664 results about "Optical beam" patented technology

The invention relates to the technical field of photoetching machine calibration, and discloses a photoetching machine calibration method, device and equipment based on multi-view vision, and the method comprises the following steps: carrying out imaging and phase sensitive detection analysis on a mask plane and a wafer plane through a four-path optical beam splitting system to obtain four groups of mask-wafer initial alignment position information; performing scanning white light interference edge enhancement processing to obtain three-dimensional surface contour data; performing wavelet transform processing on the three-dimensional surface contour data, and performing dynamic registration on the four-path optical beam splitting system to obtain multi-view visual feature registration data; a comprehensive error model including mechanical errors, optical errors and environmental errors is established, real-time correction and error compensation are carried out on a six-degree-of-freedom motion platform of the photoetching machine, a multi-view vision calibration result of the photoetching machine is obtained, the influence of environmental vibration and thermal drift on calibration precision is effectively eliminated, and the calibration accuracy of the photoetching machine is improved. The optical system is ensured to be always in the optimal imaging state, and the calibration precision is improved.

A method is disclosed for use in detecting a pulsed optical beam when the pulsed optical beam is transmitted through a scattering medium, wherein the pulsed optical beam comprises a plurality of optical pulses and the method comprises using a plurality of photodetectors of a photodetector array to detect light which is scattered progressively from the same optical pulse as the optical pulse propagates through a plurality of regions of the scattering medium and which is then received progressively on different photodetectors of the photodetector array. The method may be used in particular, though not exclusively, for non-line-of-sight free-space optical communications. An optical receiver for use in detecting the pulsed optical beam and an associated optical system are also disclosed.

The invention relates to a packaging structure and packaging method for an optical module and an optical chip, and the packaging structure comprises a receiving end assembly, a stepped metal heat sink, and a silicon-based optical interconnection assembly which is pasted on the stepped metal heat sink. The silicon-based optical interconnection assembly comprises a laser, a silicon light beam splitter, a lens group, a light transmission compensation gasket, a silicon light modulator and an optical fiber array; coplanar coupling is formed between the laser and the silicon light beam splitter. The silicon light beam splitter and at least part of the collimating lens in the lens group are fixed on the light transmission compensation gasket; the optical fiber array and the silicon light modulator realize waveguide matching in an active coupling mode; the silicon light modulator and the receiving end assembly are separately arranged at least at a preset interval, and the optical fiber array and / or the receiving end assembly are / is covered with a metal isolation cover. According to the invention, the problems of high cost of multiple light sources, easy pollution of an open light path and yield bottleneck caused by low-reliability glue in the prior art are solved, and finally, a packaging scheme which is compact in structure, stable in process and high in mass production is formed.

The invention provides a light beam scanning device of an integrated photonics chip and a test method. The light beam scanning device of the integrated photonics chip comprises a chip sample table, a chip sample table base, a light beam receiver connected with a lens cone and a horizontally arranged turntable base, the lens barrel is arranged above the turntable base, and a diaphragm adjusting structure and at least four lens groups are arranged in the lens barrel; the central point of the chip sample table base is overlapped with the central point of the turntable base, the chip sample table base is positioned above the turntable base, and the chip sample table is vertically arranged at the central point of the chip sample table base. Through switching of different lens groups in the lens cone, measurement of far and near fields of the to-be-tested chip is realized by using the same lens cone, the lens cone is arranged on the turntable base, and the test angle range can be adjusted according to specific test requirements so that various chip test requirements can be met.

High-power, integrated optical amplifiers are described in which gain waveguides of the amplifiers are designed to improve power performance by reducing power saturation effects in the amplifier. The gain waveguides can change, in at least one aspect, along the length of the gain waveguide to reduce gain saturation. Multi-mode optical beams and / or multi-stage amplification can also be employed to reduce gain saturation.

One example includes a quantum lidar system. The system includes a beam generator configured to generate a signal beam and an idler beam and a beam combiner configured to generate a combined optical beam comprising the signal beam and the idler beam. The system also includes a lidar transmitter configured to transmit the combined optical beam to a target and a lidar receiver configured to receive the combined optical beam and a reflected beam of the combined optical beam reflected from the target to generate lidar data associated with the target.

A method for assembling a photonic computing system includes attaching a photonic source to a support structure, and attaching a photonic integrated circuit to the support structure. The photonic source includes a first laser die on a substrate configured to provide a first optical beam, and a second laser die on the substrate configured to provide a second optical beam. The photonic integrated circuit includes a first waveguide and a first coupler coupled to the first waveguide, and a second waveguide and a second coupler coupled to the second waveguide. The method includes attaching a plurality of beam-shaping optical elements to the support structure, the substrate, or the photonic integrated circuit, in which the attaching includes aligning a first beam-shaping optical element during attachment so that the first optical beam is coupled to the first coupler, and aligning a second beam-shaping optical element during attachment so that the second optical beam is coupled to the second coupler.

A method for monitoring a plurality of process chambers, the method includes generating an optical beam at a light source. The method further includes dividing the optical beam into a plurality of light beams. The method further includes providing the plurality of light beams to the plurality of process chambers. And the method further includes measuring the plurality of light beams after being reflected within the plurality of process chambers.

A modification setup including an array of modification units, each positioned and configured to: cause light of an input optical beam to pass through a corresponding input surface of the respective modification unit, in a manner that reduces exceeding of its light, from a first effective aperture of the input surface; and modify beam profile of the input optical beam, to form an intermediate optical beam having a beam profile of illumination distribution factor that is higher than that of the input optical beam. An output surface of the modification unit, located at a distance D from the input surface is configured and positioned such that the intermediate optical beam passes through the output surface at increased illumination cover area and decreased exceeding from a second effective aperture of the output surface. Each input beam may be collimated before entering the input surface of a corresponding modification unit.

Methods and systems for luminescence characterisation of semiconductor devices are provided herein In an embodiment, the method 300 for luminescence characterisation of a perovskite material 224 comprises a step 302 of exciting at least part of the perovskite material 224 with a modulated optical beam 210 to emit a modulated photoluminescence signal 226, the modulated optical beam 210 having a modulation frequency that is selected based on an estimated lifetime of the perovskite material 224 to be characterised; a step 304 of capturing the emitted modulated photoluminescence signal 226; and a step 306 of analysing a phase and / or modulation change between the modulated optical beam 210 and the modulated photoluminescence signal 226 for characterising the perovskite material 224.

The invention relates to a method for holographic generation of an array of focusing points arranged according to multiple positions of the field of an optical system, which comprises: (S10) detecting images formed by the optical system at a plurality of calibration points arranged according to multiple positions of the field of the optical system; (S20) estimating aberrations introduced by the optical system onto the optical field from the detected images; (S30) applying a phase mask to the optical beam in order to generate a plurality of focusing points arranged according to multiple positions in the field of the optical system; wherein the phase mask is calculated from the estimated aberrations in order to simultaneously compensate for the aberrations at each focusing point. The invention also relates to a holographic generation system which carries out this method.

This invention presents a frequency-domain fluorescence lifetime imaging system, enhancing capabilities with a spatial beam attenuator and pinhole beam splitter. The spatial beam attenuator reshapes any beam into a circular Gaussian beam profile, being compact, cost-effective, with low loss and back reflection. Using digital printing technology, a thin optical film is deposited onto an optical substrate for precise local attenuation of the beam in either transmission or reflection mode. The pinhole beam splitter consists of an optical beam splitter with an active region the size of a pinhole, positioned near the beam's focus, which directs focused light into two paths based on acceptance or rejection by the pinhole. This configuration allows for two detectors to collect photons from both paths concurrently, facilitating dual-mode imaging. Consequently, the system can generate both confocal and conventional non-confocal laser scanning fluorescence lifetime images of the sample at the same time.

Systems, methods and subsystems for adjustment of optical path length (OPL) of optical beams of a multi-channel optical system, by using an OPL adjustment subsystem that includes an array of OPL adjustors, each configured and located to controllably adjust OPL of an optical beam of a corresponding optical channel. For each optical beam of each optical channel one or more updated properties associated with the optical beam is detected to determine, based on detected data analysis, required one or more updated adjustor-control properties, for achieving an associated desired OPL adjustment of the corresponding optical beam. Each OPL adjustor is controlled to adjust the OPL of its corresponding optical beam, according to the determined one or more updated adjustor-control properties. The detection, analysis and / or OPL adjustment may be performed in a parallel manner to all optical channels of the multi-channel optical system.

The invention provides a space optical communication multi-aperture receiving method based on optical and electrical comprehensive synthesis. The number of optical beam combination sub-apertures is intelligently adjusted by adopting densely-arranged multi-aperture optical antennas so as to ensure that light paths and light signals after beam combination are mutually independent; receiving of optical signals and correction of first-order and second-order Zernike aberration are achieved through the optical antenna array with the total number of sub-apertures determined on the basis of the receiving plane; the optical signals pass through the optical beam splitter, one part of the optical signals are input into the coupling energy photoelectric detector to be converted into voltage or current feedback signals to be input into the control module, and the other part of the optical signals are input into the N * 1 self-adaptive light beam synthesis module; coherent beam combination is carried out on the optical signals through the N * 1 adaptive beam combination module to form M paths of mutually independent optical signals; and carrying out direct detection or coherent detection on the M paths of optical signals, converting the M paths of optical signals into M paths of electric signals, and carrying out electrical signal synthesis on the M paths of electric signals. The communication stability is improved, and the independence of the electrical synthesis signal is ensured.

A method and system is provided for operating a quantum information processing (QIP) system, including a dual-space, single-species architecture for trapped-ion quantum information processing. An exemplary method of preparing the ions include i) applying a first optical beam to the plurality of ions to shelve at least a portion of the plurality of ions from a first state to a second state, ii) applying a second optical beam to the plurality of ions to deshelve the at least a portion of the plurality of ions from the second state to a third state, iii) applying a third optical beam to optically pump the at least a portion of the plurality of ions from the third state and to a fourth state, and iv) iteratively repeat i) to iii) to transition a remaining portion of the plurality of ions to the fourth state.

Distances between photonic integrated circuits and multiport optical probes can be established by emitting an optical beam from a first optical port of the multiport optical probe so that the optical beam is coupled into a first waveguide section of a PIC. This optical beam portion is reflected from a surface of the multiport optical probe back to the PIC. At suitable PIC-probe distances, the optical beam is coupled by a second waveguide grating to propagate in a second waveguide section and is then emitted to a second optical port of the multiport optical probe by a third waveguide grating coupler and directed to a detector. The detector signal is used to determine or adjust PIC-probe separation.

There is provided an object scanning apparatus. The object scanning apparatus may include a THz source emitting a THz beam; an optical system for directing the THz beam; a zone for inspecting objects wherein the optical beam interacts with the object; a motion device for changing the spatial or temporal interaction of the object and optical beam; at least one transducer, the at least one transducer including an imaging transducer for converting the optical beam energy after interaction with the object to an electronic image; and a processor for performing processing of the image for use in characterization of the object or its interior contents or composition.

A method for differentiating gas sources based on temperature includes transmitting an optical beam through a plume emitted by a combustion system. The method includes detecting the optical beam, after propagating through the plume, to obtain an absorption spectrum. The method includes determining, based on the absorption spectrum, a first path-integrated concentration of a gas species, a first temperature of the first path-integrated concentration, a second path-integrated concentration of the gas species, and a second temperature of the second path-integrated concentration. The second temperature is different from the first temperature. The method may further include performing an inversion to obtain a sampled quantity of the gas species within the plume. The method may be implemented with dual-comb spectroscopy, in which case the optical beam is formed from two frequency combs having slightly different repetition rates.

The invention relates to a measuring arrangement for the interferometric determination of the surface shape of a test object, wherein a test wave generated from electromagnetic radiation and reflected at the test object can be superimposed with a reference wave not reflected at the test object, with a reference element (110, 210, 310, 410) having a reference surface (112, 212, 312, 412) which, in the optical beam path, splits off the reference wave from the test wave before it strikes the test object (120, 220, 320, 420) by reflection, and at least one beam shaping surface (111, 211, 311, 411, 413, 414) located in the optical beam path in front of the reference surface, wherein this beam shaping surface is designed as an aspherical distortion correction surface such that a distortion occurring in a predetermined reference plane of the measuring arrangement is reduced. The invention further relates to a method for manufacturing an optical element for such a measuring arrangement.

The invention relates to a windshield for a vehicle, having an exposed exterior-side surface (I) and an exposed interior-side surface (i), wherein the windshield has a transmission region (S) which is provided for the optical beam path of a transmitter and / or receiver (4) of electromagnetic radiation, and the interior-side surface (i) is provided with an anti-reflection coating (20) in the transmission region (S), the anti-reflection coating comprising, in the specified order starting from the interior-side surface (i): - a first optically high-refractive layer (21) having a refractive index of at least 1.9 and an optical thickness of 95 nm to 225 nm; - a first optically low-refractive layer (22) having a refractive index of maximally 1.6 and an optical thickness of 40 nm to 135 nm; - a second optically high-refractive layer (23) having a refractive index of at least 1.9 and an optical thickness of 415 nm to 615 nm; and - a second optically low-refractive layer (24) having a refractive index of maximally 1.6 and an optical thickness of 290 nm to 410 nm, the optical thickness being determined as the product of the geometrical thickness and the refractive index at 550 nm.

A sliding cover for a liquid delivery device, such as a cap (100) for a pen injector (200), incorporates a set of sensors including an optical sensor (110) with an output which changes during uncapping or capping motions on passing of a plunger (220) of the pen injector. This output is used together with a position sensor (120) to determine the position of the plunger along a cylinder (210) of the liquid delivery device. By monitoring changes in the plunger position, the quantity of dosages delivered by the liquid delivery device can be determined, displayed, stored and / or transmitted to an external device for further data processing or storage. Preferred implementations of the invention employ optical sensors with a converging beam (115), and / or position sensors employing linear potentiometer strips (132).

An optical grating is provided which can be configured to emit an optical beam, from optical grating portions of the optical grating, with a predetermined cross-section and / or a predetermined intensity in a portion of the cross-section including light.

A device includes first, second and third elements fabricated on a common substrate. The first element includes an optical source, the second element includes at least one optical facet coupled to free space, and the third element includes a waveguide that optically couples the first element to the second element. The optical facet, having a compound III-V semiconductor material as a core and a dielectric material as a cladding, is characterized by a refractive index contrast between the core and the cladding that is greater or equal to 1. An optical beam exiting the facet is characterized by a central beam propagation axis and a FWHM beam divergence greater than 40 degrees referred to at least one axis perpendicular to the central beam propagation axis.

The application relates to a packaging structure and a packaging method of an optical module and an optical chip, wherein the packaging structure comprises a receiving end assembly, a stepped metal heat sink and a silicon-based optical interconnection assembly attached to the stepped metal heat sink; the silicon-based optical interconnection assembly comprises a laser, a silicon optical beam splitter, a lens group, a light-transmitting compensation gasket, a silicon optical modulator and a fiber array; the laser and the silicon optical beam splitter form a coplanar coupling; the silicon optical beam splitter and at least part of the collimating lenses in the lens group are fixed on the light-transmitting compensation gasket; the fiber array and the silicon optical modulator realize waveguide matching through an active coupling mode; the silicon optical modulator and the receiving end assembly are arranged at a distance of at least a preset interval, and the fiber array and / or the receiving end assembly are covered with a metal isolation cover. The application solves the yield bottleneck caused by high cost of multiple light sources, pollution of an open light path and low reliability of glue in the prior art, and finally forms a packaging scheme with compact structure, stable process and high productivity.

A system for calibrating or otherwise characterising a machine, including: a launch unit which is operable to launch an optical beam into a working volume of the machine; a sensor unit which is moveable by the machine to a plurality of sensor unit positions along the beam, and which is operable, for each of the plurality of sensor unit positions, to measure a transverse beam position at a plurality of measurement positions along the beam, with a position of the sensor unit relative to the beam in at least three degrees of freedom being derivable from the measurements; and a processor unit which is operable to use the measurements to calibrate or otherwise characterise the machine.

The present application provides a spaceborne acquisition, tracking and pointing system and a free space optical communication link establishment method. The system comprises: an optical antenna, a laser generation module, a first detector, a light spot position determination module, a first tracking controller, and a first tracking execution mechanism. During terminal link establishment, a first terminal traverses scan points in an initial scan acquisition zone, and emits a first optical beam on the basis of the pointing direction of the currently traversed scan points. When a first feedback optical beam transmitted by a second terminal is received, the first terminal adjusts the boresight direction of the optical antenna. The first terminal emits a second optical beam by means of the optical antenna and receives a second feedback optical beam emitted by the second terminal in response to the second optical beam. When the second feedback optical beam is received, the first terminal emits a third optical beam by means of the optical antenna, so that the second terminal performs tracking processing in response to the third optical beam.

In some examples, a device includes an analog display configured to indicate a current temperature and one or more temperature set Additionally, the device includes processing circuitry is configured to control a set of light-emitting diodes (LEDs) to emit one or more optical beams to reflect off of a projection ring onto the analog display. The one or more optical beams are a first color if the current temperature is lower than a set point temperature of the one or more set point temperatures. The one or more optical beams are a second color if the current temperature is greater than the set point temperature of the one or more set point temperatures.

The present invention provides an optical beam member for a charged particle-optical device configured to direct a charged particle beam towards a sample location. The optical beam member comprises a first beam aperture and one or more optical radiation sources. The first beam aperture is for passage of the charged particle beam. The one or more optical radiation sources are arranged adjacent the first beam aperture. The optical radiation sources are configured to generate and emit optical radiation beams towards the sample location such that an optical beam spot on the sample associated with the one or more optical radiation sources is substantially coincident with a charged particle beam spot on the sample. The charged particle beam spot is associated with the charged particle beam.

The present invention discloses a quantum random number generator chip and design method. The chip includes: an optical chip, a transimpedance amplifier chip, and a microcontroller chip connected in sequence, wherein: the optical chip includes a continuous laser, an optical beam splitter, a first optical attenuator, a second optical attenuator, a first photodetector, and a second photodetector; the microcontroller chip includes a first digital-to-analog converter, a second digital-to-analog converter, an analog-to-digital converter, and a processor; the transimpedance amplifier chip includes a transimpedance amplifier; wherein the optical chip, the transimpedance amplifier chip, and the microcontroller chip are packaged to obtain a quantum random number generator chip. The present invention packages the optical chip and the microcontroller chip into a single chip through a systematic packaging method, significantly reducing the size of the quantum random number system, greatly improving the stability of the system and structure, while reducing power consumption and cost, and expanding the scope and application scenarios.

The invention discloses a thin-film barium titanate electro-optical switch unit based on a composite electrode and an array thereof. The optical switch unit comprises a first waveguide optical fiber coupling module, a second waveguide optical fiber coupling module, an optical beam splitting module, an electro-optical phase shift region, an optical beam combining module, a third waveguide optical fiber coupling module and a fourth waveguide optical fiber coupling module. Wherein the composite electrode of the electro-optic phase shift region is composed of a metal electrode and a transparent conductive layer, the electrode is closer to the waveguide by utilizing the transparent characteristic of a transparent conductive material, the coupling of a light field and an electric field is effectively enhanced, and the extinction ratio is improved. Meanwhile, a barium titanate film with a high electro-optical coefficient is adopted as a waveguide material, and the performance is further optimized, so that the electro-optical switch unit has the excellent characteristics of low-voltage driving, high extinction ratio, low insertion loss and small size.