Chicane Blanker Assembly for Neutral Particle Blocking in P-FIB Systems
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Summary
Problems
Plasma-focused ion beam (P-FIB) systems experience significant staining and image saturation due to neutral particles reaching the sample, which is exacerbated by higher gas pressures and larger beam currents, making it difficult to prevent neutrals from impacting the sample during processing and imaging.
Innovation solutions
A chicane blanker assembly is introduced, comprising an entrance, exit, neutrals blocking structures, chicane deflectors, and a beam blocking structure, which deflects the charged particle beam around neutrals blocking structures and into a beam blocking structure, preventing neutrals from reaching the sample while allowing the ion beam to irradiate the sample effectively.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If plasma sources are used to generate plasma-focused ion beams, then higher current and faster milling rates are achieved, but significant sample staining occurs due to neutral particles reaching the sample
Why choose this principle:
The beam path is segmented into multiple sections with alternating deflectors that create a zigzag trajectory. Neutral particles traveling in straight lines are blocked by blocking structures positioned at each segment, while charged particles follow the deflected path and reach the sample. This segmentation allows selective blocking of neutrals without affecting the ion beam.
Principle concept:
If plasma sources are used to generate plasma-focused ion beams, then higher current and faster milling rates are achieved, but significant sample staining occurs due to neutral particles reaching the sample
Why choose this principle:
Electric fields generated by electrostatic deflectors serve as intermediaries to manipulate the charged particle beam. These fields deflect the ion beam along a curved path that bypasses neutral particle blocking structures, enabling the ions to reach the sample while neutrals are blocked. The electric fields act as a mediator that selectively guides charged particles around obstacles that block neutral particles.
Application Domain
Data Source
AI summary:
A chicane blanker assembly is introduced, comprising an entrance, exit, neutrals blocking structures, chicane deflectors, and a beam blocking structure, which deflects the charged particle beam around neutrals blocking structures and into a beam blocking structure, preventing neutrals from reaching the sample while allowing the ion beam to irradiate the sample effectively.
Abstract
A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector, and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector, a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.