The present application relates to the field of advanced
semiconductor packaging technology, and particularly relates to a borosilicate
system TGV glass
interposer composite
interconnection structure for three-dimensional
integrated circuit packaging and a preparation method and application thereof. The structure comprises a
borosilicate glass interposer, a TGV through array penetrating the
interposer, a low-loss insulation / adhesion layer arranged on the upper and lower surfaces of the interposer, a fine re-routed layer, a ground shielding via array and a thermal
diffusion metal layer. By adopting
borosilicate glass as the core material of the interposer, realizing vertical
interconnection through TGV, constructing a ground shielding and
power integrity enhancement structure around the high-speed
signal channel, and introducing a thermal
diffusion layer and a stress buffer
insulation layer, the requirements of high-density
interconnection, low
insertion loss, low
crosstalk, low warpage and high reliability can be met. The structure is suitable for three-dimensional packaging scenes such as AI accelerator, high-
performance computing,
radio frequency front end, co-packaged optical and high-reliability sensor.