Ultraviolet irradiation device

Abstract

The present application provides a kind of ultraviolet irradiation device, which is greatly miniaturized compared with existing configuration.The ultraviolet irradiation device includes: a lampshade, which is formed with a light extraction surface; an excimer lamp, which is housed at a position separated from the light extraction surface in a first direction; a first electrode block, which is arranged in contact with the outer surface of the light emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction; a second electrode block, which is arranged in contact with the outer surface of the light emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction at a position separated from the first electrode block in a second direction parallel to the tube axis of the excimer lamp; and a pressing member, which is arranged at least one of a position further away from the second electrode block than the first electrode block in the second direction and a position further away from the first electrode block than the second electrode block in the second direction, and abuts against the excimer lamp.

Description

Technical Field

[0001] This invention relates to an ultraviolet irradiation device. Background Technology

[0002] Previously, small ultraviolet irradiation devices equipped with excimer lamps as light sources have been developed (see Patent Document 1 below). Furthermore, the ultraviolet irradiation device disclosed in Patent Document 1 below is primarily envisioned for the treatment of skin diseases.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-164417 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] Figure 23 This diagram schematically illustrates the structure of the small ultraviolet irradiation device disclosed in Patent Document 1. The ultraviolet irradiation device 100 includes a lamp housing 103 and a light irradiation window 104 housed within a housing 102 including a handle 101. An excimer lamp 110 emitting ultraviolet light is built into the lamp housing 103.

[0008] Figure 24 This diagram schematically illustrates the structure of the excimer lamp 110. The excimer lamp 110 has: a cylindrical outer tube 121; and a cylindrical inner tube 122 disposed coaxially with the outer tube 121 inside the outer tube 121 and having a smaller inner diameter than the outer tube 121. The outer tube 121 and the inner tube 122 are sealed at their ends in the direction d1, forming an annular luminescent space between them, within which a luminescent gas 123G is sealed.

[0009] The outer wall of the outer tube 121 is provided with a mesh-like or perforated outer electrode 124, and the inner wall of the inner tube 122 is provided with a film-like inner electrode 125 made of stainless steel or aluminum. The outer electrode 124 and the inner electrode 125 are electrically connected to a power supply unit 126 capable of generating high-frequency AC voltage.

[0010] By applying a high-frequency alternating voltage between the outer electrode 124 and the inner electrode 125 through the power supply unit 126, a voltage is applied to the luminescent gas 123G via the tubes of the outer tube 121 and the inner tube 122, generating discharge plasma within the discharge space containing the luminescent gas 123G. As a result, the atoms of the luminescent gas 123G are excited into a quasi-molecular state, and quasi-molecular luminescence is generated when these atoms transition to the ground state.

[0011] However, Figure 24As illustrated above, the excimer lamp 110 is formed by arranging two tubes (121, 122) coaxially. Therefore, the housing 102 housing the excimer lamp 110 must be of a certain size. As described above, the ultraviolet irradiation device 100 described in Patent Document 1 is envisioned for the treatment of skin diseases; however, due to limitations in users and usage conditions, it has not yet been widely adopted. Figure 23 The shape and size shown will not be a major problem in practical use.

[0012] However, for example, for ordinary consumers to disinfect places in their homes such as toilets, kitchens, bathrooms, and shoes where bacteria are considered to easily multiply, a size and weight that are easy to transport are preferred. If intended for such a purpose, then having... Figure 23 The construction of the ultraviolet irradiation device 100, which uses the excimer lamp 110 as a light source, may cause practical problems.

[0013] Furthermore, while sterilization applications have been mentioned above, they are not limited to medical settings. Even in general industrial applications, as long as a smaller ultraviolet irradiation device is developed than before, the range of installation locations and usage areas can be expanded, thus making it effective.

[0014] In view of the above-mentioned problems, the object of the present invention is to provide an ultraviolet irradiation device that is significantly smaller than that of the prior art.

[0015] Technical solutions for solving the problem

[0016] The ultraviolet irradiation device of the present invention is characterized in that it comprises:

[0017] The lampshade forms a surface that allows light to be emitted;

[0018] An excimer lamp is housed within the lamp cover at a position separated from the light extraction surface in a first direction and emits ultraviolet light;

[0019] The first electrode block is disposed in contact with the outer surface of the light-emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction;

[0020] The second electrode block is disposed at a position separated from the first electrode block in a second direction parallel to the tube axis of the excimer lamp, and is in contact with the outer surface of the light-emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction; and

[0021] The pressing member is disposed at at least one of a position further away from the first electrode block in the second direction and a position further away from the first electrode block in the second direction, and abuts against the excimer lamp.

[0022] The aforementioned ultraviolet irradiation device includes a first electrode block and a second electrode block that contact the outer surface of the excimer lamp's light-emitting tube. These electrode blocks are respectively located at positions separated along the tube axis of the excimer lamp, contacting the outer surface of the excimer lamp's light-emitting tube. Therefore, the excimer lamp can discharge using a simple straight tube structure, thus eliminating the need for the structure commonly used in conventional excimer lamps, which involves concentrically arranged double-layered tubes with a luminescent gas sealed between the inner and outer tubes; that is, the so-called "double-layered tube structure" is unnecessary.

[0023] As an example, the excimer lamp in the ultraviolet irradiation device has a tube body with a length of 15 mm or more and 200 mm or less in the tube axis direction (second direction) and an outer diameter of 2 mm or more and 16 mm or less.

[0024] If a voltage is applied between the first electrode block and the second electrode block, light is emitted primarily within the tube of the excimer lamp located between these electrode blocks. The ultraviolet light generated by this emission travels towards the light extraction surface and is extracted to the outside of the ultraviolet irradiation device via the light extraction surface. Since both the first and second electrode blocks are structured to contact the outer surface of the excimer lamp's light-emitting tube from the side opposite to the light extraction surface in the first direction, the obstruction of the ultraviolet light traveling towards the light extraction surface by these electrode blocks is prevented.

[0025] However, as described above, when the ultraviolet irradiation device according to the present invention is conceived as a small device, it is also considered that it should be portable by a user. In this case, with the first electrode block and the second electrode block both having a structure in which the excimer lamp's light-emitting tube contacts the outer surface of the excimer lamp from the side opposite to the light extraction surface in the first direction, it is conceivable that the position of the excimer lamp inside the lamp cover may shift during transport. For example, if the position of the excimer lamp shifts in the first direction, sufficient contact with the electrode block cannot be ensured, and it is possible that insufficient discharge will not be formed when voltage is applied, or the discharge state may change. Furthermore, this problem is not limited to transport; even when mounted on other machinery, it may occur due to vibrations generated during the operation of that machinery.

[0026] In view of this problem, the inventors of the present invention first investigated the case of installing a pressing member to press the excimer lamp from the side opposite to the electrode block in a first direction. However, when the position opposite to the electrode block in the first direction becomes the light extraction surface side, installing the pressing member at this position may obstruct the travel of ultraviolet rays.

[0027] In contrast, according to the ultraviolet irradiation device of the present invention, the pressing member is disposed at at least one of a position further away from the second electrode block than the first electrode block in the second direction, and a position further away from the first electrode block than the second electrode block in the second direction. When a voltage is applied to the two electrode blocks, the excimer lamp emits the strongest light at the position sandwiched between the two electrode blocks in the second direction. Since the pressing member is disposed further outward than the emitting area, the obstruction of ultraviolet light from the emitting area toward the light extraction surface is significantly suppressed.

[0028] Therefore, based on the above structure, a small ultraviolet irradiation device that maintains stable light emission and suppresses the decrease in light extraction efficiency has been realized.

[0029] Alternatively, the pressing member may include an elastic metal member.

[0030] The pressing member is configured to contact the outer surface of the excimer lamp's light-emitting tube from the side opposite to the first electrode block and the second electrode block in the first direction.

[0031] According to this structure, the elastic force of the elastic member allows stress to be applied to the excimer lamp from the side opposite to the two electrode blocks in a first direction. As a result, the contact state between the excimer lamp and the electrode blocks can be stabilized. Furthermore, by using a pressing member made of metal, degradation relative to ultraviolet light can be suppressed.

[0032] Alternatively, the pressing member may be positioned in a direction that is separated from the first electrode block and the second electrode block in the second direction.

[0033] According to the above structure, since the pressing member is positioned separately from the electrode block, the situation where the pressing member becomes the starting point of discharge is prevented. As a result, the instability of the discharge state is suppressed.

[0034] Alternatively, the pressing member may have a flat portion and a curved portion by bending a portion of a metal sheet, and the curved portion constitutes the elastic member.

[0035] The lampshade has:

[0036] The first housing has a groove and a light extraction surface that allow the flat portion of the pressing member to be inserted; and

[0037] The second housing is equipped with the first electrode block and the second electrode block.

[0038] According to the above structure, by arranging the excimer lamp in such a way that the flat portion of the pressing member is embedded relative to the first housing, and the outer surface of the light-emitting tube contacts the two electrode blocks relative to the second housing on which the electrode blocks are mounted, the two housings are integrated, thereby enabling the excimer lamp to be installed inside the lampshade in a stable contact with the electrode blocks. That is, a small ultraviolet irradiation device with a stable discharge state can be manufactured through simple operations. Furthermore, since the pressing member can be installed in the first housing without the use of adhesives, even if the light emission continues, the possibility of the pressing member detaching from the first housing can be prevented.

[0039] Alternatively, the pressing member may have a slit formed in a portion of the curved portion, and may contact the outer surface of the excimer lamp's light-emitting tube at two or more locations in a third direction orthogonal to the first and second directions, separated by the slit.

[0040] According to this structure, the excimer lamp can be pressed towards the electrode block at multiple locations relative to the light extraction surface. This improves the stability of the excimer lamp's contact with the electrode block.

[0041] Alternatively, the pressing member may have a fastening portion that is fastened to at least one of the first electrode block and the second electrode block from the light extraction surface side in the first direction.

[0042] The pressing member, located on the outer side of the fastening part in the second direction, contacts the outer surface of the light-emitting tube of the excimer lamp from the light extraction surface side.

[0043] Even with this structure, because the pressing member contacts the outer surface of the excimer lamp's light-emitting tube at a position further outward than the electrode block, it is less likely to obstruct ultraviolet light traveling towards the light extraction surface. Therefore, a compact ultraviolet irradiation device that maintains stable light emission and suppresses the reduction in light extraction efficiency is achieved.

[0044] As a more specific example, the pressing member may have: a recess for embedding the excimer lamp by bending a portion of a metal sheet; and a connecting portion extending in the second direction from the fastening portion side toward the recess side.

[0045] The connecting portion is formed at a position where it has been displaced relative to the recess in a third direction orthogonal to the first and second directions.

[0046] Alternatively, the ultraviolet irradiation device may have a plurality of excimer lamps arranged separately in a third direction orthogonal to the first and second directions.

[0047] At least one of the pressing members is configured to contact the plurality of excimer lamps.

[0048] According to this structure, since multiple excimer lamps are mounted inside the lamp cover, high-output ultraviolet light can be emitted from the light extraction surface. Furthermore, since a pressing member is configured to suppress the displacement of the multiple excimer lamps in the first direction, an ultraviolet irradiation device that can reduce the number of components and maintain stable light emission is realized.

[0049] Invention Effects

[0050] According to the present invention, a small ultraviolet irradiation device is realized that maintains stable light emission and suppresses the reduction of light extraction efficiency. Attached Figure Description

[0051] Figure 1 This is a perspective view schematically showing the appearance of the ultraviolet irradiation device according to the first embodiment.

[0052] Figure 2 From Figure 1 A perspective view of the main body and cover of the lampshade of the ultraviolet irradiation device is provided.

[0053] Figure 3 It is a three-dimensional diagram schematically showing the structure of the electrode block and excimer lamp in an ultraviolet irradiation device.

[0054] Figure 4 From Figure 3 A stereoscopic view with a changed viewpoint.

[0055] Figure 5 From Figure 4 The diagram of the excimer lamp is omitted, and a three-dimensional view is shown schematically illustrating the structure of the electrode block.

[0056] Figure 6 Observing from the +Z direction Figure 3 A schematic top view of a 3D model.

[0057] Figure 7 This is an example of the emission spectrum of an excimer lamp containing KrCl in the luminescent gas.

[0058] Figure 8 It is a schematic top view when viewed from the side of the main housing opposite to the light extraction surface.

[0059] Figure 9 It is a schematic three-dimensional diagram showing only the excimer lamp, pressing component, and electrode block.

[0060] Figure 10 Viewed from the -X direction Figure 9 A schematic top view of the state.

[0061] Figure 11 It is a schematic three-dimensional diagram of the pressing component.

[0062] Figure 12 It is a schematic three-dimensional diagram used to illustrate the contact state between the pressing component and the excimer lamp.

[0063] Figure 13 Observed from the +Y direction Figure 9 A schematic top view of the state.

[0064] Figure 14 Observing from the +Z direction Figure 8 A schematic top view of the state.

[0065] Figure 15 This is a schematic top view of the first housing with the pressing component installed.

[0066] Figure 16 This is a schematic perspective view of the first housing before the pressing component is installed.

[0067] Figure 17 This is a schematic perspective view of the second housing with the electrode blocks installed.

[0068] Figure 18 This is a schematic perspective view of the second embodiment of the ultraviolet irradiation device.

[0069] Figure 19 From Figure 18 The structure is schematically represented in a three-dimensional diagram, with only the excimer lamp, electrode block, and pressing component extracted.

[0070] Figure 20 It is a schematic representation Figure 18 A three-dimensional view of the internal pressing component.

[0071] Figure 21 yes Figure 18 A schematic cross-sectional view of the XZ plane at a specified position under the condition.

[0072] Figure 22 It is a three-dimensional diagram schematically representing other structures of the electrode block.

[0073] Figure 23 This is a schematic diagram illustrating the structure of a conventional small ultraviolet irradiation device.

[0074] Figure 24 It is a schematic representation of being mounted on Figure 23 A diagram showing the structure of the excimer lamp in the ultraviolet irradiation device. Detailed Implementation

[0075] Embodiments of the ultraviolet irradiation device according to the present invention will be described with appropriate reference to the accompanying drawings. Furthermore, the following drawings are schematic illustrations, and the aspect ratios shown may not necessarily correspond to the actual aspect ratios. Additionally, the aspect ratios may not be consistent between the various drawings.

[0076] [First Implementation Method]

[0077] Figure 1 It is a three-dimensional diagram schematically showing the appearance of an ultraviolet irradiation device. Figure 2 From Figure 1 An exploded perspective view of the main body housing 22 and the cover 23 of the lampshade 2 of the ultraviolet irradiation device 1 is shown. Furthermore, in this embodiment, as described later, the main body housing 22 is configured to also include a first housing 22a and a second housing 22b.

[0078] In the following figures, the explanation refers to the XYZ coordinate system, where the extraction direction of ultraviolet L1 is defined as the X direction, and the plane orthogonal to the X direction is defined as the YZ plane. For more details, please refer to... Figure 2 As described later in the accompanying figures, the tube axis of the excimer lamp 3 is defined as the Y direction, and the direction orthogonal to both the X and Y directions is defined as the Z direction. The X direction corresponds to the "first direction", the Y direction corresponds to the "second direction", and the Z direction corresponds to the "third direction".

[0079] Furthermore, in the following explanation, when indicating direction, if a positive or negative orientation is distinguished, it will be written using positive and negative symbols, such as "+X direction" and "-X direction". If a direction is not distinguished by positive or negative, it will simply be written as "X direction". That is, in this specification, the use of "X direction" includes both "+X direction" and "-X direction". The same applies to the Y and Z directions.

[0080] like Figure 1 and Figure 2 As shown, the ultraviolet irradiation device 1 includes a lampshade 2 with a light extraction surface 10 formed on one side. The lampshade 2 includes a main housing portion 22 and a cover portion 23, and an excimer lamp 3 and electrode blocks (11, 12) are housed within the main housing portion 22. Furthermore, in this embodiment, an example is given where four excimer lamps 3 (3a, 3b, 3c, 3d) are housed within the lampshade 2 (see reference). Figure 3 However, the number of excimer lamps 3 can be one, two, three, or more than five. Electrode blocks (11, 12) constitute electrodes for supplying power to each excimer lamp 3.

[0081] In this embodiment, such as Figure 2As shown, an optical filter 21 is provided in the area of ​​the light extraction surface 10 that constitutes the cover portion 23. The characteristics of this optical filter 21 will be described later.

[0082] Figure 3 and Figure 4 From Figure 2 The main body housing 22 is omitted from the illustration, and only the electrode blocks (11, 12) and excimer lamps 3 (3a, 3b, 3c, 3d) are shown in perspective. Figure 3 and Figure 4 Only the viewing angle is different. Also, Figure 5 From Figure 4 The 3D view of the excimer lamp 3 is further omitted.

[0083] like Figure 3 and Figure 4 As shown, the ultraviolet irradiation device 1 of this embodiment includes four excimer lamps 3 (3a, 3b, 3c, 3d) arranged separately in the Z direction. In addition, two electrode blocks (11, 12) are arranged in contact with the outer surface of the light-emitting tube of each excimer lamp 3. Hereinafter, the electrode block 11 located on the -Y side will be referred to as "first electrode block 11", and the electrode block 12 located on the +Y side will be referred to as "second electrode block 12".

[0084] The first electrode block 11 and the second electrode block 12 are positioned separately in the Y direction. Figure 5 In the example shown, the first electrode block 11 is configured to have: a mounting region 11a that is shaped as a curved surface along the outer surface of the excimer lamp 3 and on which the excimer lamp 3 is mounted; and a conical surface 11b formed at a position separated from the excimer lamp 3 in the Z direction and inclined relative to the YZ plane. Similarly, the second electrode block 12 also has a mounting region 12a and a conical surface 12b.

[0085] Furthermore, the first electrode block 11 and the second electrode block 12 are made of a conductive material, preferably a material that exhibits reflectivity relative to ultraviolet light emitted from the excimer lamp 3. As an example, both the first electrode block 11 and the second electrode block 12 are made of Al, Al alloys, stainless steel, or the like.

[0086] The first electrode block 11 and the second electrode block 12 are both in contact with the outer surface of the light-emitting tube of each excimer lamp 3 (3a, 3b, 3c, 3d) and are configured to span each excimer lamp 3 in the Z direction.

[0087] Figure 6 This diagram schematically shows the positional relationship between the excimer lamp 3 and the electrode blocks (11, 12), corresponding to a schematic top view of the excimer lamp 3 viewed from the +Z direction. Figure 6The diagram only shows excimer lamp 3a, which is located on the -Z side among the four excimer lamps 3 (3a, 3b, 3c, 3d). The diagrams of the other excimer lamps (3b, 3c, 3d) are omitted. However, as mentioned above, the excimer lamps (3b, 3c, 3d) are also arranged in the +Z direction.

[0088] The excimer lamp 3 has a tube body with the Y-direction as its tube axis. At positions separated along the Y-direction, the outer surface of the light-emitting tube of the excimer lamp 3 is in contact with each electrode block (11, 12). A luminescent gas 3G is sealed within the tube body of the excimer lamp 3. When a high-frequency AC voltage of approximately 10 kHz to 5 MHz is applied between each electrode block (11, 12), the voltage is applied to the luminescent gas 3G through the tube body of the excimer lamp 3. At this time, a discharge plasma is generated within the discharge space containing the luminescent gas 3G, and the atoms of the luminescent gas 3G are excited to become excimer states. When these atoms transition to the ground state, excimer luminescence is generated.

[0089] The wavelength of ultraviolet L1 emitted from the excimer lamp 3 depends on the composition of the luminescent gas 3G. For example, when KrCl is contained in the luminescent gas 3G, the ultraviolet L1 emitted from the excimer lamp 3 exhibits a spectrum with a predominant peak wavelength around 222 nm (see reference). Figure 7 ).

[0090] In addition to KrCl, KrBr, ArF, etc., can also be used as the luminescent gas 3G. When KrBr is present in the luminescent gas 3G, the main peak wavelength of ultraviolet L1 emitted from the excimer lamp 3 is around 207 nm. When ArF is present in the luminescent gas 3G, the main peak wavelength of ultraviolet L1 emitted from the excimer lamp 3 is around 193 nm. Among these arbitrary gas types, the main emission wavelength of ultraviolet L1 generated from the excimer lamp 3 is in the band between 190 nm and 225 nm. In addition to the gas types mentioned above, inert gases such as argon (Ar) and neon (Ne) can also be mixed in.

[0091] In the case where the luminescent gas 3G contains KrCl, such as Figure 7 As shown, in the ultraviolet L1 spectrum, the light output is largely concentrated around 222 nm, which is the main peak wavelength. However, very little light output is observed in the band above 240 nm, which is of concern for human health. Therefore, an optical filter 21 is provided in the region constituting the light extraction surface 10 to block the light components in this band. That is, the optical filter 21 has the function of blocking ultraviolet rays above 240 nm and below 300 nm.

[0092] As described above, the excimer lamps 3 (3a, 3b, 3c, 3d) in the ultraviolet irradiation device 1 of this embodiment are configured such that the outer surface of their light-emitting tubes contacts the electrode blocks (11, 12). However, if their contact state is unstable, the voltage applied to each excimer lamp 3 will change, or insufficient voltage will be applied, resulting in potentially unstable discharge. From this viewpoint, the ultraviolet irradiation device 1 includes a pressing member 5 (see reference 5) for stabilizing the contact between the excimer lamps 3 (3a, 3b, 3c, 3d) and the electrode blocks (11, 12). Figures 8 to 14 (The following is for reference only.) Figures 8 to 14 The diagrams illustrate the construction of the pressing component 5.

[0093] Figure 8 This is a schematic top view of the -X side of the main body shell 22, that is, the side opposite to the light extraction surface 10, when viewed from the +X direction. Figure 9 This is a schematic three-dimensional diagram showing only the excimer lamp 3, the pressing component 5, and the electrode blocks (11, 12) removed. Figure 10 Observed from the +X side in the direction opposite to the direction of light extraction (-X direction). Figure 9 A schematic top view of the state. Figure 11 This is a schematic three-dimensional view of the pressing component 5.

[0094] Figure 12 This is a schematic perspective view illustrating the contact state between the pressing member 5 and the excimer lamp 3. For ease of explanation, the illustration of the excimer lamp 3c is omitted. Figure 13 Observed from the +Y direction Figure 9 A schematic top view of the state. Figure 14 Observing from the +Z direction Figure 8 A schematic top view of the state. However, in Figure 14 For ease of explanation, the wall surface of the main body shell 22 located on the -Z side is omitted from the illustration.

[0095] The electrode blocks (11, 12) are in contact with the excimer lamp 3 from the -X side, which is opposite to the light extraction direction. In contrast, the pressing member 5 is configured to be in contact with the excimer lamp 3 from the +X side.

[0096] The pressing member 5 is composed of an elastic member, and more specifically, of a metal member such as stainless steel. Particularly preferably, such as... Figure 11As shown, the pressing member 5 has a flat portion 5a and a bent portion 5b by bending a part of the plate, and an elastic member is formed through the bent portion 5b. Since the bent portion 5b of the pressing member 5 has an elastic force in the -X direction, the excimer lamp 3, whose outer surface of the light-emitting tube is in contact with the bent portion 5b, is pressed in a direction toward the electrode blocks (11, 12) located further on the -X side than the excimer lamp 3. As a result, the outer surface of the light-emitting tube of the excimer lamp 3 is stably in contact with the electrode blocks (11, 12).

[0097] Furthermore, the pressing member 5 is positioned in the Y direction on the outer side of the electrode blocks (11, 12) (see reference). Figure 8 , Figure 10 Therefore, although the pressing member 5 is located on the +X side, i.e. the light extraction side, of the excimer lamp 3, the position between the electrode blocks (11, 12) in the tube of the excimer lamp 3 mainly constitutes the discharge space, so it is not likely to obstruct the ultraviolet L1 traveling from the discharge space in the +X direction.

[0098] Furthermore, the pressing member 5 is separated from the electrode blocks (11, 12) in the Y direction and is electrically insulated from the electrode blocks (11, 12). As a result, even if a voltage is applied to the electrode blocks (11, 12) for luminescence, the pressing member 5 will not be energized, thus suppressing the possibility that the pressing member 5 will become the starting point of discharge. Therefore, it is less likely that the discharge will become unstable due to the setting of the pressing member 5.

[0099] like Figure 11 As shown, the pressing member 5 preferably forms a slit 5c in a portion of the curved portion 5b. By forming this slit 5c, the outer surface of the excimer lamp 3, which is circular when viewed along the tube axis (Y direction), contacts the pressing member 5 at multiple locations separated by the slit 5c (see reference). Figure 13 ).according to Figure 13 At two locations (A1, A2) in the Z direction, the outer surface of the excimer lamp 3's light-emitting tube contacts the pressing member 5. This stabilizes the contact between the excimer lamp 3 and the pressing member 5.

[0100] The pressing member 5 is more preferably configured to be mounted to the main housing 22 without the use of adhesive. If the pressing member 5 is mounted to the main housing 22 using adhesive, common adhesives have low resistance to ultraviolet light L1. Therefore, due to the continuous illumination of the excimer lamp 3, ultraviolet light L1 irradiates the adhesive, potentially causing it to deteriorate. If the adhesive performance decreases due to the deterioration of the adhesive, the pressing member 5 may detach from the main housing 22.

[0101] As a specific example of a method for mounting the pressing member 5 to the main body housing 22 without using adhesive, the main body housing 22 has a first housing 22a and a second housing 22b, and a groove 6 is formed on the first housing 22a side to allow the flat portion 5a of the pressing member 5 to be inserted (see reference). Figure 16 ). Figure 15 This is a schematic top view of the first housing 22a with the pressing member 5 installed.

[0102] Figure 16 This is a schematic perspective view of the first housing 22a before the pressing member 5 is installed. Additionally, in Figure 16 The diagram also includes a three-dimensional view of the pressing component 5.

[0103] like Figure 16 As shown, the pressing member 5 is installed at a predetermined location in the first housing 22a by inserting the flat portion 5a of the pressing member 5 into the groove 6 that is mounted to the first housing 22a. Here, as described above, in order to prevent the pressing member 5 from obstructing the travel of the ultraviolet L1, it is preferable to install the pressing member 5 on the end side in the Y direction. Therefore, the groove 6 is also preferably formed on the end side in the Y direction of the first housing 22a.

[0104] Furthermore, the electrode blocks (11, 12) can also be installed in the second housing 22b outside the first housing 22a (see reference). Figure 17 ). Figure 17 This is a schematic perspective view showing the excimer lamps 3 (3a, 3b, 3c, 3d) arranged in contact with the electrode blocks (11, 12) relative to the second housing 22b on which the electrode blocks (11, 12) are mounted. Figure 15 The first housing 22a in the state shown is relative to Figure 17 The second housing 22b, as shown, covers and integrates from the +X side, enabling the excimer lamps (3a, 3b, 3c, 3d) to make stable contact with the electrode blocks (11, 12). Figure 14 This is a schematic top view corresponding to the state in which the first housing 22a and the second housing 22b are integrated when viewed from the +Z direction.

[0105] [Second Implementation]

[0106] The second embodiment of the ultraviolet irradiation device will be described mainly in terms of its differences from the first embodiment.

[0107] Figure 18This is a schematic perspective view of a second embodiment of the ultraviolet irradiation device. In this embodiment, similarly to the first embodiment, the electrode blocks (11, 12) contact the outer surface of the excimer lamp 3's light-emitting tube from the -X side, and the pressing member 5 contacts the outer surface of the excimer lamp 3's light-emitting tube from the +X side. However, in this embodiment, the shape of the pressing member 5 differs from that in the first embodiment. Regarding this, refer to... Figures 19-21 Please provide an explanation.

[0108] Figure 19 It is a schematic three-dimensional view showing only the excimer lamps (3a, 3b), electrode blocks (11, 12) and pressing member 5. Figure 20 This is a perspective view schematically showing the pressing member 5 of this embodiment. Figure 21 yes Figure 18 A schematic cross-sectional view of the XZ plane at a specified position under the condition.

[0109] In this embodiment, such as Figure 19 As shown, the pressing member 5 is fixed relative to the electrode blocks (11, 12). More specifically, the pressing member 5 has a fastening portion 5d (see reference). Figure 20 The pressing member 5 and the electrode blocks (11, 12) are fastened via the fastening part 5d, for example by screws.

[0110] like Figure 20 As shown, the pressing member 5 has a recess 5e with a shape based on the outer surface of the light-emitting tube of the excimer lamp 3. Thus, as... Figure 21 As shown, after the excimer lamp 3 is placed on the +X side relative to the electrode blocks (11, 12), and the pressing member 5 is further installed from the +X side with the outer surface of the light-emitting tube of the excimer lamp 3 embedded in the recess 5e, the pressing member 5 can be fastened to the electrode blocks (11, 12) via the fastening part 5d. As a result, the excimer lamp 3 is pressed by the pressing member 5 from the +X side to the -X direction, i.e., the electrode block (11, 12) side, thus ensuring stable contact between the excimer lamp 3 and the electrode blocks (11, 12).

[0111] Furthermore, unlike the first embodiment, in this embodiment, the pressing member 5 is not separated from the electrode blocks (11, 12) in the Y direction. However, the recess 5e of the pressing member 5 into which the excimer lamp 3 is embedded, i.e., the region of the pressing member 5 located further towards the +X side than the excimer lamp 3, is located at the end further towards the Y direction than the electrode blocks (11, 12). More specifically, the pressing member 5 has a connecting portion 5f extending in the Y direction from the fastening portion 5d toward the recess 5e. Therefore, similarly to the first embodiment, the pressing member 5 is prevented from obstructing the ultraviolet L1 emitted from the excimer lamp 3 and traveling in the +X direction.

[0112] [Other Implementation Methods]

[0113] Other implementation methods will be described below.

[0114] <1> In the above embodiment, the case where both the first electrode block 11 and the second electrode block 12 have conical surfaces (11a, 11b) has been described. However, in this invention, whether each electrode block has a conical surface is arbitrary. For example, as Figure 22 As shown in the first electrode block 11, the portion other than the groove 11g into which the excimer lamp 3 is embedded can also be formed of a flat surface. The same applies to the second electrode block 12.

[0115] <2> When the ultraviolet irradiation device 1 is equipped with multiple excimer lamps 3, the arrangement position of two or more excimer lamps 3 in the X direction can also be shifted.

[0116] <3> In the above embodiments, the ultraviolet irradiation device 1 was described with an optical filter 21 provided on the light extraction surface 10. However, in this invention, whether or not the ultraviolet irradiation device 1 has an optical filter 21 is arbitrary. In particular, when the ultraviolet irradiation device 1 is provided in a situation where the possibility of irradiating the human body with ultraviolet L1 is extremely low, the optical filter 21 may not be provided.

[0117] Furthermore, in the above embodiment, the case where the main emission wavelength of the ultraviolet L1 emitted from the ultraviolet irradiation device 1 is in the band of 190 nm or more and 225 nm or less has been described; however, the present invention does not exclude the case where ultraviolet light with a main emission wavelength exceeding 225 nm is emitted. For example, the ultraviolet irradiation device 1 may also include an excimer lamp 3 that uses XeCl in the luminescent gas 3G and emits ultraviolet L1 with a main peak wavelength of 308 nm.

[0118] <4> In the above embodiment, a pressing member 5 is configured to contact a plurality of excimer lamps 3 arranged adjacent to each other in the Z direction from the +X side. However, it is also possible to configure a structure in which an independent pressing member 5 is provided for each excimer lamp 3.

[0119] Furthermore, in the above embodiment, pressing members 5 are provided at both ends of the excimer lamp 3 in the tube axis direction (Y direction). However, the present invention does not exclude a structure in which pressing members 5 are provided only at one end in the Y direction. Even in this case, compared with the case where pressing members 5 are not present, it is possible to stabilize the contact state between the excimer lamp 3 and the electrode blocks (11, 12).

[0120] Label Explanation

[0121] 1: Ultraviolet irradiation device

[0122] 2: Lampshade

[0123] 3: Excimer lamp

[0124] 3a, 3b, 3c, 3d: Excimer lamps

[0125] 3G: Emitting gas

[0126] 5: Pressing component

[0127] 5a: Flat area

[0128] 5b: Bend

[0129] 5c: Slit

[0130] 5d: Fastening part

[0131] 5e: Concave

[0132] 5f: Connecting part

[0133] 6: Groove

[0134] 11: First electrode block

[0135] 11a: Placement area

[0136] 11b: Conical surface

[0137] 11g: slot

[0138] 12: Second electrode block

[0139] 12a: Placement area

[0140] 12b: Conical surface

[0141] 22: Main body shell section

[0142] 22a: First shell

[0143] 22b: Second shell

[0144] 23: cover

[0145] 100: Ultraviolet irradiation device

[0146] 101: Control Department

[0147] 102: Shell

[0148] 103: Lamp Containment Department

[0149] 104: Light-illuminating window

[0150] 110: Excimer lamp

[0151] 121: Outer tube

[0152] 122: Inner tube

[0153] 123G: luminescent gas

[0154] 124: Outer electrode

[0155] 125: Inner electrode

[0156] 126: Power Supply Section

[0157] L1: Ultraviolet light

Claims

1. An ultraviolet irradiation device, characterized in that, include: The lampshade forms a surface from which light is emitted; An optical filter is disposed on the light extraction surface; An excimer lamp is housed within the lamp cover at a position separated from the light extraction surface in a first direction and emits ultraviolet light; The first electrode block is disposed in contact with the outer surface of the light-emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction; The second electrode block is positioned at a location separated from the first electrode block in a second direction parallel to the tube axis of the excimer lamp, and is arranged to contact the outer surface of the light-emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction. and The pressing member is disposed at at least one of two positions in the second direction that are further away from the second electrode block than the first electrode block, and at a position in the second direction that are further away from the first electrode block than the second electrode block, and abuts against the excimer lamp. The pressing component includes an elastic metal member. The pressing member is configured to contact the outer surface of the excimer lamp's light-emitting tube at a position in the first direction opposite to the first electrode block and the second electrode block, and in the second direction separated from the first electrode block or the second electrode block in the direction toward the end of the excimer lamp's light-emitting tube. The pressing member has an elastic force in the first direction.

2. The ultraviolet irradiation device according to claim 1, characterized in that, The pressing member is positioned in the second direction at a position separate from the first electrode block and the second electrode block.

3. The ultraviolet irradiation device according to claim 2, characterized in that, The pressing member has a flat portion and a curved portion by bending a portion of a metal sheet, and the curved portion constitutes the elastic member. The lampshade has: The first housing has a groove and a light extraction surface that allow the flat portion of the pressing member to be inserted; and The second housing is equipped with the first electrode block and the second electrode block.

4. The ultraviolet irradiation device according to claim 3, characterized in that, The pressing member has a slit formed in a portion of the curved section, and contacts the outer surface of the excimer lamp's light-emitting tube at two or more locations in a third direction orthogonal to the first and second directions, separated by the slit.

5. The ultraviolet irradiation device according to claim 1, characterized in that, The pressing member has a fastening portion that is fastened to the light extraction surface side in the first direction relative to at least one of the first electrode block and the second electrode block. The pressing member, located on the outer side of the fastening part in the second direction, contacts the outer surface of the light-emitting tube of the excimer lamp from the light extraction surface side.

6. The ultraviolet irradiation device according to claim 5, characterized in that, The pressing member has: a recess for embedding the excimer lamp by bending a portion of a metal sheet; and a connecting portion extending in the second direction from the fastening portion side toward the recess side. The connecting portion is formed at a position where it has been displaced relative to the recess in a third direction orthogonal to the first and second directions.

7. The ultraviolet irradiation device according to any one of claims 1 to 6, characterized in that, The ultraviolet irradiation device has a plurality of excimer lamps arranged separately in a third direction orthogonal to the first and second directions. At least one of the pressing members is configured to contact the plurality of excimer lamps.

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