Delivery device and delivery method

Abstract

A conveying device and a conveying method judge whether a member such as a substrate passes a predetermined area by a method different from the prior art. The conveying device includes a conveying arm, an irradiation section, a light receiving section, and a control device. The conveying arm conveys the member. The irradiation section obliquely irradiates light to a passing area through which the member is to pass when the conveying arm conveys the member. The light receiving section receives the light irradiated from the irradiation section and reflected by the member when the member passes through the passing area. The control device judges whether the member passes through the passing area based on whether the light receiving section receives the light irradiated from the irradiation section.

Description

Technical Field

[0001] Various aspects and embodiments of the present invention relate to conveying devices and conveying methods. Background Technology

[0002] For example, Patent Document 1 discloses a technique in which, when light projected from a light-projecting part is blocked between a light-receiving part and a light-projecting part that receives light projected from the light-projecting part, it is determined that the substrate has passed between the light-projecting part and the light-receiving part.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-96149. Summary of the Invention

[0006] The problem the invention aims to solve

[0007] The present invention provides a conveying device and conveying method that can determine whether components such as substrates have passed through a predetermined area using a method different from the prior art.

[0008] Technical means for solving problems

[0009] One aspect of the present invention is a conveying device, comprising a conveying arm, an irradiation unit, a light-receiving unit, and a control device. The conveying arm conveys a component. The irradiation unit obliquely irradiates light onto a passage area through which the component is to pass as the conveying arm conveys the component. The light-receiving unit receives light irradiated by the irradiation unit and reflected by the component as the component passes through the passage area. The control device determines whether the component has passed through the passage area based on whether the light-receiving unit receives light irradiated by the irradiation unit.

[0010] Invention Effects

[0011] According to various aspects and embodiments of the present invention, it is possible to determine whether components such as substrates have passed through a predetermined area using methods different from those in the prior art. Attached Figure Description

[0012] Figure 1 This is a top view showing an example of the processing system in the first embodiment.

[0013] Figure 2 This is an enlarged view of the vicinity of the gate valve in the first embodiment.

[0014] Figure 3 This is a diagram showing an example of the optical path of light irradiating the substrate in the first embodiment.

[0015] Figure 4 This is an enlarged view of the vicinity of the gate valve in the first embodiment.

[0016] Figure 5 This is an enlarged view of the area near the gate valve in the second embodiment.

[0017] Figure 6 This is a diagram illustrating an example of the optical path of light irradiating the substrate in the second embodiment.

[0018] Figure 7 This is a diagram illustrating an example of a method for determining the reference position of a substrate.

[0019] Figure 8 This is a flowchart illustrating an example of the transport method in the second embodiment.

[0020] Figure 9 This is a side view showing an example of the load locking component in the third embodiment.

[0021] Figure 10 This is a diagram showing an example of the optical path of light irradiating the substrate in the third embodiment.

[0022] Figure 11 This is a diagram showing another example of the optical path of light irradiating the substrate in the third embodiment.

[0023] Figure 12 This is a diagram showing another example of the optical path of light irradiating the substrate in the third embodiment.

[0024] Figure 13 This is a diagram illustrating an example of the optical path of light irradiating the substrate in the fourth embodiment.

[0025] Figure 14 This is a diagram showing another example of the optical path of light irradiating the substrate in the fourth embodiment.

[0026] Figure 15 This is a diagram showing another example of the optical path of light irradiating the substrate in the fourth embodiment.

[0027] Figure 16 This is a diagram showing another example of the optical path of light irradiating the substrate in the fourth embodiment.

[0028] Explanation of reference numerals in the attached figures

[0029] A through the area

[0030] E endpoint

[0031] ER edge ring

[0032] G gate valve

[0033] L straight line

[0034] O Reference position

[0035] P Reflection position

[0036] T segment

[0037] W substrate

[0038] 1. Processing System

[0039] 10 main body

[0040] 100 Control device

[0041] 11 Vacuum Conveying Components

[0042] 110 Conveyor Arm

[0043] 111 guide rail

[0044] 12 Processing Components

[0045] 13 Load Locking Components

[0046] 14 Atmospheric transport components

[0047] 140 Conveyor Arm

[0048] 141 guide rail

[0049] 15 Loading Port

[0050] 20 Irradiation Department

[0051] 21 Light-receiving section

[0052] 22 Reflectors Detailed Implementation

[0053] Hereinafter, embodiments of the conveying device and conveying method will be described in detail based on the accompanying drawings. Furthermore, the conveying device and conveying method of the present invention are not limited to the following embodiments. Additionally, the embodiments illustrated below can be appropriately combined without contradicting the processing content.

[0054] (First Embodiment)

[0055] [Structure of Processing System 1]

[0056] Figure 1 This is a top view showing an example of the structure of the processing system 1 according to the first embodiment. Figure 1 For convenience, the diagram shows a portion of the internal components of the device. The processing system 1 includes a main body 10 and a control device 100 for controlling the main body 10. The processing system 1 is an example of a conveying device.

[0057] The main body 10 includes a vacuum conveying assembly 11, multiple processing assemblies 12, multiple load locking assemblies 13, and an atmospheric conveying assembly 14. Multiple processing assemblies 12 are connected to the side wall of the processing system 1 via gate valves G1. Figure 1 In the example, eight processing components 12 are connected to the vacuum conveying assembly 11, but the number of processing components 12 connected to the vacuum conveying assembly 11 can be less than seven or more than nine.

[0058] Each processing component 12 forms elements on the substrate W by performing processes such as etching and film deposition on the substrate W to be processed. Consumable components such as edge rings ER are provided within the processing component 12. After processing multiple substrates W, the consumable components are replaced with new consumable components. The substrate W and the consumable components are an example of components.

[0059] Multiple load locking components 13 are connected to the other side wall of the vacuum conveying assembly 11 via a gate valve G2. Figure 1 In the example, two load locking components 13 are connected to the vacuum delivery assembly 11, but the number of load locking components 13 connected to the vacuum delivery assembly 11 can be one or more. Furthermore, at least one of the two load locking components 13 can accommodate consumable components such as the substrate W and the edge ring ER. Hereinafter, the substrate W and the edge ring ER will be referred to as the substrate W, etc.

[0060] A conveying arm 110 is disposed within the vacuum conveying assembly 11. The conveying arm 110 moves within the vacuum conveying assembly 11 along a guide rail 111 disposed within the vacuum conveying assembly 11. The conveying arm 110 then conveys the substrate W between the processing assembly 12 and other processing assemblies 12, and between the processing assembly 12 and the load locking assembly 13. The vacuum conveying assembly 11 is maintained at a pressure atmosphere lower than atmospheric pressure. Alternatively, the conveying arm 110 may be fixed at a predetermined position within the vacuum conveying assembly 11 and not move within the vacuum conveying assembly 11.

[0061] A vacuum delivery assembly 11 is connected to one side wall of each load locking assembly 13 via a gate valve G2, and an atmospheric delivery assembly 14 is connected to the other side wall via a gate valve G3. When the substrate W is fed into the load locking assembly 13 from the atmospheric delivery assembly 14 via the gate valve G3, the gate valve G3 is closed, and the pressure inside the load locking assembly 13 drops from atmospheric pressure to a predetermined pressure. Then, the gate valve G2 is opened, and the substrate W inside the load locking assembly 13 is fed into the vacuum delivery assembly 11 by the delivery arm 110.

[0062] Furthermore, with the pressure inside the load locking assembly 13 below atmospheric pressure, the substrate W is fed into the load locking assembly 13 from the vacuum conveying assembly 11 via the gate valve G2 using the conveying arm 110, and then the gate valve G2 is closed. The pressure inside the load locking assembly 13 then rises to atmospheric pressure. Then, the gate valve G3 is opened, and the substrate W inside the load locking assembly 13 is conveyed out into the atmospheric conveying assembly 14. The feeding and discharging of consumable components such as the edge ring ER is performed in the same manner.

[0063] Multiple loading ports 15 are provided on the side wall of the atmospheric transport assembly 14 opposite to the side wall of the assembly 14 where the gate valve G3 is located. Each loading port 15 is connected to a container such as a FOUP (FrontOpening Unified Pod) capable of holding multiple substrates W. Additionally, alignment components for changing the orientation of the substrates W may be provided in the atmospheric transport assembly 14. Furthermore, any one of the multiple loading ports 15 is connected to a container capable of holding consumable components such as edge rings ER.

[0064] The pressure inside the atmospheric conveying assembly 14 is atmospheric pressure. A conveying arm 140 is provided inside the atmospheric conveying assembly 14. The conveying arm 140 moves within the atmospheric conveying assembly 14 along a guide rail 141 provided within the atmospheric conveying assembly 14, conveying the substrate W, etc., between the load locking assembly 13 and the container connected to the loading port 15. The conveying arm 140 may also be fixed at a predetermined position within the atmospheric conveying assembly 14 and not move within the atmospheric conveying assembly 14. An FFU (Fan Filter Unit) or similar unit is provided at the upper part of the atmospheric conveying assembly 14, and air, after the removal of particles, is supplied from the upper part into the atmospheric conveying assembly 14, forming a downward flow within the atmospheric conveying assembly 14. Furthermore, in this embodiment, the atmosphere inside the atmospheric conveying assembly 14 is atmospheric pressure, but as another method, the pressure inside the atmospheric conveying assembly 14 may also be controlled to be positive pressure. This can suppress the intrusion of particles, etc., from the outside into the atmospheric conveying assembly 14.

[0065] Furthermore, multiple irradiation sections 20 and light-receiving sections 21 are provided within the vacuum delivery assembly 11 and the atmospheric delivery assembly 14. In this embodiment, the irradiation sections 20 and light-receiving sections 21 are located near each gate valve G1, each gate valve G2, each gate valve G3, and each loading port 15.

[0066] When the substrate W is transported by the transport arm 110, the irradiation unit 20 irradiates light at an angle to the passage area through which the substrate W is to pass. The light-receiving unit 21 receives the light irradiated by the irradiation unit 20 and reflected by the substrate W as the substrate W passes through the passage area.

[0067] The control device 100 includes a memory, a processor, and an input / output interface. Data such as plans and programs are stored in the memory. The memory may be, for example, RAM (Random Access Memory), ROM (Read Only Memory), HDD (Hard Disk Drive), or SSD (Solid State Drive). The processor controls various parts of the main unit 10 via the input / output interface by executing programs read from the memory, based on the data such as plans stored in the memory. The processor may be a CPU (Central Processing Unit) or DSP (Digital Signal Processor).

[0068] The control device 100 irradiates each irradiation section 20 with light and determines whether each light-receiving section 21 receives the light irradiated from the irradiation section 20. Then, the control device 100 determines whether the substrate W, etc., has passed through the light-passing area irradiated by the irradiation section 20 based on whether the light-receiving section 21 receives the light irradiated from the irradiation section 20. For example, the control device 100 controls the irradiation section 20 to irradiate light into a predetermined passing area, and controls the transport arm 110 and the transport arm 140 to move the substrate W, etc., based on data such as a scheme.

[0069] Then, if the light-receiving unit 21 receives light reflected from the substrate W or the like that has passed through the passing area, the control device 100 determines that the substrate W or the like has passed through the passing area and executes the control for the next step. Conversely, if the light-receiving unit 21 does not receive light, the control device 100 determines that the substrate W or the like has not passed through the passing area, does not execute the control for the next step, and notifies the user of the processing system 1 of an error.

[0070] [Pass / Fail Judgment Method for Substrate W]

[0071] Figure 2 This is an enlarged view of the vicinity of gate valve G1 in the first embodiment. Figure 3 This diagram illustrates an example of the optical path of light irradiating the substrate W in the first embodiment. In this embodiment, the irradiation unit 20 obliquely irradiates light onto the passage region A through which the substrate W to be fed into the processing assembly 12 and the substrate W to be discharged from the processing assembly 12 will pass. The passage region A is a plane that includes the upper surface of the substrate W, etc., during transport by the transport arm 110. In this embodiment, the irradiation unit 20 is, for example, a semiconductor laser device that irradiates laser light.

[0072] When the substrate W passes through the passage area A, the light irradiated from the irradiation unit 20 into the passage area A is, for example... Figure 3As shown, the light at the reflection position P on the substrate W is reflected and incident on the light-receiving unit 21. On the other hand, if the substrate W does not pass through the passage area A, the light irradiated from the irradiation unit 20 to the passage area A is not reflected by the substrate W and does not incident on the light-receiving unit 21. The light-receiving unit 21 outputs an electrical signal corresponding to the intensity of the incident light to the control device 100. The light-receiving unit 21 is, for example, a phototransistor.

[0073] In this embodiment, the irradiation section 20 and the light-receiving section 21, for example... Figure 3 As shown, the irradiation section 20 and the light-receiving section 21 are arranged on the same side of the substrate W relative to the substrate W that passes through the passage area A. This allows for easy maintenance of both the irradiation section 20 and the light-receiving section 21.

[0074] When the light-receiving unit 21 receives light irradiated from the irradiation unit 20, the control device 100 determines that the substrate W has passed through the passage area A; when the light-receiving unit 21 does not receive light irradiated from the irradiation unit 20, it determines that the substrate W has not passed through the passage area A. Thus, the control device 100 can simultaneously confirm the position of the substrate W and perform scheme-based processing on the substrate W.

[0075] Furthermore, in consumable components such as edge rings (ER), for example Figure 4 As shown, when the consumable component passes through the passage area A, the light irradiated from the irradiation unit 20 to the passage area A is reflected at the reflection position P' on the consumable component and incident on the light-receiving unit 21. Therefore, the control device 100 can determine that the consumable component has passed through the passage area A if the light-receiving unit 21 receives light irradiated from the irradiation unit 20. Conversely, the control device 100 can determine that the consumable component has not passed through the passage area A if the light-receiving unit 21 does not receive light irradiated from the irradiation unit 20.

[0076] The first embodiment has been described above. As described above, the processing system 1 in this embodiment includes a transport arm 110, an irradiation unit 20, a light-receiving unit 21, and a control device 100. The transport arm 110 transports a substrate W, etc. The irradiation unit 20 irradiates light obliquely into the passage area A through which the substrate W, etc., is to pass when the transport arm 110 transports the substrate W, etc. The light-receiving unit 21 receives light irradiated from the irradiation unit 20 and reflected by the substrate W, etc., when the substrate W, etc., passes through the passage area A. The control device 100 determines whether the substrate W, etc., has passed through the passage area A based on whether the light-receiving unit 21 receives light irradiated from the irradiation unit 20. Thus, it is possible to determine whether the substrate W, etc., has passed through the predetermined area using a method different from the prior art.

[0077] Furthermore, in the first embodiment described above, both the irradiation section 20 and the light-receiving section 21 are arranged on the same side of the substrate W relative to the substrate W when passing through the passage area A. This allows for easy maintenance of the irradiation section 20 and the light-receiving section 21.

[0078] (Second Implementation)

[0079] In the first embodiment, it is determined whether the substrate W, etc., has passed through the passage area A by judging whether the light-receiving unit 21 receives light irradiated from the irradiation unit 20 to the passage area A. In this embodiment, the reference position of the substrate W, etc., is also determined based on the light-receiving time of the light-receiving unit 21. Then, the substrate W, etc., is transported to the transport destination (e.g., the chamber of the processing component 12, etc.) at the determined reference position. As a result, it is not necessary to provide a separate sensor for determining the position of the substrate W, etc., and the overall size of the processing system 1 can be reduced.

[0080] Figure 5 This is an enlarged view of the vicinity of gate valve G1 in the second embodiment. Figure 6 This diagram illustrates an example of the optical path of light irradiating the substrate W in the second embodiment. In this embodiment, the irradiation unit 20 has irradiation units 20a and 20b, and the light-receiving unit 21 has light-receiving units 21a and 21b. Irradiation unit 20a is an example of a first irradiation unit, and irradiation unit 20b is an example of a second irradiation unit. Similarly, light-receiving unit 21a is an example of a first light-receiving unit, and light-receiving unit 21b is an example of a second light-receiving unit. Irradiation units 20a, 20b, 21a, and 21b are disposed near their respective gate valves G1. Alternatively, irradiation units 20a, 20b, 21a, and 21b may also be disposed near each gate valve G2 and gate valve G3.

[0081] In this embodiment, the irradiation sections 20a and 20b irradiate light at an angle relative to the passage region A. When the substrate W passes through the passage region A, the light irradiated from the irradiation section 20a onto the passage region A is, for example... Figure 6 As shown, the light at reflection position Pa on the substrate W is reflected and incident on the light-receiving part 21a. Furthermore, when the substrate W passes through the passage area A, the light irradiated from the irradiation part 20b to the passage area A is reflected at reflection position Pb on the substrate W and incident on the light-receiving part 21b. The control device 100 determines whether the substrate W has passed through the passage area A by determining whether the light-receiving part 21a receives light irradiated from the irradiation part 20a to the passage area A, or whether the light-receiving part 21b receives light irradiated from the irradiation part 20b to the passage area A.

[0082] Furthermore, the control device 100 determines the amount of movement of the substrate W as it passes through the passage area A based on the control amount of the conveying arm 110. Additionally, the control device 100 determines the light-receiving time of each of the light-receiving portions 21a and 21b as the substrate W passes through the passage area A. Then, based on the determined amount of movement of the substrate W and the light-receiving times of each of the light-receiving portions 21a and 21b, the control device 100 determines the reference position O of the substrate W (e.g., the center of gravity of the substrate W).

[0083] For example, such as Figure 7 As shown, the control device 100 determines line segment Ta representing the trajectory of reflection position Pa and line segment Tb representing the trajectory of reflection position Pb. Then, the control device 100 determines a straight line La as the perpendicular bisector of line segment Ta. Additionally, the control device 100 determines a straight line Lb as the perpendicular bisector of the line segment connecting endpoint Ea of line segment Ta and endpoint Eb of line segment Tb. The control device 100 then determines the intersection of straight lines La and Lb as the reference position O of the substrate W.

[0084] Then, the control device 100 controls the conveyor arm 110 to feed the substrate W into the processing assembly 12 in such a way that the substrate W is positioned at a predetermined position (e.g., the center of gravity of the stage on which the substrate W is placed) within the cavity of the processing assembly 12 at a predetermined reference position O. This allows the substrate W to be fed into the predetermined position within the processing assembly 12, suppressing processing deviations between substrates W.

[0085] [Transportation Method]

[0086] Figure 8 This is a flowchart illustrating an example of the transport method in the second embodiment. Figure 8 The illustrated process is achieved by controlling various parts of the main body 10 through the control device 100. Furthermore, in Figure 8 The example illustrates the process of sending the substrate W into the processing component 12.

[0087] First, the control device 100 controls the irradiation units 20a and 20b to obliquely irradiate light onto the passage area A near the gate valve G1, and opens the gate valve G1. Then, the control device 100 controls the conveying arm 110 to begin feeding the substrate W into the processing assembly 12 (S10). Then, the light-receiving units 21a and 21b receive light reflected from the substrate W passing through the passage area A. The control device 100 determines that the substrate W has passed through the passage area A when the light-receiving unit 21a receives light from the irradiation unit 20a, or when the light-receiving unit 21b receives light from the irradiation unit 20b.

[0088] Next, the control device 100 determines the amount of movement of the substrate W and the light-receiving time of the light-receiving parts 21a and 21b based on the control amount of the conveying arm 110 and the electrical signals output from the light-receiving parts 21a and 21b (S11).

[0089] Next, the control device 100, based on the determined movement amount of the substrate W and the light-receiving time of the light-receiving parts 21a and 21b, through... Figure 7 The process described herein is used to determine the reference position O of the substrate W (S12).

[0090] Next, the control device 100 controls the conveyor arm 110 to deliver the substrate W into the chamber of the processing assembly 12 at the determined reference position O (S13). Then, the conveyor arm 110 retracts from the chamber, the gate valve G1 closes, and the process shown in this flowchart ends.

[0091] The second embodiment has been described above. As described above, in this embodiment, the irradiation unit 20 includes an irradiation unit 20a and an irradiation unit 20b. When the substrate W is fed from the vacuum transport assembly 11, which is provided with the transport arm 110, into the chamber of the processing assembly 12 connected to the vacuum transport assembly 11, the irradiation unit 20a irradiates light into a portion of the passage area A through which the substrate W is to pass. When the substrate W is fed from the vacuum transport assembly 11 into the chamber of the processing assembly 12, the irradiation unit 20b irradiates light into another portion of the passage area A through which the substrate W is to pass. The light-receiving unit 21 includes a light-receiving unit 21a and a light-receiving unit 21b. The light-receiving unit 21a receives light irradiated from the irradiation unit 20a and reflected by the substrate W passing through a portion of the passage area A. The light-receiving unit 21b receives light irradiated from the irradiation unit 20b and reflected by the substrate W passing through another portion of the passage area A. While controlling the conveyor arm 110 to allow the substrate W to pass through the passage area A, the control device 100 determines the reference position of the substrate W based on the amount of movement of the substrate W, the light-receiving time of the light-receiving portion 21a, and the light-receiving time of the light-receiving portion 21b. Then, the control device 100 controls the conveyor arm 110 to feed the substrate W into the cavity of the processing assembly 12 in such a way that it is positioned at a predetermined position within the cavity of the processing assembly 12 according to the determined reference position. As a result, processing deviations between substrates W can be suppressed.

[0092] (Third Implementation)

[0093] In existing methods based on light-blocking sensors, the presence of a substrate W or similar component blocking the light path is used to determine if the substrate W or similar component has passed through an area where the light path is formed. However, in this method, it is difficult to distinguish which device the substrate W or similar component is placed into when it is fed into any of the vertically arranged devices. In contrast, in this embodiment, it is possible to distinguish which device the substrate W or similar component was fed into. The same distinction can be made when the substrate W or similar component is ejected. Therefore, it is possible to determine with higher accuracy whether the substrate W or similar component has passed through a predetermined area.

[0094] In this embodiment, for example Figure 9 As shown, load locking components 13-1 and 13-2 are configured adjacent to each other. Figure 9 This is a side view showing an example of the load locking components 13-1 and 13-2 in the third embodiment. By arranging the load locking components 13-1 and 13-2 vertically adjacent to each other, the space occupied by the processing system 1 can be reduced. Furthermore, the number of load locking components 13 arranged vertically adjacent to each other can be three or more. Additionally, the vertically arranged device can consist of two processing components 12, or it can be a processing component 12 and a load locking component 13. Figure 9 In the example, load locking assembly 13-1 is an example of the first chamber, and load locking assembly 13-2 is an example of the second chamber.

[0095] Figure 10 This diagram illustrates an example of the optical path of light irradiating the substrate W in the third embodiment. In this embodiment, the irradiation unit 20 has irradiation units 20a and 20b, and the light-receiving unit 21 has light-receiving units 21a and 21b. The irradiation units 20a, 20b, 21a, and 21b are disposed near their respective gate valves G1. Alternatively, the irradiation units 20a, 20b, 21a, and 21b may also be disposed near each of the gate valves G2 and G3.

[0096] In this embodiment, the irradiation unit 20a irradiates light obliquely into the passage area A near the load locking assembly 13-1, and the irradiation unit 20b irradiates light obliquely into the passage area A near the load locking assembly 13-2. The light irradiated from the irradiation unit 20a into the passage area A is, for example... Figure 10 As shown by the solid arrow, when the substrate W is fed into the load locking assembly 13-1, the reflection position Pa on the substrate W passing through the passage area A is reflected and incident on the light receiving part 21a. The passage area A through which the substrate W passes when fed into the load locking assembly 13-1 is an example of the first passage area.

[0097] On the other hand, when the substrate W is fed into the load locking assembly 13-2, light irradiated from the irradiation section 20a through region A, for example... Figure 10 As shown by the dashed arrow, light is reflected from the substrate W passing through the passage region A, but does not incident on the light-receiving part 21a. Therefore, the control device 100 can determine whether the substrate W has passed through the passage region A by detecting whether the light-receiving part 21a receives light. The passage region A through which the substrate W passes when being fed into the load locking assembly 13-2 is an example of the second passage region. Furthermore, the control device 100 can also determine whether the substrate W has passed through the passage region A in the same way when the substrate W is ejected from the load locking assembly 13-1.

[0098] Additionally, light irradiated from the irradiation unit 20b through region A, for example... Figure 10 As shown by the solid arrow, when the substrate W is fed into the load locking assembly 13-2, the reflection position Pb on the substrate W passing through the passage area A is reflected and incident on the light receiving part 21b. On the other hand, when the substrate W is fed into the load locking assembly 13-1, the light irradiated from the irradiation part 20b onto the passage area A is, for example... Figure 10 As shown by the dashed arrow, the light is reflected off the substrate W passing through the passage area A, but does not incident on the light-receiving part 21b. Therefore, the control device 100 can determine whether the substrate W has passed through the passage area A by detecting whether the light-receiving part 21b receives light. Furthermore, the control device 100 can also determine whether the substrate W has passed through the passage area A in the same way when ejecting the substrate W from the load locking assembly 13-2.

[0099] Furthermore, as another example, the control device 100 can also determine which of the load locking components 13-1 and 13-2 the substrate W is sent into by determining which of the light-receiving parts 21a and 21b receives light irradiated from one of the irradiation parts 20. Figure 11 This diagram illustrates another example of the optical path of light irradiating the substrate W in the third embodiment. Figure 11 In the example, light-receiving part 21a is an example of the third light-receiving part, and light-receiving part 21b is an example of the fourth light-receiving part.

[0100] When the substrate W is inserted into the load-locking assembly 13-1, light irradiated from the irradiation section 20 onto the passing area A near the load-locking assembly 13-1, for example... Figure 11As shown, the light reflected at position Pa on the substrate W is reflected and incident on the light-receiving part 21a. In this case, the light reflected on the substrate W does not incident on the light-receiving part 21b. Therefore, the control device 100 can determine whether the substrate W has passed through the passage area A near the load locking assembly 13-1 by detecting whether the light received by the light-receiving part 21a has passed through the passage area A near the load locking assembly 13-1. Furthermore, when the control device 100 ejects the substrate W from the load locking assembly 13-1, it can also determine whether the substrate W has passed through the passage area A near the load locking assembly 13-1 in the same way.

[0101] On the other hand, when the substrate W is inserted into the load locking assembly 13-2, light irradiated from the irradiation section 20 onto the passing area A near the load locking assembly 13-2, for example... Figure 11 As shown, the reflection position Pb on the substrate W is reflected and incident on the light-receiving part 21b. In this case, the light reflected on the substrate W does not incident on the light-receiving part 21a. Therefore, the control device 100 can determine whether the substrate W has passed through the passage area A near the load locking assembly 13-2 by detecting the light received by the light-receiving part 21b. Furthermore, when the control device 100 delivers the substrate W from the load locking assembly 13-2, it can also determine whether the substrate W has passed through the passage area A near the load locking assembly 13-2 in the same way. In this structure, it is also possible to distinguish which load locking assembly 13, arranged vertically, the substrate W, etc., is delivered into. In addition, in Figure 11 In the illustrated structure, the number of irradiation sections 20 can be reduced.

[0102] Alternatively, as another example, the control device 100 can also determine which of the load locking assemblies 13-1 and 13-2 the substrate W is fed into by detecting which of the irradiation sections 20a and 20b the light is received by one light-receiving section 21. Figure 12 This is a diagram showing another example of the optical path of light irradiating the substrate W in the third embodiment.

[0103] When the substrate W is inserted into the load-locking assembly 13-1, light irradiating the passing area A near the load-locking assembly 13-1 from the irradiation section 20a, for example... Figure 12 As shown by the solid arrow, the light at the reflection position Pa on the substrate W is reflected and incident on the light-receiving part 21. On the other hand, the light irradiating the passing area A near the load locking assembly 13-1 from the irradiation part 20b is, for example... Figure 12 As shown by the dashed arrow, it is reflected on the substrate W, but does not incident on the light-receiving part 21.

[0104] On the other hand, when the substrate W is fed into the load locking assembly 13-2, light irradiating the passing area A near the load locking assembly 13-2 from the irradiation section 20b, for example... Figure 12As shown by the solid arrow, the reflection position Pb on the substrate W is reflected and incident on the light-receiving part 21. On the other hand, the light irradiated from the irradiation part 20a to the passing area A near the load locking assembly 13-2, for example... Figure 12 As shown by the dashed arrow, it is reflected on the substrate W, but does not incident on the light-receiving part 21.

[0105] The control device 100 controls the illumination of light from the irradiation section 20a and the irradiation section 20b at different times, and determines at what time the light-receiving section 21 receives light. Therefore, the control device 100 can determine which of the irradiation sections 20a and 20b the light is received from. In this structure, it is also possible to distinguish which load locking assembly 13, arranged vertically, the substrate W, etc., is fed into. Furthermore, in... Figure 12 In the illustrated structure, the number of light-receiving parts 21 can be reduced.

[0106] (Fourth implementation)

[0107] When two devices are arranged adjacent to each other in the lateral direction, in existing methods based on light-shielding sensors, a group of irradiation units 20 and light-receiving units 21 for determining whether a substrate W or the like has been fed into the device is provided for each passage area A. In this embodiment, however, only one irradiation unit 20 is provided, and a light-receiving unit 21 for determining whether a substrate W or the like has been fed into the device is provided for each passage area A. This reduces the number of irradiation units 20.

[0108] Figure 13 This diagram illustrates an example of the optical path of light irradiating the substrate W in the fourth embodiment. In this embodiment, processing components 12-1 and 12-2 are arranged laterally. Additionally, in this embodiment, a reflector 22 is provided to reflect the light irradiated from the irradiation unit 20. The light-receiving unit 21 has a light-receiving section 21a and a light-receiving section 21b. The irradiation unit 20, light-receiving sections 21a, 21b, and reflector 22 are located near the gate valve G1. Alternatively, the irradiation unit 20, light-receiving section 21a, light-receiving section 21b, and reflector 22 may also be located near each of the gate valves G2 and G3. Furthermore, the laterally arranged device can be two load locking components 13, or it can be the processing unit 12 and the load locking component 13.

[0109] When the substrate W is fed into the processing assembly 12-1, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20, for example... Figure 13As shown, the reflection position P on the substrate W is reflected and incident on the light-receiving part 21a. In this case, the light irradiated from the irradiation part 20 does not incident on the reflector 22 and the light-receiving part 21b. When the light-receiving part 21a receives light but the light-receiving part 21b does not receive light, the control device 100 can determine that the substrate W has passed through the passage area A near the processing assembly 12-1. Furthermore, when the control device 100 ejects the substrate W from the processing assembly 12-1, it can also determine whether the substrate W has passed through the passage area A near the processing assembly 12-1 in the same way.

[0110] On the other hand, when the substrate W is fed into the processing assembly 12-2, the light irradiated from the irradiation section 20 onto the passing area A near the processing assembly 12-1, for example... Figure 13 The light incident on the reflector 22 is as shown. Therefore, the light illuminating the passing area A near the processing assembly 12-1 from the irradiation unit 20 will not enter the light-receiving unit 21a. Furthermore, the light incident on the reflector 22 is reflected by the reflector 22, but is blocked by the substrate W passing through the passing area A near the processing assembly 12-2, and does not enter the light-receiving unit 21b. When neither the light-receiving unit 21a nor the light-receiving unit 21b receives light, the control device 100 can determine that the substrate W has passed through the passing area A near the processing assembly 12-2. Furthermore, when the control device 100 ejects the substrate W from the processing assembly 12-2, it can also determine whether the substrate W has passed through the passing area A near the processing assembly 12-2 in the same way.

[0111] The processing system 1 of this embodiment includes a light-receiving section 21a and a light-receiving section 21b, and a reflector 22 that reflects light irradiated from the irradiation section 20 to either the light-receiving section 21a or the light-receiving section 21b. The reflector 22 is an example of a reflective section. Therefore, in the processing system 1 of this embodiment, the number of irradiation sections 20 can be reduced compared to the existing judgment method.

[0112] In addition, as other examples, for example Figure 14 As shown, it is also possible to determine which of the processing components 12-1 and 12-2 the substrate W is sent to by determining which of the irradiation units 20a and 20b the light-receiving unit 21 receives light from. Figure 14 This is a diagram showing another example of the optical path of light irradiating the substrate W in the fourth embodiment.

[0113] When the substrate W is fed into the processing assembly 12-1, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20a, for example... Figure 14 As shown by the dashed arrow, the light is blocked by the substrate W passing through the area A, so it does not incident on the reflector 22. Therefore, the light irradiated from the irradiation section 20a is not received by the light-receiving section 21.

[0114] Additionally, when the substrate W is fed into the processing assembly 12-2, light irradiating the passing area A near the processing assembly 12-2 from the irradiation section 20b, for example... Figure 14 As shown by the solid arrow, the light at the reflection position P on the substrate W, which passes through the region A, is reflected and incident on the light-receiving part 21. On the other hand, the light irradiated from the irradiation part 20a is reflected by the reflector 22, but for example... Figure 14 As shown by the dashed arrow, the light is blocked by the substrate W in the passing area A near the processing component 12-2, so it does not incident on the light-receiving part 21.

[0115] The control device 100 controls the illumination of light from the irradiation unit 20a and the irradiation unit 20b at different times, and determines at what time the light-receiving unit 21 receives light. If the light-receiving unit 21 does not receive light from either the irradiation unit 20a or the irradiation unit 20b, the control device 100 can determine that the substrate W has passed through the passage area A near the processing assembly 12-1. On the other hand, if the light-receiving unit 21 receives light from the irradiation unit 20b, the control device 100 can determine that the substrate W has passed through the passage area A near the processing assembly 12-2. Furthermore, if the light-receiving unit 21 receives light from the irradiation unit 20a, the control device 100 can determine that the substrate W has not passed through either the passage area A near the processing assembly 12-1 or the processing assembly 12-2. Figure 14 In the illustrated structure, the number of light-receiving parts 21 can be reduced compared to existing judgment methods.

[0116] Furthermore, the judgment method of this embodiment can also be applied when the processing component 12, load locking component 13 and other devices are arranged in three or more adjacent positions in the horizontal direction. Figure 15 This diagram illustrates another example of the optical path of light irradiating the substrate W in the fourth embodiment. Figure 15 In the example, the light-receiving part 21 has light-receiving parts 21a, 21b, 21c, and 21d. Additionally, in... Figure 15 In the example, reflectors 22a, 22b, 22c, 22d, and 22e are provided.

[0117] When the substrate W is fed into the processing assembly 12-1, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20, for example... Figure 15As shown, the reflection position Pa on the substrate W passing through the passage area A is reflected and incident on the light-receiving part 21a. In this case, the light irradiated from the irradiation part 20 does not incident on the light-receiving parts 21b, 21c, and 21d. When the control device 100 receives light from the light-receiving part 21a, it can determine that the substrate W has passed through the passage area A near the processing assembly 12-1. Furthermore, when the control device 100 ejects the substrate W from the processing assembly 12-1, it can also determine whether the substrate W has passed through the passage area A near the processing assembly 12-1 in the same way.

[0118] Additionally, when the substrate W is fed into the processing assembly 12-2, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20, for example... Figure 15 As shown, the light is reflected by reflectors 22a and 22b. The light reflected by reflectors 22a and 22b illuminates the passage area A near the processing assembly 12-2. The light illuminating the passage area A near the processing assembly 12-2 is reflected at the reflection position Pb on the substrate W that passes through the passage area A and then incident on the light-receiving part 21b. In this case, the light irradiated from the irradiation part 20 does not incident on the light-receiving parts 21a, 21c, and 21d. When the control device 100 receives light from the light-receiving part 21b, it can determine that the substrate W has passed through the passage area A near the processing assembly 12-2. Furthermore, when the control device 100 ejects the substrate W from the processing assembly 12-2, it can also determine whether the substrate W has passed through the passage area A near the processing assembly 12-2 in the same way.

[0119] Additionally, when the substrate W is fed into the processing assembly 12-3, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20, for example... Figure 15 As shown, light reflected by mirrors 22a to 22d illuminates the passage area A near the processing assembly 12-3. The light illuminating the passage area A near the processing assembly 12-3 is reflected at reflection position Pc on the substrate W that passes through the passage area A and then incident on the light-receiving section 21c. In this case, light irradiated from the irradiation section 20 does not incident on the light-receiving sections 21a, 21b, and 21d. When the control device 100 receives light from the light-receiving section 21c, it can determine that the substrate W has passed through the passage area A near the processing assembly 12-3. Furthermore, when the control device 100 ejects the substrate W from the processing assembly 12-3, it can also determine whether the substrate W has passed through the passage area A near the processing assembly 12-3 using the same method.

[0120] Furthermore, when the light-receiving part 21d receives light from the irradiation part 20, the control device 100 can determine that the substrate W has not passed through any of the passing areas A near the processing component 12-1, near the processing component 12-2, and near the processing component 12-3. Figure 15 In this structure, the number of irradiation sections 20 can be reduced compared to existing judgment methods. Furthermore, if none of the light-receiving sections 21a to 21c receive light from the irradiation section 20, the control device 100 can determine that the substrate W has not passed through any passage area A. In this case, the reflector 22e and the light-receiving section 21d are unnecessary.

[0121] In addition, as other examples, for example Figure 16 As shown, it is also possible to determine which of the processing components 12-1 to 12-3 the substrate W is sent to by determining which of the irradiation units 20a to 20c the light receiving unit 21 receives light from. Figure 16 This is a diagram showing another example of the optical path of light irradiating the substrate W in the fourth embodiment.

[0122] When the substrate W is fed into the processing assembly 12-1, light irradiating the passing area A near the processing assembly 12-1 from the irradiation section 20a, for example... Figure 16 As shown, light is reflected at reflection position Pa on the substrate W that passes through region A. The light reflected at reflection position Pa is reflected by mirrors 22a to 22d and then incident on the light-receiving part 21. On the other hand, light irradiated from the irradiation part 20b to the region A near the processing assembly 12-2 and light irradiated from the irradiation part 20c to the region A near the processing assembly 12-3 are not reflected by the substrate W, so they do not incident on the light-receiving part 21.

[0123] Additionally, when the substrate W is fed into the processing assembly 12-2, light irradiating the passing area A near the processing assembly 12-2 from the irradiation section 20b, for example... Figure 16 As shown, the light reflected at the reflection position Pb on the substrate W passing through the passage area A is reflected. The light reflected at the reflection position Pb is reflected by the reflector 22c and the reflector 22d respectively, and then incident on the light receiving part 21. On the other hand, the light irradiated from the irradiation part 20a to the passage area A near the processing assembly 12-1, and the light irradiated from the irradiation part 20c to the passage area A near the processing assembly 12-3 are not reflected by the substrate W, and therefore do not incident on the light receiving part 21.

[0124] Additionally, when the substrate W is fed into the processing assembly 12-3, light irradiating the passing area A near the processing assembly 12-3 from the irradiation section 20c, for example... Figure 16As shown, the light at the reflection position Pc on the substrate W passing through the passage area A is reflected. The light reflected at the reflection position Pc is incident on the light-receiving part 21. On the other hand, the light irradiated from the irradiation part 20a to the passage area A near the processing component 12-1, and the light irradiated from the irradiation part 20b to the passage area A near the processing component 12-2 are not reflected by the substrate W, so they do not incident on the light-receiving part 21.

[0125] The control device 100 controls the illumination of each of the irradiation units 20a to 20c at different times and determines at what time the light-receiving unit 21 receives light. When the light-receiving unit 21 receives light from the irradiation unit 20a, the control device 100 can determine that the substrate W passes through the passage area A near the processing assembly 12-1. Similarly, when the light-receiving unit 21 receives light from the irradiation unit 20b, the control device 100 can determine that the substrate W passes through the passage area A near the processing assembly 12-2. Furthermore, when the light-receiving unit 21 receives light from the irradiation unit 20c, the control device 100 can determine that the substrate W passes through the passage area A near the processing assembly 12-3.

[0126] Furthermore, if the light-receiving section 21 does not receive light from any of the irradiation sections 20a to 20c, the control device 100 can determine that the substrate W has not passed through any passage area A. Figure 16 In the illustrated structure, the number of light-receiving parts 21 can be reduced compared to existing judgment methods.

[0127] [other]

[0128] Furthermore, the technology disclosed in this application is not limited to the above-described embodiments, and various modifications can be made within the scope of its spirit.

[0129] For example, in the embodiments described above, the irradiation section 20 irradiates light obliquely onto the upper surface of the substrate W that passes through the passage region A, but preferably the light irradiated from the irradiation section 20 is irradiated onto the region of the substrate W where no element is formed. This prevents the light irradiated from the irradiation section 20 from being diffusely reflected by the elements formed on the substrate W, thus preventing a reduction in the amount of light incident on the light-receiving section 21.

[0130] Furthermore, when the irradiation unit 20 irradiates light onto the substrate W passing through the passage area A, it can also irradiate light onto the back side of the surface on which the element is formed in the substrate W. In this case, it is also possible to prevent the light irradiated from the irradiation unit 20 from being diffusely reflected by the element formed on the substrate W, thereby preventing a reduction in the amount of light incident on the light-receiving unit 21.

[0131] Furthermore, the embodiments disclosed herein should be considered illustrative rather than restrictive in all respects. In fact, the above-described embodiments can be implemented in various ways. In addition, the above-described embodiments can be omitted, substituted, or modified in various ways without departing from the appended claims and their spirit.

Claims

1. A conveying device, characterized in that, include: The conveying chamber is equipped with a conveying arm for conveying the substrate; A first chamber and a second chamber connected to and arranged vertically adjacent to the transport chamber; An irradiation unit obliquely irradiates light into a first passage area through which the substrate passes when it is transported between the transport chamber and the first chamber, and a second passage area through which the substrate passes when it is transported between the transport chamber and the second chamber, when the substrate is transported by the transport arm. A first light-receiving part receives light reflected from the irradiation part as the substrate, supported by the conveying arm, passes through the first passage area. The second light-receiving part receives the light reflected from the irradiation part as the substrate supported by the conveying arm passes through the second passage area; and The control device determines whether the substrate has passed through the first passing area or the second passing area based on whether the first light-receiving part and the second light-receiving part receive the light.

2. The conveying device as described in claim 1, characterized in that: The irradiation portion, the first light-receiving portion, and the second light-receiving portion are all arranged on the same side of the substrate relative to the substrate when passing through the first passing area or the second passing area.

3. The conveying device as described in claim 1 or 2, characterized in that: When the substrate passes through the first passing area or the second passing area, the irradiation unit irradiates light onto a region on the surface of the substrate forming an element, other than the region forming the element.

4. The conveying device as described in claim 1 or 2, characterized in that: The irradiation unit irradiates light onto the back side of the surface of the substrate forming the element when the substrate passes through the first passing area or the second passing area.

5. A conveying device, characterized in that, include: The conveying chamber is equipped with a conveying arm for conveying the substrate; A first chamber and a second chamber connected to and arranged vertically adjacent to the transport chamber; A first irradiation unit obliquely irradiates light onto a first passage area through which the substrate passes when it is transported between the transport chamber and the first chamber, as the transport arm transports the substrate. The second irradiation unit obliquely irradiates light onto the second passage area through which the substrate passes when it is transported between the transport chamber and the second chamber, as the transport arm transports the substrate. The light-receiving part receives light reflected from the substrate by the first irradiation part when the substrate supported by the conveying arm passes through the first passage area, and receives light reflected from the substrate by the second irradiation part when the substrate supported by the conveying arm passes through the second passage area. and The control device determines whether the substrate has passed through the first passing area or the second passing area based on whether the light-receiving part receives the light.

6. A conveying device, characterized in that, include: A conveyor arm for transporting substrates; An irradiation unit that, when the substrate is conveyed by the conveying arm, obliquely irradiates light onto a first passage area through which the substrate is to pass; A first light-receiving portion receives light reflected by the substrate when the substrate passes through the first passing area; A reflective portion that, when the substrate is not present in the first passing area, reflects the light irradiated from the irradiation portion to the second passing area; The second light-receiving part receives the light reflected from the reflective part when neither of the substrates exists in the first passing area nor the second passing area. The control device determines whether the substrate has passed through either the first passing area or the second passing area based on whether the first light-receiving part and the second light-receiving part receive the light.

7. A conveying device, characterized in that, include: A conveyor arm for transporting substrates; The first irradiation unit irradiates light obliquely into a first passage area through which the substrate is to pass when the conveying arm conveys the substrate; The second irradiation unit irradiates light obliquely into the second passage area through which the substrate is to pass when the conveying arm conveys the substrate; A reflective portion that, when the substrate is not present in the first passing area, reflects the light irradiated from the first irradiation portion to the second passing area; The light-receiving portion receives light reflected from the substrate by the second irradiation portion when the substrate passes through the second passage area, and receives light reflected from the reflective portion by the first irradiation portion when the substrate is not present in either the first passage area or the second passage area. and The control device determines whether the substrate has passed through either the first passing area or the second passing area based on whether the light-receiving part receives the light.

8. A conveying device, characterized in that, include: A conveyor arm for transporting substrates; An irradiation unit that, when the substrate is conveyed by the conveying arm, obliquely irradiates light onto a first passage area through which the substrate is to pass; A first light-receiving portion receives light reflected from the irradiation portion when the substrate passes through the first passing area; A first reflective portion, which reflects the light irradiated from the irradiation portion when the substrate is not present in the first passing area; The second reflector reflects the light reflected from the first reflector to the second passing area; The second light-receiving part receives the light reflected by the substrate when the substrate passes through the second passing area; and The control device determines whether the substrate has passed through either the first passing area or the second passing area based on whether the first light-receiving part and the second light-receiving part receive the light.

9. The conveying device as described in claim 8, characterized in that, It also includes a third reflective part, a fourth reflective part, and a third light-receiving part. When the substrate is not present in either the first or second passing region, the third reflective part reflects the light reflected from the second reflective part to the fourth reflective part. The fourth reflector reflects the light reflected from the third reflector into the third passing area. The third light-receiving part receives the light reflected onto the substrate when the substrate passes through the third passing area.

10. A conveying device, characterized in that, include: A conveyor arm for transporting substrates; The first irradiation unit irradiates light obliquely into a first passage area through which the substrate is to pass when the conveying arm conveys the substrate; The second irradiation unit irradiates light obliquely into the second passage area through which the substrate is to pass when the conveying arm conveys the substrate; A first reflective portion reflects the light reflected by the substrate from the first irradiation portion as the substrate passes through the first passing area; The second reflector reflects the light reflected by the first reflector. The light-receiving part receives light reflected from the substrate by the second irradiation part when the substrate passes through the second passage area, and receives light reflected from the first irradiation part and the second reflective part when the substrate is not present in the second passage area but is present in the first passage area. and The control device determines whether the substrate has passed through either the first passing area or the second passing area based on whether the light-receiving part receives the light.

11. A conveying method, characterized in that, include: Step a, when the substrate is transported between the transport chamber, which is provided with a transport arm for transporting the substrate, and the first chamber and the second chamber, which are arranged vertically adjacent to each other, the substrate is obliquely irradiated by the irradiation unit into the first passage area that the substrate is to pass through when transported between the transport chamber and the first chamber, and the second passage area that the substrate is to pass through when transported between the transport chamber and the second chamber. Step b: When the substrate supported by the conveying arm passes through the first passing area, determine whether the first light-receiving part receives the light reflected by the substrate from the irradiation part; Step c: When the substrate supported by the conveying arm passes through the second passage area, determine whether the second light-receiving part receives the light reflected by the substrate from the irradiation part; and Step d: Determine whether the substrate has passed through the first passing area or the second passing area based on whether the first light-receiving part and the second light-receiving part receive the light.

Images