Image sensor and electronic device including the same

Abstract

An image sensor including a color separation lens array is provided. The image sensor includes a sensor substrate including a plurality of first light sensing cells and a plurality of second light sensing cells configured to sense light, and a color separation lens array including a plurality of first regions and a plurality of second regions, the plurality of first regions respectively corresponding to the plurality of first light sensing cells and each including a first fine structure, and the plurality of second regions respectively corresponding to the plurality of second light sensing cells and including a second fine structure different from the first fine structure, wherein, in incident light incident on the color separation lens array, light of a first wavelength and light of a second wavelength are branched in different directions and focused on the first light sensing cells and the second light sensing cells.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2019-0132385, filed on October 23, 2019, Korean Patent Application No. 10-2019-0132386, filed on October 23, 2019, Korean Patent Application No. 10-2019-0146210, filed on November 14, 2019, Korean Patent Application No. 10-2019-0146233, filed on November 14, 2019, and Korean Patent Application No. 10-2020-0117777, filed on September 14, 2020, the disclosures of which are incorporated herein by reference in their entirety. Technical Field

[0003] The exemplary embodiments of this disclosure relate to an image sensor including a dichroic lens array and an electronic device including the image sensor, and more specifically, to an image sensor including a dichroic lens array configured to focus incident light individually according to the wavelength of the incident light and an electronic device including the image sensor. Background Technology

[0004] Image sensors typically use color filters to sense the color of incident light. However, because color filters absorb light of colors other than their corresponding colors, they can have low light utilization efficiency. For example, when using an RGB (red, green, and blue) color filter, only 1 / 3 of the incident light is transmitted, while the other 2 / 3 is absorbed. Therefore, the light utilization efficiency is only about 33%. Consequently, in color display devices or color image sensors, most of the light loss occurs in the color filter. Summary of the Invention

[0005] One or more example embodiments provide an image sensor that provides improved light utilization efficiency by using a dichroic lens array configured to focus incident light separately according to the wavelength of the incident light.

[0006] One or more example embodiments also provide an electronic device that includes the image sensor.

[0007] Additional aspects will be set forth in part in the description which follows, and will also be apparent in part from the description, or may be learned by practice of exemplary embodiments of this disclosure.

[0008] According to one aspect of an example embodiment, an image sensor is provided, comprising: a sensor substrate including a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; and a dichroic lens array disposed above the sensor substrate, the dichroic lens array including a plurality of first regions and a plurality of second regions, wherein the plurality of first regions respectively correspond to the plurality of first photosensitive units and have a first fine structure, and the plurality of second regions respectively correspond to the plurality of second photosensitive units and have a second fine structure different from the first fine structure, wherein the first fine structure and the second fine structure are configured to form a phase distribution below the plurality of first regions and the plurality of second regions. In this configuration, the first wavelength light and the second wavelength light incident on the dichroic lens array are branched into different directions based on the phase distribution and focused on the plurality of first photosensitive units and the plurality of second photosensitive units, and in this configuration, the positions of the plurality of first regions and the plurality of second regions at the center of the dichroic lens array coincide with the positions of the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions, and the positions of the plurality of first regions and the plurality of second regions on the peripheral portion of the dichroic lens array are shifted relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions toward the center of the dichroic lens array.

[0009] The degree of displacement of the plurality of first regions and the plurality of second regions on the peripheral portion of the dichroic lens array relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions can increase with the increase of the distance from the center of the dichroic lens array.

[0010] The displacement distance of the plurality of first regions and the plurality of second regions relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions respectively can satisfy: , where d represents the shortest distance between the lower surface of the dichroic lens array and the upper surface of the sensor substrate, and CRA' is the incident angle of the light incident on the sensor substrate.

[0011] The first fine structure and the second fine structure can be configured such that, immediately after the light of the first wavelength passes through the dichroic lens array, the light of the first wavelength forms a 2Nπ phase distribution at a position corresponding to the center of the plurality of first photosensitive units, and forms a (2N-1)π phase distribution at a position corresponding to the center of the plurality of second photosensitive units, where N is an integer greater than 0.

[0012] The first fine structure and the second fine structure can be configured such that, immediately after the light of the second wavelength passes through the dichroic lens array, the light of the second wavelength forms a (2M-1)π phase distribution at a position corresponding to the center of the plurality of first photosensitive units, and forms a 2Mπ phase distribution at a position corresponding to the center of the plurality of second photosensitive units, where M is an integer greater than 0.

[0013] The image sensor may further include a spacer layer disposed between the sensor substrate and the dichroic lens array, the spacer layer being configured to form a distance between the sensor substrate and the dichroic lens array.

[0014] When the theoretical thickness of the spacer layer is h t Furthermore, when the spacing between the plurality of first photosensitive units and the plurality of second photosensitive units is p, the thickness h of the spacer layer can satisfy h t - p ≤ h ≤ h t + p, and wherein the theoretical thickness of the spacer layer can be the focal length of the dichroic lens array at the center wavelength of the wavelength band of the incident light to be separated by the dichroic lens array.

[0015] When the refractive index of the spacer layer is n and the center wavelength of the wavelength band separated by the dichroic lens array is λ0, the theoretical thickness h of the spacer layer is... t It can satisfy: .

[0016] The sensor substrate may further include a plurality of third photosensitive units and a plurality of fourth photosensitive units for sensing light, wherein the dichroic lens array may further include: a plurality of third regions, each corresponding to the plurality of third photosensitive units and having a third fine structure different from the first fine structure and the second fine structure; and a plurality of fourth regions, each corresponding to the plurality of fourth photosensitive units and having a fourth fine structure different from the first fine structure, the second fine structure and the third fine structure, wherein the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions may be disposed along four quadrant surfaces respectively.

[0017] At the center of the image sensor, the positions of the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions of the dichroic lens array can coincide with the positions of the plurality of first photosensitive units, the plurality of second photosensitive units, the plurality of third photosensitive units, and the plurality of fourth photosensitive units corresponding to the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth photosensitive units respectively. Furthermore, at the peripheral portion of the image sensor, the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions of the dichroic lens array can be shifted toward the center of the image sensor relative to the plurality of first photosensitive units, the plurality of second photosensitive units, the plurality of third photosensitive units, and the plurality of fourth photosensitive units respectively corresponding to the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth photosensitive units respectively.

[0018] At the peripheral portion of the image sensor, the degree of displacement of the plurality of first regions, plurality of second regions, plurality of third regions, and plurality of fourth regions of the dichroic lens array relative to the plurality of first photosensitive units, plurality of second photosensitive units, plurality of third photosensitive units, and plurality of fourth photosensitive units corresponding to the plurality of first regions, plurality of second regions, plurality of third regions, and plurality of fourth photosensitive units toward the center of the image sensor can increase with the increase of the distance from the center of the image sensor.

[0019] The first, second, third, and fourth fine structures can be configured to form a phase distribution through which the first, second, and third wavelengths of incident light incident on the dichroic lens array are branched into different directions. Furthermore, at positions after passing through the plurality of first, second, third, and fourth regions, the first wavelength light can converge on the plurality of first and fourth photosensitive units, the second wavelength light can converge on the plurality of second photosensitive units, and the third wavelength light can converge on the plurality of third photosensitive units.

[0020] The first wavelength of light can be green light, the second wavelength of light can be blue light, and the third wavelength of light can be red light.

[0021] The first, second, third, and fourth fine structures can be configured such that: at the position immediately following the passage of light of the first wavelength through the dichroic lens array, the first wavelength forms a phase distribution of 2Nπ at a position corresponding to the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, and a phase distribution of (2N-1)π at a position corresponding to the centers of the plurality of second photosensitive units and the plurality of third photosensitive units; at the position immediately following the passage of light of the second wavelength through the dichroic lens array, the second wavelength forms a phase distribution of (2M-1)π at a position corresponding to the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, a phase distribution of 2Mπ at a position corresponding to the centers of the plurality of second photosensitive units, and a phase distribution greater than (2M-2)π and less than (2M-2)π at a position corresponding to the centers of the plurality of third photosensitive units. The third wavelength light forms a phase distribution of (2L-1)π at the center of the plurality of first photosensitive units and the center of the plurality of fourth photosensitive units, a phase distribution of 2Lπ at the center of the plurality of third photosensitive units, and a phase distribution greater than (2L-2)π and less than (2L-1)π at the center of the plurality of second photosensitive units. Immediately after the third wavelength light passes through the dichroic lens array, the third wavelength light forms a phase distribution of (2L-1)π at the position corresponding to the center of the plurality of first photosensitive units and the center of the plurality of fourth photosensitive units, a phase distribution of 2Lπ at the position corresponding to the center of the plurality of third photosensitive units, and a phase distribution greater than (2L-2)π and less than (2L-1)π at the position corresponding to the center of the plurality of second photosensitive units, where N, M, and L are integers greater than 0.

[0022] The first, second, third, and fourth fine structures in the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions may include a plurality of nanopillars, wherein at least one of the shape, size, and arrangement of the nanopillars in the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions may be different from each other.

[0023] The image sensor may include multiple unit pixels, each unit pixel including repeated red pixels, green pixels and blue pixels, and the nanopillars disposed in the region corresponding to the green pixel among the multiple first regions, the multiple second regions, the multiple third regions and the multiple fourth regions may have different distribution rules in a first direction and a second direction perpendicular to the first direction.

[0024] The nanopillars disposed in the regions corresponding to the blue pixels and the regions corresponding to the red pixels among the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions can have a symmetrical distribution rule in the first direction and the second direction.

[0025] Each of the plurality of nanopillars may include a first nanopillar and a second nanopillar disposed on the first nanopillar. At the center of the image sensor, the position of the second nanopillar may coincide with the position of the first nanopillar, and at the peripheral portion of the image sensor, the second nanopillar may be displaced relative to the first nanopillar toward the center of the image sensor.

[0026] At the peripheral portion of the image sensor, the degree of displacement of the second nanopillar relative to the first nanopillar can increase with the increase of the distance from the center of the image sensor.

[0027] Each of the plurality of nanopillars may include a first nanopillar, a second nanopillar disposed on the first nanopillar, and a third nanopillar disposed on the second nanopillar. At the center of the image sensor, the positions of the second nanopillar and the third nanopillar may be consistent with the position of the first nanopillar. At the peripheral portion of the image sensor, the second nanopillar may be shifted relative to the first nanopillar toward the center of the image sensor, and the third nanopillar may be shifted relative to the second nanopillar toward the center of the image sensor.

[0028] The linewidth of each nanopillar disposed in one of the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions on the periphery of the image sensor may be greater than the linewidth of the nanopillar at the same position in the same region at the center of the image sensor.

[0029] When the linewidth of the nanopillar on the periphery of the image sensor is w and the linewidth of the nanopillar at the center of the image sensor is w0, w and w0 can satisfy: Where CRA is the angle of incidence of the light incident on the dichroic lens array.

[0030] The linewidth of the nanopillars at the outermost edge of the image sensor can be 2.5% to 6.5% larger than the linewidth of the nanopillars at the center of the image sensor.

[0031] The dichroic lens array may further include a plurality of first protruding regions and a plurality of second protruding regions, the plurality of first protruding regions and the plurality of second protruding regions protruding from the edge of the sensor substrate and not facing any of the plurality of first photosensitive units and the plurality of second photosensitive units in the sensor substrate in the vertical direction.

[0032] The total area of ​​the dichroic lens array can be smaller than the total area of ​​the sensor substrate.

[0033] The dichroic lens array may further include a first dichroic lens array and a second dichroic lens array disposed on the first dichroic lens array, wherein the first fine structure and the second fine structure in the first region and the second region of the first dichroic lens array may include a plurality of nanopillars, and the first fine structure and the second fine structure in the first region and the second region of the second dichroic lens array may include a plurality of nanopillars, wherein the arrangement of the plurality of nanopillars included in the first dichroic lens array may be different from the arrangement of the plurality of nanopillars included in the second dichroic lens array.

[0034] According to another aspect of an example embodiment, an image sensor is provided, comprising: a sensor substrate including a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; and a dichroic lens array including: a plurality of first regions, each first region including a first dielectric having a first refractive index and forming a first pattern, and a second dielectric having a second refractive index less than the first refractive index and filling spaces in the first pattern in the first dielectric, the plurality of first regions respectively corresponding to the plurality of first photosensitive units; and a plurality of second regions, each second region including a first dielectric having the first refractive index and forming a second pattern different from the first pattern, and a second dielectric having a second refractive index less than the first refractive index and filling spaces in the first pattern in the first dielectric, the plurality of first regions respectively corresponding to the plurality of first photosensitive units; and a plurality of second regions, each second region including a first dielectric having the first refractive index and forming a second pattern different from the first pattern, and a second dielectric having a second refractive index less than the first refractive index and filling spaces in the first pattern. A second dielectric in a dielectric space of the second pattern, wherein the plurality of second regions respectively correspond to the plurality of second photosensitive units, wherein the plurality of first regions and the plurality of second regions are configured to form a phase distribution below the plurality of first regions and the plurality of second regions, wherein light of a first wavelength and light of a second wavelength in incident light incident on the dichroic lens array are respectively branched to different directions based on the phase distribution and converge on each of the plurality of first photosensitive units and each of the plurality of second photosensitive units, and wherein the shape of the first pattern in the plurality of first regions and the shape of the second pattern in the second regions gradually change from the center of the dichroic lens array toward the peripheral portion of the dichroic lens array.

[0035] According to another aspect of an example embodiment, an electronic device is provided, comprising: an imaging device configured to focus light reflected from an object to form an optical image; and an image sensor configured to convert the optical image formed by the imaging device into an electrical signal, wherein the image sensor includes: a sensor substrate including a plurality of first photosensitive units and a plurality of second photosensitive units for sensing light; and a dichroic lens array disposed above the sensor substrate and including a plurality of first regions and a plurality of second regions, wherein the plurality of first regions respectively correspond to the plurality of first photosensitive units and have a first fine structure, and the plurality of second regions respectively correspond to the plurality of second photosensitive units and have a second fine structure different from the first fine structure, wherein the first fine structure and the second fine structure are configured to... A phase distribution is formed below the plurality of first regions and the plurality of second regions, wherein light of a first wavelength and light of a second wavelength in the incident light incident on the dichroic lens array are respectively branched into different directions based on the phase distribution and converge on each of the plurality of first photosensitive units and each of the plurality of second photosensitive units, and wherein, at the center of the dichroic lens array, the positions of the plurality of first regions and the plurality of second regions coincide with the positions of the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions, and on the peripheral portion of the dichroic lens array, the positions of the plurality of first regions and the plurality of second regions are shifted relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions toward the center of the dichroic lens array.

[0036] The electronic device may include a smartphone, mobile phone, personal digital assistant (PDA), laptop computer, or personal computer (PC).

[0037] According to another aspect of an example embodiment, an image sensor is provided, comprising: a sensor substrate including a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; and a dichroic lens array disposed above the sensor substrate, and including a plurality of first regions and a plurality of second regions, wherein the plurality of first regions respectively correspond to the plurality of first photosensitive units and have a first fine structure, and the plurality of second regions respectively correspond to the plurality of second photosensitive units and have a second fine structure different from the first fine structure, wherein the first fine structure and the second fine structure are configured to form a phase distribution below the plurality of first regions and the plurality of second regions. In this configuration, the first wavelength light and the second wavelength light incident on the dichroic lens array are branched into different directions based on the phase distribution and focused onto the plurality of first photosensitive units and the plurality of second photosensitive units, respectively. The first fine structure and the second fine structure each include a plurality of nanopillars, each of the plurality of nanopillars including a first nanopillar and a second nanopillar disposed on the first nanopillar. Furthermore, at the center of the image sensor, the position of the second nanopillar coincides with the position of the first nanopillar, and at the peripheral portion of the image sensor, the second nanopillar is shifted relative to the first nanopillar toward the center of the image sensor. Attached Figure Description

[0038] The above and other aspects, features, and advantages of the exemplary embodiments will become clearer from the following description taken in conjunction with the accompanying drawings, in which:

[0039] Figure 1 This is a block diagram of an image sensor according to an example embodiment;

[0040] Figure 2A , Figure 2B and Figure 2C This is a diagram illustrating examples of various pixel arrangements in a pixel array of an image sensor according to an example embodiment;

[0041] Figure 3 This is a conceptual diagram illustrating the structure and operation of a dichroic lens array according to an example embodiment;

[0042] Figure 4A and Figure 4B This is a cross-sectional view of a pixel array in an image sensor according to an example embodiment;

[0043] Figure 5A This is a top view illustrating the arrangement of photosensitive units in the pixel array of an image sensor according to an example embodiment. Figure 5B This is a top view illustrating an example of the arrangement of nanopillars in multiple regions of a dichroic lens array according to an exemplary embodiment; Figure 5C yes Figure 5B An enlarged top view of a portion;

[0044] Figure 6A and Figure 6B This is a view illustrating a computer simulation of the phase distribution of blue light passing through the dichroic lens array and the focused distribution of blue light in the facing photosensitive unit according to an example embodiment. Figure 6C The diagram illustrates the direction of travel of blue light incident on the second region and the periphery of the dichroic lens array corresponding to the blue pixel, according to an example embodiment. Figure 6D An example of a microlens array that functions equivalently to blue light, according to an exemplary embodiment, is shown;

[0045] Figure 7A and Figure 7B This is a view illustrating a computer simulation of the phase distribution of green light passing through the dichroic lens array and the focused distribution of green light in the facing photosensitive unit according to an example embodiment. Figure 7C The diagram illustrates the direction of travel of green light incident on a first region and the periphery of a dichroic lens array corresponding to a green pixel, according to an example embodiment. Figure 7D An example of a microlens array that functions equivalently with respect to green light, according to an exemplary embodiment, is shown;

[0046] Figure 8A and Figure 8B This is a view showing a computer simulation of the phase distribution of red light passing through the dichroic lens array and the focused distribution of red light in the facing photosensitive unit according to an example embodiment. Figure 8C The diagram illustrates the direction of travel of red light incident on the third region and periphery of the dichroic lens array corresponding to the red pixel, according to an example embodiment. Figure 8D An example of a microlens array that functions equivalently with respect to red light, according to an exemplary embodiment, is shown;

[0047] Figure 9A , Figure 9B , Figure 9C , Figure 9D and Figure 9E This is a graph showing the efficiency of the dichroic lens array as a function of the distance between the dichroic lens array and the sensor substrate when the spacing between the photosensitive units is 0.7 μm, according to an example embodiment.

[0048] Figure 10A , Figure 10B , Figure 10C , Figure 10D and Figure 10EThis is a graph showing the efficiency of the dichroic lens array as a function of the distance between the dichroic lens array and the sensor substrate when the spacing between the photosensitive units is 0.8 μm, according to an example embodiment.

[0049] Figure 11A , Figure 11B , Figure 11C , Figure 11D and Figure 11E This is a graph showing the efficiency of the dichroic lens array as a function of the distance between the dichroic lens array and the sensor substrate when the spacing between the photosensitive units is 1.0 μm, according to an example embodiment.

[0050] Figure 12 This is a perspective view showing an exemplary shape of a nanopillar that can be used in a dichroic lens array of an image sensor according to an example embodiment;

[0051] Figure 13A , Figure 13B , Figure 13C , Figure 13D , Figure 13E , Figure 13F , Figure 13G and Figure 13H This is a top view illustrating an exemplary shape of a nanopillar that can be used in a dichroic lens array of an image sensor according to another example embodiment;

[0052] Figure 14 This is a top view illustrating the arrangement of multiple nanopillars in a dichroic lens array of an image sensor according to another example embodiment;

[0053] Figure 15 This is a top view illustrating the arrangement of multiple nanopillars in a dichroic lens array of an image sensor according to another example embodiment;

[0054] Figure 16 This is a top view illustrating the arrangement of multiple nanopillars in a dichroic lens array of an image sensor according to another example embodiment;

[0055] Figure 17 This is a top view illustrating the arrangement of multiple nanopillars in a dichroic lens array of an image sensor according to another example embodiment;

[0056] Figure 18 It is exemplarily shown in including Figure 17 A graph showing the spectral distribution of light incident on red, green, and blue pixels respectively in an image sensor with a dichroic lens array;

[0057] Figure 19A and Figure 19BThis is a cross-sectional view showing a schematic structure of a pixel array in an image sensor according to another example embodiment, as viewed from different sections;

[0058] Figure 20 and Figure 21 It is a graph showing the spectral distribution of light incident on each of the red, green and blue pixels of the image sensor according to the embodiment, respectively relating to the case with a color filter and the case without a color filter;

[0059] Figure 22 This is a conceptual diagram of a camera based on an example embodiment;

[0060] Figure 23A , Figure 23B and Figure 23C This is a top view showing a variation in the arrangement of nanopillars in a dichroic lens array based on their position on an image sensor, according to an example embodiment.

[0061] Figure 24 This is a cross-sectional view illustrating a schematic structure of a pixel array in an image sensor according to another example embodiment;

[0062] Figure 25 It is shown exemplarily in Figure 22 A top view of the displacement of two-dimensionally arranged nanopillars in a dichroic lens array used in the image sensor of a camera.

[0063] Figure 26 It includes Figure 25 A cross-sectional view of the pixel array in an image sensor with a dichroic lens array;

[0064] Figure 27 It is shown in Figure 26 A perspective view of an exemplary shape of nanopillars used in a dichroic lens array of an image sensor;

[0065] Figure 28 This is a cross-sectional view illustrating a schematic structure of a pixel array in an image sensor according to another example embodiment;

[0066] Figure 29A , Figure 29B and Figure 29C These are illustrative graphs showing the spectral distribution of light incident on red, green, and blue pixels in an image sensor according to an example embodiment, respectively, and respectively involving the case of not considering the change of the principal ray angle according to the position on the image sensor, the case of changing the position of the nanopillar considering the change of the principal ray angle, and the case of configuring the nanopillar as bipolar considering the change of the principal ray angle.

[0067] Figure 30A and Figure 30B This is a top view showing the variation of the linewidth of the nanopillars according to another example embodiment as a function of their position on an image sensor;

[0068] Figure 31 This is an exemplary graph showing the spectral distribution of light incident on the red, green, and blue pixels of the image sensor in Figure 30, respectively.

[0069] Figure 32 and Figure 33 This is a top view illustrating various shapes of nanopillars used in a dichroic lens array according to another example embodiment;

[0070] Figure 34 and Figure 35 This is a cross-sectional view showing nanopillars of various cross-sectional shapes used in a dichroic lens array according to another example embodiment;

[0071] Figure 36 This is a cross-sectional view illustrating a schematic structure of a pixel array in an image sensor according to another example embodiment;

[0072] Figure 37 This is a conceptual diagram illustrating the structure and operation of a dichroic lens array according to another example embodiment;

[0073] Figure 38 This is a top view illustrating an example of a unit pattern array of a dichroic lens array applicable to a Bayer pattern type image sensor according to an exemplary embodiment;

[0074] Figure 39 It is a section taken along line A-A' Figure 38 A cross-sectional view of a unit pattern array;

[0075] Figure 40 It is intercepted along line B-B'. Figure 38 A cross-sectional view of a unit pattern array;

[0076] Figure 41 It shows that it includes multiple Figure 38 A top view of an example arrangement of a dichroic lens array, including a unit pattern array.

[0077] Figure 42A It is shown Figure 38 A diagram illustrating an example of the first region in a unit pattern array; Figure 42B This is a diagram showing the pixels corresponding to the first region and the peripheral pixels in an image sensor according to an example embodiment;

[0078] Figure 43A It is shown Figure 38 An example diagram of the second region in a unit pattern array; Figure 43BThis is a diagram showing the pixels corresponding to the second region and the peripheral pixels in an image sensor according to an example embodiment;

[0079] Figure 44A It is shown Figure 38 A diagram illustrating an example of the third region in a unit pattern array; Figure 44B This is a diagram showing the pixels corresponding to the third region and the peripheral pixels in an image sensor according to an example embodiment;

[0080] Figure 45A It is shown Figure 38 A diagram illustrating an example of the fourth region in a unit pattern array; Figure 45B This is a diagram showing the pixels corresponding to the fourth region and the peripheral pixels in an image sensor according to an example embodiment;

[0081] Figure 46 This is a top view illustrating an exemplary form of a unit pattern array in a dichroic lens array according to another example embodiment;

[0082] Figure 47 This is a top view illustrating an exemplary form of a unit pattern array in a dichroic lens array according to another example embodiment;

[0083] Figure 48A and Figure 48B These are cross-sectional views of the pixel array in an image sensor employing a dichroic lens array according to an example embodiment, taken along different sections;

[0084] Figure 49 This is a top view showing an example of a dichroic lens array according to another exemplary embodiment;

[0085] Figure 50 It includes Figure 49 A cross-sectional view of the pixel array in an image sensor with a dichroic lens array;

[0086] Figure 51 This is a top view illustrating an example of the arrangement of multiple unit pattern arrays in a dichroic lens array according to another exemplary embodiment;

[0087] Figure 52 This is a cross-sectional view illustrating a schematic structure of a pixel array in an image sensor according to another example embodiment;

[0088] Figure 53 This is a block diagram of an electronic device including an image sensor according to one or more example embodiments; and

[0089] Figure 54 , Figure 55 , Figure 56 , Figure 57 , Figure 58 , Figure 59 , Figure 60 , Figure 61 , Figure 62 , Figure 63 and Figure 64 The diagram illustrates various examples of electronic devices employing image sensors according to one or more example embodiments. Detailed Implementation

[0090] Referring now to the exemplary embodiments shown in the accompanying drawings, wherein the same reference numerals refer to the same elements throughout the drawings. In this respect, exemplary embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, exemplary embodiments are described below only with reference to the accompanying drawings to explain various aspects. The term “and / or” as used herein includes any and all combinations of one or more of the related listed items. Expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c, or variations thereof.

[0091] In the following, an image sensor including a dichroic lens array and an electronic device including the image sensor will be described in detail with reference to the accompanying drawings. The exemplary embodiments are capable of various modifications and can be embodied in many different forms. In the drawings, the same reference numerals denote the same components, and for ease of explanation, the dimensions of the components in the drawings may be enlarged.

[0092] When a layer, film, region, or panel is referred to as being "on" another element, it can be directly above / below / on the left / right side of another layer or substrate, or there may be an intermediate layer.

[0093] It should be understood that while terms such as "first," "second," etc., may be used herein to describe various components, these components should not be limited by these terms. These terms are used only to distinguish one component from another. These terms do not limit the materials or structures of the components to be different from each other.

[0094] Singular expressions encompass plural expressions unless there is a clear distinction in the context. It will also be understood that when a part is said to "include" another component, unless the context otherwise indicates, that part may not exclude the other component, but may also include it.

[0095] In addition, terms such as “...unit” and “module” used in this document refer to units that perform functions or operations and can be implemented by hardware, software or a combination of hardware and software.

[0096] The use of the term "above" and similar indicative terms can correspond to both the singular and plural forms.

[0097] Similarly, the steps of all methods described herein may be performed in any suitable order, unless otherwise indicated herein or explicitly stated otherwise by the context. Likewise, all exemplary terms (e.g., etc.) are used only for the purpose of describing the spirit of the art, and the scope of the claims is not limited by these terms unless the context is limited by the claims.

[0098] Figure 1 This is a block diagram of an image sensor 1000 according to an example embodiment. (Refer to...) Figure 1 The image sensor 1000 may include a pixel array 1100, a timing controller 1010, a line decoder 1020, and an output circuit 1030. The image sensor may include a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor.

[0099] Pixel array 1100 includes pixels arranged in a two-dimensional configuration of multiple rows and columns. Row decoder 1020 selects one of the rows in pixel array 1100 in response to a row address signal output from timing controller 1010. Output circuit 1030 outputs photosensitive signals from multiple pixels arranged in the selected row, column by column. For this purpose, output circuit 1030 may include column decoder and analog-to-digital converter (ADC). For example, output circuit 1030 may include column decoder and multiple ADCs arranged for columns in pixel array 1100, or a single ADC disposed at the output of column decoder. Timing controller 1010, row decoder 1020, and output circuit 1030 may be implemented as a single chip or as separate chips. A processor for processing the image signals output from output circuit 1030 may be implemented as a single chip along with timing controller 1010, row decoder 1020, and output circuit 1030.

[0100] The pixel array 1100 may include multiple pixels that sense light of different wavelengths. This can be achieved as follows: Figures 2A to 2C The pixels are arranged in various ways as shown.

[0101] Figure 2A The Bayer pattern used in the image sensor 1000 is shown. (Refer to...) Figure 2AA unit pixel comprises four quadrant regions, and specifically, the first quadrant region can be a blue pixel B, the second quadrant region can be a green pixel G, the third quadrant region can be a red pixel R, and the fourth quadrant region can be a green pixel G. Unit pixels can be arranged repeatedly and two-dimensionally in a first direction (X-direction) and a second direction (Y-direction). For example, in a 2×2 array of unit pixels, two green pixels G are arranged in one diagonal direction, and one blue pixel B and one red pixel R are arranged in the other diagonal direction. In the overall arrangement of the pixels, the repeating arrangement includes: a first row with alternating arrangements of multiple green pixels G and multiple blue pixels B in the first direction, and a second row with alternating arrangements of multiple red pixels R and multiple green pixels G in the first direction.

[0102] However, the arrangement of the pixel array 1100 is not limited to a Bayer pattern, but can be achieved by arranging pixels in various types other than a Bayer pattern. For example, see reference... Figure 2B The magenta pixel M, cyan pixel C, yellow pixel Y, and green pixel G can be configured into a CYGM arrangement of one unit pixel. Similarly, refer to... Figure 2C An RGBW arrangement can be used, where green pixels G, red pixels R, blue pixels, and white pixels W are configured into a single unit pixel. The unit pixel can have a 3×2 array. Besides the examples above, the pixels in the pixel array 1100 can be arranged in various ways according to the color characteristics of the image sensor 1000. Hereinafter, a Bayer pattern will be described for the pixel array 1100 in the image sensor 1000; however, the principles of the example embodiments described later will also apply to other pixel arrangements besides the Bayer pattern.

[0103] According to an example embodiment, the pixel array 1100 of the image sensor 1000 may include a dichroic lens array configured to focus light of a color corresponding to each pixel onto each pixel. Figure 3 This is a conceptual diagram illustrating the structure and operation of a dichroic lens array 130 according to an exemplary embodiment. (Refer to...) Figure 3 The dichroic lens array 130 includes nanopillars NP arranged on a plane according to a predetermined rule. The dichroic lens array 130 may be disposed on the spacer layer 120.

[0104] Here, this rule can be applied to parameters such as the shape and size (width and height) of the nanopillars NP, the distance between the nanopillars NP, and the arrangement of the nanopillars NP. These parameters can be determined based on the target phase distribution TP that will be achieved by the dichroic lens array 130 for the incident light Li. The target phase distribution TP can be determined by considering a first target region R1 and a second target region R2, in which the wavelengths of the incident light Li are separated and the light is converged. For ease of illustration, the target phase distribution TP is indicated between the dichroic lens array 130 and the target regions R1 and R2. The actual target phase distribution TP can be the phase distribution at the position immediately following the incident light Li passing through the dichroic lens array 130, for example, the phase distribution on the lower surface of the dichroic lens array 130 or the upper surface of the spacer layer 120.

[0105] The dichroic lens array 130 may include a first region 131 and a second region 132, each having a first fine structure and a second fine structure distinct from each other. For example, each of the first region 131 and the second region 132 may include one or more nanopillars NP. Each of the first region 131 and the second region 132 may face the first target region R1 and the second target region R2, and may correspond one-to-one. Three nanopillars NP may be arranged in each of the first region 131 and the second region 132. However, the embodiment is not limited thereto. Similarly, the nanopillars NP may be entirely located in one of the first region 131 and the second region 132. However, the embodiment is not limited thereto, and some nanopillars NP may be arranged on the boundary between the first region 131 and the second region 132.

[0106] The nanopillars NP of the dichroic lens array 130 can form a phase distribution in which different wavelengths of light included in the incident light Li branch and converge in different directions. For example, the shape, size, arrangement, etc. of the nanopillars NP distributed in the first region 131 and the second region 132 can be determined such that the light of the first wavelength (L) λ1 Light with a first phase distribution and a second wavelength (L) λ2 The target phase distribution TP has a second phase distribution, where light L λ1 Wako L λ2 Included in the incident light Li. According to the target phase distribution TP, the light L with the first wavelength... λ1 and light with a second wavelength L λ2 They can converge at a predetermined separation distance A from the array of nanopillars NP in each of the first target region R1 and the second target region R2.

[0107] The rules governing the arrangement of nanopillars NP in the first region 131 and the rules governing the arrangement of nanopillars NP in the second region 132 may differ from each other. For example, at least one of the shape, size, and arrangement of the nanopillars NP included in the first region 131 may differ from the shape, size, and arrangement of the nanopillars NP included in the second region 132.

[0108] The nanopillar NP can have a sub-wavelength size smaller than the wavelength band to be branched. The nanopillar NP can have a shape size smaller than the shorter of the first and second wavelengths, and when the incident light Li is visible light, the nanopillar NP can have a size smaller than 400 nm, 300 nm, or 200 nm.

[0109] Nanopillars (NPs) can include materials with a refractive index higher than that of the surrounding material. For example, nanopillars (NPs) can include c-Si, p-Si, a-Si, and III-V compound semiconductors (gallium phosphide (GaP), gallium nitride (GaN), gallium arsenide (GaAs), etc.), silicon carbide (SiC), titanium oxide (TiO2), silicon nitride (SiN), and / or combinations thereof. Nanopillars (NPs) with a refractive index different from that of the surrounding material can alter the phase of the light passing through them. This is due to a phase delay caused by the sub-wavelength size, and the degree of phase delay can be determined by the detailed shape and dimensions, arrangement type, etc., of the nanopillars (NPs). The surrounding material can be a dielectric material with a refractive index lower than that of the nanopillars (NPs), such as SiO2 or air.

[0110] The first wavelength λ1 and the second wavelength λ2 can be within the visible light wavelength band. However, the embodiments are not limited to this, and various wavelength bands can be achieved according to the rules of nanopillars NP. Figure 3 The illustration shows two wavelengths being branched and converged. However, the embodiment is not limited to this, and the incident light can be branched into three or more directions and converged according to the wavelength.

[0111] In the following text, an example of applying the above-described dichroic lens array 130 to the pixel array 1100 of the image sensor 1000 will be described.

[0112] Figure 4A and Figure 4B This is a cross-sectional view of the pixel array 1100 according to an example embodiment. Figure 5A This is a top view showing the arrangement of photosensitive units in the pixel array 1100 according to an example embodiment, and Figure 5B This is a top view showing an example of nanopillars arranged in a dichroic lens array according to an exemplary embodiment.

[0113] Reference Figure 4A and Figure 4BThe pixel array 1100 includes: a sensor substrate 110 including a plurality of photosensitive units 111, 112, 113 and 114 configured to sense light; a spacer layer 120, which is transparent and disposed on the upper surface of the sensor substrate 110; and a dichroic lens array 130 disposed on the upper surface of the spacer layer 120 above the sensor substrate.

[0114] The sensor substrate 110 may include a first photosensitive unit 111, a second photosensitive unit 112, a third photosensitive unit 113, and a fourth photosensitive unit 114 that convert light into electrical signals. For example... Figure 4A As shown, the first photosensitive unit 111 and the second photosensitive unit 112 may be positioned differently in the first direction (X direction) and in the Y direction. Figure 4A Alternating arrangement in the cross section, such as Figure 4B As shown, the third photosensitive unit 113 and the fourth photosensitive unit 114 can be arranged alternately. This area division is configured to sense incident light on a pixel-by-pixel basis. For example, the first photosensitive unit 111 and the fourth photosensitive unit 114 can sense light having a first wavelength corresponding to a first pixel, the second photosensitive unit 112 can sense light having a second wavelength corresponding to a second pixel, and the third photosensitive unit 113 can sense light having a third wavelength corresponding to a third pixel. In the following text, light having a first wavelength, light having a second wavelength, and light having a third wavelength will be shown as green light, blue light, and red light, respectively, and the first pixel, the second pixel, and the third pixel will be described as green pixel G, blue pixel B, and red pixel R, respectively, as examples. Separators for separating units can be further formed between the photosensitive units.

[0115] The spacer layer 120 supports the dichroic lens array 130 while maintaining a constant gap between the sensor substrate 110 and the dichroic lens array 130, and may be made of a transparent material relative to visible light. For example, the spacer layer 120 may include a dielectric material having a lower refractive index than the nanopillars NP in the dichroic lens array 130 and low absorption in the visible light band, such as SiO2, spin-coated glass based on siloxanes (SOG), etc.

[0116] The dichroic lens array 130 includes nanopillars (NPs) arranged according to a predetermined rule. The dichroic lens array 130 may further include a protective layer for protecting the nanopillars (NPs). The protective layer may include a dielectric material with a refractive index lower than that of the material used to form the nanopillars (NPs).

[0117] The dichroic lens array 130 is divided into a first region 131, a second region 132, a third region 133, and a fourth region 134 facing a plurality of photosensitive units 111, 112, 113, and 114 in a one-to-one correspondence. One or more nanopillars NP may be arranged in each of the plurality of regions 131, 132, 133, and 134, and at least one of the shape, size, and arrangement of the nanopillars NP may differ from one another depending on the region.

[0118] The dichroic lens array 130 is divided such that light of a first wavelength is branched and focused into and converged in the first photosensitive unit 111 and the fourth photosensitive unit 114, light of a second wavelength is branched and focused into and converged in the second photosensitive unit 112, and light of a third wavelength is branched and focused into and converged in the third photosensitive unit 113. Additionally, for each region, the size, shape, and arrangement of the nanopillars NP are determined.

[0119] When pixel array 1100 has such Figure 2A When the Bayer pattern is arranged as shown, Figure 5A The first photosensitive unit 111 and the fourth photosensitive unit 114 correspond to the green pixel G, the second photosensitive unit 112 corresponds to the blue pixel B, and the third photosensitive unit 113 corresponds to the red pixel R.

[0120] Reference Figure 5B In the dichroic lens array 130, the first region 131 and the fourth region 134 correspond to the green pixel G, the second photosensitive unit 112 and the second region 132 correspond to the blue pixel B, and the third photosensitive unit 113 and the third region 133 correspond to the red pixel R. Therefore, the dichroic lens array 130 includes a plurality of unit pattern arrays arranged in two dimensions, and each unit pattern array includes a first region 131, a second region 132, a third region 133, and a fourth region 134 arranged in a 2×2 configuration.

[0121] like Figure 5B As shown, the first region 131 and the fourth region 134 corresponding to the green pixel G, the second region 132 corresponding to the blue pixel B, and the third region 133 corresponding to the red pixel R may include nanopillars NP, each nanopillar NP having a cylindrical shape with a circular cross-section. Nanopillars NP with different cross-sectional areas are arranged at the centers of the first region 131, the second region 132, the third region 133, and the fourth region 134 to branch the incident light based on different wavelengths. Nanopillars NP can also be arranged at the center of the boundaries between pixels and at the intersections of the pixel boundaries. The cross-sectional area of ​​nanopillars NP arranged at the boundaries between pixels can be smaller than the cross-sectional area of ​​nanopillars NP arranged at the center of the pixels.

[0122] Figure 5C The nanopillar NP is shown in Figure 5B The arrangement in some regions (i.e., the first to fourth regions 131, 132, 133, and 134 constituting the unit pattern array). Figure 5C In this context, the nanopillars (NPs) are designated as p1 to p9 based on their detailed positions within the unit pattern array. (See reference...) Figure 5C In the nanopillar NP, the cross-sectional area of ​​nanopillar p1 at the center of the first region 131 and nanopillar p4 at the center of the fourth region 134 is greater than the cross-sectional area of ​​nanopillar p2 at the center of the second region 132 or nanopillar p3 at the center of the third region 133, and the cross-sectional area of ​​nanopillar p2 at the center of the second region 132 is greater than the cross-sectional area of ​​nanopillar p3 at the center of the third region 133. However, the embodiments are not limited to the above examples, and nanopillar NPs with various shapes, sizes, and arrangements can be applied if desired.

[0123] The nanopillars NPs included in the first region 131 and the fourth region 134 corresponding to the green pixel G can have different distribution rules in the first direction (X direction) and the second direction (Y direction). For example, the nanopillars NPs arranged in the first region 131 and the fourth region 134 can have different sizes arranged in the first direction (X direction) and the second direction (Y direction). Figure 5C As shown, in the nanopillar NP, the cross-sectional area of ​​nanopillar p5, located at the boundary between the first region 131 and the second region 132 adjacent to the first region 131 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar p6, located at the boundary between the first region 131 and the third region 133 adjacent to the first region 131 in the second direction (Y direction). Similarly, the cross-sectional area of ​​nanopillar p7, located at the boundary between the fourth region 134 and the third region 133 adjacent to the fourth region 134 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar p8, located at the boundary between the fourth region 134 and the second region 132 adjacent to the fourth region 134 in the second direction (Y direction).

[0124] Simultaneously, the nanopillars NP arranged in the second region 132 corresponding to the blue pixel B and the third region 133 corresponding to the red pixel R can have a symmetrical distribution rule in the first and second directions (X and Y directions). Figure 5CAs shown, in the nanopillar NP, the cross-sectional area of ​​nanopillar p5 at the boundary between pixels adjacent to the second region 132 in the first direction (X direction) is the same as the cross-sectional area of ​​nanopillar p8 at the boundary between pixels adjacent to the second region 132 in the second direction (Y direction). In the third region 133, the cross-sectional area of ​​nanopillar p7 at the boundary between pixels adjacent to each other in the first direction (X direction) is the same as the cross-sectional area of ​​nanopillar p6 at the boundary between pixels adjacent to each other in the second direction (Y direction).

[0125] Similarly, the nanopillars p9 at the four corners of each of the first to fourth regions 131, 132, 133, and 134 (i.e., the points where the four regions intersect each other) have the same cross-sectional area. This distribution is caused by the pixel arrangement in the Bayer pattern. The pixel adjacent to the blue pixel B and the red pixel R in the first direction (X direction) and the second direction (Y direction) is the green pixel G. In the first direction (X direction), the pixel adjacent to the green pixel G corresponding to the first region 131 is the blue pixel B, and in the second direction (Y direction), the pixel adjacent to the green pixel G is the red pixel R. Furthermore, in the first direction (X direction), the pixel adjacent to the green pixel G corresponding to the fourth region 134 is the red pixel R, and in the second direction (Y direction), the pixel adjacent to the green pixel G is the blue pixel B. Furthermore, the green pixel G corresponding to the first region 131 and the fourth region 134 is adjacent to the same pixel (e.g., green pixels G in the four diagonal directions), the blue pixel B corresponding to the second region 132 is adjacent to the same pixel (e.g., red pixels R in the four diagonal directions), and the red pixel R corresponding to the third region 133 is adjacent to the same pixel (e.g., blue pixels B in the four diagonal directions). Therefore, in the second region 132 and the third region 133 corresponding to the blue pixel B and the red pixel R respectively, the nanopillars NP can be arranged in a 4-fold symmetric form, and in the first region 131 and the fourth region 134 corresponding to the green pixel G, the nanopillars NP can be arranged in a 2-fold symmetric form. In particular, the first region 131 and the fourth region 134 are rotated 90° relative to each other.

[0126] Multiple nanopillars NP are shown with symmetrical circular cross-sectional shapes. However, the embodiments are not limited to this and may include some nanopillars with asymmetrical cross-sectional shapes. For example, the first region 131 and the fourth region 134 corresponding to the green pixel G employ nanopillars with asymmetrical cross-sectional shapes, which have different widths in the first direction (X direction) and the second direction (Y direction), and the second region 132 and the third region 133 corresponding to the blue pixel B and the red pixel R may employ nanopillars with symmetrical cross-sectional shapes, which have the same width in the first direction (X direction) and the second direction (Y direction).

[0127] The arrangement rule of the dichroic lens array 130 is an example of achieving a target phase distribution in which light with a first wavelength is branched and focused on the first photosensitive unit 111 and the fourth photosensitive unit 114, light with a second wavelength is branched and focused on the second photosensitive unit 112, and light with a third wavelength is branched and focused on the third photosensitive unit 113, and the arrangement rule is not limited to the pattern shown.

[0128] The shape, size, and arrangement of the nanopillars NP in each region of the dichroic lens array 130 can be determined such that the phase of the first wavelength of light that converges into the first photosensitive unit 111 and the fourth photosensitive unit 114 but does not proceed to the second photosensitive unit 112 and the third photosensitive unit 113 can be formed at a position below the dichroic lens array 130 after the first wavelength of light has passed through the dichroic lens array 130.

[0129] Similarly, the shape, size, and arrangement of the nanopillars NP in each region of the dichroic lens array 130 can be determined such that the phase of the second wavelength light that converges into the second photosensitive unit 112 and does not proceed to the first photosensitive unit 111, the third photosensitive unit 114, and the fourth photosensitive unit 114 can be formed at a position below the dichroic lens array 130 after the second wavelength light passes through the dichroic lens array 130.

[0130] Similarly, the shape, size, and arrangement of the nanopillars NP in each region of the dichroic lens array 130 can be determined such that the phase of the third wavelength light that converges to the third photosensitive unit 113 and does not proceed to the first photosensitive unit 111, the second photosensitive unit 112, and the fourth photosensitive unit 114 can be formed at a position below the dichroic lens array 130 after the third wavelength light passes through the dichroic lens array 130.

[0131] The shape, size, and / or arrangement of the nanopillars NP that satisfy the above conditions can be determined, and the dichroic lens array 130 can allow light that has passed through the dichroic lens array 130 to have the following target phase distribution. At the position immediately after passing through the dichroic lens array 130, i.e., on the lower surface of the dichroic lens array 130 or the upper surface of the spacer layer 120, the phase of light with the first wavelength can be: 2nπ at the center of the first region 131 corresponding to the first photosensitive unit 111 and the center of the fourth region 134 corresponding to the fourth photosensitive unit 114, and (2n+1)π at the center of the second region 132 corresponding to the second photosensitive unit 112 and the center of the third region 133 corresponding to the third photosensitive unit 113. Here, N is an integer greater than 0. For example, at the position immediately after passing through the dichroic lens array 130, the phase of light with the first wavelength is maximum at the center of the first region 131 and the center of the fourth region 134, and gradually decreases. The concentric circles furthest from the centers of the first region 131 and the fourth region 134 have the smallest values, as do the centers of the second region 132 and the third region 133. For example, when N is 1, exactly after passing through the dichroic lens array 130, the phase of the green light can be 2π at the centers of the first region 131 and the fourth region 134, and π at the centers of the second region 132 and the third region 133. Here, this phase can represent the relative phase value with respect to the phase just before the light passes through the nanopillar NP.

[0132] Similarly, exactly after passing through the dichroic lens array 130, the phase of the second wavelength light can be: 2Mπ at the center of the second region 132 corresponding to the second photosensitive unit 112; (2M-1)π at the center of the first region 131 corresponding to the first photosensitive unit 111 and the center of the fourth region 134 corresponding to the fourth photosensitive unit 114; and greater than (2M-2)π and less than (2M-1)π at the center of the third region 133 corresponding to the third photosensitive unit 113. Here, M is an integer greater than 0. For example, exactly after passing through the dichroic lens array 130, the phase of the second wavelength light is maximum at the center of the second region 132, and then gradually decreases as the concentric circles move away from the center of the second region 132, until it is locally minimum at the center of the third region 133. For example, when M is 1, at the position after passing through the dichroic lens array 130, the phase of the second wavelength of light can be 2π at the center of the second region 132, π at the center of the first region 131 and the fourth region 134, and about 0.2π to about 0.7π at the center of the third region 133.

[0133] Similarly, exactly after passing through the dichroic lens array 130, the phase of the third wavelength light can be: 2Mπ at the center of the second region 133 corresponding to the third photosensitive unit 113; (2L-1)π at the center of the first region 131 corresponding to the first photosensitive unit 111 and the center of the fourth region 134 corresponding to the fourth photosensitive unit 114; and greater than (2L-2)π and less than (2L-1)π at the center of the second region 132 corresponding to the second photosensitive unit 112. Here, L is an integer greater than 0. For example, exactly after passing through the dichroic lens array 130, the phase of the third wavelength light is maximum at the center of the third region 133, and then gradually decreases as the concentric circles move away from the center of the third region 133, until it is locally minimum at the center of the second region 132. For example, when L is 1, at the position after passing through the dichroic lens array 130, the phase of the third wavelength of light can be 2π at the center of the third region 133, π at the center of the first region 131 and the center of the fourth region 134, and about 0.2π to about 0.7π at the center of the second region 132.

[0134] As described above, the target phase distribution represents the phase distribution of light exactly at the position after the light passes through the dichroic lens array 130. When the light after passing through the dichroic lens array 130 has the aforementioned phase distribution, light of the first to third wavelengths is focused into the corresponding first to fourth photosensitive units 111 to 114, respectively. For example, the following effect can be obtained: light that has passed through the dichroic lens array 130 is branched according to wavelength and then travels in different directions to be focused.

[0135] A predetermined propagation distance requirement can be determined to focus light of the corresponding wavelength onto the corresponding photosensitive unit, and therefore, the thickness h of the spacer layer 120 can be determined. The thickness h of the spacer layer 120 can vary depending on the wavelength λ of the light to be branched, the pixel size, and the arrangement spacing p of the photosensitive units. The thickness h of the spacer layer 120 can be greater than the center wavelength λ of the visible light wavelength band to be branched, and compared with the arrangement spacing p, which is the center wavelength of the distance between the centers of adjacent photosensitive units, the thickness h of the spacer layer 120 can range from about 1 p to about 3 p. Specifically, the thickness h of the spacer layer 120 can be from about 500 nm to about 5 μm. Reference will be made below. Figures 9A to 9E , Figures 10A to 10E as well as Figures 11A to 11E A more detailed description of the thickness h of the spacer layer 120 is provided.

[0136] Figure 6A and Figure 6B This is a view showing a computer simulation of the phase distribution of blue light passing through the dichroic lens array 130 and the focused distribution of blue light in the facing photosensitive unit. Figure 6CThe direction of light travel is shown when incident on the second region of the dichroic lens array corresponding to the blue pixel B and on the periphery of the second region. Figure 6D An example of a microlens array 130 that functions equivalently to blue light is shown.

[0137] Reference Figure 6A The phase distribution shown has a phase of approximately 2π at the center of the region corresponding to the blue pixel B, and a phase of approximately 2π at the center of the region corresponding to the adjacent green pixel G. The phase of the region corresponding to the red pixel R on the diagonal can be approximated as a value less than π (e.g., approximately 0.2π to approximately 0.7π).

[0138] like Figure 6B As shown, this phase distribution represents the focused distribution of blue light. Blue light is mainly focused on the region corresponding to blue pixel B, and rarely reaches the regions corresponding to other pixels.

[0139] Therefore, the blue light incident on the second region 132 corresponding to the blue pixel B and its periphery, after passing through the dichroic lens array 130, is as follows: Figure 6C As shown, in the incident light incident on the second region 132 of the dichroic lens array 130 and certain portions of other regions surrounding the second region 132, blue light is focused onto the second photosensitive unit 112 facing the second region 132. For example, blue light from the second region 132 corresponding to the blue pixel B, blue light from the two first regions 131 adjacent to the second region 132 in the lateral direction, blue light from the two fourth regions 134 adjacent to the second region 132 in the vertical direction, and blue light from the four third regions 113 adjacent to the second region 132 in the diagonal direction are incident on the blue pixel B.

[0140] Therefore, as Figure 6D As shown, for blue light, the dichroic lens array 130 can function equivalently to an array of multiple microlenses ML1 arranged around the second photosensitive unit 112. Each equivalent microlens ML1 can be larger than its corresponding second photosensitive unit 112, so that blue light incident on other areas surrounding the second photosensitive unit 112 and blue light incident on the area of ​​the second photosensitive unit 112 can be focused onto the second photosensitive unit 112. For example, each microlens ML1 can be approximately four times larger than the second photosensitive unit 112 corresponding to each microlens ML1, and the four sides of each microlens ML1 can be parallel to the four sides of the second photosensitive unit 112.

[0141] Figure 7A and Figure 7B This is a computer simulation diagram showing the phase distribution of green light passing through the dichroic lens array and the focused distribution of green light in the facing photosensitive unit. Figure 7C An example of the travel direction of green light incident on the first and fourth regions and their peripheries is shown, wherein the first and fourth regions of the dichroic lens array 130 correspond to green pixels, and Figure 7D An example of a microlens array that functions equivalently to a dichroic lens array relative to green light is shown.

[0142] according to Figure 7A The phase distribution shown in the example has a phase of approximately 2π at the center of the region corresponding to the green pixel G, and a phase of approximately π at the center of the regions corresponding to the adjacent blue pixel B and red pixel R.

[0143] like Figure 7B As shown, this phase distribution can represent the focused distribution of green light. The green light is focused on the regions corresponding to the two green pixels G, and hardly reaches the regions corresponding to other pixels.

[0144] Therefore, the green light incident on the first region 131 and the fourth region 134 corresponding to the green pixel G, as well as the surrounding area, after passing through the dichroic lens array 130, is as follows: Figure 7C As shown, green light is focused onto the first photosensitive unit 111 facing the first region 131 in the dichroic lens array 130, for example, in the incident light incident on a portion of the first region 131 and other regions surrounding the first region 131. Similarly, green light is focused onto the fourth photosensitive unit 114 facing the fourth region 134 in the dichroic lens array 130, for example, in the incident light incident on a portion of the fourth region 134 and other regions surrounding the fourth region 134. For example, green light from the first region 131 or the fourth region 134 corresponding to the color pixel G, and green light from two second regions 132 and two third regions 133 adjacent to the first region 131 or the fourth region 134 in the lateral and longitudinal directions, are incident on the green pixel G.

[0145] Therefore, as Figure 7DAs shown, the dichroic lens array 130 can operate equivalently to an array of multiple microlenses ML2 arranged around the first photosensitive unit 111 and the fourth photosensitive unit 114 relative to green light. Each equivalent microlens ML2 is larger than the first photosensitive unit 111 or the fourth photosensitive unit 114 corresponding to each microlens ML2, so that green light incident on other areas surrounding the first photosensitive unit 111 and the fourth photosensitive unit 114, as well as green light incident on the areas of the first photosensitive unit 111 and the fourth photosensitive unit 114, can be focused onto the first photosensitive unit 111 and the fourth photosensitive unit 114. For example, each microlens ML2 can be approximately twice the size of the first photosensitive unit 111 or the fourth photosensitive unit 114 corresponding to each microlens ML2, and can be arranged to contact the first photosensitive unit 111 and the fourth photosensitive unit 114 in a diagonal direction.

[0146] Figure 8A and Figure 8B This is a computer simulation view showing the phase distribution of red light passing through the dichroic lens array and the focused distribution of red light in the facing photosensitive unit. Figure 8C The direction of travel of red light incident on the third region and the periphery of the dichroic lens array corresponding to the red pixel is shown, and Figure 8D An example of a microlens array that functions equivalently to the red pixel R is shown.

[0147] Reference Figure 8A The phase distribution shown has a phase of approximately 2π at the center of the region corresponding to the red pixel R, approximately π at the center of the region corresponding to the adjacent green pixel G, and approximately π at the center of the region corresponding to the blue pixel B in the diagonal direction (e.g., approximately 0.2π to approximately 0.7π).

[0148] like Figure 8B As shown, this phase distribution can represent the focused distribution of red light. The red light is focused on the region corresponding to the red pixel R, and rarely reaches the regions corresponding to other pixels.

[0149] Therefore, the light incident on the third region 133 and its periphery corresponding to the red pixel R, after passing through the dichroic lens array 130, is as follows: Figure 8CAs shown, the red light is focused onto the third photosensitive unit 113 facing the third region 133 in the dichroic lens array 130, for example, in the incident light incident on the third region 133 and certain portions of other regions surrounding the third region 133. For example, red light from the third region 133 corresponding to the red pixel R, red light from the two fourth regions 134 adjacent to the third region 133 in the lateral direction, red light from the two first regions 131 adjacent to the third region 133 in the vertical direction, and red light from the four second regions 132 adjacent to the third region 133 in the diagonal direction are incident on the red pixel R.

[0150] Therefore, as Figure 8D As shown, for red light, the dichroic lens array 130 can function equivalently to an array of multiple microlenses ML3 arranged around the third photosensitive unit 113. Each equivalent microlens ML3 is larger than the third photosensitive unit 113 corresponding to each microlens ML3, so red light incident on other areas around the third photosensitive unit 113 and red light incident on the area of ​​the third photosensitive unit 113 can be focused onto the third photosensitive unit 113. For example, each microlens ML3 can be approximately four times larger than its corresponding third photosensitive unit 113, and the four sides of each microlens ML3 can be parallel to the four sides of the third photosensitive unit 113.

[0151] about Figure 6C , Figure 6D , Figure 7C , Figure 7D , Figure 8C and Figure 8DAs shown, in the incident light incident on the first region 131 of the dichroic lens array 130, green light travels towards the center of the first photosensitive unit 111 corresponding to the first region 131, blue light travels towards the center of the second photosensitive unit 112 surrounding the first photosensitive unit 111 corresponding to the first region 131, and red light travels towards the center of the third photosensitive unit 113 surrounding the first photosensitive unit 111 corresponding to the first region 131. Similarly, in the incident light incident on the second region 132 of the dichroic lens array 130, blue light travels towards the center of the second photosensitive unit 112 corresponding to the second region 132, green light travels towards the center of the first photosensitive unit 111 and the fourth photosensitive unit 114 surrounding the second photosensitive unit 112 corresponding to the second region 132, and red light travels towards the center of the third photosensitive unit 113 surrounding the second photosensitive unit 112 corresponding to the second region 132. Similarly, in the incident light incident on the third region 133 of the dichroic lens array 130, red light travels towards the center of the third photosensitive unit 113 corresponding to the third region 133, green light travels towards the center of the first photosensitive units 111 and the fourth photosensitive unit 114 surrounding the third photosensitive unit 113 corresponding to the third region 133, and blue light travels towards the center of the second photosensitive unit 112 surrounding the third photosensitive unit 113 corresponding to the third region 133. Likewise, in the incident light incident on the fourth region 134 of the dichroic lens array 130, green light travels towards the center of the fourth photosensitive unit 114 corresponding to the fourth region 134, blue light travels towards the center of the second photosensitive unit 112 surrounding the fourth photosensitive unit 114 corresponding to the fourth region 134, and red light travels towards the center of the third photosensitive unit 113 surrounding the fourth photosensitive unit 114 corresponding to the fourth region 134.

[0152] By appropriately setting the thickness of the spacer layer 120, the aforementioned color separation and focusing can be performed more effectively. For example, when the theoretical thickness of the spacer layer 120 is h... t When the refractive index of the spacer layer 120 relative to the wavelength λ0 is n, and the spacing between the photosensitive units is p, the following equation 1 can be satisfied.

[0153] [Equation 1]

[0154] Here, the theoretical thickness h of the spacer layer 120 is... t This can refer to the focal length at which the dichroic lens array 130 focuses light of wavelength λ0 onto the top surfaces of photosensitive units 111, 112, 113, and 114. For example, light of wavelength λ0 can pass through the dichroic lens array 130 while being focused at a distance h from the lower surface of the dichroic lens array 130. t Place.

[0155] As expressed in Equation 1 above, the theoretical thickness h of the spacer layer 120 t The spacing p of the photosensitive units 111, 112, 113, and 114 and the refractive index n of the spacer layer 120 can be varied. For example, when the center wavelength λ0 of the visible light band is 540 nm, the spacing p of the photosensitive units 111, 112, 113, and 114 is 0.8 μm, and the refractive index n of the spacer layer 120 at a wavelength of 540 nm is 1.46, and the theoretical thickness h of the spacer layer 120 is... t That is, the distance between the lower surface of the dichroic lens array 130 and the upper surface of the sensor substrate 110 is approximately 1.64 μm. However, the actual thickness h of the spacer layer 120 is not necessarily limited to the theoretical thickness h expressed by Equation 1 above. t For example, considering the efficiency of the dichroic lens array 130, it can be based on the theoretical thickness h. t Select the actual thickness of spacer layer 120 within the predetermined range.

[0156] Figures 9A to 9E This is an exemplary graph showing the variation in efficiency of the dichroic lens array 130 with respect to the distance between the dichroic lens array 130 and the sensor substrate 110 when the spacing between the photosensitive units 111, 112, 113 and 114 is 0.7 μm, according to an example embodiment. Figure 9A The focusing efficiency of the dichroic lens array 130 relative to blue light incident on the second photosensitive unit 112 from the first to fourth regions 131, 132, 133 and 134 constituting the dichroic lens array 130 is shown. Figure 9B The focusing efficiency of the dichroic lens array 130 relative to green light incident on the first photosensitive unit 111 and the fourth photosensitive unit 114 from the first region 131 to the fourth region 131 constituting the unit pattern array is shown, and Figure 9C The focusing efficiency of the dichroic lens array 130 relative to red light incident on the third photosensitive unit 113 from the first to fourth regions 131, 132, 133 and 134 constituting the unit pattern array is shown.

[0157] exist Figure 9A and Figure 9C In this configuration, four regions are arranged relative to a single photosensitive unit, therefore the theoretical maximum value is 4. Figure 9B In this configuration, four regions are arranged relative to the two photosensitive units, therefore the theoretical maximum value is 2. Figures 9A to 9C In the curve diagram, the distance at which the focusing efficiency of the dichroic lens array 130 is highest becomes the theoretical thickness h that satisfies Equation 1 above. t . like Figures 9A to 9C As shown, the theoretical thickness h t It can vary depending on the wavelength.

[0158] Figure 9D This is an exemplary graph showing the variation in efficiency of a dichroic lens array 130 that takes into account the sensitivity characteristics of the human eye relative to visible light. For example, the human eye typically has the highest sensitivity to green light and the lowest sensitivity to blue light. Therefore, by considering the sensitivity characteristics of the human eye relative to visible light... Figure 9A The curve is assigned the lowest weight. Figure 9C The curve is assigned a higher weight than that applied to blue light, and... Figure 9B The curve is assigned the highest weight and the sum is averaged to obtain the result. Figure 9D The curve graph. Figure 9E It shows the... Figure 9D The curve is the result of normalization.

[0159] Reference Figure 9D and Figure 9E The graph shows that, taking into account the sensitivity characteristics of the human eye, the efficiency of the dichroic lens array 130 relative to visible light is highest at a distance of 1.2 μm when the spacing between the photosensitive units 111, 112, 113, and 114 is 0.7 μm. Similarly, the efficiency of the dichroic lens array 130 is approximately 80% of its maximum efficiency at a distance of approximately 0.5 μm, and approximately 95% of its maximum efficiency at a distance of approximately 1.9 μm.

[0160] Figures 10A to 10E This is an exemplary graph showing the variation in efficiency of the dichroic lens array 130 with respect to the distance between the dichroic lens array 130 and the sensor substrate 110 when the spacing between the photosensitive units 111, 112, 113, and 114 is 0.8 μm, according to an example embodiment. (Refer to...) Figures 10A to 10E The graph shows that, taking into account the sensitivity characteristics of the human eye, the efficiency of the dichroic lens array 130 relative to visible light is highest at a distance of 1.64 μm when the spacing between the photosensitive units 111, 112, 113, and 114 is 0.8 μm. Similarly, the efficiency of the dichroic lens array 130 is approximately 85% of its maximum efficiency at a distance of approximately 0.8 μm, and approximately 93% of its maximum efficiency at a distance of approximately 2.5 μm.

[0161] Figures 11A to 11E This is an exemplary graph showing the variation in efficiency of the dichroic lens array 130 with respect to the distance between the dichroic lens array 130 and the sensor substrate 110 when the spacing between photosensitive units 111, 112, 113, and 114 is 1.0 μm. (Refer to...) Figures 11A to 11EThe graphs show that, taking into account the sensitivity characteristics of the human eye, the efficiency of the dichroic lens array 130 relative to visible light is highest at a distance of 2.6 μm when the spacing between the photosensitive units 111, 112, 113, and 114 is 1.0 μm. Similarly, the efficiency of the dichroic lens array 130 is approximately 87% of its maximum efficiency at a distance of approximately 1.6 μm, and approximately 94% of its maximum efficiency at a distance of approximately 3.6 μm.

[0162] Therefore, even when the actual thickness h of the spacer layer 120 is greater than or less than the theoretical thickness h t When multiplied by the spacing p of the photosensitive units 111, 112, 113, and 114, the dichroic lens array 130 can also achieve a high efficiency relative to its maximum efficiency, for example, above 80%, above 90%, or above 95%. Based on the above results, the actual thickness h of the spacer layer 120 can be [h]. t - p≤ h ≤ h t Choose from the range of + p.

[0163] Because the dichroic lens array 130 described above can branch incident light according to wavelength and focus the branched light on specific areas without absorbing or blocking the incident light, the light utilization efficiency of the image sensor can be improved. Furthermore, since the dichroic lens array 130 has improved color separation performance, the image sensor employing the dichroic lens array 130 can have improved color purity. Similarly, the image sensor employing the dichroic lens array 130 can implement the Bayer pattern type commonly used in image sensors, thus allowing the use of the same image processing algorithms as existing pixel structures. Moreover, because the dichroic lens array 130 can be used as a lens for focusing incident light, the image sensor employing the dichroic lens array 130 does not require separate microlenses for focusing light onto pixels.

[0164] Figure 12 This is a perspective view illustrating an exemplary shape of a nanopillar that can be used in a dichroic lens array according to an example embodiment. (Refer to...) Figure 12 Each nanopillar can have a cylindrical shape with a diameter D and a height H. The diameter D and height H can have values ​​of sub-wavelengths, and the diameter D can vary depending on the arrangement of the nanopillars.

[0165] Similarly, nanopillars can have the shape of pillars with various cross-sectional shapes. Figures 13A to 13H This is a top view showing an exemplary shape of a nanopillar that can be used in a dichroic lens array 130 of an image sensor.

[0166] like Figure 13A As shown, the cross-sectional shape of the nanopillar can be a ring shape with an outer diameter D and an inner diameter Di. The width w of the ring can have a sub-wavelength value. Figure 13BAs shown, the cross-sectional shape of the nanopillar can be an elliptical shape with different major axis lengths Dx and minor axis lengths Dy in the first direction (X direction) and the second direction (Y direction). For example, as referenced above... Figure 5B As described, this shape can be used in the first region 131 and the fourth region 134 corresponding to the green pixels.

[0167] In addition, such as Figure 13C , Figure 13D and Figure 13F As shown, the cross-sectional shape of the nanopillar can be square, square ring, cross, or rectangular, or have a shape such as... Figure 13E and Figure 13G The cross shapes of different lengths Dx and Dy are shown in the first direction (X direction) and the second direction (Y direction). See the reference above. Figure 5B As described, this rectangular or cross shape can be used in the first region 131 and the fourth region 134 corresponding to the green pixels.

[0168] In another example embodiment, the cross-sectional shape of the nanopillar can have multiple concave arcs, such as... Figure 13H As shown.

[0169] Figure 14 This is a top view illustrating an arrangement of multiple nanopillars in a dichroic lens array 140 according to another example embodiment.

[0170] The dichroic lens array 140 has a similarity to Figure 2A The illustrated Bayer pattern has a pixel arrangement corresponding to a shape that may include the following quadrant regions: a first region 141 corresponding to the green pixel G, a second region 142 corresponding to the blue pixel B, a third region 143 corresponding to the red pixel R, and a fourth region 144 corresponding to the green pixel G. The unit pattern array described above can be repeatedly arranged in a first direction (X direction) and a second direction (Y direction). Each region can be equally divided into multiple sub-regions, and nanopillars NP can be arranged at the intersections of the boundaries of the sub-regions. Figure 14 The following example illustrates a scenario where the number of sub-regions is nine, and nanopillars NPs are arranged at grid points obtained by dividing the nine sub-regions. Therefore, the nanopillars NPs are not located at the center point of each region 141, 142, 143, or 144, and four nanopillars NPs of the same shape are configured in the central portion. The nanopillars NPs in the outer portion are located on the boundaries of another region. The nanopillars NPs are designated r1 to r9 based on their detailed location within the unit pattern array.

[0171] Reference Figure 14The cross-sectional area of ​​nanopillar r1 at the center of the first region 141 corresponding to the green pixel is greater than the cross-sectional area of ​​nanopillars r5, r6, and r9 at the periphery. Similarly, the cross-sectional area of ​​nanopillar r4 at the center of the fourth region 144 corresponding to the green pixel is greater than the cross-sectional area of ​​nanopillars r7, r8, and r9 at the periphery. The cross-sectional areas of nanopillars r1 and r4 at the center of the first and fourth regions 141 and 144 corresponding to the green pixel can be greater than the cross-sectional areas of nanopillar r2 at the center of the second region 142 corresponding to the blue pixel and nanopillar r3 at the center of the third region 143 corresponding to the red pixel. Likewise, the cross-sectional area of ​​nanopillar r2 at the center of the second region 142 corresponding to the blue pixel can be greater than the cross-sectional area of ​​nanopillar r3 at the center of the third region 143 corresponding to the red pixel.

[0172] The nanopillars NP in the second region 142 and the third region 143 can be symmetrically arranged in the first direction (X direction) and the second direction (Y direction), and the nanopillars NP in the first region 141 and the fourth region 144 can be asymmetrically arranged in the first direction (X direction) and the second direction (Y direction). For example, the nanopillars NP in the second region 142 and the third region 143 corresponding to the blue pixel and the red pixel, respectively, can be arranged in the first direction (X direction) and the second direction (Y direction) using the same distribution rule, and the nanopillars NP in the first region 141 and the fourth region 144 corresponding to the green pixel can be arranged in the first direction (X direction) and the second direction (Y direction) using different distribution rules.

[0173] In the nanopillar NP, the cross-sectional area of ​​nanopillar r5, located at the boundary between the first region 141 and the second region 142 adjacent to the first region 141 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar r6, located at the boundary between the first region 141 and the third region 143 adjacent to the first region 141 in the second direction (Y direction). Similarly, the cross-sectional area of ​​nanopillar r7, located at the boundary between the fourth region 144 and the third region 143 adjacent to the fourth region 144 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar r8, located at the boundary between the fourth region 144 and the second region 142 adjacent to the fourth region 144 in the second direction (Y direction).

[0174] On the other hand, the cross-sectional area of ​​the nanopillar r7 located at the boundary between the first region 141 and the second region 142 adjacent to the first region 141 in the first direction (X direction) is equal to the cross-sectional area of ​​the nanopillar r8 located at the boundary between the fourth region 144 and the second region 142 adjacent to the fourth region 144 in the second direction (Y direction). Furthermore, the cross-sectional area of ​​the nanopillar r6 located at the boundary between the first region 141 and the third region 143 adjacent to the first region 141 in the second direction (Y direction) is equal to the cross-sectional area of ​​the nanopillar r7 located at the boundary between the fourth region 144 and the third region 143 adjacent to the fourth region 144 in the first direction (X direction).

[0175] In addition, the nanopillars p9 at the four corners of each of the first to fourth regions 141, 142, 143 and 144 (i.e., the points where the four regions intersect each other) have the same cross-sectional area.

[0176] As described above, in the second region 142 and the third region 143 corresponding to the blue pixel B and the red pixel R respectively, the nanopillars NP can be arranged in a four-fold symmetric configuration, and in the first region 141 and the fourth region 144 corresponding to the green pixel G, the nanopillars NP can be arranged in a two-fold symmetric configuration. Furthermore, the first region 141 and the fourth region 144 are rotated 90° relative to each other. This can also be applied to [the following section will refer to] Figure 16 and Figure 17 The example implementation described.

[0177] Figure 15 This is a top view illustrating the arrangement of multiple nanopillars in a dichroic lens array 150 according to another example embodiment.

[0178] The dichroic lens array 150 has a shape corresponding to the pixel arrangement of the Bayer pattern and may include the following quadrant regions, for example, a first region 151 corresponding to the green pixel G, a second region 152 corresponding to the blue pixel B, a third region 153 corresponding to the red pixel R, and a fourth region 154 corresponding to the green pixel G.

[0179] Each region can be equally divided into multiple sub-regions, and nanopillars NP can be arranged at the intersections of the boundaries of the sub-regions. Figure 15 and Figure 14 The difference in the nanostructure arrangement is that an example with 16 sub-regions is shown, and the nanopillars NP are arranged at the grid points dividing the 16 sub-regions, so that the nanopillars NP are arranged at the center point of each region 151, 152, 153 or 154. The nanopillars NP are indicated as s1 to s11 according to their detailed positions in the unit pattern array.

[0180] exist Figure 15 In the example embodiment shown, the cross-sectional area of ​​nanopillar s1 located at the center point of the first region 151 corresponding to the green pixel and nanopillar s4 located at the center point of the fourth region 154 is greater than the cross-sectional area of ​​nanopillar NP located on the outer portion, and is also greater than the cross-sectional area of ​​nanopillar NP arranged on the second region 152 corresponding to the blue pixel and the third region 153 corresponding to the red pixel.

[0181] In the first region 151, the nanopillar s1 with the largest cross-sectional area is located at the center, and nanopillars s10, s5, and s6 with gradually decreasing cross-sectional areas are arranged towards the outer portion. In the fourth region 154, the nanopillar s4 with the largest cross-sectional area is located at the center, and nanopillars s11, s7, and s8 with gradually decreasing cross-sectional areas are arranged towards the outer portion. In the second region 152, nine nanopillars s2 with the same cross-sectional area are arranged in the center, and nanopillars s5 and s8 with a cross-sectional area larger than that of nanopillar s2 are arranged in the outer portion. In the third region 153, nine nanopillars s3 with the same cross-sectional area are arranged in the center, and nanopillars s6 and s7 with a cross-sectional area larger than that of nanopillar s3 are arranged in the outer portion. In the second region 152 and the third region 153, the nanopillars NP in the outer portion are located at the boundary with other regions.

[0182] exist Figure 15 In example embodiments, similar to Figure 14 In the illustrated example embodiment, the nanopillars NP in the second region 142 and the third region 153 can be arranged symmetrically in the first direction (X direction) and the second direction (Y direction), and the nanopillars NP in the first region 151 and the fourth region 154 can be arranged asymmetrically in the first direction (X direction) and the second direction (Y direction). Similarly, the nanopillars p9 at the four corners of each of the first to fourth regions 151, 152, 153 and 154 (i.e., the positions where the four regions are adjacent to each other) have the same cross-sectional area.

[0183] Figure 16 This is a top view illustrating an arrangement of multiple nanopillars in a dichroic lens array 160 according to another example embodiment.

[0184] The dichroic lens array 160 has a shape corresponding to the pixel arrangement of the Bayer pattern and may include the following quadrant regions, for example, a first region 161 corresponding to the green pixel G, a second region 162 corresponding to the blue pixel B, a third region 163 corresponding to the red pixel R, and a fourth region 164 corresponding to the green pixel G.

[0185] Each region can be equally divided into multiple sub-regions, and the nanopillars (NPs) can be arranged within these sub-regions. Similar to... Figure 14 For example, each region in the dichroic lens array 160 is divided into nine sub-regions, except that the nanopillars NP are arranged in each sub-region, rather than at the intersections between the sub-regions. The nanopillars NP are designated t1 to t16 based on their detailed positions within the unit pattern array.

[0186] according to Figure 16 In an example embodiment, the cross-sectional areas of nanopillar t1 located at the center of the first region 161 and nanopillar t4 located at the center of the fourth region 164 can each be larger than the nanopillar NP arranged in the second region 162 and the third region 163 and the nanopillar NP located on the peripheral portion.

[0187] The cross-sectional area of ​​nanopillar t2, located at the center of the second region 162, can be greater than the cross-sectional area of ​​nanopillar t3, located at the center of the third region 163. In the second region 162, the cross-sectional areas of nanopillars t6 and t10, located on the peripheral portions away from the center in the first direction (X direction) and the second direction (Y direction), are greater than the cross-sectional area of ​​nanopillar t2 at the center, and the cross-sectional area of ​​nanopillar t14, located diagonally away from the center, is smaller than the cross-sectional area of ​​nanopillar t2 at the center.

[0188] In the third region 163, the central nanopillar t3 has the smallest cross-sectional area, and the cross-sectional areas of the outer nanopillars t7, t11 and t15 are greater than the cross-sectional area of ​​the central nanopillar t3.

[0189] The nanopillars NP in the second region 162 and the third region 163 can be symmetrically arranged in the first direction (X-direction) and the second direction (Y-direction), and the nanopillars NP in the first region 161 and the fourth region 164 can be asymmetrically arranged in the first direction (X-direction) and the second direction (Y-direction). For example, the nanopillars NP in the second region 162 and the third region 163 corresponding to the blue pixel and the red pixel, respectively, can be arranged in the first direction (X-direction) and the second direction (Y-direction) using the same distribution rule, and the nanopillars NP in the first region 161 and the fourth region 164 corresponding to the green pixel can be arranged in the first direction (X-direction) and the second direction (Y-direction) using different distribution rules.

[0190] In the first region 161, nanopillar t5, adjacent to the center nanopillar t1 in the first direction (X direction), and nanopillar t9, adjacent to the center nanopillar t1 in the second direction (Y direction), have different cross-sectional areas. In the fourth region 164, nanopillar t8, adjacent to the center nanopillar t4 in the first direction (X direction), and nanopillar t12, adjacent to the center nanopillar t4 in the second direction (Y direction), have different cross-sectional areas. Similarly, nanopillar t5, adjacent to the center nanopillar t1 in the first region 161 in the first direction (X direction), and nanopillar t12, adjacent to the center nanopillar t4 in the fourth region 164 in the second direction (Y direction), have the same cross-sectional area, and nanopillar t9, adjacent to the center nanopillar t1 in the first region 161 in the second direction (Y direction), and nanopillar t8, adjacent to the center nanopillar t4 in the fourth region 164 in the first direction (X direction), have the same cross-sectional area. The nanopillars t13 adjacent to the four corners of the first region 161 and the nanopillars t16 adjacent to the four corners of the fourth region 164 have the same cross-sectional area. As described above, the first region 161 and the fourth region 164 are rotated 90° relative to each other.

[0191] In the second region 162, nanopillar t6, which is adjacent to the center nanopillar t2 in the first direction (X direction), and nanopillar t10, which is adjacent to nanopillar t2 in the second direction (Y direction), have the same cross-sectional area. Nanopillar t14, which is adjacent to the four corners of the second region 162, have the same cross-sectional area.

[0192] In the third region 163, nanopillar t7, which is adjacent to the center nanopillar t3 in the first direction (X direction), and nanopillar t11, which is adjacent to nanopillar t3 in the second direction (Y direction), have the same cross-sectional area. Nanopillar t15, which is adjacent to the four corners of the third region 163, have the same cross-sectional area.

[0193] Figure 17 This is a top view illustrating an arrangement of multiple nanopillars in a dichroic lens array 170 according to another example embodiment.

[0194] The dichroic lens array 170 in the image sensor according to the example embodiment can have the simplest structure. A nanopillar NP is arranged in each of the following regions: a first region 171 corresponding to a green pixel, a second region 172 corresponding to a blue pixel, a third region 173 corresponding to a red pixel, and a fourth region 174 corresponding to a green pixel. The nanopillar NPs in the first region 171 and the fourth region 174 have the largest cross-sectional area, the nanopillar NP in the second region 172 has a smaller cross-sectional area than the nanopillar NP in the first region 171, and the nanopillar NP in the third region 173 has the smallest cross-sectional area.

[0195] Figure 18 It is exemplarily shown in including Figure 17 The graph shows the spectral distribution of light incident on the red pixel R, green pixel G, and blue pixel B in an image sensor with a dichroic lens array.

[0196] Figure 19A and Figure 19B This is a cross-sectional view showing a schematic structure of a pixel array 1100a according to another example embodiment, viewed from different sections.

[0197] Pixel array 1100a and Figure 4A and Figure 4B The difference in the example shown is that a color filter 105 is also provided between the sensor substrate 110 and the dichroic lens array 130. The color filter 105 may be arranged between the sensor substrate 110 and the spacer layer 120.

[0198] The pixel array 1100a may include a transparent dielectric layer 121 that can protect the dichroic lens array 130. The dielectric layer 121 may be arranged to cover the space between adjacent nanopillars NP and the upper surface of the nanopillars NP. The dielectric layer 121 may include a material having a refractive index lower than that of the nanopillars NP, for example, the same material as the spacer layer 120.

[0199] The color filter 105 has a filter area that has a shape corresponding to the pixel arrangement in the Bayer pattern. For example... Figure 19A As shown, the green color filter region CF1 and the blue color filter region CF2 are arranged alternately, and as... Figure 19BAs shown, in the next row in the Y direction, the red color filter region CF3 and the green color filter region CF1 are arranged alternately. Because light of different wavelengths is branched into multiple photosensitive units 111, 112, 113, and 114 and converged in the dichroic lens array 130, the configuration of the color filter 105 may not be included in the pixel array when the dichroic lens array 130 sufficiently branches light of different wavelengths. However, the color filter 105 can be additionally configured so that color purity can be supplemented. Since light of a largely separated color is incident on the color filter 105, light loss is not significant.

[0200] Figure 20 and Figure 21 It is a graph showing the spectral distribution of light incident on each of the red pixel R, green pixel G, and blue pixel B of the image sensor, respectively involving the case with and without a color filter.

[0201] Figure 20 The graph shows the curves including Figure 19A and Figure 19B The spectrum of the image sensor, including the color filter shown, and Figure 21 The graph shows that there is no Figure 4A and Figure 4B The spectrum of the image sensor for the color filter shown. Figure 20 and Figure 21 Simulation results for an image sensor with a pixel width of approximately 0.7 μm are shown. When a color filter is set, the total amount of light is reduced, but the color separation performance is improved compared to the comparative example.

[0202] Image sensors including dichroic lens arrays according to the above example embodiments can be applied to various optical devices such as cameras. For example, Figure 22 This is a conceptual diagram of a camera 2000 according to an example embodiment.

[0203] Reference Figure 22A camera 2000 according to an example embodiment may include: an objective lens 2010 configured to form an optical image by focusing light reflected from an object; and an image sensor 1000 configured to convert the optical image formed by the objective lens 2010 into an electrical image signal. The image sensor 1000 includes the dichroic lens array described above. Similarly, the camera 2000 also includes: a processor 2200 configured to process the electrical signals from the image sensor 1000 as image signals. The processor 2200 forms an image by performing operations such as noise reduction and color interpolation on the signals of each color output from the image sensor 1000. The camera 2000 may also include: an infrared (IR) cutoff filter between the image sensor 1000 and the objective lens 2010, a display panel for displaying the image formed by the processor 2200, and a memory for storing the image data formed by the processor 2200. The camera 2000 may be built into a mobile electronic device, such as a mobile phone, a laptop computer, a tablet PC, etc.

[0204] Objective lens 2010 focuses an image of an object onto image sensor 1000, where the object is located outside camera 2000. When image sensor 1000 is precisely positioned on the focal plane of objective lens 2010, light originating from a specific point on the object travels through objective lens 2010 to reach a specific point on image sensor 1000. For example, light originating from a specific point A on the optical axis OX travels through objective lens 2010 and reaches the center of image sensor 1000 on the optical axis OX. Similarly, light originating from any of points B, C, and D located outside the optical axis OX travels through objective lens 2010 across the optical axis OX and reaches a point in the peripheral portion of image sensor 1000. For example, in Figure 22 In the image sensor 1000, light originating from point B above the optical axis OX intersects the optical axis OX and reaches the lower peripheral portion, while light originating from point C below the optical axis OX intersects the optical axis OX and reaches the upper peripheral portion. Similarly, light originating from point D between the optical axis OX and point B reaches the position between the lower peripheral portion and the center of the image sensor 1000.

[0205] Therefore, depending on the distances of points A, B, C, and D from the optical axis OX, light originating from different points A, B, C, and D strikes the image sensor 1000 at different angles of incidence. The angle of incidence of light incident on the image sensor 1000 is typically defined as the principal ray angle (CRA). The principal ray represents the ray that originates from a point on the object and passes through the center of the objective lens 2010 to reach the image sensor 1000, and CRA represents the angle formed by the principal ray relative to the optical axis OX. The CRA of light originating from point A on the optical axis OX is 0°, and the light is incident perpendicularly on the image sensor 1000. As the origin moves further away from the optical axis OX, the CRA increases.

[0206] From the perspective of image sensor 1000, the CRA of light incident on the central portion of image sensor 1000 is 0°, and the CRA of the incident light gradually increases towards the edges of image sensor 1000. For example, the CRA of light starting from each of points B and C and reaching the outermost edge of image sensor 1000 is the largest, while the CRA of light starting from point A and reaching the center of image sensor 1000 is 0°. Similarly, the CRA of light starting from point D and reaching the position between the center and the edge of image sensor 1000 is greater than 0°, but less than the CRA of light starting from each of points B and C.

[0207] Similarly, the aforementioned dichroic lens array can typically be directional. For example, while the dichroic lens array works effectively with respect to light incident within a certain angular range, its color separation performance degrades when the incident angle deviates from this range. Therefore, when the nanopillars of the dichroic lens array have the same arrangement across the entire area of ​​the image sensor 1000, the color separation efficiency is inconsistent across the entire area of ​​the image sensor 1000 and can vary depending on the region of the image sensor 1000. Consequently, the quality of the image provided by the camera 2000 may degrade.

[0208] Therefore, considering the CRA of the incident light, the nanopillars of the dichroic lens array can be designed with different arrangements, the CRA of which varies depending on the position on the image sensor 1000. Figures 23A to 23C This is a top view illustrating variations in the arrangement of nanopillars in a dichroic lens array based on their position on an image sensor, according to an example embodiment. Specifically, Figure 23A The positions of the nanopillars NP, each located at the center of the image sensor 1000, are shown. Figure 23B The positions of the nanopillars NP, each arranged between the center and edge of the image sensor 1000, are shown. Figure 23C The positions of each part at the edge of the image sensor 1000 are shown. Figures 23A to 23CInstead of limiting the nanopillars NP to a certain arrangement, it is provided to conceptually describe the relative changes in the position of the nanopillars NP according to their position on the image sensor 1000.

[0209] like Figures 23A to 23C As shown, from the center of the image sensor 1000 towards the edge, the first to fourth regions of the dichroic lens array are shifted relatively far from their corresponding pixels or photosensitive units. For example, at the center of the image sensor 1000, at the center of the dichroic lens array, or at the center of the sensor substrate, the positions of the first to fourth regions of the dichroic lens array may coincide with the positions of the green, blue, red, and green pixels (or the positions of the corresponding photosensitive units) corresponding to the first to fourth regions of the dichroic lens array. Furthermore, the positions of the first to fourth regions of the dichroic lens array may be further away from the center of the image sensor 1000, away from the center of the dichroic lens array, or away from the center of the sensor substrate from the positions of the green, blue, red, and green pixels (or the positions of the corresponding photosensitive units) corresponding to the first to fourth regions. The degree of shift of the first to fourth regions of the dichroic lens array can be determined based on the CRA of the light incident on the dichroic lens array. Specifically, on the peripheral portion of the image sensor 1000, on the peripheral portion of the dichroic lens array, or on the peripheral portion of the sensor substrate, the first to fourth regions of the dichroic lens array are shifted relative to the first to fourth photosensitive units corresponding to the first to fourth regions in the direction toward the center of the image sensor 1000.

[0210] In the following text, it will be referred to as the central portion of the image sensor 1000; however, since the image sensor 1000, the dichroic lens array, and the sensor substrate face each other, the central portion of the image sensor 1000 may refer to the central portion of the dichroic lens array or the central portion of the sensor substrate. Similarly, the peripheral portion / edge of the image sensor 1000 may refer to the peripheral portion / edge of the dichroic lens array or the peripheral portion / edge of the sensor substrate.

[0211] Figure 24 This is a cross-sectional view showing a schematic structure of pixel array 1100b according to another example embodiment.

[0212] Reference Figure 24Considering the inclusion of the dichroic lens array 230, the pixel array 1100b in the image sensor according to this example embodiment differs from the example embodiment described above. The dichroic lens array 230 includes nanopillars NPs stacked in two stages. The nanopillars NPs may include a first nanopillar NP1 disposed on the spacer layer 120 and a second nanopillar NP2 disposed on the first nanopillar NP1. The second nanopillar NP2 may be displaced relative to the first nanopillar NP1 along the direction of light tilt. For example, when the light incident on the dichroic lens array 230 is tilted from right to left, the second nanopillar NP2 may be displaced to the right relative to the first nanopillar NP1. When the light incident on the dichroic lens array 230 is tilted from left to right, the second nanopillar NP2 may be displaced to the left relative to the first nanopillar NP1.

[0213] In addition, considering the incident at Figure 22 In the CRA of light on the image sensor 1000 shown, the second nanopillar NP2 can be shifted relative to the first nanopillar NP1 towards the center of the image sensor 1000. For example, in the direction from the center portion of the image sensor 1000 to the left edge, the second nanopillar NP2 can be shifted further to the right relative to the first nanopillar NP1, and in the direction from the center portion of the image sensor 1000 to the right edge, the second nanopillar NP2 can be shifted further to the left relative to the first nanopillar NP1.

[0214] Similarly, the third region 233 and the fourth region 234 of the dichroic lens array 230 can be shifted toward the center of the image sensor 1000 relative to their corresponding red pixels (or third photosensitive units) and green pixels (or fourth photosensitive units). For example, in the direction from the center of the image sensor 1000 toward the left edge, the third region 233 and the fourth region 234 of the dichroic lens array 230 can be further shifted to the right relative to their corresponding green pixels and red pixels. The first and second regions on another cross section of the dichroic lens array 230 can also be shifted toward the center of the image sensor 1000 relative to their corresponding green pixels (or first photosensitive units) and blue pixels (or second photosensitive units).

[0215] Specifically, the third region 233 and the fourth region 234 of the dichroic lens array 230 can be shifted so that red light and green light converge at the center of the corresponding third photosensitive unit 113 and the center of the fourth photosensitive unit 114. The shift distance s of the third region 233 and the fourth region 234 of the dichroic lens array 230 can be determined, for example, by the following equation 2.

[0216] [Equation 2]

[0217] In Equation 2, d represents the shortest distance or interval between the lower surface of the dichroic lens array 230 and the upper surface of the sensor substrate 110, and CRA' represents the incident angle of the light incident on the sensor substrate 110. Similarly, CRA' can be determined by the following Equation 3.

[0218] [Equation 3]

[0219] In Equation 3, CRA represents the incident angle of light incident on the dichroic lens array 230, and n represents the refractive index of the material disposed between the dichroic lens array 230 and the sensor substrate 110. Therefore, the shift distance s between the third region 233 and the fourth region 234 of the dichroic lens array 230 and the corresponding pixel can be determined by the incident angle of light incident on the dichroic lens array 230 and the refractive index of the material disposed between the dichroic lens array 230 and the sensor substrate 110. When the color filter 105 and the spacer layer 120 are disposed between the dichroic lens array 230 and the sensor substrate 110, CRA' can be determined based on the incident angle of light incident on the spacer layer 120, the refractive index of the spacer layer 120, the incident angle of light incident on the color filter 105, and the refractive index of the color filter 105.

[0220] Figure 25 This exemplarily illustrates a two-dimensional arrangement applied to Figure 22 A top view of the displacement of nanopillars in the dichroic lens array of the camera's image sensor 1000, and... Figure 26 It includes Figure 25 The image shows a cross-sectional view of the pixel array of the dichroic lens array.

[0221] Reference Figure 25 and Figure 26 At the center C of the image sensor 1000, the first to fourth regions of the dichroic lens array 230 remain unchanged relative to their corresponding pixels (or photosensitive units). Similarly, at the center C of the image sensor 1000, the second nanopillar NP2 remains unchanged relative to the first nanopillar NP1. Furthermore, in the peripheral portion P of the image sensor 1000, the first to fourth regions of the dichroic lens array 230 are shifted toward the center C of the image sensor 1000, and the second nanopillar NP2 is shifted toward the center C of the image sensor 1000 relative to the first nanopillar NP1. Therefore, in Figure 22 In the image sensor 1000 used in the camera 2000, the entire area of ​​the dichroic lens array 230 can be smaller than the entire area of ​​the pixel array 1100b of the image sensor 1000 or the entire area of ​​the sensor substrate 110.

[0222] according to Figure 24In an example embodiment, the color filter 105 is arranged on the sensor substrate 110, but when the dichroic lens array 230 can have sufficient performance at the peripheral portion P of the image sensor 1000, such as Figure 26 As shown, color filter 105 can be omitted.

[0223] Figure 27 It is shown in Figure 26 A perspective view of an exemplary shape of the nanopillars used in the dichroic lens array of an image sensor. (Example image follows) Figure 27 As shown, the lower first nanopillar NP1 and the upper second nanopillar NP2 can be stacked with an offset from each other. The degree of offset is... Figure 27 The deviation is represented by b, and this deviation can increase from the center C of the image sensor 1000 to the peripheral portion P, that is, it increases in the radial direction with increasing distance from the center C. The direction in which the second nanopillar NP2 deviates from the first nanopillar NP1 is from the peripheral portion P to the center C. In particular, the deviation b can be determined such that light is incident on the center of the upper surface of the second nanopillar NP2 and the center of the upper surface of the first nanopillar NP1.

[0224] To fabricate nanopillars NPs with the above configuration, such as Figure 26 As shown, dielectric layer 121 may include: a first dielectric layer 121a disposed on spacer layer 120 to fill the space between first nanopillars NP1 and support second nanopillars NP2; and a second dielectric layer 121b covering the second nanopillars NP2. The first dielectric layer 121a and the second dielectric layer 121b may include materials having a refractive index lower than that of the materials included in the first nanopillars NP1 and the second nanopillars NP2.

[0225] The diagram shows a structure in which nanopillars (NPs) are stacked in two layers, but the embodiments are not limited to this; for example, structures with three or more layers can be used. Figure 28 This is a cross-sectional view showing the structure of a pixel array 1100c according to another example embodiment.

[0226] Reference Figure 28 The pixel array 1100c of the image sensor includes a dichroic lens array 240 having three stacked nanopillars NP. The nanopillars NP may include a first nanopillar NP1 disposed on a spacer layer 120, a second nanopillar NP2 disposed on the first nanopillar NP1, and a third nanopillar NP3 disposed on the second nanopillar NP2. The second nanopillar NP2 is shifted relative to the first nanopillar NP1 toward the center of the image sensor, and the third nanopillar NP3 is shifted relative to the second nanopillar NP2 toward the center of the image sensor.

[0227] Similarly, the fourth region 244 of the dichroic lens array 240 is shifted toward the center of the image sensor relative to the green pixel or its corresponding fourth photosensitive unit 114, and the third region 243 is shifted toward the center of the image sensor relative to the red pixel or its corresponding third photosensitive unit 113.

[0228] Figures 29A to 29C This is an exemplary diagram showing the spectral distribution of light incident on red, green, and blue pixels of an image sensor according to an example embodiment, respectively, and specifically relating to the following cases: without considering changes in the CRA based on the position on the image sensor, considering changes in the CRA and altering the position of the nanopillars, and considering changes in the CRA and configuring the nanopillars in a two-stage configuration. Figures 29A to 29C In the diagram, curve B0 shows the spectral distribution of light incident on the blue pixel when CRA is 0°, curve G0 shows the spectral distribution of light incident on the green pixel when CRA is 0°, and curve R0 shows the spectral distribution of light incident on the red pixel when CRA is 0°. Additionally, curve B26 shows the spectral distribution of light incident on the blue pixel when CRA is 26°, curve Gb26 shows the spectral distribution of light incident on green pixels alternating with blue pixels in the first direction when CRA is 26°, curve Gr26 shows the spectral distribution of light incident on green pixels alternating with red pixels in the first direction when CRA is 26°, and curve R26 shows the spectral distribution of light incident on the red pixel when CRA is 26°.

[0229] like Figure 29A As shown in the curve, when the CRA variation is not considered, the performance of the dichroic lens array degrades relative to light with a CRA of 26°. Additionally, as... Figure 29B As the curves show, the performance of the dichroic lens array is improved relative to light with a CRA of 26° when the nanopillars are displaced based on the change in CRA. Similarly, as Figure 29C As shown in the graph, when the nanopillars are arranged in two stages as the nanopillars are shifted, the performance of the dichroic lens array relative to light with a CRA of 26° is almost further improved to the performance of the dichroic lens array relative to light with a CRA of 0°.

[0230] Figure 30A and Figure 30B This is a top view showing the variation of the linewidth NP of the nanopillar NP according to its position on an image sensor, based on another example embodiment. Figure 30A The linewidth of the nanopillar NP of the dichroic lens array at the center of the image sensor is shown, and Figure 30BThe linewidth of the nanopillar NP' of the dichroic lens array on the peripheral portion of an image sensor is illustrated by way of example. Figure 30B In the example embodiment shown, the nanopillars are shifted relative to the corresponding pixels, and the second nanopillar NP2' is shifted relative to the first nanopillar NP1'. Furthermore, the linewidth of the nanopillar NP' is changed. The change in the linewidth of the nanopillar NP' can be determined according to the CRA using the following equation 4.

[0231] [Equation 4]

[0232] In Equation 4 above, w represents the linewidth of the nanopillar NP' on the periphery of the image sensor, and w0 represents the linewidth of the nanopillar NP at the center of the image sensor. Therefore, the linewidth of the nanopillar NP' can increase towards the periphery of the image sensor. For ease of description, Figure 30B The increase in linewidth of the nanopillars NP′ is exaggerated. Compared to the linewidth at the center of the image sensor, the linewidth of the nanopillars NP′ at the edge of the image sensor can increase by approximately 2.5% to approximately 6.5%.

[0233] Here, the variation in linewidth is obtained by comparing the linewidths of nanopillars located at the same positions within the same region of the first to fourth regions of the dichroic lens array. For example, the linewidth of a nanopillar arranged at the center of the first region of the dichroic lens array in the center of the image sensor can be compared with the linewidth of a nanopillar arranged at the center of the first region of the dichroic lens array in the peripheral portion of the image sensor. Nanopillars arranged in different regions of the dichroic lens array or at different positions within the same region are not compared with each other.

[0234] Figure 31 This is an exemplary graph showing the spectral distribution of light incident on the red, green, and blue pixels of the image sensor in Figure 30, respectively. When... Figure 31 The curve and Figure 29C When comparing the curves, the performance of the dichroic lens array relative to light with a CRA of 26° is further improved when the linewidth of the nanopillars is further changed with the shifting of the nanopillars and the two-stage configuration of the nanopillars.

[0235] Figure 32 and Figure 33 This is a top view illustrating various shapes of nanopillars used in a dichroic lens array according to another example embodiment. (As shown) Figure 32 and Figure 33 As shown, nanopillars of various shapes can be arranged after displacement. For example, such as... Figure 32 As shown, nanopillars NP1 and NP2, with rectangular cross-sections and stacked in two levels, can be displaced from each other. Similarly, as... Figure 33 As shown, the bi-level stacked ring nanopillars NPa, the bi-level stacked circular nanopillars NPb, and the bi-level stacked rectangular nanopillars NPc can be shifted relative to each other in each region of the dichroic lens array.

[0236] Figure 34 and Figure 35 This is a cross-sectional view illustrating nanopillars of various cross-sectional shapes used in a dichroic lens array according to another example embodiment. For example... Figure 34 and Figure 35 As shown, the side surfaces of nanopillars can be formed as inclined surfaces. For example, in Figure 34 In the dichroic lens array 250 shown, the side surfaces of the nanopillars are tilted, allowing the cross-sectional area of ​​the nanopillars to increase from the bottom to the top. Therefore, the nanopillars in the dichroic lens array 250 can have a trapezoidal cross-section with the upper surface larger than the lower surface. For example, in... Figure 35 In the dichroic lens array 260 shown, the side surfaces of the nanopillars are tilted so that the cross-sectional area of ​​the nanopillars can decrease from the bottom to the top. Therefore, the nanopillars in the dichroic lens array 260 can have a trapezoidal cross-section with a lower surface larger than the upper surface.

[0237] The tilt angles of the tilted surfaces of the nanopillars arranged in the first to fourth regions of the dichroic lens array 250 or 260 can be different from each other. Furthermore, the tilt angle of the tilted surface in the nanopillar positioned corresponding to the center of the image sensor can be different from the tilt angle of the tilted surface of the nanopillar positioned corresponding to the peripheral portion of the image sensor.

[0238] Figure 36 This is a cross-sectional view showing a schematic structure of a pixel array 1100d according to another example embodiment.

[0239] Reference Figure 36 The pixel array 1100d of the image sensor may include a first dichroic lens array 280 and a second dichroic lens array 290 with multiple nanopillars arranged differently. The second dichroic lens array 290 may be arranged on the first dichroic lens array 280. The nanopillars of the second dichroic lens array 290 are not shifted relative to the nanopillars of the first dichroic lens array 280, and the arrangement of the nanopillars of the second dichroic lens array 290 may be different from the arrangement of the nanopillars of the first dichroic lens array 280.

[0240] The arrangement of the multiple nanopillars in the first dichroic lens array 280 and the second dichroic lens array 290 can be determined by considering the CRA of the light incident on the image sensor. For example, the arrangement of the multiple nanopillars in the first dichroic lens array 280 and the second dichroic lens array 290 can be designed such that, regardless of the incident angle, the light incident on the sensor substrate 110 after passing through the second dichroic lens array 290 and the first dichroic lens array 280 consecutively can be more effectively separated and focused.

[0241] As described above, color separation efficiency can be improved by using a dichroic lens array in which nanopillars of sub-wavelengths are arranged according to a predetermined rule, and image sensors employing dichroic lens arrays can have improved performance. The detailed shapes are merely examples and can be modified and combined in various ways. For example, wavelength bands of visible light are shown. However, embodiments are not limited to this, and different wavelength bands can be separated according to the arrangement rules of the nanopillars. Similarly, the number of nanopillars set in each of the multiple regions of the dichroic lens array can be varied. As an example, the pixel arrangement in an image sensor is described as a Bayer pattern, but embodiments are not limited to the above examples. For example, red pixels, green pixels, and blue pixels can be arranged repeatedly in the aforementioned order in one direction, or... Figure 2B The CYGM type arrangement shown or Figure 2C The RGBW arrangement shown can also be used. Similarly, one or more example embodiments can be applied to pixel arrangement patterns, where multiple unit pixels, each including pixels of two or more colors, are repeatedly arranged. The color separation lens array can employ a region division suitable for this pixel arrangement, and the nanopillar arrangement rule can be selected according to the region.

[0242] The above describes configuring a dichroic lens array by arranging nanopillars formed in a definable shape; however, dichroic lens arrays can be configured as free patterns of various definable shapes. For example, Figure 37 This is a conceptual diagram illustrating the structure and operation of a dichroic lens array 330 according to another example embodiment.

[0243] Reference Figure 37 The unit pattern array of the dichroic lens array 330 may include first to fourth regions 331, 332, 333, and 334, each of which includes a first to a fourth fine structure distinct from each other. For example, the first region 331 may have a first pattern, the second region 332 may have a second pattern different from the first pattern, the third region 333 may have a third pattern different from the first and second patterns, and the fourth region 334 may have a fourth pattern different from the first to the third patterns.

[0244] The first to fourth regions 331, 332, 333, and 334 can be arranged on the same plane, for example, in a 2×2 configuration. Therefore, the first region 331 and the second region 332 can be adjacent to each other in a first direction, and the third region 333 and the fourth region 334 can be adjacent to each other in the first direction. Additionally, the first region 331 and the third region 333 are adjacent to each other in a second direction perpendicular to the first direction, and the second region 332 and the fourth region 334 are adjacent to each other in the second direction. The first region 331 and the fourth region 334 are arranged diagonally, and the second region 332 and the third region 333 are arranged along another diagonal direction.

[0245] According to an example embodiment, the first to fourth patterns can be determined such that, in the incident light incident on the dichroic lens array 330, light of the first wavelength λ1 is vertically focused on the first target region R1 facing the first region 331, light of the second wavelength λ2 is vertically focused on the second target region R2 facing the second region 332, light of the third wavelength λ3 is vertically focused on the third target region R3 facing the third region 333, and light of the fourth wavelength λ4 is vertically focused on the fourth target region R4 facing the fourth region 334. The first to fourth patterns in the first to fourth regions 331, 332, 333, and 334 can be designed differently depending on the pixel arrangement and color characteristics of the image sensor to which the dichroic lens array 330 is applied.

[0246] For example, when the dichroic lens array 330 is applied Figure 2A In the Bayer pattern type image sensor shown, the first region 331 and the fourth region 334 face the green pixel G, the second region 332 faces the blue pixel B, and the third region 333 faces the red pixel R. Furthermore, the light of the first wavelength λ1 and the fourth wavelength λ4 can be green light, the light of the second wavelength λ2 can be blue light, and the light of the third wavelength λ3 can be red light.

[0247] Figure 38 This is a top view illustrating an example of a unit pattern array of a dichroic lens array applicable to Bayer pattern type image sensors. (See reference...) Figure 38The first region 331 facing the green pixel G includes a first dielectric 331a forming a first pattern and a second dielectric 331b filling the space in the first dielectric 331a. The second region 332 facing the blue pixel B includes a first dielectric 332a forming a second pattern and a second dielectric 332b filling the space in the first dielectric 332a. The third region 333 facing the red pixel R includes a first dielectric 333a forming a third pattern and a second dielectric 333b filling the space in the first dielectric 333a. The fourth region 334 facing the green pixel G includes a first dielectric 334a forming a fourth pattern and a second dielectric 334b ​​filling the space in the first dielectric 334a.

[0248] Both region 331 and region 334 can have the same shape because they both face the green pixels, but their rotation directions can be different from each other. For example, as Figure 38 As shown, the pattern of the fourth region 334 can be obtained by rotating the pattern of the first region 331 by 90°. The aforementioned differences can be determined based on the arrangement of adjacent pixels. Figure 38 In this case, the blue pixel B is arranged to the left and right of the green pixel G facing the first region 331, and the red pixel R is arranged to the left and right of the green pixel G facing the fourth region 334. Therefore, due to this difference, patterns with the same shape but rotated in different directions can be obtained.

[0249] The first dielectrics 331a, 332a, 333a, and 334a may comprise the same material, and the second dielectrics 331b, 332b, 333b, and 334b ​​may comprise the same material. For example, the first dielectrics 331a, 332a, 333a, and 334a may comprise dielectric materials having high refractive index and low absorption in the visible light band, such as titanium oxide (TiO2), gallium nitride (GaN), silicon trinitride (SiN3), zinc sulfide (ZnS), zinc selenide (ZnSe), silicon nitride (Si3N4), etc., and the second dielectrics 331b, 332b, 333b, and 334b ​​may comprise dielectric materials having low refractive index and low absorption in the visible light band, such as air, silicon oxide (SiO2), siloxane spin-coated glass (SOG), etc. When the second dielectrics 331b, 332b, 333b, and 334b ​​comprise air, they can be easily obtained by etching the first dielectrics 331a, 332a, 333a, and 334a. Figure 38 The dichroic lens array 330 shown is shown.

[0250] Figure 39 It is intercepted along line A-A' (X direction). Figure 38 A cross-sectional view of the unit pattern array, and Figure 40It is intercepted along line B-B' (Y direction). Figure 38 A cross-sectional view of a unit pattern array.

[0251] Reference Figure 39 and Figure 40 The first dielectrics 331a, 332a, 333a and 334a and the second dielectrics 331b, 332b, 333b and 334b ​​may extend parallel to each other in the vertical direction. Figure 39 and Figure 40 The vertical cross-sections shown are exemplary, and the shapes of the vertical cross-sections in the first to fourth regions 331, 332, 333, and 334 can vary depending on the positions of lines A-A' and B-B'. For example, since line AA' moves along the Y direction, Figure 39 The shape of the vertical cross-section shown changes, and because line BB′ moves along the X direction, therefore... Figure 40 The shape of the vertical cross-section shown changes. Regardless of the change in the shape of the vertical cross-section, the first dielectrics 331a, 332a, 333a and 334a and the second dielectrics 331b, 332b, 333b and 334b ​​can coexist on each vertical cross-section of the first region to the fourth region 331, 332, 333 and 334.

[0252] Figure 41 It shows that it includes multiple Figure 38 A top view of an example arrangement of the dichroic lens array 330, including the unit pattern array. (See attached image.) Figure 41 As shown, the dichroic lens array 330 may have one of the following features: Figure 38 The structure shown is a repeating and two-dimensional arrangement of a 2×2 unit pattern array.

[0253] In the dichroic lens array 330 applied to a Bayer pattern type image sensor, the first to fourth patterns of the first to fourth regions 331, 332, 333, and 334 can have predetermined rules. For example, Figure 42A It is shown Figure 38 An example diagram of the pattern of the first region 331 in the unit pattern array, and Figure 42B This is a diagram showing the pixel corresponding to the first region 331 and the surrounding pixels in the image sensor. (Refer to...) Figure 42BBlue pixels B are arranged to the left and right of green pixels G corresponding to the first region 331, and red pixels R are arranged above and below green pixels G. Green pixels corresponding to the fourth region 334 are arranged diagonally opposite to green pixels G corresponding to the first region 331. Therefore, to achieve the desired optical effect, in the light transmitted through the first region 331, blue light travels towards the left and right sides of the first region 331, while red light travels towards the top and bottom of the first region 331, and the first pattern of the first region 331 can have double symmetry. For example, as... Figure 42A As shown, the first pattern of the first region 331 can be symmetrical about the first axis (I) in the Y direction and simultaneously about the second axis (II) in the X direction.

[0254] Figure 43A This is an example shown Figure 38 The shape of the second region 332 in the unit pattern array, and Figure 43B This is a diagram showing the pixels corresponding to the second region 332 in the image sensor and the surrounding pixels. (Refer to...) Figure 43B Green pixels G are arranged to the left and right, as well as above and below, the blue pixels B corresponding to the second region 332. Additionally, red pixels R are arranged along two intersecting diagonal directions. Therefore, to achieve the desired optical effect, in the light transmitted through the second region 332, green light travels along the left and right, and above and below, while red light travels along the diagonal directions of the second region 332. The second pattern of the second region 332 can thus possess fourfold symmetry. For example, as... Figure 43A As shown, the second pattern of the second region 332 can be symmetrical about the first axis (I) in the Y direction, about the second axis (II) in the X direction, and about the third axis (III) and the fourth axis (IV) in the diagonal directions.

[0255] Figure 44A This is an example shown Figure 38 The shape of the third region 333 in the unit pattern array, and Figure 44B This is a diagram showing the pixels corresponding to the third region 333 in the image sensor and the surrounding pixels. (Refer to...) Figure 44B Green pixels G are arranged to the left and right, as well as above and below, the red pixels R corresponding to the third region 333. Additionally, blue pixels B are arranged along two intersecting diagonal directions. Therefore, to achieve the desired optical effect, in the light transmitted through the third region 333, green light travels along the left and right, and above and below, while blue light travels along the diagonal directions of the third region 333. The third pattern of the third region 333 can thus possess fourfold symmetry. For example, as... Figure 44AAs shown, the third pattern of the third region 333 can be symmetrical about the first axis (I) in the Y direction, about the second axis (II) in the X direction, and about the third axis (III) and the fourth axis (IV) in the diagonal direction.

[0256] Figure 45A This is an example shown Figure 38 The shape of the fourth region 334 in the unit pattern array, and Figure 45B This is a diagram showing the pixels corresponding to the fourth region 334 in the image sensor and the surrounding pixels. (Refer to...) Figure 45B Red pixels R are arranged to the left and right of green pixels G corresponding to the fourth region 334, and blue pixels B are arranged above and below green pixels G. Green pixels corresponding to the first region 331 are arranged diagonally, but... Figure 45B Not shown in the diagram. Therefore, to achieve the desired optical effect, in the light transmitted through the fourth region 334, red light travels towards the left and right sides of the fourth region 334, while blue light travels towards the top and bottom of the fourth region 334, and the fourth pattern of the fourth region 334 can have double symmetry. For example, as... Figure 45A As shown, the fourth pattern in the fourth region 334 can be symmetrical about the first axis (I) in the Y direction and simultaneously about the second axis (II) in the X direction. Similarly, Figure 45B The pixel arrangement shown is Figure 42B The pixel arrangement shown is rotated by 90°. Therefore, the fourth pattern in the fourth region 334 can have the same shape as the first pattern in the first region 331 rotated by 90°.

[0257] In the dichroic lens array 330 applied to a Bayer pattern type image sensor, as another rule for the first to fourth patterns of the first to fourth regions 331, 332, 333, and 334, the first to fourth color regions 331, 332, 333, and 334 can be designed such that the blue, green, and red light that has passed through the dichroic lens array 330 can have a predetermined target phase distribution. For example, the first to fourth patterns of the first to fourth regions 331, 332, 333, and 334 can be determined such that a phase is formed that causes the blue light transmitted through the dichroic lens array 330 to travel toward and converge at the position of the blue pixel B corresponding to the second region 332, instead of traveling to the position corresponding to the fourth region 334 and the first region 331 adjacent to the second region 332.

[0258] Similarly, the first to fourth patterns of the first to fourth regions 331, 332, 333 and 334 can be determined such that a phase is formed that causes the green light transmitted through the dichroic lens array 330 to travel toward and converge at the position of the green pixel G corresponding to the first region 331 and the fourth region 334, instead of traveling to the position corresponding to the third region 333 and the second region 332 adjacent to the first region 331 and the fourth region 334.

[0259] Similarly, the first to fourth patterns of the first to fourth regions 331, 332, 333 and 334 can be determined such that the following phase is formed, which causes the red light transmitted through the dichroic lens array 330 to travel toward and converge at the position of the red pixel R corresponding to the third region 333, instead of traveling to the position corresponding to the fourth region 334 and the first region 331 adjacent to the third region 333.

[0260] The target phase distribution achieved by the dichroic lens array 330 can be the same as described above regarding the dichroic lens array 130, therefore its detailed description is omitted. The dichroic lens array 330 can perform the same operation as described above based on the first to fourth patterns of the first to fourth regions 331, 332, 333, and 334. Figures 6A to 6D , Figures 7A to 7D as well as Figures 8A to 8D The same operation as described above.

[0261] The pattern of the dichroic lens array 330 that satisfies the above phase distribution can be automatically designed through various types of computer simulation. For example, the patterns of the first to fourth regions 331, 332, 333 and 334 can be optimized through natural heuristic algorithms such as genetic algorithms, particle swarm optimization algorithms, ant colony optimization algorithms, or inverse design based on adjoint optimization algorithms.

[0262] The first to fourth patterns of regions 331, 332, 333, and 334 can be optimized during the design of the dichroic lens array 330 while evaluating the performance of candidate dichroic lens arrays based on evaluation factors such as dichroic spectrum, optical efficiency, and signal-to-noise ratio. For example, the first to fourth patterns of regions 331, 332, 333, and 334 can be optimized by pre-determining a target value for each evaluation element and reducing the sum of differences from the target values ​​of multiple evaluation elements. Performance can be indexed for each evaluation element, and the first to fourth patterns of regions 331, 332, 333, and 334 can be optimized to maximize the values ​​representing performance.

[0263] Figure 38The dichroic lens array 330 shown is an example. Furthermore, various types of dichroic lens arrays 330 can be obtained through the above-described optimized design based on the following: the size and thickness of the first to fourth regions 331, 332, 333, and 334 in the dichroic lens array 330; the spacing and color characteristics between pixels in the image sensor to which the dichroic lens array 330 is applied; the distance between the dichroic lens array 330 and the image sensor; the incident angle of the incident light, etc. For example, Figure 46 This is an exemplary top view showing the shape of a unit pattern array that can be applied to a Bayer pattern type image sensor dichroic lens array according to another example embodiment, and Figure 47 This is a top view exemplarily illustrating the shape of a unit pattern array in a dichroic lens array of an image sensor of the Bayer pattern type, according to another example embodiment.

[0264] Figure 38 Each of the first to fourth regions 331, 332, 333, and 334 shown is optimized in a 14×14 rectangular arrangement in digital binary form, and Figure 46 Each of the first to fourth regions 331, 332, 333, and 334 shown is optimized in a 16×16 rectangular arrangement in digitized binary form. Therefore, Figure 38 The unit pattern array of the dichroic lens array 330 shown has a 28×28 rectangular arrangement, and Figure 46 The unit pattern array of the dichroic lens array shown has a 32×32 rectangular arrangement. In this case, as line AA′ moves in the Y direction or as line BB′ moves in the X direction, Figure 39 and Figure 40 The shapes of the vertical cross-sections of the first to fourth regions 331, 332, 333 and 334 shown change discontinuously.

[0265] Figure 47 Each of the first to fourth regions 331, 332, 333, and 334 shown can be optimized as a continuous curve without digitization. In this case, as line AA′ moves in the Y direction or as line BB′ moves in the X direction, Figure 39 and Figure 40 The shapes of the vertical cross-sections of the first to fourth regions 331, 332, 333 and 334 shown change continuously.

[0266] Figure 48A and Figure 48B These are cross-sectional views of the pixel array in a pixel sensor employing a dichroic lens array 330, viewed from different cross-sections. (Refer to...) Figure 48A and Figure 48BThe pixel array 1100e of the image sensor may include a sensor substrate 110, a spacer layer 120, and a dichroic lens array 330. A first region 331 of the dichroic lens array 330 is correspondingly disposed to a first photosensitive unit 111 of the sensor substrate 110, and a second region 332 of the dichroic lens array 330 is correspondingly disposed to a second photosensitive unit 112 of the sensor substrate 110. A third region 333 of the dichroic lens array 330 is correspondingly disposed to a third photosensitive unit 113 of the sensor substrate 110, and a fourth region 334 of the dichroic lens array 330 is correspondingly disposed to a fourth photosensitive unit 114 of the sensor substrate 110. A color filter 105 may be further arranged between the sensor substrate 110 and the spacer layer 120. As described above, the thickness of the spacer layer 120 is determined by a predetermined propagation distance requirement, which is configured such that light of different wavelengths separated by the dichroic lens array 330 converges onto the corresponding photosensitive units.

[0267] The pattern described above for the dichroic lens array 330 is an example and can be modified in various ways. For example, other wavelength bands besides the visible light band can be separated based on other pattern shapes of the first to fourth regions 331, 332, 333, and 334 in the dichroic lens array 330. Similarly, the number of dichroic patterns in a unit pattern array of the dichroic lens array 330 can vary depending on the application example of the dichroic lens array 330. As an example, the pixel arrangement in an image sensor is described as a Bayer pattern, but it can be applied to... Figure 2B and Figure 2C The pixel arrangement is shown. A pattern suitable for the pixel arrangement can be determined by using the regions of the dichroic lens array 330 and applying the optimization method described above to each region.

[0268] Figure 49 This is a top view showing an example of a dichroic lens array 340 according to another exemplary embodiment. (Refer to...) Figure 49 The dichroic pattern array 340 may include multiple unit pattern arrays, indicated by thick lines, wherein the unit pattern arrays are arranged in two dimensions. Each unit pattern array may include first to fourth regions 341, 342, 343, and 344 arranged in a 2×2 dimensional shape. Throughout the arrangement of the dichroic lens array 340, the first region 341 and the second region 342 are arranged alternately in a row in the lateral direction, and the third region 343 and the fourth region 344 are arranged alternately in another row in the lateral direction. Similarly, the first region 341 and the third region 343 are arranged alternately in a column in the longitudinal direction, and the second region 342 and the fourth region 344 are arranged alternately in another column in the longitudinal direction.

[0269] Additionally, the dichroic lens array 340 may further include a plurality of first to fourth dichroic patterns 341, 342, 343, and 344 not included in any unit pattern array. The plurality of first to fourth dichroic patterns 341, 342, 343, and 344 not included in any unit pattern array may be arranged along the edges of the dichroic lens array 340. For example, a plurality of second regions 342 and a plurality of fourth regions 344 forming a column are additionally arranged on the left edge of the dichroic lens array 340, a plurality of first regions 341 and a plurality of third regions 343 forming a column are additionally arranged on the right edge of the dichroic lens array 340, a plurality of third regions 343 and a plurality of fourth regions 344 forming a row are additionally arranged on the upper edge of the dichroic lens array 340, and a plurality of first regions 341 and a plurality of second regions 342 forming a row are additionally arranged on the lower edge of the dichroic lens array 340.

[0270] Figure 50 The cut-off line C-C' is shown. Figure 49 The vertical cross-section of the dichroic lens array 340 is shown. (Refer to...) Figure 50 The dichroic lens array 340 may include a plurality of first regions 341 and a plurality of second regions 342 that project horizontally relative to the edge of the sensor substrate 110 and do not face any photosensitive unit in the sensor substrate 110 in the vertical direction. (Not included) Figure 50 All of the first to fourth regions 341, 342, 343 and 344 in any unit pattern array protrude horizontally relative to the edge of the sensor substrate 110 and do not face any photosensitive unit in the vertical direction.

[0271] As referenced above Figures 6A to 6D , Figures 7A to 7D as well as Figures 8A to 8D The photosensitive unit can receive light not only from its corresponding region in the dichroic lens array 340 in the vertical direction, but also from multiple other peripheral regions. When the first to fourth regions 341, 342, 343, and 344 are not added along the edge of the dichroic lens array 340, the intensity of light incident on the photosensitive unit arranged along the edge of the sensor substrate 110 can be reduced, and the color purity can also be decreased. By additionally arranging the first to fourth regions 341, 342, 343, and 344 along the edge of the dichroic lens array 340, light can be incident on the photosensitive unit arranged along the edge of the sensor substrate 110, similar to the photosensitive unit arranged inside the sensor substrate 110. Figure 49 and Figure 50 The example embodiments shown can also be applied to dichroic lens arrays that include the arrangement of the above-described multiple nanopillars.

[0272] When the example embodiments are applied Figure 22In the camera 2000 shown, considering the CRA of the incident light, the multiple unit pattern arrays in the dichroic lens array can be designed with different shapes. For example, Figure 51 This is a top view illustrating an example arrangement of a plurality of unit pattern arrays in a dichroic lens array 350 according to another exemplary embodiment. (Refer to...) Figure 51 The dichroic lens array 350 may include multiple unit pattern arrays 350a, 350b, 350c, 350d, 350e, 350f, 350g, 350h, and 350i, each with a different pattern depending on its position on the image sensor. For example, considering the CRA of incident light incident on the image sensor at positions where unit pattern arrays 350a to 350i are arranged, the pattern of the first to fourth regions in each unit pattern array 350a to 350i can be determined using the aforementioned optimization algorithm. When the CRA of light incident on the center of the image sensor is 0 and gradually increases towards the edges of the image sensor, the pattern of the first to fourth regions in each unit pattern array 350a to 350i can gradually change from the unit pattern array 350e at the center of the image sensor towards the unit pattern arrays 350a, 350b, 350c, 350d, 350f, 350g, 350h, and 350i arranged at the edges of the image sensor.

[0273] Similarly, to achieve consistent color separation efficiency without considering changes in the CRA of the incident light, which varies depending on its position on the image sensor, two different dichroic lens arrays can be stacked into a two-layer structure. For example, Figure 52 This is a cross-sectional view illustrating a schematic structure of a pixel array 1100f in an image sensor according to another example embodiment. (Refer to...) Figure 52 The pixel array 1100f of the image sensor may include a first dichroic lens array 360 on the spacer layer 120 and a second dichroic lens array 370 on the first dichroic lens array 360.

[0274] The first dichroic lens array 360 may include a first region 361 arranged vertically facing the first photosensitive unit 111 and a second region 362 arranged vertically facing the second photosensitive unit 112. Figure 52The cross-sectional view only shows the first region 361 and the second region 362, but the first dichroic lens array 360 may also include a third region and a fourth region in another cross-section. The second dichroic lens array 370 may include a first region 371 arranged vertically facing the first photosensitive unit 111 and a second region 372 arranged vertically facing the second photosensitive unit 112. Therefore, the first region 361 and the second region 362 of the first dichroic lens array 360 may be arranged to face the first region 371 and the second region 372 of the second dichroic lens array 370, respectively, in the vertical direction. Similarly, the second dichroic lens array 370 may further include a third region and a fourth region.

[0275] The first region 361 and the second region 362 of the first dichroic lens array 360 may have different patterns, and the first region 371 and the second region 372 of the second dichroic lens array 370 may also have different patterns. Similarly, the first region 361 of the first dichroic lens array 360 may have a pattern different from that of the first region 371 and the second region 372 of the second dichroic lens array 370, and the second region 362 of the first dichroic lens array 360 may have a pattern different from that of the first region 371 and the second region 372 of the second dichroic lens array 370.

[0276] In the above structure, the patterns of the second dichroic lens array 370 and the first dichroic lens array 360 can be designed such that light incident on the sensor substrate 110 after passing successively through the second dichroic lens array 370 and the first dichroic lens array 360 can be more effectively separated into colors. For example, the second dichroic lens array 370 can have a shape that varies depending on its position on the image sensor, and can change the direction of travel of the incident light to be almost parallel to the surface normal of the first dichroic lens array 360. In this case, the pattern of the first dichroic lens array 360 can be consistent regardless of its position on the image sensor. Similarly, the patterns of the first dichroic lens array 360 and the second dichroic lens array 370 can be shifted relative to each other in the direction of light propagation.

[0277] In the image sensor according to the above example embodiments, light loss caused by the color filter occurs very little, and sufficient light intensity can be provided to the pixels even when the pixel size is reduced. Therefore, it is possible to manufacture ultra-high resolution, ultra-small size, and high sensitivity image sensors with hundreds of millions or more pixels. Such ultra-high resolution, ultra-small size, and high sensitivity image sensors can be used in a variety of high-performance optical devices or high-performance electronic devices. For example, electronic devices may include, but are not limited to, smartphones, mobile phones, cellular phones, personal digital assistants (PDAs), laptops, personal computers (PCs), various portable devices, electronic devices, surveillance cameras, medical cameras, automobiles, the Internet of Things (IoT), and other mobile or non-mobile computing devices.

[0278] Figure 53 This is a block diagram of an electronic device including an image sensor according to one or more example embodiments. The electronic device includes an image sensor 1000, a processor 2200, a memory 2300, a display device 2400, and a bus 2500. The image sensor 1000 acquires image information about external objects under the control of the processor 2200 and provides the image information to the processor 2200. The processor 2200 stores the image information provided from the image sensor 1000 in the memory 2300 via the bus 2500 and outputs the image information stored in the memory 2300 to the display device 2400 to display the image information to the user. Similarly, the processor 2200 can perform various image processing on the image information provided from the image sensor 1000.

[0279] Figures 54 to 64 The diagram illustrates various examples of electronic devices employing image sensors according to one or more example embodiments.

[0280] The image sensor according to the example embodiment can be applied to various multimedia devices with image capture capabilities. For example, the image sensor can be applied to... Figure 54 The camera shown is 2000. Camera 2000 can be a digital camera or a digital camcorder.

[0281] Reference Figure 55 The camera 2000 may include an imaging unit 2100, an image sensor 1000, and a processor 2200.

[0282] Imaging unit 2100 forms an optical image by focusing light reflected from object OBJ. Imaging unit 2100 may include objective lens 2010, lens driver 2120, aperture stop 2130, and aperture stop driver 2140. For ease of illustration, Figure 55Only one lens is shown, but objective lens 2010 can actually include multiple lenses of different sizes and shapes. Lens driver 2120 can communicate with processor 2200 about focus detection information and can adjust the position of objective lens 2010 based on control signals provided from processor 2200. Lens driver 2120 can move objective lens 2010 to adjust the distance between objective lens 2010 and object OBJ, or can adjust the position of separate lenses within objective lens 2010. When lens driver 2120 drives objective lens 2010, the focus of object OBJ can be adjusted. Camera 2000 may have autofocus functionality.

[0283] The aperture stop driver 2140 can communicate with the processor 2200 about light intensity information and can adjust the aperture stop 2130 according to control signals provided from the processor 2200. For example, the aperture stop driver 2140 can increase or decrease the aperture of the aperture stop 2130 according to the amount of light entering the camera 2000 through the objective lens 2010, and can adjust the opening time of the aperture stop 2130.

[0284] Image sensor 1000 can generate an electrical image signal based on the intensity of incident light. Image sensor 1000 may include a pixel array 1100, a timing controller 1010, and an output circuit 1030. Image sensor 1000 may further include... Figure 1 The line decoder is shown. Light that has passed through objective lens 2010 and aperture stop 2130 can form an image of object OBJ on the light-receiving surface of pixel array 1100. Pixel array 1100 can be a CCD or CMOS for converting optical signals into electrical signals. Pixel array 1100 may include additional pixels for performing autofocus (AF) or distance measurement functions. Similarly, pixel array 1100 may include the dichroic lens array described above.

[0285] The processor 2200 can control the overall operation of the camera 2000 and can have image processing functions. For example, the processor 2200 can provide control signals for operating elements to the lens driver 2120, aperture stop driver 2140, timing controller 1010, etc.

[0286] The image sensor according to the example embodiment can be applied to Figure 56 The mobile phone or smartphone shown is 3000. Figure 57 The tablet or smart tablet 3100 shown Figure 58 The laptop computer 3200 shown Figure 59The example shown is a television or smart TV 3300, etc. For example, a smartphone 3000 or a smart tablet 3100 may include multiple high-resolution cameras, each including a high-resolution image sensor. Depth information of objects in the image can be extracted, the image can be adjusted out of focus, or objects in the image can be automatically identified by using the high-resolution cameras.

[0287] Similarly, image sensors can be applied to Figure 60 The smart refrigerator 3400 shown Figure 61 The surveillance camera 3500 shown Figure 62 The robot 3600 shown Figure 63 Examples include the medical camera 3700. For instance, the smart refrigerator 3400 can automatically identify food in the refrigerator using image sensors and can notify the user of the presence of certain foods, the types of food put in or taken out, etc., via a smartphone. Similarly, the surveillance camera 3500 can provide ultra-high-resolution images and allow users to identify objects or people in images even in dark environments using high sensitivity. The robot 3600 can be deployed to disaster or industrial sites that are not directly accessible to humans to provide users with high-resolution images. The medical camera 3700 can provide high-resolution images for diagnosis or surgery and can dynamically adjust the field of view.

[0288] Similarly, image sensors can be like Figure 64 The illustration applies to vehicle 3800. Vehicle 3800 may include a plurality of vehicle cameras 3810, 3820, 3830, and 3840 arranged in various locations, and each of the vehicle cameras 3810, 3820, 3830, and 3840 may include an image sensor according to an example embodiment. Vehicle 3800 can provide the driver with various information about the interior or periphery of vehicle 3800 by using the plurality of vehicle cameras 3810, 3820, 3830, and 3840, and can provide the driver with information needed for autonomous driving by automatically identifying objects or people in the images.

[0289] Although an image sensor including a dichroic lens array and an electronic device including the image sensor have been specifically shown and described with reference to exemplary embodiments, those skilled in the art will understand that various changes in form and detail may be made in the exemplary embodiments without departing from the spirit and scope defined by the appended claims. The exemplary embodiments should be considered only in the sense of the description and not for limiting purposes. Therefore, the scope of this disclosure is not limited by the detailed description thereof, but by the appended claims, and all differences within the scope shall be construed as included in this disclosure.

[0290] It should be understood that the exemplary embodiments described herein should be considered descriptive only and not for limiting purposes. The description of features or aspects in each exemplary embodiment should typically be interpreted as other similar features or aspects that may be used in other embodiments. Although exemplary embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the claims.

Claims

1. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; as well as A dichroic lens array is disposed above the sensor substrate. The dichroic lens array includes multiple first regions and multiple second regions. The multiple first regions correspond to multiple first photosensitive units and have a first fine structure, and the multiple second regions correspond to multiple second photosensitive units and have a second fine structure different from the first fine structure. The first fine structure and the second fine structure are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light on the plurality of first photosensitive units, and focus the separated second wavelength of light on the plurality of second photosensitive units. Specifically, the positions of multiple first regions and multiple second regions at the center of the dichroic lens array coincide with the positions of multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions. Furthermore, the positions of the multiple first regions and multiple second regions on the peripheral portion of the dichroic lens array are shifted relative to the multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions towards the center of the dichroic lens array. Wherein, the displacement distance of the plurality of first regions and the plurality of second regions on the peripheral portion of the dichroic lens array relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions respectively satisfies: ， Where d is the shortest distance between the lower surface of the dichroic lens array and the upper surface of the sensor substrate, and CRA' is the incident angle of the light incident on the sensor substrate.

2. The image sensor according to claim 1, wherein, The degree of displacement of the plurality of first regions and the plurality of second regions on the peripheral portion of the dichroic lens array relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions increases with the increase of the distance from the center of the dichroic lens array.

3. The image sensor according to claim 1, wherein, The first fine structure and the second fine structure are configured such that, immediately after the light of the first wavelength passes through the dichroic lens array, the light of the first wavelength forms a phase distribution of 2Nπ at a position corresponding to the center of the plurality of first photosensitive units, and forms a phase distribution of (2N-1)π at a position corresponding to the center of the plurality of second photosensitive units, where N is an integer greater than 0.

4. The image sensor according to claim 3, wherein, The first fine structure and the second fine structure are configured such that, immediately after the light of the second wavelength passes through the dichroic lens array, the light of the second wavelength forms a (2M-1)π phase distribution at a position corresponding to the center of the plurality of first photosensitive units, and forms a 2Mπ phase distribution at a position corresponding to the center of the plurality of second photosensitive units, where M is an integer greater than 0.

5. The image sensor according to claim 1, further comprising: A spacer layer is disposed between the sensor substrate and the dichroic lens array, the spacer layer being configured to form a distance between the sensor substrate and the dichroic lens array.

6. The image sensor according to claim 5, wherein, When the theoretical thickness of the spacer layer is h t Furthermore, when the spacing between the plurality of first photosensitive units and the plurality of second photosensitive units is p, the thickness h of the spacer layer satisfies h t - p ≤ h ≤ h t + p, and The theoretical thickness of the spacer layer is the focal length of the dichroic lens array at the center wavelength of the wavelength band of the incident light to be separated by the dichroic lens array.

7. The image sensor according to claim 6, wherein, When the refractive index of the spacer layer is n and the center wavelength of the wavelength band separated by the dichroic lens array is λ0, the theoretical thickness h of the spacer layer is... t satisfy: 。 8. The image sensor according to claim 1, wherein, The sensor substrate also includes a plurality of third photosensitive units and a plurality of fourth photosensitive units for sensing light. The dichroic lens array further includes: Multiple third regions, each corresponding to one of the multiple third photosensitive units, and having a third fine structure different from the first fine structure and the second fine structure; and Multiple fourth regions, each corresponding to one of the multiple fourth photosensitive units, and having a fourth fine structure different from the first fine structure, the second fine structure, and the third fine structure, and The plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions are respectively arranged along the four quadrant surfaces.

9. The image sensor according to claim 8, wherein, At the center of the image sensor, the positions of the plurality of first regions, plurality of second regions, plurality of third regions, and plurality of fourth regions of the dichroic lens array coincide with the positions of the plurality of first photosensitive units, plurality of second photosensitive units, plurality of third photosensitive units, and plurality of fourth photosensitive units corresponding to the plurality of first regions, plurality of second regions, plurality of third regions, and plurality of fourth photosensitive units, respectively. Wherein, at the peripheral portion of the image sensor, a plurality of first regions, a plurality of second regions, a plurality of third regions, and a plurality of fourth regions of the dichroic lens array are shifted toward the center of the image sensor relative to a plurality of first photosensitive units, a plurality of second photosensitive units, a plurality of third photosensitive units, and a plurality of fourth photosensitive units corresponding to the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions, respectively.

10. The image sensor according to claim 9, wherein, At the peripheral portion of the image sensor, the degree of displacement of the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions of the dichroic lens array relative to the plurality of first photosensitive units, the plurality of second photosensitive units, the plurality of third photosensitive units, and the plurality of fourth photosensitive units corresponding to the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth photosensitive units toward the center of the image sensor increases with the increase of the distance from the center of the image sensor.

11. The image sensor according to claim 8, wherein, The first, second, third, and fourth fine structures are configured to form a phase distribution through which the first, second, and third wavelengths of incident light incident on the dichroic lens array are branched into different directions. Wherein, at the position after passing through the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions, the light of the first wavelength is focused on the plurality of first photosensitive units and the plurality of fourth photosensitive units, the light of the second wavelength is focused on the plurality of second photosensitive units, and the light of the third wavelength is focused on the plurality of third photosensitive units.

12. The image sensor according to claim 11, wherein, The first wavelength of light is green light, the second wavelength of light is blue light, and the third wavelength of light is red light.

13. The image sensor according to claim 11, wherein, The first fine structure, the second fine structure, the third fine structure, and the fourth fine structure are configured such that: At the position immediately following the passage of the first wavelength light through the dichroic lens array, the first wavelength light forms a 2Nπ phase distribution at positions corresponding to the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, and a (2N-1)π phase distribution at positions corresponding to the centers of the plurality of second photosensitive units and the plurality of third photosensitive units. At the position immediately following the passage of the second wavelength light through the dichroic lens array, the second wavelength light forms a phase distribution of (2M-1)π at positions corresponding to the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, a phase distribution of 2Mπ at positions corresponding to the centers of the plurality of second photosensitive units, and a phase distribution greater than (2M-2)π and less than (2M-1)π at positions corresponding to the centers of the plurality of third photosensitive units. At a position below the dichroic lens array, the light of the third wavelength forms a phase distribution of (2L-1)π at the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, a phase distribution of 2Lπ at the centers of the plurality of third photosensitive units, and a phase distribution greater than (2L-2)π and less than (2L-1)π at the centers of the plurality of second photosensitive units. Immediately after the third wavelength passes through the dichroic lens array, the light of the third wavelength forms a phase distribution of (2L-1)π at a position corresponding to the centers of the plurality of first photosensitive units and the plurality of fourth photosensitive units, a phase distribution of 2Lπ at a position corresponding to the centers of the plurality of third photosensitive units, and a phase distribution greater than (2L-2)π and less than (2L-1)π at a position corresponding to the centers of the plurality of second photosensitive units, where N, M, and L are integers greater than 0.

14. The image sensor according to claim 8, wherein, The first, second, third, and fourth fine structures in the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions include a plurality of nanopillars, and The shape, size, and arrangement of the nanopillars in the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions are different from each other.

15. The image sensor according to claim 14, wherein, The image sensor includes multiple unit pixels, each unit pixel comprising repeating red, green, and blue pixels, and... Among them, the nanopillars disposed in the region corresponding to the green pixel among the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions have different distribution rules in the first direction and in the second direction perpendicular to the first direction.

16. The image sensor according to claim 15, wherein, The nanopillars disposed in the regions corresponding to the blue pixels and the regions corresponding to the red pixels among the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions have a symmetrical distribution rule in the first direction and the second direction.

17. The image sensor according to claim 14, wherein, Each of the plurality of nanopillars includes a first nanopillar and a second nanopillar disposed on the first nanopillar. Wherein, at the center of the image sensor, the position of the second nanopillar coincides with the position of the first nanopillar, and Specifically, at the peripheral portion of the image sensor, the second nanopillar is shifted relative to the first nanopillar toward the center of the image sensor.

18. The image sensor according to claim 17, wherein, At the peripheral portion of the image sensor, the degree of displacement of the second nanopillar relative to the first nanopillar increases with increasing distance from the center of the image sensor.

19. The image sensor according to claim 14, wherein, Each of the plurality of nanopillars includes a first nanopillar, a second nanopillar disposed on the first nanopillar, and a third nanopillar disposed on the second nanopillar. Specifically, at the center of the image sensor, the positions of the second and third nanopillars coincide with the position of the first nanopillar, and... Specifically, at the peripheral portion of the image sensor, the second nanopillar is shifted relative to the first nanopillar toward the center of the image sensor, and the third nanopillar is shifted relative to the second nanopillar toward the center of the image sensor.

20. The image sensor according to claim 14, wherein, The linewidth of each of the nanopillars disposed in one of the plurality of first regions, the plurality of second regions, the plurality of third regions, and the plurality of fourth regions on the periphery of the image sensor is greater than the linewidth of the nanopillar at the same position in the same region at the center of the image sensor.

21. The image sensor according to claim 20, wherein, When the linewidth of the nanopillar on the periphery of the image sensor is w and the linewidth of the nanopillar at the center of the image sensor is w0, w and w0 satisfy: ， Wherein, CRA is the angle of incidence of the light incident on the dichroic lens array.

22. The image sensor according to claim 20, wherein, The linewidth of the nanopillars at the outermost edge of the image sensor is 2.5% to 6.5% larger than the linewidth of the nanopillars at the center of the image sensor.

23. The image sensor according to claim 1, wherein, The dichroic lens array further includes a plurality of first protrusion regions and a plurality of second protrusion regions, the plurality of first protrusion regions and the plurality of second protrusion regions protruding from the edge of the sensor substrate and not facing any of the plurality of first photosensitive units and the plurality of second photosensitive units in the sensor substrate in the vertical direction.

24. The image sensor according to claim 1, wherein, The total area of ​​the dichroic lens array is smaller than the total area of ​​the sensor substrate.

25. The image sensor according to claim 1, wherein, The dichroic lens array further includes a first dichroic lens array and a second dichroic lens array disposed on the first dichroic lens array, and Wherein, the first fine structure and the second fine structure in the first region and the second region of the first dichroic lens array include multiple nanopillars, and the first fine structure and the second fine structure in the first region and the second region of the second dichroic lens array include multiple nanopillars, and The arrangement of the multiple nanopillars in the first dichroic lens array differs from that in the second dichroic lens array.

26. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; as well as Dichroic lens array, including: A plurality of first regions, each first region including a first dielectric having a first refractive index and forming a first pattern, and a second dielectric having a second refractive index less than the first refractive index and filling the space of the first pattern in the first dielectric, the plurality of first regions respectively corresponding to the plurality of first photosensitive units, and A plurality of second regions, each second region comprising a first dielectric having the first refractive index and forming a second pattern different from the first pattern, and a second dielectric having a second refractive index less than the first refractive index and filling the space of the second pattern in the first dielectric, the plurality of second regions respectively corresponding to the plurality of second photosensitive units. The plurality of first regions and the plurality of second regions are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light onto the plurality of first photosensitive units, and focus the separated second wavelength of light onto the plurality of second photosensitive units. The shapes of the first patterns in the plurality of first regions and the second patterns in the plurality of second regions gradually change from the center of the dichroic lens array toward the periphery of the dichroic lens array. Wherein, the displacement distance of the plurality of first regions and the plurality of second regions relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions respectively satisfies: ， Where d is the shortest distance between the lower surface of the dichroic lens array and the upper surface of the sensor substrate, and CRA' is the incident angle of the light incident on the sensor substrate.

27. An electronic device comprising: Imaging devices are configured to focus light reflected from an object to form an optical image; as well as An image sensor is configured to convert an optical image formed by the imaging device into an electrical signal. The image sensor includes: A sensor substrate, comprising a plurality of first photosensitive units and a plurality of second photosensitive units for sensing light; and A dichroic lens array is disposed above the sensor substrate and includes multiple first regions and multiple second regions. Each of the multiple first regions corresponds to a multiple of first photosensitive units and has a first fine structure. Each of the multiple second regions corresponds to a multiple of second photosensitive units and has a second fine structure different from the first fine structure. The first fine structure and the second fine structure are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light on the plurality of first photosensitive units, and focus the separated second wavelength of light on the plurality of second photosensitive units. In this configuration, at the center of the dichroic lens array, the positions of multiple first regions and multiple second regions correspond to the positions of multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions. Furthermore, on the peripheral portion of the dichroic lens array, the positions of the multiple first regions and multiple second regions are shifted relative to the multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions, towards the center of the dichroic lens array. Wherein, the displacement distance of the plurality of first regions and the plurality of second regions on the peripheral portion of the dichroic lens array relative to the plurality of first photosensitive units and the plurality of second photosensitive units corresponding to the plurality of first regions and the plurality of second regions respectively satisfies: ， Where d is the shortest distance between the lower surface of the dichroic lens array and the upper surface of the sensor substrate, and CRA' is the incident angle of the light incident on the sensor substrate.

28. The electronic device according to claim 27, wherein, The electronic device includes a smartphone, mobile phone, personal digital assistant (PDA), laptop computer, or personal computer (PC).

29. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; as well as A dichroic lens array is disposed above the sensor substrate and includes multiple first regions and multiple second regions. Each of the multiple first regions corresponds to a multiple of first photosensitive units and has a first fine structure. Each of the multiple second regions corresponds to a multiple of second photosensitive units and has a second fine structure different from the first fine structure. The first and second fine structures are configured to form a phase distribution beneath the plurality of first and second regions, wherein the first and second wavelengths of incident light incident on the dichroic lens array are branched into different directions based on the phase distribution and focused onto the plurality of first and second photosensitive units, respectively. The first fine structure and the second fine structure each comprise a plurality of nanopillars. Each of the plurality of nanopillars includes a first nanopillar and a second nanopillar disposed on the first nanopillar, and Specifically, at the center of the image sensor, the position of the second nanopillar coincides with the position of the first nanopillar, and at the periphery of the image sensor, the second nanopillar is shifted relative to the first nanopillar toward the center of the image sensor.

30. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; A dichroic lens array, disposed above the sensor substrate, includes multiple first regions and multiple second regions. The multiple first regions correspond to multiple first photosensitive units and each has a first fine structure. The multiple second regions correspond to multiple second photosensitive units and each has a second fine structure different from the first fine structure. A spacer layer is disposed between the sensor substrate and the dichroic lens array, the spacer layer being configured to form the distance between the sensor substrate and the dichroic lens array. The first fine structure and the second fine structure are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light on the plurality of first photosensitive units, and focus the separated second wavelength of light on the plurality of second photosensitive units. Specifically, the positions of multiple first regions and multiple second regions at the center of the dichroic lens array coincide with the positions of multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions. Furthermore, the positions of the multiple first regions and multiple second regions on the peripheral portion of the dichroic lens array are shifted relative to the multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions toward the center of the dichroic lens array. Wherein, when the theoretical thickness of the spacer layer is h t Furthermore, when the spacing between the plurality of first photosensitive units and the plurality of second photosensitive units is p, the thickness h of the spacer layer satisfies h t - p ≤ h ≤ h t + p, and The theoretical thickness of the spacer layer is the focal length of the dichroic lens array at the center wavelength of the wavelength band of the incident light to be separated by the dichroic lens array.

31. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; as well as A dichroic lens array is disposed above the sensor substrate. The dichroic lens array includes multiple first regions and multiple second regions. The multiple first regions correspond to multiple first photosensitive units and have a first fine structure, and the multiple second regions correspond to multiple second photosensitive units and have a second fine structure different from the first fine structure. The first fine structure and the second fine structure are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light on the plurality of first photosensitive units, and focus the separated second wavelength of light on the plurality of second photosensitive units. Specifically, the positions of multiple first regions and multiple second regions at the center of the dichroic lens array coincide with the positions of multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions. Furthermore, the positions of the multiple first regions and multiple second regions on the peripheral portion of the dichroic lens array are shifted relative to the multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions toward the center of the dichroic lens array. The image sensor includes multiple unit pixels, each unit pixel comprising repeating red, green, and blue pixels, and... Among them, the nanopillars disposed in the region corresponding to the green pixel among the plurality of first regions, the plurality of second regions, the plurality of third regions and the plurality of fourth regions have different distribution rules in the first direction and in the second direction perpendicular to the first direction.

32. An image sensor, comprising: A sensor substrate includes a plurality of first photosensitive units configured to sense light and a plurality of second photosensitive units configured to sense light; as well as A dichroic lens array is disposed above the sensor substrate. The dichroic lens array includes multiple first regions and multiple second regions. The multiple first regions correspond to multiple first photosensitive units and have a first fine structure, and the multiple second regions correspond to multiple second photosensitive units and have a second fine structure different from the first fine structure. The first fine structure and the second fine structure are configured to separate a first wavelength of light and a second wavelength of light from incident light incident on the plurality of first regions and the plurality of second regions, focus the separated first wavelength of light on the plurality of first photosensitive units, and focus the separated second wavelength of light on the plurality of second photosensitive units. Specifically, the positions of multiple first regions and multiple second regions at the center of the dichroic lens array coincide with the positions of multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions. Furthermore, the positions of the multiple first regions and multiple second regions on the peripheral portion of the dichroic lens array are shifted relative to the multiple first photosensitive units and multiple second photosensitive units corresponding to the multiple first regions and multiple second regions toward the center of the dichroic lens array. Wherein, when the linewidth of the nanopillar on the peripheral portion of the image sensor is w and the linewidth of the nanopillar on the center of the image sensor is w0, w and w0 satisfy: ， Wherein, CRA is the angle of incidence of the light incident on the dichroic lens array.

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