Multifunctional quartz carrier for photolithography and processing technology thereof

Abstract

The application discloses a processing technology of a multifunctional quartz carrier for photoetching. The quartz carrier comprises an inner cylinder and an outer cylinder, the inner cylinder and the outer cylinder are fixedly welded into an integrated body, the size of the inner cylinder is smaller than that of the outer cylinder, a closed interlayer is formed between the inner cylinder and the outer cylinder, the inner cylinder comprises a first inner side plate, a second inner side plate, a third inner side plate, a fourth inner side plate and an inner bottom plate, the first inner side plate, the second inner side plate, the third inner side plate, the fourth inner side plate and the inner bottom plate are fixedly welded into an integrated body, the outer cylinder comprises a first outer side plate, a second outer side plate, a third outer side plate and an outer bottom plate, two first outer side plates are arranged, and the two first outer side plates, the second outer side plate, the third outer side plate and the outer bottom plate are fixedly welded into an integrated body.

Description

Technical Field

[0001] This invention relates to the field of quartz technology, and in particular to a multifunctional quartz carrier for photolithography and its processing technology. Background Technology

[0002] Existing quartz cylinders are single-layer structures, which cannot achieve automatic overflow and venting. The original cylinders suffer from poor welding stability and a high breakage rate. Stress generated during processing cannot be removed, and the overall structure requires multiple annealing cycles and cumbersome cleaning procedures. Therefore, this application presents a novel multifunctional quartz carrier for photolithography, specifically designed to meet specific needs. Summary of the Invention

[0003] The purpose of this invention is to provide a multifunctional quartz carrier for photolithography and its processing technology, so as to solve the problems mentioned in the background art.

[0004] The objective of this invention is achieved through the following technical solution: a multifunctional quartz carrier for photolithography, comprising an inner cylinder and an outer cylinder, wherein the inner cylinder and the outer cylinder are fixedly welded together, the inner cylinder being smaller than the outer cylinder, and a closed interlayer is formed between the inner cylinder and the outer cylinder, wherein the inner cylinder comprises a first inner side plate, a second inner side plate, a third inner side plate, a fourth inner side plate, and an inner bottom plate, wherein the first inner side plate, the second inner side plate, the third inner side plate, the fourth inner side plate, and the inner bottom plate are fixedly welded together;

[0005] The outer cylinder includes a first outer side plate, a second outer side plate, a third outer side plate, and an outer bottom plate. Two first outer side plates are provided, and the two first outer side plates are fixedly welded to the second outer side plate, the third outer side plate, and the outer bottom plate as a whole.

[0006] A flange is fixedly welded to the inner cylinder, and a support block is fixedly welded between the outer bottom plate and the flange. At least six support blocks of different sizes are provided.

[0007] Furthermore, quartz nails are fixedly and symmetrically arranged on the inner bottom plate.

[0008] Furthermore, an upper rectangular through slot and a lower rectangular through slot are fixedly and symmetrically opened on the first inner side plate. A first perforated plate is fixedly welded in the upper rectangular through slot, and a second perforated plate is fixedly welded in the lower rectangular through slot.

[0009] Furthermore, an arc-shaped through hole is fixedly opened at the bottom of the first inner side plate and the second inner side plate, and the arc-shaped through hole is fixedly welded to the first guide pipe and the second guide pipe as a whole;

[0010] The first guide tube is L-shaped and is formed by fixing and welding the first guide branch tube and the second guide branch tube together. Several through holes are fixedly opened on the second guide branch tube.

[0011] The second guide tube is a frame structure, consisting of a third guide tube and a fourth guide tube fixedly welded together. Several through holes are fixedly opened on the first guide tube.

[0012] Furthermore, the flange is welded together from several flange plates of different sizes. Two through holes are fixedly opened on the flange and are located on the same central axis as the through holes on the outer base plate. A first vent pipe and a second vent pipe are inserted and fixedly welded into the through holes.

[0013] The first vent pipe and the second vent pipe are located on the outside of the inner cylinder;

[0014] The first vent pipe extends through the through hole on the outer bottom plate into the closed interlayer formed between the inner cylinder and the outer cylinder, and the second vent pipe extends to the bottom surface of the outer bottom plate and communicates with the outer bottom plate.

[0015] Furthermore, quartz blocks are fixedly welded to the four connecting points of the first inner side plate, the second inner side plate, the third inner side plate, and the fourth inner side plate, and the quartz blocks have single-sided chamfers on both sides.

[0016] Furthermore, the upper ends of the first inner side plate, the second inner side plate, the third inner side plate, and the fourth inner side plate are fixedly provided with several arc-shaped slots.

[0017] The bottom edges of the first inner side plate and the second inner side plate are fixedly provided with an inclination angle;

[0018] The third inner side plate has a fixed opening, which matches the opening on the inner bottom plate.

[0019] Furthermore, there are two first outer side plates, and the bottom edge of the first outer side plate is fixedly provided with an inclined angle.

[0020] Furthermore, through holes are fixedly opened on the first perforated plate and the second perforated plate, and the size of the first perforated plate is larger than the size of the second perforated plate.

[0021] A processing technology for a multifunctional quartz substrate used in photolithography is as follows:

[0022] 1) All parts are cut into whole and then soaked in 2% HF and washed with pure water;

[0023] 2) The flange is fully annealed at a constant temperature for 120 minutes, then chamfered;

[0024] 3) The guide tube is soaked in 2% HF, rinsed with pure water, and the end cap and connecting pipe are annealed on a lathe (note that the pipe opening should be flush after processing). It is then soaked in 2% HF, rinsed with pure water, drilled, fully annealed, and kept at a constant temperature for 120 minutes.

[0025] 3) The perforated plate is immersed in 27% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered.

[0026] 4) Machining and cutting of the vent pipe;

[0027] 5) The quartz block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then threaded and chamfered.

[0028] 6) The support block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered.

[0029] 7) Quartz nail threaded holes;

[0030] 8) Assemble the inner cylinder body and outer flange, anneal thoroughly, maintain a constant temperature for 120 minutes, then soak in 2% HF and rinse with pure water;

[0031] 9) Assemble, weld flanges, vent pipes, and guide pipes, anneal thoroughly, keep at a constant temperature for 120 minutes, soak in 2% HF, and rinse with pure water;

[0032] 10) Polish the whole thing, anneal it thoroughly, keep it at a constant temperature for 120 minutes, first check the stress, then check the appearance, and finally check the dimensions according to the finished product drawing. Finally, clean it, dry it, and package it into inner packaging.

[0033] Compared with existing technologies, the advantages of this invention are: compared with other quartz cylinders, this product is more complex to process, has more components, and more comprehensive functions. For example, the addition of a bubbling function makes the liquid flow in the cylinder more uniform, and it also has a stirring function. In addition, a temperature measurement function has been added, greatly enhancing the ease of use. Multiple inlet and outlet ports allow for the addition of different liquids during product use, eliminating the need for a single liquid and manual injection. At the same time, the complexity of this product also increases the technical and capability requirements for its processing. Attached Figure Description

[0034] Figure 1 This is the overall front view of the invention;

[0035] Figure 2 This is a top view of the present invention;

[0036] Figure 3 This is a side view of the present invention;

[0037] Figure 4 This is a schematic diagram of the first guide tube of the present invention;

[0038] Figure 5 This is a schematic diagram of the second guide tube of the present invention. Detailed Implementation

[0039] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0040] like Figure 1-5 As shown, a multifunctional quartz carrier for photolithography includes an inner cylinder and an outer cylinder, which are fixedly welded together. The inner cylinder is smaller than the outer cylinder, and a closed interlayer is formed between the inner cylinder and the outer cylinder. The inner cylinder includes a first inner side plate 1, a second inner side plate 2, a third inner side plate 3, a fourth inner side plate 4, and an inner bottom plate 5. The first inner side plate 1, the second inner side plate 2, the third inner side plate 3, the fourth inner side plate 4, and the inner bottom plate 5 are fixedly welded together.

[0041] The outer cylinder includes a first outer side plate 6, a second outer side plate 7, a third outer side plate 8, and an outer bottom plate 9. Two first outer side plates 6 are provided, and the two first outer side plates 6 are fixedly welded to the second outer side plate 7, the third outer side plate 8, and the outer bottom plate 9 as a whole.

[0042] A flange 10 is fixedly welded to the inner cylinder, and a support block 11 is fixedly welded between the outer bottom plate 9 and the flange 10. At least 6 support blocks 11 are provided, and they are of different sizes.

[0043] In this embodiment, quartz nails 12 are fixedly and symmetrically provided on the inner bottom plate 5.

[0044] In this embodiment, an upper rectangular through slot and a lower rectangular through slot are fixedly and symmetrically opened on the first inner side plate 1. A first perforated plate 13 is fixedly welded in the upper rectangular through slot, and a second perforated plate 14 is fixedly welded in the lower rectangular through slot.

[0045] In this embodiment, an arc-shaped through hole is fixedly opened at the bottom of the first inner side plate 1 and the second inner side plate 2, and the arc-shaped through hole is fixedly welded to the first guide pipe 16 and the second guide pipe 17 as a whole;

[0046] The first guide pipe 16 is L-shaped and is fixedly welded together with the first guide branch pipe 161 and the second guide branch pipe 162. Several through holes are fixedly opened on the second guide branch pipe 162.

[0047] The second guide pipe 17 is a frame structure, which is fixedly welded together by the third guide pipe 171 and the fourth guide pipe 172. Several through holes are fixedly opened on the first guide pipe 172.

[0048] In this embodiment, the flange 10 is welded together from several flange plates of different sizes. Two through holes are fixedly opened on the flange 10 and are located on the same central axis as the through holes on the outer base plate 9. A first vent pipe 18 and a second vent pipe 19 are inserted and fixedly welded into the through holes.

[0049] The first vent pipe 18 and the second vent pipe 19 are located on the outer side of the inner cylinder;

[0050] The first vent pipe 18 extends through the through hole on the outer bottom plate 9 into the closed interlayer formed between the inner cylinder and the outer cylinder, and the second vent pipe 19 extends to the bottom surface of the outer bottom plate 9 and communicates with the outer bottom plate 9.

[0051] In this embodiment, a quartz block 20 is fixedly welded to the four sides of the first inner side plate 1, the second inner side plate 2, the third inner side plate 3, and the fourth inner side plate 4, and the quartz block 20 has a single-sided chamfer on both sides.

[0052] In this embodiment, the upper ends of the first inner side plate 1, the second inner side plate 2, the third inner side plate 3, and the fourth inner side plate 4 are fixedly provided with a plurality of arc-shaped slots.

[0053] The bottom edges of the first inner side plate 1 and the second inner side plate 2 are fixedly provided with an inclined angle;

[0054] The third inner side plate 3 has a fixed opening, which matches the opening on the inner bottom plate 5.

[0055] In this embodiment, there are two first outer side plates 6, and the bottom edge of the first outer side plate 6 is fixedly provided with an inclined angle.

[0056] In this embodiment, through holes are fixedly opened on the first perforated plate 13 and the second perforated plate 14, and the size of the first perforated plate 13 is larger than the size of the second perforated plate 14.

[0057] A processing technology for a multifunctional quartz substrate used in photolithography is as follows:

[0058] 1) All parts are cut into whole and then soaked in 2% HF and washed with pure water;

[0059] 2) The flange is fully annealed at a constant temperature for 120 minutes, then chamfered;

[0060] 3) The guide tube is soaked in 2% HF, rinsed with pure water, and the end cap and connecting pipe are annealed on a lathe (note that the pipe opening should be flush after processing). It is then soaked in 2% HF, rinsed with pure water, drilled, fully annealed, and kept at a constant temperature for 120 minutes.

[0061] 3) The perforated plate is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered.

[0062] 4) Machining and cutting of the vent pipe;

[0063] 5) The quartz block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then threaded and chamfered.

[0064] 6) The support block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered.

[0065] 7) Quartz nail threaded holes;

[0066] 8) Assemble the inner cylinder body and outer flange, anneal thoroughly, maintain a constant temperature for 120 minutes, then soak in 2% HF and rinse with pure water;

[0067] 9) Assemble, weld flanges, vent pipes, and guide pipes, anneal thoroughly, keep at a constant temperature for 120 minutes, soak in 2% HF, and rinse with pure water;

[0068] 10) Polish the whole thing, anneal it thoroughly, keep it at a constant temperature for 120 minutes, first check the stress, then check the appearance, and finally check the dimensions according to the finished product drawing. Finally, clean it, dry it, and package it into inner packaging.

[0069] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0070] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multifunctional quartz carrier for photolithography, characterized in that: The quartz carrier includes an inner cylinder and an outer cylinder, which are fixedly welded together. The inner cylinder is smaller than the outer cylinder, and a closed interlayer is formed between the inner cylinder and the outer cylinder. The inner cylinder includes a first inner side plate (1), a second inner side plate (2), a third inner side plate (3), a fourth inner side plate (4), and an inner bottom plate (5). The first inner side plate (1), the second inner side plate (2), the third inner side plate (3), the fourth inner side plate (4), and the inner bottom plate (5) are fixedly welded together. The outer cylinder includes a first outer side plate (6), a second outer side plate (7), a third outer side plate (8), and an outer bottom plate (9). Two first outer side plates (6) are provided, and the two first outer side plates (6) are fixedly welded together with the second outer side plate (7), the third outer side plate (8), and the outer bottom plate (9). A flange (10) is fixedly welded to the inner cylinder, and a support block (11) is fixedly welded between the outer bottom plate (9) and the flange (10). At least 6 support blocks (11) are provided, and they are of different sizes. The flange (10) is made of several flange plates of different sizes welded together. Two through holes are fixedly opened on the flange (10) and the through holes on the outer bottom plate (9) are located on the same central axis. A first vent pipe (18) and a second vent pipe (19) are inserted and fixedly welded into the through holes. The first vent pipe (18) and the second vent pipe (19) are located on the outside of the inner cylinder; The first vent pipe (18) extends through the through hole on the outer bottom plate (9) into the closed interlayer formed between the inner cylinder and the outer cylinder, and the second vent pipe (19) extends to the bottom surface of the outer bottom plate (9) and communicates with the outer bottom plate (9); Quartz blocks (20) are fixedly welded to the four sides of the first inner side plate (1), the second inner side plate (2), the third inner side plate (3), and the fourth inner side plate (4), and the quartz blocks (20) have single-sided chamfers on both sides. The upper ends of the first inner side plate (1), the second inner side plate (2), the third inner side plate (3), and the fourth inner side plate (4) are fixedly provided with several arc-shaped slots; The bottom edges of the first inner side plate (1) and the second inner side plate (2) are fixed with an inclination angle; The third inner side plate (3) has a fixed opening, which matches the opening on the inner bottom plate (5); There are two first outer side plates (6), and the bottom edge of the first outer side plate (6) is fixedly provided with an inclination angle.

2. The multifunctional quartz carrier for photolithography according to claim 1, characterized in that: Quartz nails (12) are fixed symmetrically on the inner bottom plate (5).

3. The multifunctional quartz carrier for photolithography according to claim 1, characterized in that: The first inner side plate (1) has an upper rectangular through groove and a lower rectangular through groove fixedly and symmetrically. A first perforated plate (13) is fixedly welded in the upper rectangular through groove, and a second perforated plate (14) is fixedly welded in the lower rectangular through groove.

4. The multifunctional quartz carrier for photolithography according to claim 1, characterized in that: Arc-shaped through holes are fixedly opened at the bottom of the first inner side plate (1) and the second inner side plate (2), and the arc-shaped through holes are fixedly welded to the first guide pipe (16) and the second guide pipe (17) as a whole; The first guide pipe (16) is L-shaped and is fixedly welded together by the first guide branch pipe (161) and the second guide branch pipe (162). Several through holes are fixedly opened on the second guide branch pipe (162). The second guide pipe (17) is a frame structure, which is fixedly welded together by the third guide pipe (171) and the fourth guide pipe (172). Several through holes are fixedly opened on the first guide pipe (172).

5. A multifunctional quartz carrier for photolithography according to claim 3, characterized in that: The first perforated plate (13) and the second perforated plate (14) are fixedly provided with through holes, and the size of the first perforated plate (13) is larger than the size of the second perforated plate (14).

6. The processing technology for a multifunctional quartz carrier for photolithography according to any one of claims 1-5, characterized in that, The processing technology is as follows: 1) All parts are cut into whole and then soaked in 2% HF and washed with pure water; 2) The flange is fully annealed at a constant temperature for 120 minutes, then chamfered; 3) The guide tube is soaked in 2% HF, rinsed with pure water, and the end cap and connecting pipe are annealed on a lathe (note that the pipe opening should be flush after processing). It is then soaked in 2% HF, rinsed with pure water, drilled, fully annealed, and kept at a constant temperature for 120 minutes. 3) The perforated plate is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered. 4) Machining and cutting of the vent pipe; 5) The quartz block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then threaded and chamfered. 6) The support block is soaked in 2% HF, rinsed with pure water, fully annealed, kept at a constant temperature for 120 minutes, and then chamfered. 7) Quartz nail threaded holes; 8) Assemble the inner cylinder body and outer flange, anneal thoroughly, maintain a constant temperature for 120 minutes, then soak in 2% HF and rinse with pure water; 9) Assemble, weld flanges, vent pipes, and guide pipes, anneal thoroughly, keep at a constant temperature for 120 minutes, soak in 2% HF, and rinse with pure water; 10) Polish the whole thing, anneal it thoroughly, keep it at a constant temperature for 120 minutes, first check the stress, then check the appearance, and finally check the dimensions according to the finished product drawing. Finally, clean it, dry it, and package it into inner packaging.

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