Stable Warpage Control for Single Crystal Substrates
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Summary
Problems
Existing methods for controlling warpage of substrates using laser irradiation are inconsistent and fail to achieve stable warpage control due to variations in warpage change depending on the orientation of irradiation trajectories relative to the crystal axes of the substrate.
Innovation solutions
A method involving multiple laser irradiations with non-parallel striped patterns on a single crystal substrate to form non-crystalline regions, ensuring that none of the irradiation directions are parallel to the crystal axes, which allows for uniform and stable warpage control by varying the size and distribution of non-crystalline regions.
TRIZ Analysis
Specific contradictions:
General conflict description:
Principle concept:
If laser beam irradiation is performed with trajectories parallel to crystal axes, then the irradiation process is simple and efficient, but the warpage control becomes unstable and non-uniform
Why choose this principle:
The patent applies asymmetry by intentionally setting the laser beam trajectory at an angle that is not parallel to the crystal axes of the sapphire substrate. This asymmetric orientation ensures that the laser-induced non-crystalline regions are distributed uniformly across the substrate, preventing directional bias in warpage and achieving stable, uniform warpage control while maintaining irradiation efficiency.
Principle concept:
If multiple irradiation directions are used to achieve uniform warpage control, then warpage stability improves, but the irradiation process complexity increases
Why choose this principle:
The patent changes the key parameter of trajectory orientation angle, setting it to a specific value that is not parallel to crystal axes. This single parameter change achieves uniform warpage control in one irradiation pass, eliminating the need for multiple irradiation directions and thereby maintaining process simplicity while achieving high manufacturing precision.
Application Domain
Data Source
AI summary:
A method involving multiple laser irradiations with non-parallel striped patterns on a single crystal substrate to form non-crystalline regions, ensuring that none of the irradiation directions are parallel to the crystal axes, which allows for uniform and stable warpage control by varying the size and distribution of non-crystalline regions.
Abstract
A method for manufacturing a substrate is provided. The method includes irradiating a single crystal substrate with a beam of laser or charged particles while moving an irradiation point of the beam with respect to the single crystal substrate so that a trajectory of the irradiation point on a surface of the single crystal substrate describes a striped pattern of straight lines. Non-crystalline regions are formed in the single crystal substrate along the trajectory. The irradiation is repeated multiple times so that directions of the striped patterns are different from each other among the multiple times of irradiation. The repetition of the irradiation changes warpage of the single crystal substrate. All of directions of the straight lines described in the multiple times of irradiation are not parallel to any of directions of crystal axes of the single crystal substrate in a plane parallel to the surface.