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Addressing Leakage Current in Advanced CMOS Nodes

JUL 8, 2025 |

Introduction

As CMOS technology scales down to advanced nodes, leakage current has emerged as a pressing challenge for engineers and designers. While the benefits of these nodes include higher performance and lower power consumption, the downside is an increase in leakage current, which can significantly impact the power efficiency and reliability of electronic devices. In this blog, we will explore the various types of leakage currents, their causes, and strategies to mitigate them in advanced CMOS nodes.

Understanding Leakage Current

Leakage current in CMOS devices primarily occurs due to unwanted current flow when a transistor is in the off state. In advanced nodes, where gate oxides are ultrathin and channel lengths are exceedingly short, the problem becomes more pronounced. There are several types of leakage currents, including subthreshold leakage, gate oxide leakage, and junction leakage, each contributing to the total leakage in different proportions depending on the device architecture and operating conditions.

Subthreshold Leakage

Subthreshold leakage occurs when a transistor is in the off state but still allows a small amount of current to flow between the source and drain. This is largely due to the drain-induced barrier lowering (DIBL) and the proximity of the source and drain in short-channel devices. As transistors shrink, controlling this leakage becomes increasingly difficult. Design techniques such as increasing the threshold voltage and optimizing channel length can help reduce subthreshold leakage.

Gate Oxide Leakage

Gate oxide leakage is a significant concern in advanced CMOS nodes due to the thinning of gate oxides. The reduction in oxide thickness leads to an increase in tunneling current through the gate dielectric. This leakage can be exacerbated by high electric fields. Engineers can mitigate gate oxide leakage by using high-k dielectrics, which allow for thicker physical oxides while maintaining the same electrical performance, thus reducing tunneling currents.

Junction Leakage

Junction leakage arises from the reverse-biased p-n junctions between the source/drain and the substrate. As junctions become shallower in advanced nodes, the leakage current becomes more pronounced. Techniques such as reducing the doping concentration and employing halo doping can help minimize junction leakage. Additionally, improving the interface quality and using advanced annealing processes can also play a role in leakage reduction.

Advanced Techniques for Leakage Reduction

Several advanced techniques have been developed to address leakage currents in CMOS technology. One promising approach is the use of multiple threshold voltages (multi-Vt) within the same chip. This technique allows for a trade-off between performance and power consumption, with higher threshold voltage transistors used in non-critical paths to reduce leakage.

Another strategy involves the use of adaptive body biasing, where the body voltage of a MOSFET is dynamically adjusted to control the threshold voltage and, consequently, the leakage current. This technique can be particularly effective in reducing standby power consumption.

The introduction of FinFETs and other multi-gate transistor architectures has also provided significant improvements in leakage control. These devices offer better electrostatic control over the channel, reducing short-channel effects and leakage currents.

Conclusion

Addressing leakage current in advanced CMOS nodes is a multifaceted challenge that requires a combination of design strategies and technological innovations. By understanding the types and causes of leakage, engineers can implement targeted solutions that improve device performance and power efficiency. As the industry continues to push the boundaries of miniaturization, ongoing research and development in leakage reduction techniques will remain vital to the advancement of CMOS technology.

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