Methods and mechanisms to perform maintenance event diagnostics using data matching techniques

TW202630316APending Publication Date: 2026-07-16APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-10-15
Publication Date
2026-07-16

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Abstract

A system configured to, in response to an occurrence of a corrective maintenance event, obtain first sensor data pertaining to a first process run and second sensor data pertaining to a second process run. Responsive to determining that a comparison of the first sensor data and the second sensor data fails to satisfy a first threshold criterion, the system generates a first normalized dataset based on the first sensor data and a second normalized dataset based on the second sensor data. The system then generates trace matching data by performing a trace matching operation on the first normalized dataset and the second normalized dataset. Responsive to determining that the trace matching data satisfies a second threshold criterion, the system identifies a set of sensors associated with the first sensor data as the cause of the fault that triggered the corrective maintenance event.
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