Zoned Light Irradiation Heating for Low-Power Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing heating devices for substrates require high output power sources to efficiently heat substrates using solid light emitting element arrays, which are expensive and large in size.
Innovation Solution
A heating device with a light irradiation unit that divides the substrate surface into multiple zones, allowing each zone to take turns being used for heating, thereby reducing the overall power required for heating the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a high output power source is used to heat the substrate efficiently with solid light emitting element arrays, then the heating performance is improved, but the device size and cost increase
Solution Approach 1:
The light irradiation unit is divided into multiple zones (first zone, second zone, third zone, fourth zone) that can be independently controlled. By segmenting the heating areas, the system can activate only the necessary zones for current processing needs, reducing overall power consumption while maintaining effective substrate heating performance.
Solution Approach 2:
The patent implements periodic activation of different zones rather than continuous full-power operation. Zones are activated in sequences (e.g., first zone then second zone, or alternating patterns), allowing the substrate to be heated effectively over time while reducing the instantaneous and average power requirements of the system.
2Productivity
If solid light emitting element arrays are used for substrate heating, then heating efficiency is improved, but the device becomes expensive and large in size
Solution Approach 1:
By dividing the light irradiation unit into multiple independently controllable zones, the system maintains high heating efficiency where needed while reducing the total number of active light emitting elements required at any given time. This segmentation allows for smaller, more cost-effective device design compared to requiring all elements to operate simultaneously at full capacity.
Solution Approach 2:
The patent applies different heating patterns to different zones based on local substrate heating needs. Each zone can be independently activated or deactivated, allowing the system to concentrate light irradiation on specific areas requiring heating rather than uniformly illuminating the entire substrate surface, thereby improving efficiency while reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient heating of substrates using low output power sources, reducing costs and device size while maintaining effective heating performance.
Implementation Method 1
a light irradiation unit configured to heat the substrate by irradiating the substrate supported by the support portion with light
Data Source
AI summary
A heating device for heating a substrate is provided. The heating device comprises a support portion configured to support the substrate, and a light irradiation unit configured to heat the substrate by irradiating the substrate supported by the support portion with light. A plurality of zones are set in the light irradiation unit, and each of the plurality of zones set in the light irradiation unit irradiates different portions of a surface of the substrate supporeted by the support portion with light. During the heating by the light irradiation unit, the plurality of zones take turns so that some zones of the plurality of zones are utilized.