The invention provides a high-
hardness high-
reflectivity hafnium carbide film and a preparation method thereof. The method comprises the following steps: 1) target material position: placing a
graphite target, a
hafnium target and a substrate; 2)
substrate surface pretreatment: performing ultrasonic cleaning on the substrate and then
drying the substrate; 3) vacuumizing the chamber and heating the substrate: vacuumizing the chamber to high vacuum and heating the substrate; (4) pre-cleaning the target material: introducing
inert gas into the chamber, keeping the working air pressure, and carrying out pre-
sputtering cleaning on the target material; and 5) depositing a
hafnium carbide film: continuously introducing
inert gas into the chamber, keeping the working air pressure, the substrate temperature and the substrate autorotation speed, modulating an intermediate-frequency
pulse waveform by adopting a
pulse generator, applying the intermediate-frequency
pulse waveform to the
graphite target and the hafnium target, keeping a current value, and carrying out
coating treatment. The hafnium
carbide film with the low carbon vacancy concentration and the single-phase rock salt structure can be prepared through the method, and the hafnium carbide film has high
hardness and
broadband high reflection performance.