Light receiving element, method for manufacturing light receiving element, and imaging device
By forming a diffusion region with gradually changing impurity concentration on the surface of the semiconductor light receiving element, ease the lateral electric field, the problem of increasing dark current in the prior art is solved, and a higher sensitivity and signal-to-noise ratio are achieved.
CN113366656BActive Publication Date: 2025-03-25SONY SEMICON SOLUTIONS CORP
7 Cites 0 Cited by
Patent Information
- Application Number
- CN202080012286.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2019-03-20
- Filing Date
- 2020-02-21
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2040-02-21
AI Technical Summary
Technical Problem
The uniform zinc concentration distribution of existing semiconductor light receiving elements in the depth and lateral directions leads to an increase in dark current, affecting the sensitivity and signal-to-noise ratio of the device.
Method used
The first and second impurity diffusion regions with gradually changing impurity concentration are formed on the surface of the semiconductor layer, the transverse electric field is alleviated, and the second impurity diffusion region is formed by annealing to reduce the impurity concentration.
Benefits of technology
It effectively reduces dark current, improves the sensitivity and signal-to-noise ratio of the light receiving element, and reduces the generation of noise.
✦ Generated by Eureka AI based on patent content.
Abstract
According to one embodiment of the present disclosure, a light receiving element (1) includes: a semiconductor layer, which includes a composite semiconductor material; a first impurity diffusion region (12A) which is arranged on a surface of the semiconductor layer; and a second impurity diffusion region (12B) which is arranged around the first impurity diffusion region (12A) and has a lower impurity concentration than the first impurity diffusion region (12A).
Need to check novelty before this filing date? Find Prior Art