ZnO-MoOx Composite Transparent Electrode Work Function

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Solution Overview

Problem

Current transparent conductive oxides, such as ITO, face challenges due to high cost, limited availability, and stability issues, particularly in organic photovoltaic cells and OLEDs, where achieving low resistivity, high transparency, and stable interfaces is crucial for efficient device performance.

Innovation Solution

A composite structure comprising a ZnO layer doped with Ga and/or Al, combined with a thin overlayer of MoOx or NiOx, which is doped with electron donating species like Mn or Re, or Li/Sodium, to enhance conductivity and work function, resulting in a high work function, low sheet resistance, and excellent interface stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ITO is used as transparent conductive oxide, then electrical conductivity and transparency are achieved, but cost increases and chemical stability deteriorates

Engineering Contradiction:
Improvechemical stabilityVSAvoidcost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive ITO with zinc oxide (ZnO) and its derivatives, which are significantly cheaper materials. The use of ZnO-based TCOs eliminates the need for costly indium while maintaining the required electrical and optical properties for optoelectronic devices.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent employs composite material structures including ZnO-based TCOs combined with organic layers, and later ZnO/MoOx and ZnO/NiOx composite structures. These composites leverage the advantages of each material to achieve both low cost and high chemical stability, particularly in hydrogen environments.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If ZnO-based TCO is used to reduce cost, then chemical stability improves, but electrical conductivity and interface characteristics worsen

Engineering Contradiction:
ImprovecostVSAvoidelectrical conductivity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent systematically optimizes multiple parameters of ZnO-based TCOs including doping concentrations (Al, Ga), deposition temperatures, oxygen partial pressures, and film thicknesses. These parameter changes enable precise control over electrical conductivity, carrier concentration, and mobility to achieve performance comparable to or exceeding ITO.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces localized modifications at the TCO/organic layer interface through surface treatment, ultrathin overlayer deposition (MoOx, NiOx), and interface engineering. These local quality enhancements improve interface characteristics and electrical contact without affecting the bulk properties of the ZnO-based TCO.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composite structure achieves high optical transmittance, low sheet resistance, and improved carrier transport, leading to enhanced device efficiency and stability, making it a viable alternative to ITO-based transparent conductive oxides.

Implementation Method 1

A method for increasing the work function of a ZnO film, by depositing a MoOx or NiOx film on the ZnO film

Methodology Applied
Scientific EffectElectron donation:

Implementation Method 2

The ZnO layer and the MoOx (or NiOx) layer may be deposited by applying a pulsed laser to a ZnO target and to a molybdenum oxide target or nickel oxide target in a PLD chamber

Methodology Applied
Scientific EffectPulsed laser deposition: Pulsed Laser Deposition

Data Source

PatentUS8222740B2Zinc oxide based composites and methods for their fabrication
Publication Date: 2012.07.17 NARAYAN JAGDISH
  • US8222740B2 patent drawing
  • US8222740B2 patent drawing
  • US8222740B2 patent drawing

AI summary

A transparent, electrically conductive composite includes a layer of molybdenum oxide or nickel oxide deposited on a layer of zinc oxide layer. The molybdenum component exists in a mixed valence state in the molybdenum oxide. The nickel component exists in a mixed valence state in the nickel oxide. The composite may be utilized in various electronic devices, including optoelectronic devices. In particular, the composite may be utilized as a transparent conductive electrode. As compared to conventional transparent conduct oxides such as indium tin oxide, the composite exhibits superior properties, including a higher work function.