Automated transfer of edge rings requiring rotational alignment

By designing the ring storage station, the consumables in the processing module can be replaced without destroying the vacuum conditions, which solves the impurities and pollution problems caused by the wear of the consumables and improves the quality and yield of the semiconductor chip.

CN114051652BActive Publication Date: 2025-03-18LAM RES CORP
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Patent Information

Application Number
CN202080041484.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-06-06
Filing Date
2020-05-08
Publication Date
2025-03-18
Estimated Expiration
2040-05-08

AI Technical Summary

Technical Problem

During the manufacturing process of existing semiconductor wafers, consumable parts (such as edge rings) in the processing module wear out due to exposure to harsh conditions and need to be replaced frequently, resulting in impurities and contamination during the processing process, affecting the quality and yield of the semiconductor wafer.

Method used

A ring storage station is designed to remove and replace worn or used consumables in the processing module without breaking vacuum conditions. The ring storage station contains compartment component buffers for storing new and removed consumables and precise delivery and removal of consumables through lift pin mechanisms and robots.

Benefits of technology

By replacing consumables in a controlled environment, the risk of damage to the hardware components of the processing module is reduced, the quality and yield of the semiconductor wafer are improved, and the adjustment time of the substrate processing system is shortened.

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Abstract

A ring storage station for conveying consumable parts to a substrate processing system includes a housing, the housing including a substrate and a rotating plate disposed above the substrate. An end effector opening is disposed at a first side of the housing and a service window opening is disposed at a second side of the housing. A group of finger support structures is connected to the rotating plate. Each finger support structure includes a support column and a support finger disposed thereon. At least two of the columns in the group include support fingers with indexing pins to radially align the consumables when the consumables are placed in the ring storage station. In one configuration, the consumables can be designed to engage at matching rotation angles to ensure angular alignment between the capture ring storage station and the processing module.
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