ZnO Reverse Taper Barrier Rib for OLED Fabrication
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Solution Overview
Problem
The existing manufacturing process for organic electroluminescence display devices is complex and inefficient due to the need for multiple temperature deposition steps for silicon nitride to form reverse taper barrier ribs, leading to hidden organic light emitting areas and increased process steps, and alternative materials like organic compounds result in contamination and yield issues.
Innovation Solution
A method using ZnO deposited at high temperatures to form a reverse taper barrier rib through crystal growth and wet etching, simplifying the process by eliminating the need for multiple temperature deposition steps and reducing contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If multiple temperature deposition steps are used to form reverse taper barrier ribs with silicon nitride, then the barrier rib shape is achieved, but the process complexity increases and manufacturing efficiency decreases
Solution Approach 1:
The patent changes the material parameter from silicon nitride to ZnO ( zinc oxide ), which inherently forms reverse taper structures during single-step deposition without requiring multiple temperature steps. This material substitution resolves the contradiction by achieving the desired shape while simplifying the process.
Solution Approach 2:
The patent extracts and eliminates the complex multi-step deposition process entirely by using ZnO's natural reverse taper formation capability during single-step deposition. This removes the unnecessary process complexity while maintaining the required barrier rib shape.
2Shape
If multiple temperature deposition steps are used for silicon nitride, then reverse taper barrier ribs are formed, but the organic light emitting area is hidden and yield decreases
Solution Approach 1:
By changing the material parameter to ZnO, the patent achieves reverse taper formation in a single deposition step, preventing the over-deposition that hides the organic light emitting area. This resolves the contradiction between achieving the desired shape and maintaining manufacturing yield.
3Device complexity
If organic compounds are used as alternative barrier rib materials, then process simplification is achieved, but contamination occurs and yield decreases
Solution Approach 1:
The patent uses ZnO as a robust inorganic material that serves as a temporary barrier structure during manufacturing. Unlike organic compounds, ZnO provides contamination-free processing and can be reliably removed or integrated, resolving the contradiction between process simplification and maintaining yield.
4Manufacturing precision
If barrier ribs are formed to separate EL cells, then light emitting layer separation is achieved, but the cathode electrode requires additional patterning steps
Solution Approach 1:
The ZnO-based reverse taper barrier ribs serve multiple functions: they separate the light emitting layers and simultaneously define the cathode electrode patterns. This multi-functionality resolves the contradiction by achieving precise separation while eliminating additional patterning steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the formation of a reverse taper barrier rib without increasing process complexity, ensuring effective separation of the organic light emitting layer and reducing manufacturing costs while maintaining high yield and brightness.
Implementation Method 1
depositing ZnO on an upper substrate where an anode electrode is formed, at a high temperature, and making the deposited ZnO grow crystals
Implementation Method 2
making the deposited ZnO grow crystals
Implementation Method 3
patterning the ZnO film by a wet etching process, thereby forming a barrier rib with a reverse taper shape
Data Source
AI summary
This invention relates to a fabricating method of an organic electro luminescence display device that is adaptive for simplifying a process by forming a barrier rib by use of a new material, and an organic electro luminescence display device using the same.A fabricating method of an organic electro luminescence display device according to an embodiment of the present invention includes: forming an anode electrode on an upper substrate; depositing ZnO on the entire surface of the upper substrate and forming a ZnO film by making the deposited ZnO grow crystals; forming a barrier rib with a reverse taper shape that divides an area where the organic light emitting layer is to be formed on the upper substrate by patterning the ZnO film; forming an organic light emitting layer in the cell area that is divided by the barrier rib; and forming a cathode electrode on the organic light emitting layer.