Wafer Test Chuck Cooling Using Zoned Gas Circulation Control
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Solution Overview
Problem
Existing wafer testing apparatuses lack an effective cooling mechanism for chucks, which are essential for maintaining the temperature of electronic devices during testing, leading to non-uniform cooling and potential thermal management issues.
Innovation Solution
The implementation of a gas circulating device that circulates air within the test chamber using fans and filters, with a controller to regulate fan speed based on temperature readings from temperature detecting units, ensuring uniform cooling of chucks without the need for a liquid chiller unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If multiple gas circulating units with first fans are disposed respectively in areas corresponding to multiple testing units, then uniform cooling of multiple chucks is achieved, but device complexity increases
Solution Approach 1:
The test chamber is divided into multiple areas, each corresponding to one or more testing units, with a gas circulating unit disposed in each area. This segmentation allows independent temperature control for different regions, achieving uniform cooling across multiple chucks while managing complexity through modular organization
Solution Approach 2:
Each gas circulating unit is specifically positioned in areas corresponding to testing units where chucks require cooling. The first fans are configured to circulate gas locally around the chucks, providing targeted cooling where needed rather than uniform cooling throughout the entire chamber, thus improving temperature uniformity without excessive complexity
2Measurement precision
If a controller is configured to control drive of the first fans based on detected temperatures of the chucks, then temperature control precision is improved, but device complexity increases
Solution Approach 1:
Temperature detecting units detect the temperatures of the chucks, and the controller uses this feedback information to adjust the drive of the first fans. This closed-loop feedback control ensures precise temperature management by continuously monitoring and responding to actual temperature conditions, improving control precision while keeping the control logic straightforward
3Reliability
If gas circulating units are used instead of liquid chiller units for cooling chucks, then reliability is improved by preventing liquid leakage, but device complexity increases
Solution Approach 1:
The patent uses gas (air) circulation instead of liquid cooling systems. The first fans circulate gas through the test chamber to cool the chucks, eliminating the need for liquid chillers, pumps, and associated piping. This pneumatic approach improves reliability by removing liquid leakage risks while maintaining a relatively simple system architecture
4Measurement precision
If multiple temperature detecting units are disposed to detect temperatures of multiple chucks, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The temperature detecting units are configured to detect temperatures of multiple chucks, serving multiple measurement functions with a standardized sensor design. This universal approach allows precise temperature monitoring across all chucks using consistent detection methodology, improving overall measurement precision without requiring different specialized sensors for each position
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides uniform cooling of chucks, reduces manufacturing and maintenance costs, and prevents liquid leakage, while maintaining a compact footprint and efficient airflow within the testing apparatus.
Implementation Method 1
multiple gas circulating units respectively including first fans configured to circulate a gas in the areas along a second axial direction
Implementation Method 2
multiple temperature detecting units configured to respectively detect temperatures of the chucks
Implementation Method 3
a controller configured to control drive of the first fans of the multiple gas circulating units based on the detected temperatures of the chucks
Data Source
AI summary
A testing apparatus includes multiple testing units arrayed in a first axial direction in plan view, the multiple testing units being configured to respectively press probes against electronic devices on chucks to test the electronic devices, multiple gas circulating units respectively disposed in areas each corresponding to one or more testing units among the multiple testing units, the multiple gas circulating units respectively including first fans configured to circulate a gas in the areas along a second axial direction in plan view, multiple temperature detecting units configured to respectively detect temperatures of the chucks, and a controller configured to control drive of the first fans of the multiple gas circulating units based on the detected temperatures of the chucks.