Substrate processing apparatus and method

Abstract

A substrate processing apparatus and method capable of improving yield by minimizing generation of a spot are provided. The substrate processing method can include: jetting ink onto a substrate by using a plurality of nozzles to form a plurality of ink patterns spaced apart from each other on the substrate; calculating a density of each of the plurality of ink patterns; and selecting at least one nozzle for jetting ink into one pixel region based on the calculated density of each of the plurality of ink patterns.

Description

Technical Field

[0001] This invention relates to a substrate processing apparatus and method. Background Technology

[0002] To manufacture display devices such as LCD panels, PDP panels, and LED panels, printing processes (e.g., RGB patterning) are performed on the substrate. Printing equipment equipped with inkjet heads is used to perform these printing processes. Summary of the Invention

[0003] Technical problems to be solved

[0004] However, various organic and inorganic substances are added to quantum dot (QD) inks to improve performance. These additives may not be mixed evenly within the printhead, potentially causing density differences between the inks ejected from the multiple nozzles. This results in mura (specks) and reduced yield.

[0005] The technical problem to be solved by the present invention is to provide a substrate processing method that can improve yield by minimizing the generation of spots.

[0006] Another technical problem to be solved by the present invention is to provide a substrate processing apparatus that can improve yield by minimizing the generation of spots.

[0007] The purpose of this invention is not limited to the above-described purposes, and other purposes not mentioned will be clearly understood by those skilled in the art through the following description.

[0008] Solution

[0009] To solve the above-mentioned technical problems, a substrate processing method according to one aspect of the present invention includes the following steps: spraying ink onto a substrate using a plurality of nozzles to form a plurality of ink patterns spaced apart from each other on the substrate; calculating the density of each of the plurality of ink patterns; and selecting at least one nozzle for spraying ink into a pixel region based on the calculated density of each of the plurality of ink patterns.

[0010] To solve the aforementioned technical problem, a substrate processing apparatus according to one aspect of the present invention may include: a printhead comprising a plurality of nozzles, and spraying ink onto a substrate through the plurality of nozzles to form a plurality of ink patterns spaced apart from each other on the substrate; a first image generation module for generating a plurality of ink pattern images by capturing the plurality of ink patterns; and a control module for calculating the grayscale value of each of the plurality of ink pattern images and selecting at least one nozzle for spraying ink into a pixel region based on the calculated grayscale value.

[0011] To solve the aforementioned technical problem, a substrate processing apparatus according to another aspect of the present invention may include: a first worktable; a second worktable adjacent to the first worktable; a frame arranged across the first and second worktables; an inkjet head module mounted on the frame and including a plurality of nozzles, and capable of jetting ink onto the first and second worktables; a first image generation module mounted on the frame; and a control module controlling the inkjet head module and the first image generation module, wherein the inkjet head module forms a plurality of ink patterns by jetting ink onto a test substrate on the second worktable, the first image generation module generates an ink pattern image by capturing the ink patterns, and the control module calculates the density of each of the plurality of ink patterns based on the ink pattern image.

[0012] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0013] Figure 1 This is a conceptual diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0014] Figure 2 This is a flowchart illustrating a method for calculating the density of each of a plurality of ink patterns in a substrate processing method according to some embodiments of the present invention.

[0015] Figures 3 to 5 It is used for explanation Figure 2 A conceptual diagram of the method.

[0016] Figure 6 This is a conceptual diagram used to illustrate nozzle mixing operations.

[0017] Figure 7 This is a conceptual diagram illustrating a substrate processing apparatus according to another embodiment of the present invention.

[0018] Figure 8 and Figure 9 This is a diagram illustrating a method for measuring the volume of ink.

[0019] Figure 10 This is a flowchart illustrating the operation of a substrate processing apparatus according to another embodiment of the present invention.

[0020] Figure 11 This is a diagram illustrating a substrate processing apparatus according to another embodiment of the present invention. Detailed Implementation

[0021] Preferred embodiments of the invention will be described in detail below with reference to the accompanying drawings. The advantages and features of the invention, as well as the methods of achieving these advantages and features, will become apparent from the embodiments described in detail below in conjunction with the accompanying drawings. However, the invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and these embodiments are provided only to complete the disclosure of the invention and to fully inform those skilled in the art of the scope of the invention, and the invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0022] Spatial relative terms such as “below,” “under,” “lower,” “above,” and “upper” can be used to describe the relationship between one element or component and other elements or components as shown in the figure. Spatial relative terms should be understood to include terms indicating different orientations of the element during use or operation, in addition to those shown in the figure. For example, in the case where the element shown in the figure is flipped, an element described as “below” or “under” another element can be positioned “above” another element. Therefore, the exemplary term “below” can include both lower and upper orientations. Element can also be oriented in other directions, and therefore spatial relative terms can be interpreted according to orientation.

[0023] Although terms such as "first," "second," etc., are used to describe various elements, constituent elements, and / or parts, it is clear that these elements, constituent elements, and / or parts are not limited by these terms. These terms are used only to distinguish one element, constituent element, or part from other elements, constituent elements, or parts. Therefore, within the technical concept of this invention, the first element, first constituent element, or first part mentioned below can obviously also be a second element, second constituent element, or second part.

[0024] Figure 1 This is a conceptual diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0025] Reference Figure 1 According to an embodiment of the present invention, the substrate processing apparatus includes a nozzle 120, a first image generation module 130, and a control module 150, etc.

[0026] The printhead 120 includes a plurality of nozzles. The printhead 120 sprays ink onto the substrate 110 through the plurality of nozzles, thereby forming a plurality of ink patterns P spaced apart from each other on the substrate 110.

[0027] As shown in the figure, substrate 110 can be a test substrate that is movable in one direction (refer to reference numeral S) and has flexible properties, but is not limited thereto. Substrate 110 can be a flexible substrate provided in a roll-to-roll manner. Alternatively, substrate 110 can also be a substrate with hard properties, such as a glass substrate.

[0028] Ink pattern P is formed on substrate 110 by ink ejected from printhead 120. Each of the plurality of ink patterns P may correspond to each of the plurality of nozzles of printhead 120. For example, a nozzle may eject once in a jetting area A to form an ink pattern P, or a nozzle may eject multiple times in a jetting area A to form an ink pattern P.

[0029] The first image generation module 130 generates an ink pattern image by capturing the ink pattern P (see [reference]). Figure 3 (10). For example, the first image generation module 130 may include a camera, but is not limited thereto. Any component capable of generating the ink pattern image 10 may be used.

[0030] The control module 150 calculates the density of each of the multiple ink pattern images 10 based on the generated multiple ink pattern images 10. As detailed below, the control module 150 calculates the grayscale value of each of the multiple ink pattern images 10 and calculates the density based on the grayscale value. The control module 150 performs a nozzle blending operation based on the calculated density. Multiple nozzles are used to form a pixel within a pixel region. That is, a pixel is completed by ejecting ink into a pixel region from multiple nozzles. The nozzle blending operation means: selecting at least one nozzle for ejecting ink into a pixel region, and using the selected at least one nozzle to eject ink into the aforementioned pixel region.

[0031] Furthermore, the control module 150 can control the operation of the nozzle 120 and the first image generation module 130. Additionally, the control module 150 can also control the operation of the substrate 110.

[0032] The operation of a substrate processing apparatus according to an embodiment of the present invention will now be described.

[0033] First, the printhead 120 uses multiple nozzles to spray ink onto the substrate 110, thereby forming multiple ink patterns P spaced apart from each other on the substrate 110. Next, the control module 150 calculates the density of each of the multiple ink patterns P. Then, based on the calculated density of each of the multiple ink patterns P, the control module 150 selects ink to be applied to a pixel region (see [link to image]). Figure 6At least one nozzle (see P1, P2, and P3 in the text) that ejects ink (see P1, P2, and P3 in the text) Figure 6 (N1 to N10 in the middle) (i.e., perform nozzle mixing operation).

[0034] In the following text, reference will be made to Figures 2 to 5 Describe a method for calculating the density of each of multiple ink patterns P.

[0035] Figure 2 This is a flowchart illustrating a method for calculating the density of each of a plurality of ink patterns P in a substrate processing method according to some embodiments of the present invention. Figures 3 to 5 It is used for explanation Figure 2 A conceptual diagram of the method.

[0036] Reference Figure 1 and Figure 2 After multiple ink patterns P spaced apart from each other are formed on the substrate 110 by the printhead 120, the first image generation module 130 generates a first ink pattern image 10 by capturing a first ink pattern (representing any one of the multiple ink patterns) among the multiple ink patterns P. Figure 2 (S210).

[0037] The first ink pattern image 10 can be as follows: Figure 3 As shown. For example, the central region 10C of the first ink pattern image 10 may be brighter than the edge region 10E. Areas in the first ink pattern P where additives (e.g., inorganic materials) are aggregated appear relatively dark in the first ink pattern image 10 (see edge region 10E). Conversely, areas in the first ink pattern P containing a small amount of additives appear relatively bright in the first ink pattern image 10 (see central region 10C).

[0038] The first ink pattern image 10 can be represented in grayscale. That is, the first ink pattern image 10 can be captured in grayscale by the first image generation module 130, or it can be captured in color by the first image generation module 130 and then converted to grayscale by the control module 150.

[0039] Then, the control module 150 calculates the grayscale value of the first ink pattern image 10. Figure 2 (S220).

[0040] More specifically, such as Figure 4As shown, the control module 150 divides the first ink pattern image 10 into multiple portions 10a to 10f. For example, the control module 150 can set multiple intersecting horizontal lines and multiple intersecting vertical lines on the first ink pattern image 10, forming an area defined by the multiple horizontal lines and multiple vertical lines, but is not limited thereto. Furthermore, a portion 10a to 10f of the control module 150 has a basic rectangular shape, but is not limited thereto. A portion 10a to 10f may also have a basic triangular shape or a pentagonal shape.

[0041] In addition, such as Figure 5 As shown, the control module 150 determines the grayscale value of each of the multiple divided portions 10a to 10f and generates multiple portion grayscale values. For example, the portion grayscale value of each of the multiple portions 10a, 10b, 10c, 10d, 10e, and 10f can be 9, 10, 11, 6, 5, and 6. That is, the portion grayscale values ​​of portions 10d, 10e, and 10f located in the central region 10C of the first ink pattern image 10 are relatively small, while the portion grayscale values ​​of portions 10a, 10b, and 10c located in the edge region 10E are relatively large. These portion grayscale values ​​are merely examples, and this application is not limited thereto. Unlike the illustration, according to the ink pattern P, the portion grayscale values ​​of portions 10d, 10e, and 10f located in the central region 10C can be relatively large, while the portion grayscale values ​​of portions 10a, 10b, and 10c located in the edge region 10E can be relatively small.

[0042] In addition, the control module 150 determines the overall grayscale value of the first ink pattern image 10 based on multiple partial grayscale values.

[0043] For example, control module 150 can determine the grayscale value of the first ink pattern image 10 by averaging multiple partial grayscale values ​​(i.e., using an arithmetic mean). Alternatively, control module 150 can determine the grayscale value of the first ink pattern image 10 by assigning weights to specific regions (e.g., by assigning relatively high weights to the partial grayscale values ​​corresponding to edge regions 10E) (i.e., using a weighted average). Control module 150 can use methods other than arithmetic mean and weighted average to determine the grayscale value of the first ink pattern image 10.

[0044] Then, the control module 150 calculates the density of the first ink pattern P based on the determined grayscale value of the first ink pattern image 10. Figure 2 (S230).

[0045] Specifically, the control module 150 can determine the density of the first ink pattern P as the grayscale value corresponding to the first ink pattern image 10.

[0046] As described above, areas in the first ink pattern P where additives (e.g., inorganic materials) are aggregated appear relatively dark in the first ink pattern image 10. Conversely, areas in the first ink pattern P containing small amounts of additives appear relatively bright in the first ink pattern image 10. Therefore, the density of the first ink pattern P can be determined proportionally to the grayscale value of the first ink pattern image 10. For example, if the grayscale value of the first ink pattern image 10 is large, the density value of the first ink pattern P can be determined to be large. Alternatively, the grayscale value of the first ink pattern image 10 can also be used to determine the density of the first ink pattern P.

[0047] In the following text, reference will be made to Figure 6 A method (i.e., one of N1 to N10) for selecting at least one nozzle (e.g., one of N1 to N10) to eject ink into a pixel region (e.g., one of P1, P2 and P3) based on the density of each of a plurality of ink patterns P calculated (i.e., nozzle mixing operation).

[0048] Figure 6 This is a conceptual diagram used to illustrate nozzle mixing operations.

[0049] Reference Figure 6 The nozzle 120 is equipped with multiple nozzles N1 to N10. (Refer to...) Figures 1 to 5 In the described method, the ink density of each of a plurality of nozzles N1 to N10 is measured. For example, it is assumed that the density of the ink ejected from the first nozzle N1 is 9, the density of the ink ejected from the second nozzle N2 is 8, the density of the ink ejected from the third nozzle N3 is 8, the density of the ink ejected from the ninth nozzle N9 is 10, and the density of the ink ejected from the tenth nozzle N10 is 11.

[0050] For ease of explanation, it is assumed that the volume of ink ejected from each of the multiple nozzles N1 to N10 is the same. For example, it is assumed that the volume of ink ejected from each of the multiple nozzles N1 to N10 is 1.

[0051] For example, multiple pixel regions P1, P2 and P3 are defined in the substrate G.

[0052] The nozzle 120 can move along a first direction X (i.e., the left-right direction in the figure). The substrate 110 can move along a second direction Y (i.e., the up-down direction in the figure).

[0053] Here, it is assumed that a pixel is formed only when ink of volume 3 is sprayed onto each pixel region P1, P2, and P3. Since the volume of ink sprayed from a nozzle N1 to N10 is 1, three ink sprays are required in a pixel region (e.g., P1).

[0054] The control module 150 can select the first nozzle N1, the ninth nozzle N9, and the tenth nozzle N10 as nozzles for spraying ink into the pixel area P1. The three selected nozzles N1, N9, and N10 each spray ink into the pixel area P1 once. At this time, the volume reaches 3 (i.e., 1+1+1=3) and the density reaches 10 (i.e., (9+10+11) / 3=10).

[0055] Alternatively, to achieve an ink density of 9 in pixel region P2, control module 150 can select first nozzle N1, third nozzle N3, and ninth nozzle N9 as nozzles for ejecting ink into pixel region P2. Each of the three selected nozzles N1, N3, and N9 ejects ink into pixel region P2 once. At this point, the volume reaches 3 (i.e., 1+1+1=3), and the density reaches 9 (i.e., (9+8+10) / 3=9). Since the density of ink ejected from second nozzle N2 is the same as the density of ink ejected from third nozzle N3, N1, N2, and N9 can also be selected instead of N1, N3, and N9.

[0056] As described above, at least one nozzle N1 to N10 can be selected based on density for spraying ink into a pixel region P1, P2 and P3.

[0057] Figure 7 This is a conceptual diagram illustrating a substrate processing apparatus according to another embodiment of the present invention. Figure 8 and Figure 9 This is a diagram illustrating a method for measuring the volume of ink. For ease of description, the main description and references will be presented separately. Figures 1 to 6 The differences lie in the content described.

[0058] First, refer to Figure 7 According to another embodiment of the present invention, the substrate processing apparatus includes a nozzle 120, a first image generation module 130, a second image generation module 140, and a control module 150, etc.

[0059] The printhead 120 sprays ink onto the substrate 110 through multiple nozzles, thereby forming multiple ink patterns P spaced apart from each other on the substrate 110.

[0060] The first image generation module 130 generates multiple ink pattern images by capturing multiple ink patterns P on the substrate 110 (see...). Figure 3 10 in the middle).

[0061] The control module 150 calculates the density of each of the corresponding plurality of ink patterns P based on the plurality of ink pattern images 10. As described above, the control module 150 calculates the grayscale value of each of the plurality of ink pattern images 10 and calculates the density based on the grayscale value.

[0062] The second image generation module 140 generates multiple ink droplet images by capturing images of ink ejected from each of the multiple nozzles. Figure 8 (300 in the example). For example, the second image generation module 140 may include a camera, but is not limited thereto. Any component capable of generating ink droplet images 300 can be used.

[0063] In addition, the control module 150 calculates the volume of the corresponding multiple ink droplet images 300.

[0064] Reference Figure 9 , Figure 9 The volume of a first ink droplet image (representing any one of the multiple ink droplet images) based on its position is shown in the diagram. Figure 9 In the diagram, the y-axis represents the distance from the nozzle surface (unit: μm), and the x-axis represents the volume per pixel (unit: pL).

[0065] Control module 150 will display the ink droplet image ( Figure 8 The 300 in the middle is converted to a volumetric map based on the same location (see reference). Figure 9 The main droplet 301 can be identified using various methods. For example, it can be identified based on regions where the slope increases or decreases sharply.

[0066] The control module 150 can calculate the volume of ink ejected from the nozzle based on the volume of the main ink droplet 301 found as described above. For example, the control module 150 can determine the volume of the main ink droplet 301 as the total volume of the ink. This is because the main droplet 301 in the ink droplet contributes a very large amount to the total volume, while the remaining parts besides the main droplet 301 (e.g., satellite droplets 302, connecting droplets 303, etc.) contribute little to the total volume.

[0067] The control module 150 can control the operation of the nozzle 120, as well as the operation of the first image generation module 130 and the second image generation module 140. Additionally, the control module 150 can also control the operation of the substrate 110.

[0068] The operation of a substrate processing apparatus according to another embodiment of the present invention will now be described. (Refer to...) Figure 10 The printhead 120 uses multiple nozzles to spray ink onto the substrate 110, thereby forming multiple ink patterns P spaced apart from each other on the substrate 110.

[0069] The second image generation module 140 generates an image of ink droplets by capturing images of ink being ejected from multiple nozzles (see [link]). Figure 8 Then, the control module 150 calculates the volume of ink from the ink droplet image 300 (S410).

[0070] The first image generation module 130 generates an ink pattern image by capturing multiple ink patterns P (see...). Figure 3 (10 in the image). Then, the control module 150 calculates the ink density from the ink pattern image 10 (S420).

[0071] Then, the control module 150 can select at least one nozzle for spraying ink into a pixel area (i.e., perform nozzle mixing operation) based on the gray value (i.e., ink density) of each of the plurality of ink pattern images and the volume of ink ejected from each of the plurality of nozzles (S430).

[0072] In the following text, reference will be re-examined. Figure 6 The nozzle mixing operation is described in detail. As described above, it is assumed that the densities of the ink ejected from the multiple nozzles N1, N2, N3, N9, and N10 are 9, 8, 8, 10, and 11, respectively. Furthermore, it is assumed that the volumes ejected from the multiple nozzles N1, N2, N3, N9, and N10 are 1, 1.2, 0.8, 1.2, and 1, respectively.

[0073] For example, in order to make the ink density in pixel region P3 reach 9, control module 150 selects first nozzle N1, third nozzle N3 and ninth nozzle N9 as nozzles for spraying ink into pixel region P3.

[0074] Specifically, first, available candidate nozzles are selected based on density. To achieve an ink density of 9 in pixel region P3, N1, N2, N3, and N9 can be selected as candidate nozzles. Then, based on volume, the nozzle to be used is selected from the candidate nozzles. Since the ink volume in pixel region P3 should be 3, N3 is more suitable than N2. Therefore, the nozzles to be used are N1, N3, and N9.

[0075] The three selected nozzles N1, N3, and N9 each spray ink into the pixel area P2 once. At this point, the volume reaches 3 (i.e., 1 + 0.8 + 1.2 = 3), and the density reaches 9 (i.e., (9 + 8 + 10) / 3 = 9).

[0076] Figure 11 This is a diagram illustrating a substrate processing apparatus according to another embodiment of the present invention.

[0077] like Figure 11 As shown, a substrate processing apparatus according to another embodiment of the present invention includes: a first worktable PT, a second worktable MT, a frame 410, an inkjet head module 420, first image generation modules 440a, 440b and 440c, a second image generation module 430, test substrates JOF1, JOF2 and JOF3, and substrate G, etc.

[0078] The first worktable PT is an area used to support and move the substrate G. The method of moving the substrate G on the first worktable PT is not limited to a specific method. For example, a holder can clamp and move the substrate G, or the substrate G can be moved by air flotation. The substrate G can move along the second direction Y. For example, the substrate G can be a glass substrate.

[0079] The second workbench MT can be arranged adjacent to the first workbench PT in the first direction X. Multiple test substrates JOF1, JOF2 and JOF3 can be arranged on the second workbench MT.

[0080] Multiple test substrates JOF1, JOF2, and JOF3 can be arranged to extend in a strip along the second direction Y. Multiple test substrates JOF1, JOF2, and JOF3 are arranged adjacent to each other along the first direction X.

[0081] The multiple test substrates JOF1, JOF2 and JOF3 each have flexible properties, for example, they can be provided in a roll-to-roll manner.

[0082] The rack 410 is arranged on the first worktable PT and the second worktable MT to span the first worktable PT and the second worktable MT. The rack 410 can extend along the first direction X.

[0083] The inkjet head module 420 may be mounted on the frame 410 and may move along the frame 410 (refer to reference numeral W in the figures). As shown, the inkjet head module 420 may move along a first direction X, but is not limited thereto. The inkjet head module 420 may include multiple printheads for ejecting ink, each printhead including multiple nozzles. For example, the ink may be quantum dot (QD) ink, but is not limited thereto.

[0084] Multiple first image generation modules 440a, 440b, and 440c are formed on the rack 410. Each of the multiple first image generation modules 440a, 440b, and 440c may include, but is not limited to, a camera. The first image generation modules 440a, 440b, and 440c may be arranged at positions corresponding to test substrates JOF1, JOF2, and JOF3.

[0085] The inkjet head module 420 ejects ink onto multiple test substrates JOF1, JOF2, and JOF3 to form multiple ink patterns P on the test substrates JOF1, JOF2, and JOF3. First image generation modules 440a, 440b, and 440c generate multiple ink pattern images by capturing the multiple ink patterns P (see reference). Figure 3(10 in the image). The control module 450 calculates the grayscale value of each of the multiple ink pattern images 10, and calculates the density of the ink pattern based on the grayscale value.

[0086] The second image generation module 430 is mounted on the rack 410 and arranged adjacent to the inkjet head module 420. The second image generation module 430 can move along the rack 410 together with the inkjet head module 420. The second image generation module 430 generates multiple droplet images by capturing images of each ink droplet ejected from multiple nozzles (see reference). Figure 8 (300 in the middle). The control module 450 can calculate the volume of ink from multiple ink droplet images 300.

[0087] The control module 450 can use the calculated density and volume to perform nozzle mixing operations.

[0088] On the other hand, the step of calculating the ink density can be performed more frequently than the step of calculating the ink volume. Since the ink volume changes primarily based on the nozzle's condition, it is relatively difficult to change. Conversely, the ink density varies depending on the degree of mixing of the ink additives, and therefore may be relatively easier to change compared to the ink volume. Therefore, if the control module 450 can use the ink volume data based on the nozzle for a first time period, the control module 450 can only use a second time period based on the ink density data based on the nozzle, which is shorter than the first time period.

[0089] For example, after the processed substrate G is unloaded from the first worktable PT and before a new substrate G to be processed is loaded onto the first worktable PT, the inkjet head module 420 moves to the second worktable MT and jets ink onto test substrates JOF1, JOF2, and JOF3 to form ink patterns. First image generation modules 440a, 440b, and 440c generate ink pattern images by capturing the ink patterns. That is, whenever a new substrate G is loaded onto the first worktable PT, the control module 150 can generate ink density data for each nozzle.

[0090] On the other hand, the second image generation module 430 can generate ink droplet images by capturing images of the ejected ink only during a predetermined time period (e.g., during setup or maintenance of the substrate processing device). That is, the control module 450 can generate volume data of the ink from each nozzle only during a predetermined time period (or periodically).

[0091] The control module 450 performs the nozzle mixing operation by using the ink density data and volume data generated as described above.

[0092] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art should understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, the above embodiments should be understood as exemplary in all respects, and not restrictive.

Claims

1. A substrate processing method, comprising the following steps: Ink is sprayed onto a substrate using multiple nozzles to form multiple ink patterns spaced apart from each other on the substrate; Calculate the density of each of the plurality of ink patterns; Measure the volume of ink ejected from each of the plurality of nozzles; Based on the calculated density of each of the plurality of ink patterns and the volume of ink ejected from each of the plurality of nozzles, at least one nozzle is selected for ejecting ink into a pixel region. The pixel region is configured with a reference volume and a reference density, and at least one nozzle is selected to match the reference volume and the reference density.

2. The substrate processing method according to claim 1, wherein, The steps for calculating the density of each of the plurality of ink patterns include: A first ink pattern image is generated by photographing the first ink pattern among the plurality of ink patterns; Calculate the grayscale value of the first ink pattern image; and The density of the first ink pattern is calculated based on the grayscale value.

3. The substrate processing method according to claim 2, wherein, The steps for calculating the grayscale value of the first ink pattern image include: The first ink pattern image is divided into multiple parts; Multiple segment grayscale values ​​are generated by determining the grayscale value of each of the multiple segments; and The grayscale value of the first ink pattern image is determined based on the plurality of partial grayscale values.

4. The substrate processing method according to claim 3, wherein, The grayscale value of the first ink pattern image is the average of the grayscale values ​​of the plurality of parts.

5. The substrate processing method according to claim 1, wherein, The step of measuring the volume of ink ejected from each of the plurality of nozzles includes: Photograph the ink in the state of being ejected from each of the plurality of nozzles; and Based on the volume of the main droplet of the captured ink, the volume of ink ejected from each of the plurality of nozzles is calculated.

6. The substrate processing method according to claim 1, wherein, The substrate is a flexible substrate provided in a roll-to-roll manner.

7. A substrate processing apparatus, comprising: A printhead includes multiple nozzles and sprays ink onto a substrate through the multiple nozzles to form multiple ink patterns spaced apart from each other on the substrate; The first image generation module generates multiple ink pattern images by capturing the multiple ink patterns; The second image generation module generates multiple ink droplet images by capturing images of ink in the state of being ejected from each of the multiple nozzles; as well as The control module calculates the density of each of the plurality of ink pattern images based on the plurality of ink droplet images, calculates the volume of ink ejected from each of the plurality of nozzles based on the plurality of ink droplet images, and selects at least one nozzle for ejecting ink into a pixel region based on the calculated density of each of the plurality of ink patterns and the volume of ink ejected from each of the plurality of nozzles. The pixel region is configured with a reference volume and a reference density, and at least one nozzle is selected to match the reference volume and the reference density.

8. The substrate processing apparatus according to claim 7, wherein, Calculating the density of each of the plurality of ink pattern images includes calculating the grayscale value of each of the plurality of ink pattern images, and calculating the grayscale value of each of the plurality of ink pattern images includes: The first ink pattern image among the plurality of ink pattern images is divided into multiple parts. Multiple part grayscale values ​​are generated by determining the grayscale value of each of the multiple divided parts, and The grayscale value of the first ink pattern image is determined based on the plurality of partial grayscale values.

9. The substrate processing apparatus according to claim 8, wherein, The grayscale value of the first ink pattern image is the average of the grayscale values ​​of the plurality of parts.

10. The substrate processing apparatus according to claim 7, wherein, The control module calculates the volume of ink ejected from each of the plurality of nozzles based on the volume of the main droplet of ink in the plurality of ink droplet images.

11. The substrate processing apparatus according to claim 7, wherein, The substrate is a flexible substrate provided in a roll-to-roll manner.

12. A substrate processing apparatus, comprising: First workbench; The second workbench is adjacent to the first workbench; A frame is arranged across the first workbench and the second workbench; An inkjet head module, mounted on the frame, includes multiple nozzles and is capable of jetting ink onto the first worktable and the second worktable; The first image generation module is installed on the rack; The second image generation module is installed on the rack; The control module controls the inkjet head module, the first image generation module, and the second image generation module. The inkjet head module forms multiple ink patterns by spraying ink onto a test substrate on the second worktable. The first image generation module generates an ink pattern image by capturing the ink pattern, and The control module calculates the density of each of the plurality of ink patterns based on the ink pattern image. The second image generation module generates an ink droplet image by capturing images of ink being ejected from multiple nozzles of the inkjet head module. The control module calculates the volume of ink ejected from each of the plurality of nozzles based on the ink droplet image, and The control module selects at least one nozzle for spraying ink into a pixel region based on the calculated density of each of the plurality of ink patterns and the volume of ink ejected from each of the plurality of nozzles. The pixel region is configured with a reference volume and a reference density, and the at least one nozzle is selected to match the reference volume and the reference density.

13. The substrate processing apparatus according to claim 12, wherein, After the substrate that has undergone processing is unloaded from the first worktable, and before a new substrate to be processed is loaded onto the first worktable: The inkjet head module moves to the second worktable and forms an ink pattern by spraying ink onto the test substrate, and the first image generation module captures the ink pattern.

14. The substrate processing apparatus according to claim 12, wherein, During maintenance, the inkjet head module sprays ink onto the test substrate, and the second image generation module captures the ink in the sprayed state.

15. The substrate processing apparatus according to claim 12, wherein, The control module calculates the density of each of the plurality of ink patterns, including: The first ink pattern image in the ink pattern image is divided into multiple parts; Multiple segment grayscale values ​​are generated by determining the grayscale value of each of the divided segments; and The grayscale value of the first ink pattern image is determined based on the plurality of partial grayscale values.

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