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A method of forming a metal layer having excellent thermal and oxidation resistant characteristics using atomic layer deposition is provided. The metal layer includes a reactive metal (A), an element (B) for the amorphous combination between the reactive metal (A) and nitrogen (N), and nitrogen (N). The reactive metal (A) may be titanium (Ti), tantalum (Ta), tungsten (W), zirconium (Zr), hafnium (Hf), molybdenum (Mo) or niobium (Nb). The amorphous combination element (B) may be aluminum (Al), silicon (Si) or boron (B). The metal layer is formed by alternately injecting pulsed source gases for the elements (A, B and N) into a chamber according to atomic layer deposition to thereby alternately stack atomic layers. Accordingly, the composition ratio of a nitrogen compound (A-B-N) of the metal layer can be desirably adjusted just by appropriately determining the number of injection pulses of each source gas. According to the composition ratio, a desirable electrical conductivity and resistance of the metal layer can be accurately obtained. The atomic layers are individually deposited, thereby realizing excellent step coverage even in a complex and compact region. A metal layer formed by atomic layer deposition can be employed as a barrier metal layer, a lower electrode or an upper electrode in a semiconductor device.

A tissue ablation catheter for forming a lesion along a substantially circumferential region of tissue is described. The catheter includes one or more sensors for monitoring the temperature of the tissue being ablated. The temperature sensors are mounted on the interior or exterior of an expandable member that is affixed to a shaft of the catheter.

The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering productivity and at low cost, in the high temperature heat treatment of silicon wafers, and said wafer holder is characterized in that: the wafer holder is composed of a wafer support plate and three or more wafer support members mounted on said wafer support plate, each of the wafer support members having a wafer support portion or more; at least one of said wafer support members is a tilting wafer support member which has a plurality of upward-convex wafer support portions on the upper surface and is tiltable with respect to said wafer support plate; and the wafer is supported by at least four wafer support portions.

The invention discloses a chaotic stirring control system based on ARM single chip chaotic mapping control. The system comprises an ARM single chip which is connected and communicated with an input device, a drive chip and an AD (analog to digital) conversion chip respectively; the drive chip is connected with an H bridge drive circuit, the H bridge drive circuit is connected with a direct current motor, the direct current motor is connected with a chaotic stirring system, a sensor which monitors the rotating speed and a current signal of the direct current motor is arranged on the direct current motor, and the sensor is connected with the AD conversion chip. The system adopts a full digit circuit, has good stability and high reliability, can accurately control and conveniently adjust the rotating speed of the motor, is wide in application range, and can meet requirements of different stirring parameters under various work conditions.

A golf club comprising a head having a series of tracks forming a three-dimensional pattern along a surface of the head; a plurality of weights for positioning along the channels; and a mechanism for securing the weights at arbitrary positions along the channels so as to customize at least one of center of gravity and moment of inertia of the head. The channels can all interconnect with one another to allow a weight to be moved from one to another. The golf club can further comprising a removable cover for at least a portion of the surface, the cover being for covering the channels and the weights positioned along the channels. The weights can comprise a spherical member disposed in a channel; an external member having a portion external to a surface of the head; and a coupling between the spherical member and the external member to allow the spherical member and the external member to securely capture between them a wall in which a track is formed. The channels may be in the removable cover, or below the removable cover, in the head.

In one embodiment, a method of forming a multijunction solar cell having lattice mismatched layers and lattice-matched layers comprises growing a top subcell having a first band gap over a growth semiconductor substrate. A middle subcell having a second band gap is grown over the top subcell, and a lower subcell having a third band gap is grown over the middle subcell. The lower subcell is substantially lattice-mismatched with respect to the growth semiconductor substrate. The first band gap of the top subcell is larger than the second band gap of the middle subcell. The second band gap of the middle subcell is larger than the third band gap of the lower subcell. A support substrate is formed over the lower subcell, and the growth semiconductor substrate is removed. In various embodiments, the multijunction solar cell may further comprise additional lower subcells. A parting layer may also be provided between the growth substrate and the top subcell in certain embodiments. Embodiments of this reverse process permit the top and middle subcells to have high performance by having atomic lattice spacing closely matched to that of the growth substrate. Lower subcells can be included with appropriate band gap, but with lattice spacing mismatched to the other subcells. The reduced performance caused by strain resulting from mismatch can be mitigated without reducing the performance of the upper subcells.

An information processing apparatus according to the present invention includes: an input position detecting unit for detecting a position of an operator positioned on an operation input unit; a direction detecting unit for detecting a moving direction of the operator based on time change of the position of the detected operator; a magnification change unit for changing a magnification of a screen in accordance with a number of the operator detected by the input position detecting unit; and a display content moving unit for moving a content displayed on the screen along the moving direction of the operator detected by the direction detecting unit.

The present invention relates to an integrated sleep diagnosis and treatment device, and more particularly to an integrated apnea diagnosis and treatment device. The present invention additionally relates to methods of sleep diagnosis and treatment. The sleep disorder treatment system of the present invention can use a diagnosis device to perform various forms of analysis to determine or diagnose a subject's sleeping disorder or symptoms of a subject's sleep disorder, and using this analysis or diagnosis can with or in some embodiments without human intervention treat the subject either physically or chemically to improve the sleeping disorder or the symptoms of the sleeping disorder. The diagnostic part of the system can use many different types of sensors and methods for diagnosing the severity of the symptoms of or the sleep disorder itself. The treatment part of the system can use a device to physically or chemically treat the subject's symptoms or sleep disorder itself.