828 results about "Optical beam" patented technology

The invention relates to the technical field of photoetching machine calibration, and discloses a photoetching machine calibration method, device and equipment based on multi-view vision, and the method comprises the following steps: carrying out imaging and phase sensitive detection analysis on a mask plane and a wafer plane through a four-path optical beam splitting system to obtain four groups of mask-wafer initial alignment position information; performing scanning white light interference edge enhancement processing to obtain three-dimensional surface contour data; performing wavelet transform processing on the three-dimensional surface contour data, and performing dynamic registration on the four-path optical beam splitting system to obtain multi-view visual feature registration data; a comprehensive error model including mechanical errors, optical errors and environmental errors is established, real-time correction and error compensation are carried out on a six-degree-of-freedom motion platform of the photoetching machine, a multi-view vision calibration result of the photoetching machine is obtained, the influence of environmental vibration and thermal drift on calibration precision is effectively eliminated, and the calibration accuracy of the photoetching machine is improved. The optical system is ensured to be always in the optimal imaging state, and the calibration precision is improved.

The invention discloses a low-power-consumption multiple-input-multiple-output thermo-optical switch chip which comprises N optical input ports, an N * N optical beam splitter, N spiral waveguide thermo-optical phase shifters, an N * N optical beam combiner and N optical output ports. The N * N light beam splitter and the N * N light beam combiner adopt the same design structure and comprise N single-mode input / output waveguides, N width gradient waveguide transition areas (taper areas) and a multi-mode waveguide area, and each single-mode input and output waveguide is connected to the multi-mode waveguide area through the width gradient waveguide transition area. The spiral waveguide thermo-optic phase shifter comprises two spiral waveguides with different sizes, an S bend with a gradually-changed width and a circular heating electrode. The transmission path of light in the chip can be changed by adjusting the spiral waveguide thermo-optical phase shifter, and the function of optical switch switching is achieved. The invention has the advantages of high integration level, high expandability and low power consumption, and can be used in the field of integrated photon chips.

A scanning imaging method includes splitting an optical beam into a reference beam and a scanning beam, generating an interference map, and processing the interference map to produce a reconstructed image of a sample. Generating the interference map includes, for each of a plurality of sections of the sample, generating a respective interference-map element of the interference map by: (i) illuminating the section with the scanning beam to generate a plurality of scattered beams, each scattered beam corresponding to a respective spatial frequency of the scanning beam, (ii) attenuating the reference beam, (iii) generating a plurality of interference signals at least in part by interferometrically combining the plurality of scattered beams and the attenuated reference beam while modulating a phase difference between the reference beam and the plurality of scattered beams, and (iv) detecting the plurality of interference signals to yield the respective interference-map element.

A system for deflecting an optical beam is provided. The system includes a first substrate, a first metasurface fabricated on a surface of the first substrate, a second substrate substantially parallel with the first substrate, a second metasurface fabricated on a surface of the second substrate, and an actuator configured to translate one of the first substrate and the second substrate relative to the other of the first substrate and the second substrate by a first translation distance in a first direction parallel to the surface of the first substrate and the surface of the second substrate. The first translation distance corresponds to a first target deflection angle of the optical beam.

A particle-optical arrangement is disclosed for providing a primary particle-optical beam path for a plurality of first single-particle beams directed from a multi-beam particle generator onto an object positionable in an object plane of the arrangement, as well as a secondary particle-optical beam path for a plurality of second single-particle beams emanating from the object. The particle-optical arrangement includes a magnetic array comprising a first magnetic field region traversed by the primary and secondary particle-optical beam paths to separate them.The magnetic arrangement further comprises a second magnetic field region, which is located in the primary particle optical beam path and not in the secondary particle optical beam path. The second magnetic field region is located in front of the first magnetic field region with respect to the primary particle optical beam path, and the first and second magnetic field regions deflect the primary particle optical beam path in different directions. The first magnetic field region has an exit inclination σ1 ≠ 0°, where the exit inclination σ1 is defined as the angle by which the orientation of the exit region deviates from the orthogonal to the particle optical axis Z of the primary particle optical beam path.

A method is disclosed for use in detecting a pulsed optical beam when the pulsed optical beam is transmitted through a scattering medium, wherein the pulsed optical beam comprises a plurality of optical pulses and the method comprises using a plurality of photodetectors of a photodetector array to detect light which is scattered progressively from the same optical pulse as the optical pulse propagates through a plurality of regions of the scattering medium and which is then received progressively on different photodetectors of the photodetector array. The method may be used in particular, though not exclusively, for non-line-of-sight free-space optical communications. An optical receiver for use in detecting the pulsed optical beam and an associated optical system are also disclosed.

The invention provides a molecular fluorescence detection chip and an optical packaging structure thereof, a fluorescence excitation layer of the chip comprises an input optical coupling module, an optical beam splitter tree structure, a fluorescence excitation structure array, an optical coupling structure array and an optical feedback structure, and the input end of the optical feedback structure is connected with one output end of the optical beam splitter tree structure. The optical packaging structure comprises an optical fiber module and the molecular fluorescence detection chip, the optical fiber module is fixed at a preset position of the chip and comprises one or more optical input channels, and the optical input channels are aligned with the input optical coupling unit of the input optical coupling module. According to the passive optical coupling scheme, the optical coupling efficiency does not change along with mechanical vibration of the environment, so that the stability of exciting light in the chip is improved, the stability of a fluorescence signal is further facilitated, meanwhile, the complexity of an optical path of external equipment is also reduced, and the equipment cost is saved. In addition, the number of lasers can be increased in a multi-channel coupling-in mode, so that the in-chip excitation light power is improved, and the signal-to-noise ratio is improved.

The invention relates to a packaging structure and packaging method for an optical module and an optical chip, and the packaging structure comprises a receiving end assembly, a stepped metal heat sink, and a silicon-based optical interconnection assembly which is pasted on the stepped metal heat sink. The silicon-based optical interconnection assembly comprises a laser, a silicon light beam splitter, a lens group, a light transmission compensation gasket, a silicon light modulator and an optical fiber array; coplanar coupling is formed between the laser and the silicon light beam splitter. The silicon light beam splitter and at least part of the collimating lens in the lens group are fixed on the light transmission compensation gasket; the optical fiber array and the silicon light modulator realize waveguide matching in an active coupling mode; the silicon light modulator and the receiving end assembly are separately arranged at least at a preset interval, and the optical fiber array and / or the receiving end assembly are / is covered with a metal isolation cover. According to the invention, the problems of high cost of multiple light sources, easy pollution of an open light path and yield bottleneck caused by low-reliability glue in the prior art are solved, and finally, a packaging scheme which is compact in structure, stable in process and high in mass production is formed.

The invention provides a light beam scanning device of an integrated photonics chip and a test method. The light beam scanning device of the integrated photonics chip comprises a chip sample table, a chip sample table base, a light beam receiver connected with a lens cone and a horizontally arranged turntable base, the lens barrel is arranged above the turntable base, and a diaphragm adjusting structure and at least four lens groups are arranged in the lens barrel; the central point of the chip sample table base is overlapped with the central point of the turntable base, the chip sample table base is positioned above the turntable base, and the chip sample table is vertically arranged at the central point of the chip sample table base. Through switching of different lens groups in the lens cone, measurement of far and near fields of the to-be-tested chip is realized by using the same lens cone, the lens cone is arranged on the turntable base, and the test angle range can be adjusted according to specific test requirements so that various chip test requirements can be met.

According to embodiments of the present invention, a parallel scanning confocal microscope is provided. The microscope includes an optical circulator including a first port, a second port and a third port; a light source optically coupled to the first port; an optical arrangement in optical communication with the second port; a focusing lens; and a photodetector optically coupled to the third port. The light source may be configured to emit light towards the optical arrangement along an illumination path. The light may be directed as multiple optical beams towards the focusing lens, which may be configured to focus the beams to confocally and simultaneously illuminate a sample along the illumination path; and to collect light reflected from the sample confocally along a reflection path. The reflected light may be directed towards the photodetector along the reflection path. According to further embodiments, a parallel scanning confocal microscopy method is also provided.

High-power, integrated optical amplifiers are described in which gain waveguides of the amplifiers are designed to improve power performance by reducing power saturation effects in the amplifier. The gain waveguides can change, in at least one aspect, along the length of the gain waveguide to reduce gain saturation. Multi-mode optical beams and / or multi-stage amplification can also be employed to reduce gain saturation.

An electrodeless laser-driven light source includes a laser source that generates a CW sustaining light and a pump laser that generates a pump. An optical beam combiner combines the CW sustaining light and the pump such that the CW sustaining light and the pump propagate co-linearly. A Q-switched laser crystal generates pulsed light in response to the pump. A gas-filled bulb is configured such that the pulsed light ignites a pulse plasma in a breakdown region of the gas bulb and the sustaining light sustains a CW plasma in a CW plasma region of the gas bulb, thereby emitting a high brightness light from the gas bulb, where the gas-filled bulb is positioned between the output of the pump laser and the pump input of the Q-switched laser crystal such that the CW plasma absorbs the pump light quenching the pulsed light generated by the Q-switched laser crystal.

One example includes a quantum lidar system. The system includes a beam generator configured to generate a signal beam and an idler beam and a beam combiner configured to generate a combined optical beam comprising the signal beam and the idler beam. The system also includes a lidar transmitter configured to transmit the combined optical beam to a target and a lidar receiver configured to receive the combined optical beam and a reflected beam of the combined optical beam reflected from the target to generate lidar data associated with the target.

A method for assembling a photonic computing system includes attaching a photonic source to a support structure, and attaching a photonic integrated circuit to the support structure. The photonic source includes a first laser die on a substrate configured to provide a first optical beam, and a second laser die on the substrate configured to provide a second optical beam. The photonic integrated circuit includes a first waveguide and a first coupler coupled to the first waveguide, and a second waveguide and a second coupler coupled to the second waveguide. The method includes attaching a plurality of beam-shaping optical elements to the support structure, the substrate, or the photonic integrated circuit, in which the attaching includes aligning a first beam-shaping optical element during attachment so that the first optical beam is coupled to the first coupler, and aligning a second beam-shaping optical element during attachment so that the second optical beam is coupled to the second coupler.

A method for monitoring a plurality of process chambers, the method includes generating an optical beam at a light source. The method further includes dividing the optical beam into a plurality of light beams. The method further includes providing the plurality of light beams to the plurality of process chambers. And the method further includes measuring the plurality of light beams after being reflected within the plurality of process chambers.

The invention discloses a free-form surface beam shaping device and method, and belongs to the technical field of light distribution regulation and control. The free-form surface beam shaping method provided by the invention comprises the following steps: firstly, generating a standardized incident and emergent surface grid distribution diagram, then respectively mapping the standardized incident and emergent surface grid distribution diagram to a free-form surface and a target surface, and then calculating normal vectors of corresponding sampling points on the free-form surface according to the directions of incident light and emergent light, sampling points on the free-form surface are calculated based on normal vectors, and the method can design a free-form surface optical element to regulate and control light distribution. By integrating the designed free-form surface optical elements into the optical element array, light distribution regulation and control can be carried out on multiple light beams. The design method has very strong universality, can design free-form surface light distribution regulation and control aiming at multiple light sources and multiple light beams, realizes application in a high-power application scene, and can realize accurate regulation and control on non-zero expansion quantity light beams.

A modification setup including an array of modification units, each positioned and configured to: cause light of an input optical beam to pass through a corresponding input surface of the respective modification unit, in a manner that reduces exceeding of its light, from a first effective aperture of the input surface; and modify beam profile of the input optical beam, to form an intermediate optical beam having a beam profile of illumination distribution factor that is higher than that of the input optical beam. An output surface of the modification unit, located at a distance D from the input surface is configured and positioned such that the intermediate optical beam passes through the output surface at increased illumination cover area and decreased exceeding from a second effective aperture of the output surface. Each input beam may be collimated before entering the input surface of a corresponding modification unit.

The invention relates to a polarization independent conversion device of a cascade mode conversion waveguide, and belongs to the field of semiconductor optical signal transmission. The device comprises a substrate of a wafer, a buried oxide layer of the wafer, a device layer and a SiO2 upper cladding layer of the device layer from bottom to top. The device layer comprises an input waveguide, a mode evolution waveguide, a multi-section conical mode conversion waveguide, a polarization beam splitting rotator and a light beam combiner assembly. The mode evolution waveguide realizes high-order conversion from a TM0 mode to a TE1 mode; the multi-section conical mode conversion waveguide converts a TM mode of an optical signal in the input waveguide into a TE mode, and the mode coupling ratio is improved by sequentially superposing the conversion ratio of the TM mode; the phase shifter is used for ensuring that the phase difference of two columns of combined waves is 0; and the light beam combining assembly is used for combining the two columns of TE mode light signals and finally outputting a single-mode waveguide TE mode. According to the invention, TE0 single-mode beam combination output irrelevant to any polarization state of an input optical signal is realized, the structure is simple and compact, and the device is suitable for large-scale integration.

An optical bench system is provided. The optical bench system includes an array of beam-customized optical components, wherein the array of beam-customized optical components comprises a plurality of beam-customized optical components; and a relay component. Each beam-customized optical component of the plurality of beam-customized optical components is configured to control optical properties of a respective optical beam of a plurality of optical beams to provide a plurality of property-controlled optical beams. The relay component is configured to relay the plurality of property-controlled optical beams to respective target locations of an array of target locations.

A method of characterizing a device under test (DUT) includes illuminating the DUT with a broadband optical beam within an optical field of view (FOV), illuminating the DUT with an X-ray beam within an X-ray FOV overlapping the optical FOV, and concurrently acquiring X-ray metrology information, e.g., one or more X-ray images utilizing various modalities, such as absorption, phase contrast difference, darkfield, small angle X-ray scattering (SAXS) and / or fluorescence, from the X-ray FOV and a plurality of optical images of the optical FOV, each of the optical images corresponding to respective selected wavelengths of the broadband optical beam from each of ultraviolet, visible, and infrared wavelengths, for example including deep ultraviolet, near infrared, or short-wavelength infrared wavelengths. The DUT may be one or more substrates, e.g., stacked, and include electronic devices such as three-dimensional integrated devices.

Methods and systems for luminescence characterisation of semiconductor devices are provided herein In an embodiment, the method 300 for luminescence characterisation of a perovskite material 224 comprises a step 302 of exciting at least part of the perovskite material 224 with a modulated optical beam 210 to emit a modulated photoluminescence signal 226, the modulated optical beam 210 having a modulation frequency that is selected based on an estimated lifetime of the perovskite material 224 to be characterised; a step 304 of capturing the emitted modulated photoluminescence signal 226; and a step 306 of analysing a phase and / or modulation change between the modulated optical beam 210 and the modulated photoluminescence signal 226 for characterising the perovskite material 224.

The invention relates to a method for holographic generation of an array of focusing points arranged according to multiple positions of the field of an optical system, which comprises: (S10) detecting images formed by the optical system at a plurality of calibration points arranged according to multiple positions of the field of the optical system; (S20) estimating aberrations introduced by the optical system onto the optical field from the detected images; (S30) applying a phase mask to the optical beam in order to generate a plurality of focusing points arranged according to multiple positions in the field of the optical system; wherein the phase mask is calculated from the estimated aberrations in order to simultaneously compensate for the aberrations at each focusing point. The invention also relates to a holographic generation system which carries out this method.

The invention relates to the technical field of photovoltaic wire harness production, and discloses a high-density multi-core photovoltaic wire harness production device and a production method thereof.The high-density multi-core photovoltaic wire harness production device comprises a bottom plate, a supporting plate is fixedly connected to the top of the bottom plate, a loading shell is fixedly connected to the top, close to the supporting plate, of the bottom plate, and electric telescopic rods are fixedly connected to the two sides of the top, close to the loading shell, of the bottom plate correspondingly; the wire harness production device further comprises a wire harness production mechanism, the wire harness production mechanism comprises a moving plate fixedly connected to the movable end of the electric telescopic rod, the top of the moving plate is fixedly connected with a bent plate, the inner wall of the loading shell is sleeved with a wire harness, then one end of the wire harness is clamped to the inner wall of the clamping device in an aligned mode, the electric telescopic rod is started, and the wire harness is produced. The electric telescopic rod drives the moving plate to move, the moving plate drives the bent plate to move, the bent plate drives the clamping device to move, the clamping device drives the wire harnesses to move, the multiple wire harnesses move together, the stripping lengths of the multiple wire harnesses are equal conveniently when the outer skin of the wire harnesses is stripped subsequently, and the production efficiency of the subsequent wire harnesses is improved.

This invention presents a frequency-domain fluorescence lifetime imaging system, enhancing capabilities with a spatial beam attenuator and pinhole beam splitter. The spatial beam attenuator reshapes any beam into a circular Gaussian beam profile, being compact, cost-effective, with low loss and back reflection. Using digital printing technology, a thin optical film is deposited onto an optical substrate for precise local attenuation of the beam in either transmission or reflection mode. The pinhole beam splitter consists of an optical beam splitter with an active region the size of a pinhole, positioned near the beam's focus, which directs focused light into two paths based on acceptance or rejection by the pinhole. This configuration allows for two detectors to collect photons from both paths concurrently, facilitating dual-mode imaging. Consequently, the system can generate both confocal and conventional non-confocal laser scanning fluorescence lifetime images of the sample at the same time.

Systems, methods and subsystems for adjustment of optical path length (OPL) of optical beams of a multi-channel optical system, by using an OPL adjustment subsystem that includes an array of OPL adjustors, each configured and located to controllably adjust OPL of an optical beam of a corresponding optical channel. For each optical beam of each optical channel one or more updated properties associated with the optical beam is detected to determine, based on detected data analysis, required one or more updated adjustor-control properties, for achieving an associated desired OPL adjustment of the corresponding optical beam. Each OPL adjustor is controlled to adjust the OPL of its corresponding optical beam, according to the determined one or more updated adjustor-control properties. The detection, analysis and / or OPL adjustment may be performed in a parallel manner to all optical channels of the multi-channel optical system.

The invention provides a space optical communication multi-aperture receiving method based on optical and electrical comprehensive synthesis. The number of optical beam combination sub-apertures is intelligently adjusted by adopting densely-arranged multi-aperture optical antennas so as to ensure that light paths and light signals after beam combination are mutually independent; receiving of optical signals and correction of first-order and second-order Zernike aberration are achieved through the optical antenna array with the total number of sub-apertures determined on the basis of the receiving plane; the optical signals pass through the optical beam splitter, one part of the optical signals are input into the coupling energy photoelectric detector to be converted into voltage or current feedback signals to be input into the control module, and the other part of the optical signals are input into the N * 1 self-adaptive light beam synthesis module; coherent beam combination is carried out on the optical signals through the N * 1 adaptive beam combination module to form M paths of mutually independent optical signals; and carrying out direct detection or coherent detection on the M paths of optical signals, converting the M paths of optical signals into M paths of electric signals, and carrying out electrical signal synthesis on the M paths of electric signals. The communication stability is improved, and the independence of the electrical synthesis signal is ensured.

A method and system is provided for operating a quantum information processing (QIP) system, including a dual-space, single-species architecture for trapped-ion quantum information processing. An exemplary method of preparing the ions include i) applying a first optical beam to the plurality of ions to shelve at least a portion of the plurality of ions from a first state to a second state, ii) applying a second optical beam to the plurality of ions to deshelve the at least a portion of the plurality of ions from the second state to a third state, iii) applying a third optical beam to optically pump the at least a portion of the plurality of ions from the third state and to a fourth state, and iv) iteratively repeat i) to iii) to transition a remaining portion of the plurality of ions to the fourth state.

Apparatus and methods for coupling an optical beam from an optical source to a hi-tech system are described. A compact, low-cost beam-shaping and steering assembly may be located between the optical source and hi-tech system and provide automated adjustments to beam parameters such as beam position, beam rotation, and beam incident angles. The beam-shaping and steering assembly may be used to couple an elongated beam to a plurality of optical waveguides.

Distances between photonic integrated circuits and multiport optical probes can be established by emitting an optical beam from a first optical port of the multiport optical probe so that the optical beam is coupled into a first waveguide section of a PIC. This optical beam portion is reflected from a surface of the multiport optical probe back to the PIC. At suitable PIC-probe distances, the optical beam is coupled by a second waveguide grating to propagate in a second waveguide section and is then emitted to a second optical port of the multiport optical probe by a third waveguide grating coupler and directed to a detector. The detector signal is used to determine or adjust PIC-probe separation.

There is provided an object scanning apparatus. The object scanning apparatus may include a THz source emitting a THz beam; an optical system for directing the THz beam; a zone for inspecting objects wherein the optical beam interacts with the object; a motion device for changing the spatial or temporal interaction of the object and optical beam; at least one transducer, the at least one transducer including an imaging transducer for converting the optical beam energy after interaction with the object to an electronic image; and a processor for performing processing of the image for use in characterization of the object or its interior contents or composition.