Radio frequency test data analysis method, component and radio frequency test system

Abstract

The application provides a radio frequency test data analysis method, comprising: obtaining radio frequency test data files and device pairing information; and obtaining intrinsic radio frequency test data of a device after de-embedding processing, so that fast and effective analysis and result display of a large amount of radio frequency data can be realized. The application also provides a radio frequency test data analysis component, which automatically executes the radio frequency test data analysis method of the application and has corresponding advantages, such as high data reliability and good safety. The application also provides a radio frequency test system, comprising a measurement module, an analysis module and a control module; the control module is in communication connection with the measurement module and the analysis module; full automation of radio frequency test can be realized, which greatly facilitates users in data test, data management, data processing and data analysis of device radio frequency test, and further improves work efficiency.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor design and manufacturing technology, and particularly relates to a radio frequency (RF) test data analysis method, components, and a corresponding RF test system. Background Technology

[0002] During wafer fabrication, radio frequency (RF) testing is necessary to ensure device quality. RF testing is crucial for accurate dielectric layer modeling. RF testing of Device Under Test (DUT) typically utilizes a padding structure, a design specifically for placing RF probes. Generally, the DUT and padding are on-chip structures formed on the same silicon wafer. Therefore, RF test data inevitably contains parasitic RF errors. To obtain the intrinsic characteristics of the device, appropriate methods are needed to remove the influence of these parasitic elements. This process of removing parasitic elements is generally called de-embedding. Different de-embedding methods exist for different test pads; the most common is the open-short method. This method uses open-circuit and short-circuit test pads respectively to deduct the parallel admittance and series impedance effects of the contact pads and metal interconnects.

[0003] Scattering parameters, also known as S-parameters, are a set of important parameters in microwave transmission. Since it is generally difficult to measure current or voltage at high frequencies, it is necessary to measure scattering parameters. Common S-parameters include: S12 (reverse transmission coefficient, i.e., isolation); S21 (forward transmission coefficient, i.e., gain); S11 (input reflection coefficient, i.e., input return loss); and S22 (output reflection coefficient, i.e., output return loss). With the surge in the number of devices under test (DUTs) and the increasing demands for test specifications, test data has become massive, and the volume of data is growing rapidly. Faced with this massive amount of test data, the need for rapid and effective analysis to visualize the test structure and further analyze scattering parameters has become increasingly urgent. If an RF test system cannot quickly and effectively analyze large amounts of test data and visualize the test results, it will be extremely detrimental to the application of RF testing and semiconductor manufacturing technology.

[0004] Therefore, it is necessary to study a method for rapidly processing and analyzing RF test data and a corresponding RF test system to further promote the in-depth development of semiconductor design and manufacturing technologies and the widespread application of RF test technology. Summary of the Invention

[0005] This invention addresses all or part of the problems of the prior art. One aspect of this invention provides a radio frequency (RF) test data analysis method suitable for rapidly processing and parsing large amounts of RF test data. Simultaneously, this invention also provides a corresponding data analysis component for executing the data analysis method. Another aspect of this invention provides an RF test system capable of managing and analyzing test data.

[0006] This invention provides a method for analyzing radio frequency (RF) test data, comprising: acquiring an RF test data file and device pairing information, and performing de-embedding processing to obtain intrinsic RF test data of the device; wherein, the RF test data file includes device RF test data and padding RF test data (the device RF test data is obtained by mounting the device on the padding test structure and performing RF testing; the padding test data is obtained by performing RF testing on the padding test structure); the device pairing information is the pairing information between the device and the padding test structure, recording the padding test structure used by the device during RF testing; the de-embedding processing includes: extracting the RF test data from the RF test data file according to the device pairing information; and performing de-embedding on the device RF test data using de-embedding rules to obtain intrinsic RF test data of the device. By acquiring the RF test data file containing device RF test data and test structure RF test data, along with the device pairing information, it is possible to comprehensively analyze the data generated during RF testing. Combined with the device pairing information, all or part of the RF test data (including device RF test data and test structure RF test data) in the RF test data file can be automatically extracted. This facilitates the accurate and efficient removal of parasitic RF errors caused by the inclusion of test structure RF test data during de-embedding processing. Combined with preset de-embedding rules, comprehensive and rapid data parsing is achieved to obtain the intrinsic RF test data of the device.

[0007] The RF test data analysis method further includes: generating a de-embedding module. The generation process includes: acquiring and parsing preset de-embedding rules, identifying input variables in the de-embedding rules; determining the RF test data in the RF test data file corresponding to the input variables based on the device pairing information, and automatically encapsulating the de-embedding rules and the data acquisition method of their input variables together to generate the de-embedding module; the de-embedding process is implemented by executing the de-embedding module.

[0008] The RF test data analysis method further includes: providing a compilation environment for de-embedding rules, and allowing users to write de-embedding algorithms for device RF test data as the de-embedding rules. By providing a compilation environment for the de-embedding rules, it can be better adapted to actual production applications. Users can write de-embedding rules according to the specific test structure, product, and process conditions, resulting in higher data analysis efficiency and more accurate results that conform to actual production.

[0009] The RF test data of the test structure includes: open RF test data and short RF test data.

[0010] In general, the RF test data analysis method also includes generating RF test data analysis charts for the device using the obtained intrinsic RF test data of the device and a preset chart template. The RF test data analysis results are displayed graphically using the preset chart template, facilitating intuitive acquisition of the analysis results and guiding subsequent process steps, thereby improving the efficiency of process improvement.

[0011] The preset chart templates are user-defined. The RF test data analysis method also provides a user-defined chart template function, allowing users to select the desired chart type and automatically generate corresponding charts. This facilitates viewing the analysis results of greatest interest to users and allows for display in the format required by the user, facilitating the sharing and review of analysis results.

[0012] The RF test data analysis method further includes a parameter extraction module. This module obtains user-defined parameters for data display in the device's RF test data analysis charts or for plotting charts within those charts. The parameter extraction module includes: obtaining parameter calculation rules through user-defined editing; acquiring and parsing the parameter calculation rules; identifying the input variables in the parameter calculation rules; and automatically encapsulating the parameter calculation rules and their input variable data acquisition methods together to generate the parameter extraction module. By providing a user-defined parameter function, users only need to focus on the parameter calculation method, without needing to worry about the internal data acquisition path of the parameters. This facilitates users defining parameters specifically needed in actual production for data analysis result display or chart plotting.

[0013] This invention also provides an RF test data analysis component, including several storage devices storing multiple instructions adapted for loading and execution by a processor: the RF test data analysis method of this invention. Employing a B / S (Browser / Server) architecture and based on a distributed storage system, it enables rapid and efficient parsing of large amounts of RF data, offering ease of operation and low cost. Through a one-time development process, different users can flexibly access and operate the shared RF test data analysis component from different locations using various access methods (such as LAN, WAN, Internet / Intranet, etc.), enabling access control management and further ensuring the data security of RF test data and analysis results.

[0014] Another aspect of this invention provides an RF testing system, including a measurement module, an analysis module, and a control module. The control module is communicatively connected to both the measurement module and the analysis module. The measurement module performs RF testing to obtain RF test data. The analysis module is implemented using the RF test data analysis component of this invention. The control module transmits the RF test data measured by the measurement module to the analysis module for processing and configures the analysis module. By constructing this RF testing system, fully automated RF testing is achieved. By uploading the data measured by the measurement module and transmitting it to the analysis module for processing and analysis, the system enables real-time analysis and monitoring of test results. The control module can control the data upload and various settings of the analysis module, facilitating data processing and analysis during device RF testing and significantly improving the efficiency and effectiveness of RF testing.

[0015] The measurement module is configured in multiple ways; the analysis module adopts a B / S (Browser / Server) architecture and is deployed on a web interface; the control module controls each measurement module to interact with the analysis module. By deploying the analysis module on the web interface and enabling data interaction between multiple measurement modules and the analysis module via the internet, the flexibility of on-site layout is improved, thereby enhancing the flexibility of enterprises in conducting RF testing. This allows for flexible site setup and flexible acquisition and participation in RF test data analysis. Users can configure the settings in different spaces using the control module and then use the web-based analysis module to perform data analysis and obtain results.

[0016] The RF testing system supports offline data transmission. The measurement module stores the measured RF test data locally in real time and sends it to the analysis module at preset cycles or preset time points through the control module's settings. Based on the control module, each measurement module in the RF testing system can upload the measured RF test data to the analysis module in real time. It also supports offline data transmission, allowing the measurement module to temporarily store the measured RF test data locally and flexibly interact with the analysis module for data analysis according to user-preset time points or preset cycles based on actual production needs. This is more conducive to practical applications and provides a reliable and feasible solution for enterprises to deploy the RF testing system.

[0017] Compared with the prior art, the main beneficial effects of the present invention are:

[0018] 1. The present invention provides a radio frequency test data analysis method, which can achieve rapid and effective parsing of a large amount of RF data by acquiring the radio frequency test data file and performing de-embedding processing; and can intuitively display the data analysis results through preset chart templates.

[0019] 2. This invention provides an RF test data analysis component based on a distributed storage system, enabling rapid and efficient parsing and result display of large amounts of RF data, effectively solving data storage, reliability, and security issues. After importing RF test data in batches into the RF test data analysis component, users can easily perform batch parameter conversion, de-embedding, modulus extraction, and phase extraction operations, and plot parameter Smith circles, amplitude-frequency, and phase-frequency curves, greatly improving the work efficiency of RF data analysts and providing customers with a convenient and efficient data analysis experience.

[0020] 3. The RF testing system provided by this invention enables fully automated RF testing, real-time analysis and monitoring of test results, and control over data upload and various settings of the analysis module via the control module. This greatly improves the efficiency of data testing, management, processing, and analysis for device RF testing. It is internet-independent, capable of offline uploading of data measured by each measurement module and transmitting it to the analysis module for processing and analysis, resulting in higher data security and greater application flexibility. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the data analysis method process according to Embodiment 1 of the present invention.

[0022] Figure 2 This is a schematic diagram of device pairing information according to Embodiment 1 of the present invention.

[0023] Figure 3 This is a schematic diagram comparing the data before and after the de-embedding process in Embodiment 1 of the present invention.

[0024] Figure 4 This is a schematic diagram showing the output of custom parameters in Embodiment 1 of the present invention.

[0025] Figure 5 This is a schematic diagram of the radio frequency test system according to Embodiment 2 of the present invention. Detailed Implementation

[0026] The technical solutions in specific embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0027] Example 1

[0028] In Embodiment 1 of the present invention, as follows Figure 1 As shown, the RF test data analysis method includes: Step S1. Obtaining RF test data files and device pairing information; Step S2. Obtaining intrinsic RF test data of the device after de-embedding processing; Step S3. Generating RF test data analysis charts of the device using the obtained intrinsic RF test data of the device and a preset chart template.

[0029] In this embodiment, the RF test data file includes device RF test data and test structure RF test data. The device RF test data is obtained by mounting the device on the test structure and performing RF testing, while the test structure RF test data is obtained by performing RF testing on the test structure. The device pairing information is the pairing information between the device and the test structure, recording the test structure used by the device during RF testing. In the example case, the test structure RF test data includes: open-circuit RF test data and short-circuit RF test data.

[0030] In this embodiment, the RF test data file can be in SNP or ZIP file format; device pairing information can be found by referring to... Figure 2 The device pairing information indicates what the open-circuit RF test data and short-circuit RF test data are for different devices.

[0031] In this embodiment, the de-embedding process includes: extracting RF test data from the RF test data file based on device pairing information; and de-embedding the device RF test data using de-embedding rules to obtain the intrinsic RF test data of the device. The example RF test data includes test structure RF test data and device RF test data; in some other cases, it may also include other RF test data, which is not limited. The example de-embedding rule refers to the de-embedding algorithm for the device RF test data. In this embodiment, the de-embedding process is implemented by executing a de-embedding module. Before step S2, a de-embedding module is generated; the generation process includes: obtaining and parsing a preset de-embedding rule, identifying the input variables in the preset de-embedding rule; determining the RF test data in the RF test data file corresponding to the input variables based on the device pairing information, and automatically encapsulating the preset de-embedding rule and its input variable data acquisition method together to generate the de-embedding module. In some implementations, a de-embedding module is not generated for de-embedding, while in other implementations, the generated de-embedding module can be directly called for execution without first generating the de-embedding module; this is not limited here. The example provides a compilation environment for de-embedding rules, allowing users to write de-embedding algorithms based on device RF test data as de-embedding rules. In a specific example, a portion of the user-written de-embedding algorithm is as follows:

[0032] func(map):

[0033] S11 = dut.getS11()

[0034] S22 = dut.getS22()

[0035] Open_s11 = open.getS11()

[0036] Shot_s11 = short.getS11()

[0037] This section involves variables: the device under test (DUT) test data, where `open` and `short` represent the open-circuit RF test data and short-circuit RF test data of the corresponding test structures of the DUT. Additionally, the de-embedding rules can include specific de-embedding logic algorithms, such as a conventional two-port de-embedding algorithm, but there's no need to concern yourself with how the data is acquired or how it's stored after processing. After the user completes the de-embedding rules, the logic algorithm and the data acquisition methods corresponding to the input variables will be automatically encapsulated into a de-embedding module. Executing this module will complete the data de-embedding process, obtaining the device's intrinsic RF test data for subsequent device performance analysis. A comparison of data before and after de-embedding can be found in [reference needed]. Figure 3 The top row of each line contains the data after embedding, and the bottom row contains the data before embedding.

[0038] In this embodiment, users can customize parameters and obtain parameter calculation rules through user-defined editing. Before step S3 in the example, a parameter extraction module is generated. Executing the parameter extraction module yields user-defined parameters, which are used for data display in the device's RF test data analysis charts or for plotting charts within the device's RF test data analysis charts. The example of generating the parameter extraction module includes: obtaining parameter calculation rules through user-defined editing; acquiring and parsing the parameter calculation rules; identifying the input variables in the parameter calculation rules; and automatically encapsulating the parameter calculation rules and the data acquisition methods of their input variables together to generate the parameter extraction module. In the example scenario, the user only needs to focus on the specific algorithm for parameter extraction. For example, if the user needs to customize the Zmax value for each device, which reflects the maximum impedance of the device as the frequency increases, the user's written parameter calculation rules focus on the core calculation algorithm of the parameter, and this is automatically encapsulated into a parameter extraction module. By executing this parameter extraction module, the calculation of the parameter is automatically added and output. For details, please refer to [reference needed]. Figure 4 The output data will include a column for Zmax.

[0039] In this embodiment, a user-defined chart template function is provided, which allows users to customize the selected data and the required chart type, and automatically generate the corresponding chart, making it convenient for users to quickly view the frequency-dependent charts unique to RF devices.

[0040] The above embodiments exemplarily describe the specific timing of each step, but do not limit the specific situation. In fact, the various processes can be implemented in an interleaved or parallel manner according to the actual situation. In some implementations, there is no preset chart template, only test data parsing, or the analysis results are displayed in other forms, which is not limited.

[0041] Example 2

[0042] This embodiment provides an example of an RF test data analysis component and an RF test system. Figure 5As shown, in this embodiment, the RF test system includes a measurement module, an analysis module, and a control module. The control module is communicatively connected to both the measurement module and the analysis module. The measurement module performs RF testing to obtain RF test data. The example analysis module is implemented using an RF test data analysis component. The RF test data analysis component includes a storage device storing multiple instructions suitable for loading and executing the RF test data analysis method of Embodiment 1 by a processor. The example control module controls the measurement module to transmit the measured RF test data to the analysis module for processing and configures the analysis module. Three measurement modules are provided, which can be located in different workspaces. The example analysis module adopts a B / S architecture and is deployed on a web interface, allowing users to interact with the analysis module through a browser. The control module communicates with both the measurement module and the analysis module, controlling each measurement module to interact with the analysis module. The control module can communicate with each measurement module via a data cable or an internal enterprise LAN, and supports offline data transmission from the measurement modules. The control module controls the measurement module to store RF test data locally in real time and send it to the analysis module at preset cycles or preset times. For example, data analysis can be initiated every four hours, with the control module instructing the analysis module to perform the analysis; or data analysis can be automatically initiated at a specific time outside of daily working hours, separating the data analysis and data testing processes, which is beneficial for rationally scheduling work hours and improving efficiency. The control module can also be implemented using one or more mobile smart terminals, and is not limited to this.

[0043] The common English terms or letters used in this invention for clarity of description are for illustrative purposes only and are not limiting interpretations or specific uses. They should not be used to limit the scope of protection of this invention based on their possible Chinese translations or specific letters.

[0044] The present invention has been described in detail above. Specific examples have been used to illustrate the structure and working principle of the invention. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​the present invention. Several improvements and modifications can be made to the present invention without departing from its principles, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A method of radio frequency test data analysis, the method comprising: include: The intrinsic RF test data of the device is obtained by acquiring the RF test data file and device pairing information and performing de-embedding processing. The RF test data file contains device RF test data and test structure RF test data; the device pairing information is the pairing information between the device and the test structure, recording the test structure used by the device during RF testing. The de-embedding process includes: extracting radio frequency test data from the radio frequency test data file according to the device pairing information; and de-embedding the device radio frequency test data using de-embedding rules to obtain the intrinsic radio frequency test data of the device. It also includes generating RF test data analysis charts for the device using the obtained intrinsic RF test data of the device and preset chart templates; It also includes a parameter extraction module, which generates user-defined parameters by executing the parameter extraction module. These parameters are used for data display in the RF test data analysis chart of the device or for drawing charts in the RF test data analysis chart of the device.

2. The method of claim 1, wherein: Also includes: Generate de-embedded modules; The generation process includes: Obtain and parse the preset de-embedding rules, and identify the input variables in the de-embedding rules; Based on the device pairing information, determine the RF test data in the RF test data file corresponding to the input variable, and automatically encapsulate the de-embedding rule and the data acquisition method of its input variable together to generate the de-embedding module; The de-embedding process is implemented by executing the de-embedding module.

3. The method of claim 1, wherein: Also includes: A compilation environment for de-embedding rules is provided, allowing users to write de-embedding algorithms for device RF test data as the de-embedding rules.

4. The method of claim 1, wherein: The RF test data of the test structure includes: open-circuit RF test data and short-circuit RF test data.

5. The radio frequency test data analysis method according to claim 1, characterized in that: The parameter extraction module includes: Parameter calculation rules are obtained through user-defined editing; The parameter calculation rules are obtained and parsed, the input variables in the parameter calculation rules are identified, and the parameter extraction module is automatically encapsulated together with the data acquisition methods of the parameter calculation rules and their input variables.

6. A radio frequency test data analysis component, characterized in that: The method includes several storage devices, wherein multiple instructions are stored in the storage devices, and the instructions are adapted to be loaded by a processor and executed by the radio frequency test data analysis method according to any one of claims 1-5.

7. A radio frequency testing system, characterized in that: It includes a measurement module, an analysis module, and a control module; the control module is communicatively connected to the measurement module and the analysis module respectively; the measurement module is used to perform radio frequency (RF) testing and obtain RF test data; the analysis module is implemented using the RF test data analysis component of claim 6; the control module is used to transmit the RF test data measured by the measurement module to the analysis module for processing, and to configure the analysis module.

8. The radio frequency testing system according to claim 7, characterized in that: The measurement module is configured in multiple ways; the analysis module adopts a B / S architecture and is deployed on the web; the control module controls each of the measurement modules to interact with the analysis module.

9. The radio frequency test system according to claim 7 or 8, characterized in that: It supports offline data transmission; the measurement module stores the measured RF test data locally in real time, and sends it to the analysis module at a preset cycle or at a preset time point through the control settings of the control module.

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