A convenient grab lifting device for wafer boxes

Abstract

The present application relates to a kind of convenient grabbing lifting device for wafer box, with bearing frame, bearing frame is equipped with synchronous lifting mechanism, and wafer box grabbing mechanism is hung in the just below of synchronous lifting mechanism;Wafer box grabbing mechanism has clamping rack, three lifting steel wire ropes hang the clamping rack, and two parallelly arranged slide rails are arranged on the upper surface of clamping rack at front and rear positions, and two metal-made clamping moving blocks are also provided, the bottom of two clamping moving blocks is respectively installed on two slide rails by sliding block, and one L-shaped claw is respectively arranged on the inner side of two clamping moving blocks;Tension spring is also provided between two clamping moving blocks, and electromagnet is respectively arranged on the clamping rack of the outside of two clamping moving blocks;The overall structure of the device is more compact and small, saves longitudinal space, improves space utilization, so as to reduce the cost of suspension rail.

Description

Technical Field

[0001] This invention relates to the field of semiconductor integrated circuit material conveying equipment technology, and in particular to a convenient gripping and lifting device for wafer cassettes. Background Technology

[0002] With the development of the semiconductor industry, in order to improve semiconductor production efficiency, more and more companies engaged in transportation equipment manufacturing are investing in the research and development of automated wafer handling production lines, namely the Semiconductor Wafer Clean Automated Handling System (AMHS). This system can quickly and accurately transport clean wafers to their destination, which can greatly improve efficiency, shorten time, increase capacity, and enhance stability. It is a key handling equipment to meet the miniaturization requirements of semiconductors and the fine processing requirements of liquid crystal displays.

[0003] The three key components of this system are the transport trolley, the lifting device, and the gripping mechanism. Preliminary research and independent investigation revealed the following shortcomings in the existing lifting device and gripping mechanism: First, the four-belt lifting process cannot guarantee that each belt is simultaneously taut, making tilting during lifting easy; Second, the lifting device has a complex structure, and the gripping mechanism, located below it, significantly increases the cost of installing the guide rails due to the combined vertical volume of the two mechanisms; Third, the existing gripping mechanism is complex and has a heavy power supply, resulting in a large overall weight and increased load on the lifting device. Furthermore, the presence of the gripping motor necessitates a synchronous winding mechanism for the motor power cable and control signal cable; Fourth, the existing gripping mechanism typically only clamps and lifts from two directions, making it prone to slipping if the object being lifted is unbalanced. Summary of the Invention

[0004] The purpose of this invention is to address the above-mentioned issues by providing a convenient gripping and lifting device for wafer cassettes. This device has a more compact and smaller overall structure, saves longitudinal space, improves space utilization, and thus reduces the cost of suspension tracks.

[0005] The specific solution of the present invention is: a convenient gripping and lifting device for wafer cassettes, comprising a support frame, on which a synchronous lifting mechanism is mounted, and a wafer cassette gripping mechanism is suspended directly below the synchronous lifting mechanism; the synchronous lifting mechanism includes a wire rope reel A, a wire rope reel B, and a double-row reel, wherein wire rope reels A and B are coaxially arranged on one side of the top of the support frame via axle a, and the double-row reels are arranged on the other side of the top of the support frame via axle b, and axle a and axle b are driven synchronously by a synchronous belt, and axle a is driven by a belt motor; the double-row reels are composed of two coaxially arranged sub-reels m and n, wherein each of the wire rope reels A, B, and m has a lifting wire rope wound around it, and the lower ends of the three lifting wire ropes are jointly suspended from the wafer cassette gripping mechanism. The wafer cassette gripping mechanism includes a winding reel (n) for winding power and signal cables. The mechanism has a clamping frame suspended by three lifting steel wire ropes. Two parallel slide rails are positioned at the front and rear of the clamping frame. Two metal clamping blocks are also provided, with their bottoms mounted across the slide rails via sliders. Each of the two clamping blocks has an L-shaped claw on its inner side, arranged opposite each other to clamp the wafer cassette. A tension spring is located between the two clamping blocks, with its two ends connected to the blocks and positioned above the L-shaped claws. Electromagnets are mounted on the clamping frame on the outer sides of each clamping block, with one electromagnet corresponding to one block and attracting or releasing it.

[0006] Furthermore, in this invention, one of the two clamping moving blocks has an equivalent crank mechanism for clamping the side of the wafer cassette at a symmetrical position on both sides of the L-shaped claw. The equivalent crank mechanism includes a connecting rod and a rocker arm. One end of the connecting rod is hinged to the corresponding clamping moving block, and the other end of the connecting rod is rotatably connected to one end of the rocker arm. The other end of the connecting rod is rotatably connected to the side of the clamping frame. A clamping rubber block is provided with the front end of the rocker arm facing downwards. The clamping rubber block swings with the swing of the rocker arm.

[0007] Furthermore, the number of tension springs described in this invention is at least two.

[0008] Furthermore, in this invention, a linear travel switch is provided on the inner wall of one of the clamping moving blocks, which is used to detect the distance between the two clamping moving blocks.

[0009] Furthermore, the outer side of the support frame described in this invention is also provided with an air switch, a PLC controller, and a control panel.

[0010] Furthermore, the belt motor described in this invention is a servo motor.

[0011] Furthermore, in this invention, each of the wire rope reel A and wire rope reel B is provided with a guide wheel, which is mounted on the bearing frame.

[0012] The beneficial effects of this invention are as follows:

[0013] 1. The synchronous lifting mechanism of this invention distributes three lifting steel wire ropes in a triangular arrangement and uses a motor to drive the three lifting steel wire ropes, thereby achieving synchronous lifting of three points in a coplanar manner and ensuring the stability of the lifted object.

[0014] 2. The wafer cassette gripping mechanism of this invention adopts a combination of electromagnet + tension spring gripping + limit switch to achieve intelligent gripping and releasing. The electromagnet's attraction force is used to release the clamping moving block and the auxiliary clamping mechanism (equivalent to a crank mechanism), and the spring's tension force is used to clamp the clamping moving block and the auxiliary clamping mechanism (equivalent to a crank mechanism). This mechanism does not use a drive motor, has a compact structure, and reduces the load on the lifting mechanism.

[0015] 3. Automatic side auxiliary clamping, i.e., equivalent crank mechanism, uses the principle of crank-slider mechanism. By tightening and loosening the clamping moving block, the slider is made into an active moving part. This enables the gripping mechanism and the auxiliary clamping mechanism, i.e., the equivalent crank mechanism, to "clamp" and "grip" synchronously, and "release" and "release" synchronously. At the same time, it can achieve four-way clamping of the wafer cassette.

[0016] 4. The lifting and gripping mechanism of the present invention can be designed as a whole. The wafer box gripping mechanism can rise into the inner space of the synchronous lifting mechanism. The overall structure is more compact and small, saving longitudinal space and improving space utilization, thereby reducing the cost of the suspension track. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the axial direction structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the rear-view structure of the present invention;

[0019] Figure 3 This is a schematic diagram of the structure in the left-view direction of the present invention;

[0020] Figure 4 This is a schematic diagram of the axial structure of the synchronous lifting mechanism in this invention;

[0021] Figure 5 This is a schematic diagram of the axial side structure of the wafer cassette gripping mechanism in this invention;

[0022] Figure 6 yes Figure 5 A top-view structural diagram;

[0023] Figure 7 This is a schematic diagram of the connection of the components of the efficient crank mechanism in this invention.

[0024] In the diagram: 1—Wire rope reel A, 2—Axle a, 3—Wire rope reel B, 4—Guide wheel, 5—Synchronous belt, 6—Divider reel m, 7—Divider reel n, 8—Bearing frame, 9—Axle b, 10—Power line and signal line, 11—Lifting wire rope, 12—Control panel, 13—PLC controller, 14—Air switch, 15—Wafer box, 16—Wafer box gripping mechanism, 17—Belt motor, 18—Lifting block on wafer box, 19—Equivalent crank mechanism, 20—Electromagnet, 21—Linear travel switch, 22—Tension spring, 23—Clamping moving block, 24—Slider, 25—Slide rail, 26—Clamping frame, 27—L-shaped chuck, 28—Connecting rod, 29—Rock arm, 30—Clamping rubber block. Detailed Implementation

[0025] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present invention.

[0026] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., which indicate orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed when in use. They are only for the convenience of describing this invention or simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0027] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0028] See Figures 1 to 7This invention relates to a convenient gripping and lifting device for wafer cassettes, comprising a support frame 8, on which a synchronous lifting mechanism is mounted, and a wafer cassette gripping mechanism 16 is suspended directly below the synchronous lifting mechanism. The synchronous lifting mechanism includes a wire rope reel A1, a wire rope reel B3, and a double-row reel. Wire rope reels A1 and B3 are coaxially arranged on one side of the top of the support frame via axle a2, while the double-row reels are arranged on the other side of the top of the support frame via axle b9. A synchronous belt 5 drives axle a and b to rotate synchronously, and axle a is driven by a belt motor 17. The double-row reels are composed of two coaxially arranged sub-reels m6 and n7. Each of the wire rope reels A, B3, and m6 has a lifting wire rope 11 wound around it, and the lower ends of the three lifting wire ropes together suspend the wafer cassette gripper. The wafer cassette gripping mechanism includes a winding wheel n for winding power and signal lines 10; the wafer cassette gripping mechanism has a clamping frame 26, with three lifting steel wire ropes suspending the clamping frame. Two parallel slide rails 25 are arranged on the clamping frame at the front and rear positions, and two metal clamping moving blocks 23 are also provided. The bottoms of the two clamping moving blocks are respectively mounted across the two slide rails via sliders 24. Each of the two clamping moving blocks has an L-shaped claw 27 on its inner side, and the two L-shaped claws are arranged opposite each other to clamp the wafer cassette 15; a tension spring 22 is also provided between the two clamping moving blocks, with both ends connected to the two clamping moving blocks and positioned above the L-shaped claws; electromagnets 20 are respectively provided on the clamping frame on the outer side of each of the two clamping moving blocks, with one electromagnet corresponding to one clamping moving block and attracting or releasing it.

[0029] Furthermore, in this embodiment, one of the two clamping moving blocks is provided with an equivalent crank mechanism 19 for clamping the side of the wafer cassette at a symmetrical position on both sides of the L-shaped claw. The equivalent crank mechanism includes a connecting rod 28 and a rocker arm 29. One end of the connecting rod is hinged to the corresponding clamping moving block, and the other end of the connecting rod is rotatably connected to one end of the rocker arm. The other end of the connecting rod is rotatably connected to the side of the clamping frame 26. A clamping rubber block 30 is provided with the front end of the rocker arm facing downward. The clamping rubber block swings with the swing of the rocker arm.

[0030] Furthermore, in this embodiment, the number of tension springs is at least two.

[0031] Furthermore, in this embodiment, a linear travel switch 21 is provided on the inner wall of one of the clamping moving blocks. This linear travel switch is used to detect the distance between the two clamping moving blocks.

[0032] Furthermore, in this embodiment, the outer side of the supporting frame is also provided with an air switch 14, a PLC controller 13, and a control panel 12.

[0033] Furthermore, in this embodiment, the belt motor is a servo motor.

[0034] Furthermore, in this embodiment, each of the wire rope reel A and wire rope reel B is provided with a guide wheel 4, which is mounted on the bearing frame.

[0035] In this invention, the synchronous lifting mechanism includes three lifting wire ropes. Two of these ropes originate from corresponding wire rope reels, pass through guide wheels, and connect to holes in the clamping frame of the wafer cassette gripping mechanism. The third lifting wire rope emerges directly from the reel m, extends, and connects to a corresponding hole on the clamping frame of the gripping mechanism. The three lifting wire ropes are evenly distributed, forming an equilateral triangle. Power and signal lines are wound around the reel n.

[0036] The wafer cassette gripping mechanism includes two clamping moving blocks, two L-shaped jaws, two equivalent crank mechanisms, two tension springs, two electromagnets, and one linear travel switch. The electromagnets are located at both ends of the clamping frame. The clamping moving blocks are mounted on slide rails via sliders, allowing for left and right movement. Each clamping moving block has an L-shaped jaw, and the two clamping moving blocks are connected by two tension springs. The wafer cassette gripping mechanism utilizes the electromagnets and tension springs to clamp and release the wafer cassette. Specifically, when energized, the electromagnets generate an attractive force, which is greater than the spring tension, dragging the clamping moving blocks mounted on the sliders, causing the two clamping moving blocks to separate and releasing the wafer cassette. When de-energized, the electromagnets lose their attractive force on the clamping moving blocks, and under the extension and contraction of the springs, the clamping moving blocks retract, and the L-shaped jaws clamp the wafer cassette.

[0037] Furthermore, a linear travel switch is installed on the clamping moving block. When the distance between the clamping moving block and the wafer box exceeds the set threshold, the linear travel switch will be triggered, thereby realizing the conduction and disconnection of the electromagnet circuit current and achieving automatic clamping.

[0038] In this invention, the connecting rod installed on the clamping frame and the clamping moving block drives the rocker arm to move, which is equivalent to a crank mechanism, thereby achieving the clamping of the clamping rubber block to the side of the wafer cassette; when the clamping moving block separates under the attraction of the electromagnet, the clamping moving block drives the rocker arm to move outward through the connecting rod, thereby releasing the clamping rubber block from the wafer cassette.

[0039] Furthermore, in this invention, a position sensor is installed on the wafer cassette gripping mechanism. When the gripping mechanism is raised into the synchronous lifting device and the bottom position of the lifting mechanism is less than 10mm, the position sensor will send a signal to the control panel. The control panel will then send a signal to the driver to stop the belt motor, thus preventing the gripping mechanism from rising further.

[0040] The synchronous lifting mechanism in this invention distributes three lifting steel wire ropes in a triangular arrangement and uses a motor to drive the three lifting steel wire ropes, thereby achieving synchronous lifting of the three points in a coplanar manner and ensuring the stability of the lifted object.

[0041] The wafer cassette gripping mechanism of this invention adopts a combination of electromagnet, tension spring gripping, and limit switch to achieve intelligent gripping and release. The electromagnet's attraction is used to release the clamping moving block and the auxiliary clamping mechanism (equivalent to a crank mechanism), while the spring's tension is used to clamp the clamping moving block and the auxiliary clamping mechanism (equivalent to a crank mechanism). This mechanism does not use a drive motor, has a compact structure, and reduces the load on the lifting mechanism.

[0042] The automatic side-assisted clamping mechanism, also known as the equivalent crank mechanism, utilizes the principle of a crank-slider mechanism. By tightening and loosening the clamping moving block, the slider functions as the active moving part, enabling the gripping mechanism and the auxiliary clamping mechanism (equivalent crank mechanism) to synchronize "clamping" and "gripping" as well as "releasing" and "unlocking". It can also achieve four-way clamping of the wafer cassette.

[0043] The lifting and gripping mechanism of the present invention can be designed as a whole. The wafer box gripping mechanism can rise into the inner space of the synchronous lifting mechanism. The overall structure is more compact and small, saving longitudinal space and improving space utilization, thereby reducing the cost of the suspension track.

Claims

1. A convenient gripping and lifting device for wafer cassettes, comprising a support frame, characterized in that: The supporting frame is equipped with a synchronous lifting mechanism, and a wafer cassette gripping mechanism is suspended directly below the synchronous lifting mechanism. The synchronous lifting mechanism includes wire rope reels A and B, and a double-row reel. Wire rope reels A and B are coaxially arranged on one side of the top of the supporting frame via axle a, and the double-row reels are arranged on the other side of the top of the supporting frame via axle b. Axle a and axle b are driven synchronously by a synchronous belt, and axle a is driven by a belt motor. The double-row reels are composed of two coaxially arranged sub-reels m and n. Each of the wire rope reels A, B, and m has a lifting wire rope wound on it. The lower ends of the three lifting wire ropes are used to suspend the wafer cassette gripping mechanism. Sub-reel n is used to wind the electric wire rope. The wafer cassette gripping mechanism includes a clamping frame, which is suspended by three lifting steel wire ropes. Two parallel slide rails are positioned at the front and rear of the clamping frame, along with two metal clamping blocks. The bottoms of the two clamping blocks are mounted across the two slide rails via sliders. Each of the two clamping blocks has an L-shaped claw on its inner side, which is arranged opposite to each other to clamp the wafer cassette. A tension spring is also provided between the two clamping blocks, with its two ends connected to the two clamping blocks and positioned above the L-shaped claws. Electromagnets are installed on the clamping frame on the outer sides of each of the two clamping blocks, with one electromagnet corresponding to one clamping block and attracting or releasing it.

2. The convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: On the inner side of one of the two clamping moving blocks, at symmetrical positions on both sides of the L-shaped jaw, there is an equivalent crank mechanism for clamping the side of the wafer cassette. The equivalent crank mechanism includes a connecting rod and a rocker arm. One end of the connecting rod is hinged to the corresponding clamping moving block, and the other end of the connecting rod is rotatably connected to one end of the rocker arm. The other end of the connecting rod is rotatably connected to the side of the clamping frame. A clamping rubber block is provided with the front end of the rocker arm facing downward. The clamping rubber block swings with the swing of the rocker arm.

3. The convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: The number of tension springs is at least two.

4. A convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: A linear travel switch is also provided on the inner wall of one of the clamping moving blocks, which is used to detect the distance between the two clamping moving blocks.

5. A convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: The outer side of the support frame is also equipped with an air switch, a PLC controller, and a control panel.

6. A convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: The belt motor is a servo motor.

7. A convenient gripping and lifting device for a wafer cassette according to claim 1, characterized in that: Each of the wire rope reel A and wire rope reel B is also provided with a guide wheel, which is mounted on the bearing frame.

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