Zone-Dependent Thermal Plasma Chamber Component
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Solution Overview
Problem
In plasma processing chambers, temperature control of components like substrate holders and showerheads is challenging due to cross-talk and temperature non-uniformity between zones, caused by heat transfer media affecting unintended areas.
Innovation Solution
The implementation of heat transfer fluid channels with varying heat transfer coefficients or areas in different zones of plasma processing chamber components, such as substrate chucks and showerheads, to independently control temperature zones by modulating heat transfer rates and areas, reducing cross-talk and enhancing temperature uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heat transfer media is introduced to control temperature in a first zone, then temperature control of the first zone is improved, but temperature non-uniformity and cross-talk in the second zone worsen
Solution Approach 1:
The heat transfer fluid channel is segmented into multiple sections (first section and second section) with different heat transfer characteristics. The first section has a first heat transfer coefficient and the second section has a second heat transfer coefficient, allowing independent optimization of heat transfer in different zones without causing cross-talk between them.
Solution Approach 2:
Different sections of the heat transfer fluid channel are assigned different local heat transfer properties. The first section is designed with specific heat transfer characteristics for the first zone, while the second section has different heat transfer characteristics for the second zone, enabling zone-specific temperature control.
2Measurement precision
If heat transfer coefficient or area is increased to improve temperature control, then temperature responsiveness is improved, but cross-talk between zones increases
Solution Approach 1:
The channel is divided into segmented sections with different heat transfer coefficients. By setting the first heat transfer coefficient different from the second heat transfer coefficient, each zone can achieve precise temperature control independently, preventing cross-talk while maintaining high temperature control precision in each section.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more precise and independent temperature control of multiple zones within plasma processing chambers, reducing temperature variations and improving processing uniformity by minimizing the impact of heat transfer fluids on unintended zones.
Implementation Method 1
heat transfer fluid channel... heat transfer coefficient... heat transfer rate
Implementation Method 2
heat transfer coefficient, h, or heat transfer area, A... heat transfer rate
Data Source
AI summary
Components and systems for controlling a process or chamber component temperature as a plasma process is executed by plasma processing apparatus. A first heat transfer fluid channel is disposed in a component subjacent to a working surface disposed within a plasma processing chamber such that a first length of the first channel subjacent to a first temperature zone of the working surface comprises a different heat transfer coefficient, h, or heat transfer area, A, than a second length of the first channel subjacent to a second temperature zone of the working surface. In embodiments, different heat transfer coefficients or heat transfer areas are provided as a function of temperature zone to make more independent the temperature control of the first and second temperature zones.