Dynamic Voltage Control for Efficient Lens Drivers
Here’s PatSnap Eureka !
Summary
Problems
Current lens drivers in charged particle operators consume excessive power and generate heat due to a fixed voltage power supply configuration, leading to inefficiency and instability, especially when lower currents are required, which affects the accuracy and yield of integrated circuit manufacturing.
Innovation solutions
A power unit comprising a controlled voltage source and a programmable linear current source, where the voltage drop across the current source is sensed and adjusted to maintain a programmable, presettable, or predetermined range, reducing power consumption and heat generation by dynamically controlling the voltage based on the current demand.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If a fixed voltage configuration is used in current lens drivers, then the system is simple to implement, but power consumption increases excessively and heat generation occurs
Why choose this principle:
The patent applies dynamics by transitioning from a fixed voltage configuration to a dynamic voltage control system. The controlled voltage source adjusts the voltage supplied to the lens coil based on real-time current demands and operational conditions, optimizing power consumption while maintaining imaging performance. This dynamic adjustment resolves the contradiction by making the voltage configuration adaptive rather than static.
Principle concept:
If a fixed voltage configuration is used in current lens drivers, then the system is simple to implement, but power consumption increases excessively and heat generation occurs
Why choose this principle:
The patent implements parameter changes by modifying the voltage parameter dynamically. The controlled voltage source changes the voltage level according to the actual current requirements of the lens coil, preventing excessive power consumption. This parameter adjustment strategy allows the system to maintain simplicity in control logic while significantly reducing energy waste through adaptive voltage scaling.
Application Domain
Data Source
AI summary:
A power unit comprising a controlled voltage source and a programmable linear current source, where the voltage drop across the current source is sensed and adjusted to maintain a programmable, presettable, or predetermined range, reducing power consumption and heat generation by dynamically controlling the voltage based on the current demand.
Abstract
Disclosed among other aspects is a power supply such as may be used in a charged particle inspection system. The power supply includes a direct current source such as a programmable linear current source connected to a controlled voltage source where the control signal for the controlled voltage source is derived from a measured voltage drop across the direct current source.