The invention provides a non-adjacent optical wedge focusing mechanism and an
exposure machine, and belongs to the field of
optical focusing, the optical wedge focusing mechanism comprises an upper sliding mounting plate, an optical wedge bottom plate, an upper optical wedge
assembly, a lower optical wedge
assembly, a sliding guide
assembly and an optical wedge driving assembly; the upper optical wedge assembly and the lower optical wedge assembly form a double-
wedge prism unit of which adjacent wedge surfaces slide at intervals, and the optical wedge driving assembly drives the upper optical wedge assembly to move to adjust a gap between double optical wedges so as to realize focusing; according to the optical wedge focusing mechanism, the arrangement mode that the upper optical wedge is used for driving but is not adjacent to the process lens
barrel is adopted, lifting focusing of the process objective lens is replaced, therefore, the influence on the precision of the main process objective lens is reduced, the focusing efficiency and precision are high, and the optical wedge focusing mechanism can be conveniently applied and popularized in the detection and
processing fields of IC carrier plates, soft plates, HDI plates, multi-layer plates,
ceramic substrates,
alloy plates, wafers and the like.