2117 results about "Surface shape" patented technology

The invention provides an optical lens, which comprises six lenses which sequentially comprise a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power from an object side to an imaging surface, the object side surface of the second lens is a concave surface, and the image side surface of the second lens is a convex surface; the object side surface and the image side surface of the third lens are convex surfaces; the fourth lens has positive focal power, and the object side surface of the fourth lens is a convex surface; the fifth lens has negative focal power, and the image side surface of the fifth lens is a concave surface; and the sixth lens has positive focal power. According to the optical lens provided by the invention, the six lenses with specific focal power are adopted, and through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, the aberration can be reduced, the imaging quality of the optical lens can be improved, and the lens has one or more advantages of large target surface, large aperture, high imaging quality and the like.

The invention provides an optical lens, which comprises six lenses from an object side to an imaging surface along an optical axis: a first lens with positive focal power; the second lens has positive focal power; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a convex surface; the object side surface of the fourth lens is a concave surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a concave surface, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power, and the object side surface of the sixth lens is a concave surface; the curvature radius R9 of the object side surface of the fifth lens and the curvature radius R10 of the image side surface of the fifth lens meet the formula: (R9-R10) / (R9 + R10) lt; and 0.4 part. According to the optical lens provided by the invention, the six lenses with specific focal power are adopted, and through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, the aberration can be reduced, and the imaging quality of the optical lens can be improved.

The invention provides a control method and system for a surface shape of an optical device, and the method comprises the steps: carrying out the initial grinding and polishing of the optical device, carrying out the real-time detection through a multi-frequency-band stress detector, obtaining the stress distribution and surface wave front data, and obtaining an initial detection result; a phase shift interferometer and a composite laser confocal probe are used to carry out depth surface shape measurement based on the initial detection result, and adaptive finishing is carried out on an abnormal area to obtain a surface shape finishing log; according to the initial detection result and the finishing log, executing step-by-step load irradiation and stress tracking, and collecting surface shape change under photo-thermal coupling to obtain surface shape evolution information; and according to the surface shape evolution information, performing partition dynamic compensation and real-time detection until a surface shape control result meeting requirements is obtained. According to the method, secondary deformation caused by internal stress release is recognized and corrected through combination of multi-frequency-band stress detection and high-precision interference measurement, high-precision control over the surface shape of the optical device is achieved, and the method is suitable for scenes with high requirements for the surface shape of the optical element.

The invention relates to the technical field of optical machining surface shape simulation, in particular to a surface shape simulation calculation optimization method for a multi-mechanical-arm cooperative machining scene, and the method comprises the steps: planning a polishing region and a polishing track belonging to each mechanical arm according to the surface shape sampling size of a workpiece to be machined and the number and position of the mechanical arms for machining; and a residence point in the polishing track of each mechanical arm; the residence point of each mechanical arm is matched with the surface shape data of the workpiece to be machined, and the surface shape data corresponding to the residence point of each mechanical arm is determined; and finally, according to the surface shape data corresponding to the residence point of each mechanical arm and the removal function of the workpiece to be machined, final residence time distribution of each mechanical arm during machining is obtained through calculation. According to the method, a surface shape matching simulation calculation method is utilized, the secondary frequency superposition problem occurring during multi-mechanical-arm machining is effectively eliminated, and meanwhile residence time distribution with good smoothness can be obtained.

The invention discloses a deterministic cutting compensation processing method for an infrared thin-wall optical element. The method comprises the following steps: S1, acquiring an initial surface shape of a workpiece; the method comprises the following steps: measuring an initial surface shape of a thin-wall optical element to be machined through an ultra-precision machine tool in-situ measurement technology to obtain a surface shape outline rho (x, y), and calculating a material removal amount deltaz (x, y) at each coordinate position according to a designed surface shape outline z (x, y), deltaz (x, y) = rho (x, y)-z (x, y); s2, elastic deformation prediction of clamping stress; based on a finite element simulation model, three-dimensional space numerical distribution simulation is conducted on clamping force distribution in the machining process, and element elastic deformation epsilon (x, y) caused by clamping stress is predicted; integrating the elastic deformation amount with the initial material removal amount to obtain a new material removal amount z '(x, y); s3, deformation prediction of the machining residual stress element; s4, generating a non-uniform material removal compensation track; and S5, non-uniform cutting compensation machining based on slow cutter servo is carried out.

The invention provides an optical lens, which comprises nine lenses from an object side to an imaging surface along an optical axis: a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a concave surface; the object side surface of the fourth lens is a concave surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power; the seventh lens has positive focal power; the eighth lens has negative focal power; and the ninth lens has positive focal power. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the lens has one or more advantages of short focus, miniaturization, large field angle, large aperture, large target surface, low distortion and low sensitivity.

The invention provides an optical lens, which sequentially comprises a first lens with negative focal power from an object side to an imaging surface along an optical axis, a second lens with negative focal power, a third lens with positive focal power and a fourth lens with negative focal power from the object side to the imaging surface, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a concave surface, and the image side surface of the third lens is a convex surface; the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a convex surface; the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens is a convex surface; the object side surface of the seventh lens is a concave surface; and the object side surface of the eighth lens is a convex surface, and the image side surface of the eighth lens is a concave surface. The optical lens provided by the invention has the advantage of excellent imaging quality through specific surface shape arrangement and reasonable focal power distribution.

The invention discloses a surface shape-optical error compensation method and device for a glass optical element mold pressing mold. The method comprises the following steps: determining high-temperature viscoelasticity parameters of glass by using a creep test method based on constant-pressure stress micro-deformation low-friction disturbance axial compression; an initial glass optical element contour curve equation is constructed to determine initial mold pressing mold parameters, and then a glass preform simulation model under the force-heat coupling effect is established; simulating the compression molding process by using the simulation prediction model to obtain a simulated glass optical element, and predicting to obtain a predicted surface shape error and a predicted optical error of the simulated glass optical element; and compensating the initial mold pressing mold parameters based on the predicted surface shape error and the predicted optical error so as to manufacture a compensated mold pressing mold based on the compensated mold pressing mold parameters. According to the method, surface shape-optical error compensation can be carried out on parameters of the mold pressing mold, and the compensated mold pressing mold can be subjected to one-time mold pressing forming to obtain a glass optical element with high precision and high optical performance.

The invention discloses a roughness optimization method and system for ultrasonic vibration assisted magneto-rheological deterministic polishing, and the method comprises the steps: placing an ultrasonic vibration table on a workpiece rotating shaft of a magneto-rheological machine tool, and connecting and fixing a workpiece to be machined with a clamp of the ultrasonic vibration table; the position posture of the workpiece to be machined is adjusted through a leveling mechanism and a center adjusting mechanism of the magneto-rheological machine tool, and it is ensured that the press-in position and the press-in depth of a magneto-rheological polishing ribbon formed on a polishing wheel in the magneto-rheological machining process are consistent; the viscosity and the flow of the magnetorheological polishing liquid are kept stable; detecting surface shape error data of the workpiece to be processed by the wave surface interferometer and generating a processing code; and the obtained machining code is input into a magneto-rheological machine tool, so that the magneto-rheological polishing ribbon conducts deterministic polishing on the detected workpiece to be machined based on the fixed press-in position and the press-in depth. The ultrasonic vibration assisted magneto-rheological deterministic polishing roughness optimization method aims at achieving ultrasonic vibration assisted magneto-rheological deterministic polishing roughness optimization, material removal uniformity is promoted, and the roughness of a workpiece is effectively reduced.

The invention provides an optical lens, which comprises seven lenses in total, and sequentially comprises a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with positive focal power and a fifth lens with negative focal power from an object side to an imaging surface along an optical axis, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a concave surface; the image side surface of the fourth lens is a convex surface; the fifth lens has positive focal power, and the image side surface of the fifth lens is a convex surface; the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens near the optical axis is a convex surface; and the object side surface of the seventh lens is a concave surface near the optical axis, and the image side surface of the seventh lens is a convex surface. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens is improved, and the lens has one or more advantages of ultra wide angle, ultra large aperture, large image plane, high pixel, high imaging quality and the like.

The invention provides an optical lens which sequentially comprises a first lens with positive focal power from an object side to an imaging surface along an optical axis, a second lens with negative focal power, a third lens with positive focal power and a fourth lens with negative focal power from the object side to the imaging surface, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a concave surface, and the image side surface of the third lens is a convex surface; the fourth lens has positive focal power, the object side surface of the fourth lens is a convex surface near the optical axis, and the image side surface of the fourth lens is a concave surface near the optical axis; the fifth lens has positive focal power, the object side surface of the fifth lens near the optical axis is a convex surface, and the image side surface of the fifth lens is a convex surface; the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens is a convex surface; and the object side surface of the seventh lens is a concave surface, and the image side surface of the seventh lens is a concave surface near the optical axis. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, and the optical lens has the advantage of excellent imaging quality.

The invention relates to a pre-compensation flexible assembling and adjusting mechanism of a large-diameter transmission reflector. The pre-compensation flexible assembling and adjusting mechanism comprises the large-diameter transmission reflector, a glue joint mandrel, an isolation telecentric flexible hinge, an isolation plate, a hooke flexible hinge, an adjusting flexible branch chain, an anti-rotation flexible branch chain, a back plate and a driving assembly. The large-aperture transmission reflector is provided with three blind holes for glue joint, and is connected with the isolation plate through three groups of glue joint mandrels and isolation telecentric flexible hinges, so that isolation of load deformation interference of the isolation plate is realized; the driving ends of the two adjusting flexible branch chains are correspondingly connected with two driving assemblies installed on the back plate, and the connecting ends of the adjusting flexible branch chains are connected with the isolation plate. One ends of the Hooke flexible hinges and the anti-rotation flexible branch chains are connected with the isolation plate, and the other ends are connected with the back plate; the device has the advantages of being simple in structural form, stable in movement and high in precision, meanwhile, the return clearance caused by axial load reversing under heavy loads can be avoided, the additional surface shape caused by assembling and adjusting stress is effectively isolated, and the additional surface shape caused by gravity is compensated.

The invention provides an optical lens, which comprises nine lenses from an object side to an imaging surface along an optical axis: a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a concave surface; the object side surface of the fourth lens is a concave surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power; the seventh lens has positive focal power; the eighth lens has negative focal power; and the ninth lens has positive focal power. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the lens has one or more advantages of short focus, miniaturization, large field angle, large aperture, large target surface, low distortion and low sensitivity.

The invention provides an optical lens, which comprises nine lenses from an object side to an imaging surface along an optical axis: a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a concave surface; the fourth lens has negative focal power, and the object side surface of the fourth lens is a concave surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power, and the image side surface of the sixth lens is a concave surface; the seventh lens has positive focal power; the eighth lens has negative focal power; and the ninth lens has positive focal power. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the lens has one or more advantages of short focus, miniaturization, large field angle, large aperture, large target surface, low distortion and low sensitivity.

The invention provides an optical lens, which comprises six lenses which sequentially comprise a first lens with positive focal power, a second lens with negative focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with positive focal power and a sixth lens with negative focal power from an object side to an imaging surface along an optical axis, the image side surface of the second lens is a convex surface; the object side surface of the third lens is a concave surface; the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a concave surface, and the image side surface of the fifth lens is a convex surface; and the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens is a concave surface near the optical axis. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, the aberration can be reduced, and the imaging quality of the optical lens can be improved.

The invention provides an optical lens, which comprises four lenses from the object side to the imaging surface along the optical axis: a first lens with negative focal power, the object side surface of which is a concave surface near the optical axis, and the image side surface of which is a concave surface; the image side surface of the second lens is a convex surface; the third lens has positive focal power, the object side surface of the third lens is a concave surface near the optical axis, and the image side surface of the third lens is a convex surface; the fourth lens has focal power, the object side surface of the fourth lens is a convex surface near the optical axis, and the image side surface of the fourth lens is a concave surface near the optical axis; wherein the maximum field angle FOV of the optical lens and the aperture value Fno meet the following conditions: 130 degree lt; an FOV / Fnot; 150 DEG C; the curvature radius R5 of the object side surface of the third lens and the curvature radius R6 of the image side surface of the third lens satisfy 0.1 lt; (R5-R6) / (R5 + R6) lt; and 0.8. According to the optical lens provided by the invention, the four lenses with specific focal power and specific surface type are adopted, so that the lens has one or more advantages of large aperture, large field of view, small distortion, miniaturization, high pixel and the like.

The present invention discloses an in-situ detection device and method for the surface shape of an optical-mechanical component, which belongs to the field of optical precision detection technology, and aims to solve the problem in the prior art that there is a lack of in-situ monitoring and detection of surface shape distortion during the adjustment process of an optical-mechanical component. The laser light generated by the laser in the device is incident on the optical-mechanical component to be measured after passing through a beam isolator, a beam splitter prism, and a collimator A in sequence, and is reflected. The reflected light of the optical-mechanical component to be measured is incident on the beam splitter prism after passing through the collimator A and is reflected. The reflected light of the beam splitter prism is incident on a CCD camera after passing through a perforated light screen, a collimator B, and a phase plate. The CCD camera is connected to a computer system, and the light spot diagram recorded by the CCD camera will be input into the computer system for in-situ detection of the surface shape. The method modulates the reflected light of the sample to be measured by a phase plate, and uses a phase reconstruction algorithm based on light field diffraction iteration to realize sample surface shape reconstruction. It has the advantages of high measurement accuracy, no need for a reference plane, and strong vibration resistance.

The invention belongs to the technical field of precision machining equipment, and discloses a partitioned and deformation-controllable precision polishing grinding head which comprises a partitioned base, a positioning block is arranged in the center of the lower portion of the partitioned base, at least one connecting rod assembly is arranged above the partitioned base, and the top end of each connecting rod assembly is connected with a curvature adjusting head. A flexible polishing head is arranged above the curvature adjusting head, a protective shell is arranged on the outer side of the connecting rod assembly, the flexible polishing head and the protective shell are connected through a grinding head frame, and the whole device is provided with a drive circuit. According to the precise polishing grinding head capable of being partitioned and deformed controllably, through the partitioned base and the independent shape memory alloy driver, the curvature radiuses of the center and the edge of the flexible polishing head are controlled, the edge pressure is optimized, stable contact rigidity and uniform pressure distribution are brought, and finer surface shape control is achieved; the shape memory alloy driver is a solid-state element and is matched with the transverse amplification connecting rod, and needed driving force and displacement can be achieved in a relatively compact space.

The invention relates to the field of optical system imaging, in particular to an optical system imaging quality prediction model construction method giving consideration to surface shape errors and pose errors, which adopts a Zernike polynomial to perform accurate fitting on mirror surface shape errors caused by bolt pre-tightening force, and adopts a finite element mode to perform simulation on an optical system bolt tightening process. According to the method, Zernike polynomial fitting is taken as a basic parameter, various mirror surface shape errors and assembly pose deviations are fully considered when Zemax is adopted to carry out optical path imaging simulation, and the energy concentration degree is taken as an imaging quality quantitative evaluation index, so that the optical path imaging simulation of the two-mirror optical system is realized. According to the method, an SVR proxy model containing local and global mixed kernel functions is established, sensitivity analysis is performed on mirror surface shape and assembly pose parameters, an assembly data set is obtained through assembly and imaging joint simulation, and the model is trained to obtain an imaging quality prediction model so as to realize rapid and accurate prediction of imaging quality.

The invention provides an optical lens, which sequentially comprises a first lens with negative focal power from an object side to an imaging surface along an optical axis, a second lens with negative focal power, a third lens with negative focal power and a fourth lens with negative focal power from the object side to the imaging surface, the image side surface of the second lens is a convex surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a convex surface; the fourth lens has positive focal power, the object side surface of the fourth lens is a convex surface near the optical axis, and the image side surface of the fourth lens is a convex surface; the fifth lens has negative focal power, the object side surface of the fifth lens is a concave surface, and the image side surface of the fifth lens is a concave surface near the optical axis; the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens is a convex surface; and the object side surface of the seventh lens is a convex surface near the optical axis, and the image side surface of the seventh lens is a concave surface near the optical axis. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, and the optical lens has the advantage of excellent imaging quality.

The invention provides an optical lens, which comprises seven lenses, and sequentially comprises a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power from an object side to an imaging surface, the object side surface of the second lens is a concave surface, and the image side surface of the second lens is a convex surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a convex surface; the object side surface of the fourth lens is a convex surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a concave surface; the object side surface of the sixth lens is a convex surface, and the image side surface of the sixth lens is a convex surface; and the object side surface of the seventh lens is a concave surface. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the lens has one or more advantages of large aperture, large field angle, good resolution, high illumination, high imaging quality and the like.

The invention provides a device and a method for testing thermal deformation of a reflector, and relates to the technical field of optical assembly, calibration and detection.The testing device comprises an interferometer, a three-comprehensive test box, a standard plane reflector, first window glass, second window glass and a holographic original, firstly, the thermal deformation of the window glass on the two sides in the three-comprehensive test box is measured; measuring the thermal deformation of the reflector to be measured, analyzing and calculating the surface shape error caused by two times of thermal deformation to obtain the Zernike polynomial coefficient value of the reflector to be measured, and obtaining the surface shape value of the reflector to be measured through fitting analysis, namely the thermal deformation of the reflector to be measured. The problems that in the prior art, the surface shape change condition in the actual load working environment is difficult to accurately measure and the influence of window glass on the reflector to be tested is difficult to accurately measure are solved, the testing precision is improved, and in addition, the surface shape error of the reflector to be tested can be quantitatively analyzed through all Zernike polynomial coefficient values in the testing result.

The invention provides an optical lens, which comprises nine lenses from an object side to an imaging surface along an optical axis: a first lens with negative focal power, a second lens with negative focal power, a third lens with negative focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a concave surface; the object side surface of the fourth lens is a concave surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a convex surface, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power; the seventh lens has positive focal power; the eighth lens has positive focal power; and the ninth lens has positive focal power. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the lens has one or more advantages of short focus, miniaturization, large field angle, large aperture, large target surface, low distortion and low sensitivity.

The invention relates to the technical field of wafer warpage and curvature detection, in particular to a wafer warpage and curvature detection system and a detection method thereof, and the detection system comprises a laser, a beam expander, a diaphragm, a beam splitter prism, a collimating mirror, a reference mirror, an imaging lens, a CCD and a computer, the light beam is reflected by the sample to be measured and then returns along the same path to interfere with the reference light so as to generate three groups of interference fringes, and the three groups of interference fringes pass through the imaging lens, the CCD and the computer and then are calculated so as to obtain the warping degree and the bending degree of the sample to be measured. According to the invention, the multi-surface interference fringe pattern of the double-sided polished sample to be measured is acquired by using the wavelength-adjustable Hunfizeau interferometer, and the warping degree and the bending degree of the sample to be measured are obtained through calculation, so that the problem of mapping errors caused by measuring the surface shape by using two interferometers or overturning the measured surface shape is solved; therefore, the detection steps of the warping degree and the bending degree of the wafer can be simplified, and the precision of the detection result is improved.

The invention provides an optical lens, which sequentially comprises a first lens with negative focal power from an object side to an imaging surface along an optical axis, a second lens with negative focal power, a third lens with negative focal power and a fourth lens with negative focal power from the object side to the imaging surface, the object side surface of the second lens is a concave surface, and the image side surface of the second lens is a concave surface; the object side surface of the third lens is a convex surface, and the image side surface of the third lens is a convex surface; the object side surface of the fourth lens is a convex surface, and the image side surface of the fourth lens is a convex surface; the object side surface of the fifth lens is a concave surface, and the image side surface of the fifth lens is a concave surface; the object side surface of the sixth lens is a convex surface, and the image side surface of the sixth lens is a convex surface; the object side surface of the seventh lens is a concave surface, and the image side surface of the seventh lens is a convex surface; and the object side surface of the eighth lens is a convex surface. According to the optical lens, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, and the optical lens has the advantage of being good in imaging quality.

According to the workpiece surface coating bonding strength scratch detection device and method provided by the invention, the workpiece surface characteristics can be identified, so that the movement path of the scriber is planned, the scriber can change the movement direction along with the change of the surface shape of the workpiece, and the detection of the workpiece with the curved surface characteristics can be realized. The scratch detection device comprises a three-axis moving mechanism, a scriber unit, an observation unit and a workpiece clamp, the scriber unit is mounted on the three-axis moving mechanism, can move on the coating surface of the workpiece to be tested along a planned scriber moving path, scribes on the coating surface of the workpiece to be tested by using a scriber, and applies a test load to the workpiece to be tested; the observation unit is installed on the three-axis moving mechanism, can observe the surface shape of a workpiece to be measured and is used for planning the moving path of the scriber. Meanwhile, the observation unit can also be used for observing the appearance of a scratch scratched by the scriber unit on the surface of the coating of the workpiece to be detected; the workpiece clamp is used for clamping a to-be-tested workpiece.

The invention discloses an optical performance-oriented key geometric error identification method for a large aspheric element multi-axis numerical control machine tool. According to the method, a tool setting point is used as a key node to establish a surface shape error model, geometric errors and surface shape errors of a machine tool are accurately associated, multi-error coupling analysis is simplified, and targeted compensation, online monitoring and real-time correction are achieved. On the basis, a machine tool space error model is constructed in combination with a multi-body system theory, a mapping relation between a surface shape error and wavefront aberration is established by utilizing a ray tracing theory, the wavefront aberration is fitted through a Zernike polynomial, and the contribution degree of each geometric error to the aberration is quantified by means of principal component analysis, so that a key geometric error is identified and compensation is implemented. According to the method, the machining error and the final optical performance are directly associated, and the machining precision and the performance quality of the large aspheric element can be improved. The method is suitable for the manufacturing field of large complex optical elements machined by a multi-axis numerical control machine tool.

The invention provides an optical lens, which sequentially comprises a first lens with positive focal power from an object side to an imaging surface along an optical axis, a second lens with negative focal power, a third lens with positive focal power and a fourth lens with negative focal power from the object side to the imaging surface, the object side surface of the second lens is a convex surface, and the image side surface of the second lens is a concave surface; the third lens has negative focal power; the fourth lens has negative focal power, the object side surface of the fourth lens is a convex surface near the optical axis, and the image side surface of the fourth lens is a concave surface near the optical axis; the fifth lens has positive focal power, and the image side surface of the fifth lens is a convex surface; the sixth lens has negative focal power; the seventh lens has negative focal power, and the image side surface of the seventh lens is a concave surface near the optical axis; the effective focal length f of the optical lens and the real image height IH corresponding to the maximum field angle of the optical lens meet the following conditions: 1.3 lt; iH / flt; and 1.6. According to the optical lens provided by the invention, through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, and the optical lens has the advantage of excellent imaging quality.

The invention discloses a two-plane absolute surface shape detection method and device based on multi-signal phase extraction, and relates to the technical field of optical interference measurement, and the method comprises the steps: obtaining a rotation asymmetric error through employing the wavefront phase distribution data of an initial position and an average value of the wavefront phase distribution data after rotation; then translating the reference mirror along the X axis, measuring translated wavefront phase distribution data, obtaining a rotational symmetry error according to the translated wavefront phase distribution data, and combining the rotational symmetry error with the rotational asymmetry error to obtain a solved surface shape error. According to the two-plane absolute surface shape detection method and device based on multi-signal phase extraction provided by the invention, errors caused by overturning of the mirror to be detected are eliminated, the measurement precision is improved, the measurement steps are simplified, and the stability of surface shape detection is improved.

The invention provides an optical lens, which comprises six lenses which sequentially comprise a first lens with negative focal power, a second lens with negative focal power, a third lens with positive focal power, a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with negative focal power from an object side to an image side along an optical axis, the second lens has negative focal power; the object side surface of the third lens is a concave surface, and the image side surface of the third lens is a convex surface; the object side surface and the image side surface of the fourth lens are convex surfaces; the fifth lens has negative focal power, and the image side surface of the fifth lens is a concave surface; and the object side surface of the sixth lens is a concave surface, and the image side surface of the sixth lens is a convex surface. According to the optical lens provided by the invention, the six lenses with specific focal power are adopted, and through specific surface shape matching and reasonable focal power distribution, the imaging quality of the optical lens can be improved, the aberration can be reduced, the imaging quality of the optical lens can be improved, and the lens has one or more advantages of large target surface, large aperture, high imaging quality and the like.