1161 results about "Film structure" patented technology

An air-pulse generating device, a wearable sound device, bladeless fan, and an airflow producing method are disclosed. The air-pulse generating device includes a film structure, configured to be actuated to generate a plurality of air pulses at an ultrasonic pulse rate. The plurality of air pulses produces a net airflow toward one single direction.

An air-pulse generating device includes a film structure including a first flap and a second flap opposite to each other. The film structure is actuated to operate at an ultrasonic frequency, and the air-pulse generating device produces a plurality of air pulses at an ultrasonic pulse rate. The first flap and the second flap are actuated to perform a differential movement to form an opening or a virtual valve. A slit is formed between the first flap and the second flap, and the opening or the virtual valve is formed because of the slit. The slit is formed as a zigzagging pattern on the film structure.

The invention discloses an MEMS thermal flow sensor based on a glass film structure and a preparation method of the MEMS thermal flow sensor. The sensor comprises a glass inner silicon substrate, a back cavity, a silicon through column, a heating resistor, a temperature measurement resistor, an environment temperature measurement resistor, a chromium adhesion layer, a PAD port and a silicon nitride protection layer. Wherein the heating resistor is located in the center, and the temperature measuring resistors are symmetrically distributed on two sides of the heating resistor; the back cavity is located on the back of the glass inner silicon substrate, and the heating resistor, the temperature measuring resistor and the environment temperature measuring resistor lead a PAD port to the back of the glass inner silicon substrate through a silicon through column. A thermal temperature difference principle is adopted, and upstream and downstream temperature measuring resistors form a Wheatstone bridge. When the flow velocity is not zero, the Wheatstone bridge outputs, and the larger the flow velocity is, the larger the output is. Based on the glass and silicon composite substrate, the suspension film structure is formed through the silicon etching process, transmission of heat to the substrate is greatly reduced, and the heat utilization rate is increased.

The air-pulse generating device comprises a film structure, operating at an ultrasonic operating frequency, and a resonant chamber, formed on a side of the film structure. A resonance is formed within the resonance chamber. Due to the resonant chamber, the APG device has a peak on a frequency response of an acoustic property of the APG device at the ultrasonic operating frequency.

The invention discloses a laser film structure and a preparation method thereof. Wherein the thin film structure comprises a first dielectric layer, a metal layer, a second dielectric layer and a base material layer, and the second dielectric layer is formed by alternately depositing a dielectric material with a low refractive index and a dielectric material with a high refractive index; the structural expression of the second dielectric layer is H (LH) s, H represents a high-refractive-index dielectric material with the optical thickness of lambda / 4, L represents a low-refractive-index dielectric material with the optical thickness of lambda / 4, and s represents the number of cycles of the film system. According to the invention, the camouflage capability is improved, and the excellent laser protection performance is ensured.

The invention relates to the technical field of packaging film production, and discloses a production process of a three-layer co-extrusion FFS (fringe field switching) heavy coating film, which comprises the following steps: S1, selecting proper raw materials including an outer layer material, an inner layer material and a middle layer material; s2, drying the selected raw materials respectively to ensure that the moisture content is lower than 0.1%; s3, uniformly mixing different materials and additives through premixing equipment; s4, feeding the three materials into co-extrusion equipment, simultaneously extruding melt materials of different layers through a co-extrusion machine, and forming a multi-layer film structure through a die head; and S5, controlling the temperature and the flow speed at the die head to ensure the fluidity and the pressure distribution uniformity of the material melt of each layer. Through a dynamic stretching device, a pressure feedback control system, an optimized die head design and an intelligent control system, uniform film bubble expansion, accurate film thickness control and improvement of film quality stability are realized, the production efficiency and automation are improved, and the consistency and overall performance of film quality are remarkably improved.

The invention discloses a visible infrared dual-band stealth material and a preparation method thereof. The material structurally comprises a metal Mo layer, a Ge dielectric layer and an Al2O3 dielectric layer, and the metal Mo layer, the Ge dielectric layer and the Al2O3 dielectric layer are sequentially laid from bottom to top. According to the method, the absorptivity, the refractive index and the transmittance of the thin film structure in visible light and infrared bands are calculated through combination of a transmission matrix and simulation software, and simulated absorption spectrums of the thin film structure in the visible light and infrared bands under the normal incidence condition are obtained; by changing the thickness of each layer of material in the thin film structure, different thickness absorption spectrums of the thin film structure in visible light and infrared bands are obtained through calculation; comparing the different thickness absorption spectrums with the simulated absorption spectrums to obtain an optimal thin film structure and the thickness of each layer of material; and according to the thickness of each layer of material of the optimal thin film structure, a target thin film structure is prepared by setting a preparation mode. The structure is simple, the manufacturing process is simplified, and preparation and large-scale integration are easy.

The invention relates to a double-layer preservative film for prolonging the shelf life of frozen beef and mutton after unfreezing and a preparation method of the double-layer preservative film. According to the preparation method of the angelica dahurica extract-gliadin nano-particles, the angelica dahurica extract-gliadin nano-particles can be used for preparing a double-layer preservative film, and the preservative film is a natural component and is environmentally friendly and safe. The preservative film is of a double-layer structure, the mechanical performance is enhanced through the double-layer film structure, and meanwhile the preservative film has excellent oxygen and water vapor barrier performance and an antibacterial effect. According to the preservative film disclosed by the invention, slow release of active ingredients is realized by utilizing the Pycnogenin-gliadin nanoparticles, so that the antioxidant and antibacterial effects are remarkably improved, and the quality guarantee period of meat is prolonged. In addition, the preservative film does not need to be in direct contact with food in practical application, potential safety hazards of the food are further reduced, the operation process is simplified, pollution is avoided, a user can conveniently use the preservative film, the preservative film has the advantages of efficient preservation and environmental protection, and the preservative film has good application prospects and value.

The invention discloses an infrared film absorptivity prediction method and system based on machine learning, and relates to the technical field of optical film design and performance prediction.The infrared film absorptivity prediction method comprises the following steps that feature data of a to-be-measured film material and incident light are obtained, electromagnetic field distribution and local absorption power density are output, and according to power integration and boundary conditions, an infrared film absorptivity prediction result is obtained; obtaining initial absorptivity distribution; performing modal analysis on the initial absorptivity distribution, constructing a low-dimensional absorptivity response model, and outputting absorptivity response data after dimension reduction; constructing a physical constraint neural network by taking energy conservation and Fresnel boundary conditions as constraints; on the basis of a physical constraint neural network, absorptivity prediction is carried out on the infrared thin film under different conditions, thin film structure data are optimized through a multi-objective optimization algorithm, and an optimal structure parameter combination of the infrared thin film is obtained; according to the invention, through multi-physics field modeling and the physical constraint neural network, the problems of low infrared film absorptivity prediction precision and poor optimization efficiency are solved.

The invention discloses a hydrophobic micro-nano flexible thin film structure and a characterization method, relates to the technical field of thin film structure characterization, and aims to solve the problems of poor supporting performance of a flexible thin film and inaccurate standard data acquisition. Different acceleration voltages and currents are set for the coarse thinning stage and the fine thinning stage, fine removal of materials can be achieved, the accuracy of the thinning thickness is guaranteed, the thickness, the surface fluctuation amplitude and the microstructure feature size of a thin film in a measured image are measured with the help of a scale tool, and the measurement accuracy is improved. The morphological characteristics of the hydrophobic micro-nano flexible film can be converted into accurate data, rigid support is provided for the film by utilizing high hardness, high chemical stability and good thermal conductivity of tungsten, the upper side and the lower side of a target area are milled, hole digging is conducted on surrounding materials to form a preliminary sheet contour, then U-shaped milling and back-splashing material cleaning are conducted, and the thin film is obtained. The sample form is effectively controlled, and damage of processing stress to the sample structure is reduced.

The invention provides a method for measuring magneton dispersion of an antiferromagnetic thin film material based on a terahertz spectrum. According to the method, a ferromagnetic metal layer sample, an antiferromagnetic layer sample, a heavy metal layer sample and a three-layer film structure sample are prepared, laser pulses are used for inducing the samples to emit terahertz spectra, an electro-optical sampling technology is combined for measurement, and contribution of magneton transmission to the terahertz spectra is separated through data processing. The invention aims to solve the problem that the magneton dispersion property of an antiferromagnetic thin film material cannot be measured in real time at low cost in the prior art. Compared with a traditional method, the method has the advantages of being wide in frequency spectrum range, high in wave number resolution ratio, free of contact and low in cost, and is suitable for different types of antiferromagnetic materials. The method provides a theoretical basis and an experimental basis for researching the spin dynamic characteristics of an antiferromagnetic material and developing a high-frequency spintronics device. The method effectively fills the technical blank in the field of magneton measurement of the antiferromagnetic material.

The invention discloses a gradient frame membrane and separation application thereof. An integrated gradient membrane material is constructed in a mode of functional group sharing, metal node sharing or skeleton interpenetration, and target molecule recognition sites are designed by utilizing the advantage that a framework material is easy to modify, so that the separation performance is remarkably improved. The gradient film structure comprises a metal organic-metal organic framework gradient film, a metal organic-covalent organic framework gradient film and a covalent organic-metal organic framework gradient film. The invention introduces a new structure of a metal organic framework-covalent organic framework gradient film and a construction strategy thereof in detail. The preparation method comprises the steps of preparing a bottom layer film structure from bottom to top, then preparing a top layer film structure on the bottom layer film structure, performing post-modification and the like. By designing a specific asymmetric porous structure and adsorption sites, the membrane shows excellent ethylene / ethane, propylene / propane, ion screening and organic matter dehydration separation performance under the dual action of adsorption selection and shape-selective screening.

The invention discloses a fast air-ground transient electromagnetic inversion method based on FiLM-U-net, and belongs to the field of electromagnetic signal data processing, and the method comprises the steps: obtaining geological data and air-ground transient electromagnetic detection data, carrying out the preprocessing, and constructing a data set; dividing a training set, a verification set and a test set; the method comprises the following steps: constructing a FiLM-U-net network model in combination with a FiLM structure and a U-net structure; adopting the training set to select a proper training strategy to train the FiLM-U-net network model, and adopting the test set to evaluate the inversion effect of the model; and the trained FiLM-U-net network model is used to carry out inversion on ground-air transient electromagnetic measured data, transmit-receive positions and ground-air transient electromagnetic response are inputted, and an underground model resistivity value is outputted. According to the invention, the space information can be effectively utilized to carry out efficient and rapid inversion on the ground-air transient electromagnetic signal.

The invention provides a display panel and a display device, relates to the technical field of display, and is used for improving the aperture opening ratio of peep-proof pixels. The display panel includes: a substrate; the pixel layer comprises a first pixel; the packaging layer is located on the side, away from the substrate, of the pixel layer, and the packaging layer is of a single-layer film structure; each shielding structure comprises a first shielding part and a second shielding part; wherein the first shielding part is located on the side, away from the substrate, of the packaging layer, a first opening is formed between the first shielding parts of the adjacent shielding structures, the second shielding part is located on the side, away from the substrate, of the first shielding part, and a second opening is formed between the second shielding parts of the adjacent shielding structures. The first pixel, the first opening and the second opening are at least partially overlapped.

The invention discloses a triple-film-forming water essence lipstick and a preparation method thereof. The triple film-forming water essence lipstick comprises the following components: 30-45 parts of phenyl silicone oil; the film-forming oil phase comprises an oil-phase film-forming agent and an oil-phase film-forming auxiliary agent; the oil-phase coalescing agent comprises phytosterol / isostearyl alcohol / cetyl alcohol / stearyl alcohol / behenyl dilinoleate, and the mass percentage content of the oil-phase coalescing agent in the lipstick is 1%-10%; 5-20 parts of a film-forming aqueous phase comprising an aqueous phase film-forming agent; 0.5 to 5 parts of an emulsifier, wherein the emulsifier is prepared from at least one of lauryl PEG (Polyethylene Glycol)-10 tri (trimethylsiloxy) silyl ethyl polydimethylsiloxane and lauryl PEG-9 polydimethylsiloxy ethyl polydimethylsiloxane; 1 to 5 parts of a dispersing agent, wherein the dispersing agent comprises polyglycerol-2 triisostearate; and 0.1 to 0.5 part of a thickening agent, wherein the thickening agent comprises Slassonium chloride hectorite. The triple-film-forming water essence lipstick can form a three-layer film structure on the lip, so that not only can the lip be moisturized, but also the risk that the lipstick is stained with a cup can be reduced.

The invention discloses a double-selectivity all-inorganic radiation refrigeration film and a preparation method thereof.The film comprises an adhesion layer, a metal reflection layer and a multi-layer dielectric film layer, the adhesion layer is arranged on a bottom layer, the metal reflection layer is arranged on the upper surface of the adhesion layer, and the multi-layer dielectric film layer is arranged on the upper surface of the metal reflection layer; the multi-layer dielectric film layer comprises a quasi-periodic multi-layer film structure which is formed by two materials of which the refractive index difference is greater than a preset threshold value according to a preset thickness in a preset arrangement mode; wherein the number of layers, the preset arrangement mode and the preset thickness of the multiple dielectric film layers are obtained by optimizing an ideal spectrum selectively emitted by the double atmospheric transmission windows as an optimization target. The radiation refrigeration film has the characteristic of high reflection in the solar spectrum range, and can selectively emit infrared rays at the first atmospheric window and the second atmospheric window at the same time, so that the radiation refrigeration film has higher refrigeration potential than an existing radiation refrigeration emitter.

An airflow generating package includes a base, a covering structure and a film structure. The film structure is disposed between the base and the covering structure, and includes a flap pair including a first flap and a second flap. The flap pair operates at an ultrasonic rate so that the airflow generating package produces an airflow. A first air opening is formed on the covering structure.

The invention belongs to the field of high polymer materials, and discloses a double-trigger programmable degradable PHA composition and a preparation method thereof. A cured film structure formed by the composition sequentially comprises an outer protective layer, a trigger layer and an inner functional layer from outside to inside, wherein the outer protective layer takes polyhydroxyalkanoate as a base material, a reversible cross-linked network is introduced into the outer protective layer, the trigger layer is provided with humidity and ion double-trigger microcapsules, and the inner functional layer is used for bearing functional auxiliaries. The cured film can maintain low permeability and mechanical stability before application. After application, under the synergistic effect of specific moisture and ions, the trigger layer is activated, so that the cured film is subjected to step-type improvement of moisture permeability in a preset time window, and a through hole is formed. And finally, integral disintegration is realized through physical structure failure. The technology can be applied to the fields of seed coating and the like, the activity of a biological base material can be ensured by adopting a low-temperature process with the temperature lower than 50 DEG C, and unification of stable protection before application and on-demand disintegration after application is achieved.

The invention provides a method for planting winter wheat in saline-alkali soil, which belongs to the technical field of wheat planting, and comprises the following steps: S1, rotary tillage and soil preparation: carrying out rotary tillage at the depth of 25-30cm 30-40 days before sowing, doping foreign soil, and applying straw and gypsum; s2, seed treatment: selecting saline-alkaline tolerant wheat seeds, soaking the wheat seeds in a liquid medicine, and soaking the wheat seeds in the liquid medicine; s3, ridging operation: high ridges with the ridge height of 15-20 cm, the ridge surface width of 40-50 cm and the ridge spacing of 25-30 cm are constructed; s4, sowing in line on ridges: sowing the wheat seeds treated in the step S2 on the ridges in line, wherein the sowing depth is 2-3cm; s5, film mulching operation, wherein the ridges are covered with mulching films of a double-film structure, and the film edges of the mulching films are sealed with humic acid slurry; s6, field management: uncovering the film and supplementing seedlings in the seedling stage, and drip irrigation and topdressing under the film in the growth stage. According to the saline-alkali soil winter wheat planting method provided by the invention, the wheat emergence rate can be remarkably increased by constructing a low-salt micro-domain environment.

The invention provides a metasurface design method. The metasurface design method comprises the steps that metasurface efficiencies corresponding to different film layer parameters are calculated through simulation software; selecting ideal film layer parameters to form a multilayer film structure, wherein the metasurface efficiency corresponding to the ideal film layer parameters is not lower than a first threshold value; a nano structure is formed by adopting a multi-layer film structure, and nano structure arrangement is carried out; the multi-layer film structure is constructed through the screened ideal film layer parameters, the resonance effect can be reduced under the condition that the phase requirement range is large, the situation that the transmittance or reflectivity of a nano structure is suddenly reduced is avoided, and therefore high-efficiency metasurface design is achieved.

The invention discloses a processing method and device for an edge area in film layer structure ink-jet printing, and the processing method comprises the steps: determining the edge area of a to-be-printed pattern on a substrate bitmap; the pattern to be printed comprises an edge area and a non-edge area; the edge area is divided into a plurality of edge subareas so that an ink-jet printer can conveniently conduct film layer structure printing on the edge subareas of the to-be-printed pattern; wherein in the direction from the edge area to the non-edge area, the sizes of the multiple edge subareas are sequentially decreased progressively; one size of the edge subarea corresponds to one ink drop extraction rate, the size of the edge subarea is the width of the edge subarea, and the ink drop extraction rate of the edge subarea is the proportion of ink drop points which are prohibited from printing to the total ink drop points in the edge subarea. The edge area of the film layer structure can be flat, and the film thickness is uniform.

The invention relates to a perpendicular anisotropic magnetic memory based on rare earth doped antiferromagnetic, which comprises a thin film structure, and the thin film structure sequentially comprises a buffer layer, a heavy metal layer, a perpendicular magnetic anisotropic layer, a rare earth doped antiferromagnetic layer and a protective layer from bottom to top, according to the invention, the magnetic texture is changed by doping rare earth elements into the collinear antiferromagnetic to break the symmetry of the system, and the spin-orbit torque is utilized to drive the magnetic state of the memory device with perpendicular magnetic anisotropy to overturn only by means of current under the condition of no external field assistance. The method provides a new implementation path for a low-power-consumption and high-density spin storage technology, has a good application prospect, and is expected to promote actual development and application of novel magnetic storage devices in the future.

Provided is a method for etching a silicon nitride film with high accuracy and high selectivity with respect to a silicon oxide film, while preventing deterioration of the shape of a silicon oxide film portion during etching. A dry etching method according to the present invention is used for etching a film structure that is formed in advance on a wafer disposed in a processing chamber, and that is configured such that an end portion of a film layer obtained by laminating a silicon nitride film so as to be vertically sandwiched by silicon oxide films constitutes a side wall of a groove or a hole, in a state in which a gas for processing is supplied into the processing chamber and no plasma is used, wherein: the method comprises (a) a step for reacting a hydrogen fluoride gas at a prescribed temperature to form a reaction layer on the silicon nitride film, (b) a step for channeling a gas of a polar solvent to process the reaction layer formed in step (a), and (c) a step for performing heating at a temperature higher than that in step (a) in a state in which no hydrogen fluoride gas is channeled and volatilizing the reaction layer formed in step (a) and processed in step (b) to remove the reaction layer; and steps (a) to (c) are repeated a plurality of times.

The invention relates to a damp-proof multifunctional air bubble film packaging bag which comprises a first air bubble film and a second air bubble film which are oppositely arranged, the first air bubble film and the second air bubble film comprise the first air bubble film and the second air bubble film which are oppositely arranged, and the three edges of the first air bubble film and the three edges of the second air bubble film are connected with edge sealing layers in a sealed mode. A top sealing structure is arranged on the outer surfaces of the upper ends of the first air bubble film and the second air bubble film, a fixing strip is fixedly connected to the inner surface of the front end of the top sealing structure, and the top sealing structure comprises a second sealing strip and a first sealing strip. The packaging bag has the beneficial effects that many defects of a traditional packaging bag in the aspects of moisture resistance and sealing performance are effectively overcome, the packaging bag has excellent physical protection performance and functional characteristics through the design of the six-layer functional composite film structure, the durability of the packaging bag is greatly improved through the arrangement of the anti-abrasion layer, and the effect that damage caused by friction in the transportation process is avoided.

The invention provides a film structure for a narrow-band filter, and belongs to the technical field of optical elements. The invention provides a membrane structure for a narrow-band filter. The membrane structure comprises repeated unit layers, each unit layer comprises a strong absorption layer and a space layer which are stacked in sequence; the strong absorption layer is a Ni layer, and the thickness of the strong absorption layer is 1.3 nm; the space layer is a Si layer, and the thickness of the space layer is 5.4 nm; the number of periodic layers of the repeated unit layers is 60. Based on the standing wave principle, the standing wave nodes are designed at the strong absorption layer Ni layer, the filter obtained by the film structure has high working wavelength transmissivity, narrow working bandwidth and high transmission intensity for extreme ultraviolet light, the signal-to-noise ratio of detection or detection equipment is greatly improved, and the close-range working effect can be ensured.

The invention discloses a multi-layer thin film structure capable of achieving vertical exchange bias and free of external field auxiliary total current overturning and a preparation method and application thereof, the multi-layer thin film structure sequentially comprises a heavy metal base layer, an atomic level intercalation layer, a ferromagnetic layer and an antiferromagnetic layer from bottom to top, and the multi-layer thin film structure is prepared through molecular beam epitaxy. According to the invention, anisotropic epitaxial strain is introduced into the antiferromagnetic layer, so that a remarkable vertical exchange bias effect at room temperature is realized. Meanwhile, a global uncompensated magnetic moment is generated in the anisotropic epitaxial strain induction antiferromagnetic layer, an energy barrier of vertical exchange bias flipping is reduced, current-driven exchange bias flipping without an external field is further realized through a spin-orbit moment effect, the dependence on an external magnetic field in the prior art is overcome, and the performance of the device is improved. And the integration and the application potential of the spinning electronic device are obviously improved. The technology lays a foundation for design and development of efficient and high-density magnetic storage and logic devices.

Some implementations described herein provide a semiconductor device including a resistor structure. The resistor structure (e.g., a thin film resistor structure) includes a multi-layer film structure connecting contact structures of the resistor structure below the contact structures. The multi-layer film structure includes a capping layer, an upper resistive layer having a first concentration of silicon, and a lower resistive layer having a second concentration of silicon that is lesser relative to the first concentration. The multi-layer film structure may be subject to a lesser risk of oxidation relative to a single layer film structure that does not include the capping layer. Additionally, or alternatively, the combination of the upper and lower resistive layers (e.g., including the first and second concentrations of silicon) may allow for tuning of a mean resistive property and / or a temperature coefficient of resistance across the multi-layer film structure.

The invention belongs to the technical field of vacuum coating machines, and particularly relates to a full-automatic vacuum coating machine for optical lenses and a control system of the full-automatic vacuum coating machine, the full-automatic vacuum coating machine comprises a machine body, a vacuum unit, a coating unit, an electrical control unit, a heating unit and a cooling unit; the coating unit comprises a substrate frame, and the substrate frame is rotationally connected into the machine body; the motor drives the substrate plate to rotate through the driving shaft, the substrate plate drives the lens to rotate in the substrate frame, and when the substrate frame is in contact with the pressure sensor after being turned over, the pressure sensor triggers and controls the motor to stop rotating and keep fixed, so that turning over of the lens in the coating process is achieved, and a coating machine is prevented from being started in the coating process; the vacuum coating machine has the advantages that the internal environment of the coating machine is affected, the lens expands with heat and contracts with cold due to the influence of the temperature and humidity environment, and the film structure is damaged, so that the lens coating effect is improved, and the use convenience of the vacuum coating machine is improved.

The invention discloses a multilayer optical film, a preparation method thereof and an imaging device. The preparation method comprises the following steps: providing an optical glass substrate, depositing an anti-reflection layer on the optical glass substrate, carrying out pattern design on the anti-reflection layer by using a beam splitting film design algorithm, and transferring a designed beam splitting pattern to the anti-reflection layer; depositing a high-damage-threshold protection layer on the anti-reflection layer, depositing a thermal management layer on the high-damage-threshold protection layer, depositing a reflection layer on the thermal management layer in an evaporation mode, forming a multi-layer film structure, carrying out annealing treatment on the formed multi-layer film structure, and setting the annealing condition as a preset temperature so as to improve the interface bonding force between the multi-layer film structure. Obtaining a multi-layer optical film; through the optimal design of the whole preparation process, the laser damage resistance is considered, the heat management layer provides heat stability, and the reflecting layer improves the efficiency of an optical system, so that the multi-layer optical film with high performance and multiple functions is manufactured, and the multi-layer optical film is suitable for high requirements of a laser display system.

The invention relates to the field of microelectronic devices, in particular to a bulk acoustic wave resonator with a double-layer piezoelectric film structure, a preparation method and a filter, the bulk acoustic wave resonator comprises a cap wafer, and a dry film, a passivation layer, a silicon oxide layer, a high-resistance silicon wafer and RDL metal are sequentially arranged on the cap wafer; the dry film and the cap wafer form a dry film cavity, the passivation layer located above the dry film cavity extends into the dry film cavity, and a top electrode, a first piezoelectric film, a middle electrode, a second piezoelectric film and a bottom electrode are sequentially arranged on the passivation layer; the top electrode and the bottom electrode are used as first ports of the resonator; and the middle electrode is a second port. According to the resonator, the excitation mode of the resonator is changed through cooperation of the two layers of piezoelectric films with the same polarization direction and the intermediate electrode, a high-order resonance mode is jointly excited, meanwhile, a high electromechanical coupling coefficient is kept, and a wide fractional bandwidth is achieved at high frequency through the relatively thick piezoelectric films; the problems that a high-frequency resonator is weak in power bearing capacity, narrow in bandwidth, low in quality factor and poor in stability are solved.