The present invention belongs to the field of fine surface structure measuring technology, and relates to one kind of differential confocal scanning detection method with high spatial resolution. Differential confocal microscopic double receiving light path configuration and double detector subtraction form the differential confocal signal in measuring the workpiece. Optical super-resolution confocal microscopic detection method is adopted to raise the transverse resolution, and differential confocal microscopic detection method is adopted to raise the longitudinal resolution, so as to reach differential confocal scanning detection of high spatial resolution. The method can meet the requirements in high spatial resolution, high precision and great measurement range, and is especially suitable for the measurement of fine surface 3D structure, miniature steps, miniature grooves, line width, surface appearance, etc.