Electrostatic Discharge Prevention in Developer Pumps
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Summary
Problems
The buildup of electrostatic charge in developer dispensing pumps and nozzles during IC manufacturing leads to electrical discharges, causing particle detachment and defects in the resist pattern on the substrate.
Innovation solutions
Incorporating electrically conductive materials and grounding connections in the dispensing system to dissipate static charges, reducing the likelihood of electrical discharges and particle formation.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If the developer dispensing pump and nozzle are made of electrically insulating materials, then the electrostatic charge builds up to high voltage, but this causes large electrical discharges that damage components and detach particles
Why choose this principle:
The patent changes the electrical property parameter of the pump and nozzle materials from electrically insulating to electrically conductive. This parameter change allows the system to dissipate electrostatic charge continuously, preventing voltage buildup that would cause harmful electrical discharges and component damage.
Principle concept:
If the developer dispensing pump and nozzle are made of electrically insulating materials, then the electrostatic charge builds up to high voltage, but this causes large electrical discharges that damage components and detach particles
Why choose this principle:
The patent converts the harmful effect of electrostatic charge accumulation into a beneficial continuous charge dissipation mechanism. By using conductive materials, the previously harmful high voltage buildup is transformed into a controlled, continuous low-level charge flow to ground, eliminating discharge events while maintaining the pump's functional operation.
Application Domain
Data Source
AI summary:
Incorporating electrically conductive materials and grounding connections in the dispensing system to dissipate static charges, reducing the likelihood of electrical discharges and particle formation.
Abstract
A dispensing system includes a dispense material supply that contains a dispense material and a dispensing pump connected downstream from the dispense material supply. The dispensing pump includes a body made of a first electrically conductive material, one or more first electrical contacts that are disposed on the body of the dispensing pump, and one or more first connection wires that are coupled between each one of the one or more first electrical contacts and ground. The dispensing system also includes a dispensing nozzle connected downstream from the dispensing pump and includes a tube made of a second electrically conductive material, one or more second electrical contacts that are disposed on an outer surface of the tube, and one or more second connection wires that are coupled between each one of the one or more second electrical contacts and the ground.