The invention relates to the technical field of semiconductors, in particular to a
surface acoustic wave resonance device, which comprises a substrate comprising a piezoelectric layer; the interdigital
electrode is located on the piezoelectric layer, and the interdigital
electrode sequentially comprises a first
bus, a first gap part, an overlapping part, a second gap part and a second
bus in the first direction; the piezoelectric layer sequentially comprises a first part, a first failure part, an effective part, a second failure part and a second part in the first direction, and the
electromechanical coupling effect of the effective part is effective; the first
bus is located on the first portion, the first gap portion is located on the first failure portion, the overlapping portion is located on the effective portion, the second gap portion is located on the second failure portion, and the second bus is located on the second portion. On the premise of not obviously influencing
insertion loss, power tolerance and
chip size, high-order nonlinearity, such as cubic nonlinearity, caused by
electromechanical coupling outside a
resonance area is effectively inhibited. In addition, the failure part extends to the bus, so that
gap mode can be effectively inhibited.