ZrO-Coated Tungsten Emitter Tip for Longer-Life Bright Electron Beams

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Solution Overview

Problem

Existing field-emission type electron sources, such as Schottky emitters, face issues with coating material evaporation and depletion, leading to reduced lifespan and performance, particularly due to high temperatures and inefficient diffusion of ZrO coatings, resulting in lower resolution and angular intensity.

Innovation Solution

A field-emission type electron source featuring a single-crystal tungsten rod with a non-linearly tapered sharpened terminus and a mass of ZrO coating only on the terminus, positioned to minimize evaporation and enhance diffusion, along with a gaseous medium of oxygen and non-oxygen gases to maintain optimal conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a Schottky emitter uses a coating material to reduce work function, then brightness is improved, but the coating material evaporates and depletes at high temperatures, reducing lifespan

Engineering Contradiction:
ImprovebrightnessVSAvoidlifespan
Core Design Contradiction:
Illumination intensityVSDuration of action of stationary object

Solution Approach 1:

The patent changes the geometric parameters of the emitter tip by applying a non-linear taper function that reduces the tip radius more sharply than linear tapering. This parameter change allows the coating material to be concentrated in a smaller volume at the tip, improving brightness while the optimized geometry reduces overall evaporation loss by maintaining lower temperatures in the bulk material.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies a specific curvature profile to the emitter tip through non-linear tapering, creating an optimized curved surface geometry. This curved geometry enhances the concentration of electric field and coating material at the tip region, improving brightness while the gradual transition reduces stress concentrations that would lead to cracking and premature failure.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Illumination intensity

If the emitter tip is sharpened to a small radius, then brightness is improved, but the coating material diffusion distance increases, reducing effectiveness

Engineering Contradiction:
ImprovebrightnessVSAvoidcoating diffusion effectiveness
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent applies a non-linear curvature profile to the taper that optimizes the balance between tip sharpness and coating diffusion. The curvature function creates a tip region with sufficiently small radius for high brightness while maintaining a gradual transition zone that facilitates effective coating material diffusion from the bulk to the surface.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent changes the geometric parameters by implementing a non-linear taper function that controls the rate of radius reduction along the tip length. This parameter optimization ensures the tip achieves the necessary sharpness for high brightness while maintaining adequate diffusion pathways for the coating material to reach the emission surface effectively.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If linear tapering is used for the emitter rod, then manufacturing is simpler, but resolution and angular intensity are reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidresolution
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent replaces linear tapering with a non-linear curvature profile that optimizes the emitter tip geometry for resolution and angular intensity. The curved transition zone creates more favorable field distribution and electron emission characteristics, improving resolution despite increased manufacturing complexity compared to simple linear tapering.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design extends the lifespan of the electron source, improves resolution, and enhances angular intensity by reducing evaporation, diffusion distance, and maintaining a stable ZrO coating, resulting in improved performance and longer operational life.

Implementation Method 1

FIELD-emission type electron source comprising (i) a single-crystal tungsten rod having a sharpened terminus extending from a rod body

Methodology Applied
Scientific EffectField emission: Electron Beam

Implementation Method 2

a mass of ZrO on a portion of a surface, or an entire surface, of the sharpened terminus

Methodology Applied
Scientific EffectWork function reduction:

Implementation Method 3

The material from reservoir 28 diffuses along the surface and through the bulk of emitter 16 toward apex 22, thereby continually replenishing the coating on the apex 22

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 4

The Schottky emitter 12 typically operates with apex 22 at a temperature of approximately 1,800K

Methodology Applied
Scientific EffectThermal field emission: Thermionic Emission

Implementation Method 5

At the high temperatures when Schottky emitter 12 operates, the coating material tends to evaporate from emitter 16 and must be continually replenished to maintain the low work function at apex 22

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS11848169B1Field-emission type electron source and charged particle beam device using the same
Publication Date: 2023.12.19 CHEN DAZHI
  • US11848169B1 patent drawing
  • US11848169B1 patent drawing
  • US11848169B1 patent drawing

AI summary

A field-emission type electron source includes (i) a single-crystal tungsten rod having a sharpened terminus and (ii) a mass of ZrO formed only on a portion of the surface, or the entire surface, of the sharpened terminus. In preferred design, the single-crystal tungsten rod is placed in a gaseous medium that consists of oxygen and a non-oxygen gas. The molar ratio between oxygen and the non-oxygen gas is greater than 1:1.