The invention discloses a manufacturing method of a
semiconductor device, and belongs to the technical field of semiconductors. The manufacturing method comprises the following steps: providing a substrate, forming a dummy gate on the substrate, and forming a
hard mask layer on the dummy gate; forming side wall structures on two sides of the dummy gate; forming a
contact hole etching stop layer on the substrate, the side wall structure and the pseudo gate, wherein the material of the
contact hole etching stop layer is the same as that of the
hard mask layer; forming an interlayer
dielectric layer on the
contact hole etching stop layer, and planarizing the interlayer
dielectric layer to the residual preset thickness of the
hard mask layer; oxidizing the hard
mask layer, a part of the contact hole etching stop layer and a part of the side wall structure to form a
surface oxide layer; synchronously removing the
surface oxide layer and a part of the interlayer
dielectric layer, wherein the surface of the dummy gate is flush with the surfaces of the interlayer dielectric
layers on the two sides; and removing the dummy gate to form a
metal gate. According to the manufacturing method of the
semiconductor device provided by the invention, the height of the formed
metal gate can be ensured, the manufacturing process is simple, and the
controllability is high.