Electrostatic Chuck Design for Uniform Temperature Control
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Summary
Problems
Manufacturing fluctuations in the position of coolant flow paths in electrostatic chucks can lead to deviations in temperature distribution on the placement surface, compromising the design accuracy.
Innovation solutions
The electrostatic chuck features a communicating path with alternating convex and concave portions on its side surfaces, arranged in a specific direction to minimize deviations in temperature distribution even when the coolant flow path position deviates from the design.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If a conventional coolant flow path is used in the base plate, then the manufacturing process is simple, but manufacturing fluctuations cause deviations in temperature distribution on the placement surface
Why choose this principle:
The communicating path incorporates convex and concave portions at specific locations (radially outward side) to create localized thermal management zones. These geometric variations modify coolant flow characteristics and heat dissipation patterns in specific regions, compensating for manufacturing position deviations and maintaining uniform temperature distribution across the placement surface.
Principle concept:
If a conventional coolant flow path is used in the base plate, then the manufacturing process is simple, but manufacturing fluctuations cause deviations in temperature distribution on the placement surface
Why choose this principle:
The invention introduces geometric complexity in the radial dimension by adding convex and concave portions to the communicating path. This dimensional modification allows the system to compensate for manufacturing errors in the axial direction (flow path position), effectively using one dimension to correct issues in another dimension.
Application Domain
Data Source
AI summary:
The electrostatic chuck features a communicating path with alternating convex and concave portions on its side surfaces, arranged in a specific direction to minimize deviations in temperature distribution even when the coolant flow path position deviates from the design.
Abstract
An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part located in an outer circumferential region outside the radial center of the base plate and having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction perpendicular to the first direction. The second direction is from the other side surface toward the one side surface of the pair of side surfaces. The plurality of concave portions is convex in an opposite direction of the second direction.