1096results about "Mountings" patented technology

A control device (100) for controlling an actuator (200) for actuating an optical element (310) of an optical system (300), comprising a voltage measuring unit (110) coupled to the actuator (200), which is configured to provide a measuring voltage (V1) which is indicative of a control voltage (V2) applied to the actuator (200), and a charge source (120) which is configured to provide a control current (I1) for controlling the charge of the actuator (200) depending on a target position signal (P) for setting a position of the optical element (310) and the provided measuring voltage (V1).

An EUV collector (24) is used in an EUV projection exposure system. The EUV collector (24) is designed to guide EUV useful light (3) from a source area (19) to a collecting area (26). The EUV collector (24) has at least one reflective surface area (28) which has the shape of a segment of an ellipsoid with two ellipsoidal focal points (F1, F2). The source area (19) is located in the region of one of the ellipsoidal focal points (F1), and the collecting area (26) is located in the region of the other ellipsoidal focal point (F2). The reflective surface area (28) has a maximum collecting angle S2 greater than 120° for useful light beams emanating from the source area (19). Alternatively or additionally, the reflection surface area (28) has at least two detachably connected reflection surface sub-areas, each representing sub-areas of a shape of a section of an ellipsoid with two ellipsoid focal points (F1, F2).

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and an elongated interface element (250) over which the MEMS mirror array structure (210) projects laterally, and a higher-level assembly (300) with at least one receptacle (350) for the interface element (250) of the MEMS micromirror unit (200), wherein the MEMS micromirror unit (200) is mounted in a receptacle (350) of the higher-level assembly (300) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) abuts the higher-level assembly (300). A gas atmosphere with a thermal conductivity of more than 0.05 W / (m·K) is introduced into a gap (400) between the interface element (250) and the receptacle (350).

The invention relates to a system for semiconductor technology comprising at least one fluid channel (105) for a temperature control medium for temperature control of at least one component, e.g. a mirror (25, M4) of a projection exposure system (1) for photolithography. The system comprises at least two pressure fluctuation measuring devices (210) and a pressure surge sensor (220), arranged in series along the fluid channel (105) and connected to a control unit (230). The control unit (230) is configured to detect pressure fluctuations in the temperature control medium propagating from the pressure fluctuation measuring devices (210) towards the pressure surge sensor (220) from the signals of the pressure fluctuation measuring devices (210) and to control the pressure surge sensor (220) appropriately to generate destructive interference and reduce pressure fluctuations in the temperature control medium.

The present invention relates to a method for determining a first fluid quantity in a second fluid quantity in a fluid-carrying element of a lithography system, comprising filling the fluid-carrying element with the second fluid quantity, performing a first rinsing process in the fluid-carrying element with the second fluid quantity for a first rinsing time at a first flow velocity along a first rinsing direction, detecting the first fluid quantity in the second fluid quantity, performing a second rinsing process in the fluid-carrying element with the second fluid quantity for the first rinsing time at the first flow velocity along a second rinsing direction which is opposite to the first rinsing direction, detecting the first fluid quantity in the second fluid quantity again, and determining the first fluid quantity based on the detection and the re-detection.

The invention relates to a MEMS mirror array module (100) for use in semiconductor technology equipment. The MEMS mirror array module (100) comprises at least one MEMS micromirror unit (200) with a MEMS mirror array structure (210) and a higher-level assembly (300), wherein the MEMS micromirror unit (200) is attached to the higher-level assembly (230) such that the MEMS mirror array structure (210) of the MEMS micromirror unit (200) is in contact with the higher-level assembly (300). The MEMS mirror array module (100) is configured such that sufficient heat conduction from the MEMS mirror array structure (210) to the higher-level assembly (300) is achieved to prevent an undesirably high temperature rise in or on the MEMS mirror array structure (210).

A temperature control device (200) for temperature control of a position-sensitive component (102) of a lithography system (1), comprising a liquid line (208) with a line section (218) for transporting a temperature control liquid (206), and a gas bubble separator (220) with a branch line section (222) branching off from the line section (218), wherein within the branch line section (222) a fluid space (224) and a gas space (226) are formed, fluidly connected to the line section (218), and the gas space (226) is connected to the liquid space (224) by means of a gas passage unit (228) for allowing gas bubbles (216) to pass from the liquid space (224) into the gas space (226).

An imaging optic (23) serves to image an object field arranged in an object plane, in which a lithography mask can be arranged as the object to be imaged, with imaging light via an imaging beam path into an image field arranged in an image plane, in which a substrate onto which the image is to be formed can be arranged. The imaging optic (23) has at least one correction device (32). This device has a correction element (30) arranged in the imaging beam path, the imaging effect of which varies across the image field. Furthermore, the correction device (32) has a correction element holder (33) and a correction element drive unit (34). The correction element holder (33) is driven by the correction element drive unit (34) during an imaging phase of the imaging optic (23) and can be displaced along a correction element displacement direction (35) extending transversely to the imaging beam path.The result is an imaging optic whose imaging effect is improved to achieve a predetermined imaging result.

An optical drive mechanism is provided. The optical drive mechanism includes a carrier, a fixed part, a first elastic element, and a first adhesive element. The carrier is configured to connect an optical element and is movable relative to the fixed part. The carrier is movably connected to the fixed part via the first elastic element. The first elastic element is connected to the carrier or the fixed part via the first adhesive element.

Disclosed is an adjustable mobile phone lens clamp, including a mobile phone clamping apparatus and a lens connection arm. The mobile phone clamping apparatus is provided with a mobile phone clamping slot, and the lens connection arm is provided with a lens mounting portion. The lens connection arm is slidably provided at the mobile phone clamping apparatus and is rotatably connected to the mobile phone clamping apparatus, and one end of the lens connection arm provided with the lens mounting portion is configured to rotate around a joint intersection between the lens connection arm and the mobile phone clamping apparatus.

The present application provides a sensor capable of high-precision measurement with high SN ratio even when the ambient temperature changes, and a bandpass filter for the sensor. The sensor has a light source, a bandpass filter that extracts light of a peak wavelength of the light source, and a light-receiving element that receives the light extracted by the bandpass filter. The bandpass filter has a bandpass layer and a support that supports the bandpass layer. When the thermal expansion coefficient of the bandpass layer is α1, the elastic modulus is E1, the thermal expansion coefficient of the support is α2, and the elastic modulus is E2, α1 > α2 and E1 < E2 are satisfied.

The application provides a continuous zoom optical system and a stereomicroscope for the stereomicroscope, and the optical lens unit comprises, in sequence along a main optical axis, an upper fixed lens group, a compensation lens group, a middle fixed lens group, a zoom lens group and a lower fixed lens group; a variable diaphragm is arranged between the middle fixed lens group and the zoom lens group along the main optical axis; the upper fixed lens group, the compensation lens group, the zoom lens group and the lower fixed lens group are all configured as double lens combinations, the focal length values of the upper fixed lens group and the zoom lens group are negative, and the focal length values of the compensation lens group and the lower fixed lens group are positive; the middle fixed lens group is configured as a double-concave single lens; the compensation lens group and the zoom lens group are axially moved along the main optical axis based on a first zoom fitting curve and a second zoom fitting curve respectively; and the advantages are that the system has smooth magnification, suppresses vignetting phenomenon, and dynamically adjusts the numerical aperture, the depth of field and the light throughput to adapt to different scene requirements.

The utility model provides a kind of optical intensity adjustable optical filter switching device, belong to filter production technical field, including support assembly, including base, the support table of rotation connection in base end part, the support rod of fixed connection in support table end part and the connecting column of fixed connection in support table center;Switching assembly, including fixed mounting in the connecting piece of connecting column end part, hinged in the connecting piece end part link, the extension rod of insertion in link end part, the clamping block of fixed connection in the extension rod end part and the filter frame body of clamping in the clamping block end part.The utility model has the beneficial effects of: realize the flexible control of filter in three-dimensional space, can be adapted to the optical path demand of different light source, different detection equipment, expand applicable scene, shorten filter switching time, can be quickly completed filter loading and unloading, without other auxiliary tools, improve the efficiency of multiple filter alternate test.Auxiliary lamp panel provides standard light source, without external device can be completed filter light transmission performance test.

To provide a light emission control device, an imaging system, a control method for a light emitting device, and a program that can reduce the glare felt by a subject during focus detection even at the time of photographing in a relatively dark environment.SOLUTION: A sender strobe 200a, which is a light emission control device, can communicate with receiver strobes 200b to 200e, which emit light, and has a strobe MPU 201 that controls the receiver strobes 200b to 200e. The strobe MPU 201 has functions as identification means for identifying the presence or absence of a stationary light emitting unit 204 that emits stationary light for the receiver strobes 200b to 200e, determination means for determining an amount of light at the stationary light emitting unit 204 when used as auxiliary light for focus detection by an imaging device, based on an identification result by the identification means, and light emission control means for causing the stationary light emitting unit 204 to emit light with the amount of light determined by the determination means.SELECTED DRAWING: Figure 8

A projection exposure apparatus for semiconductor lithography, comprising at least one optical element. At least one actuator for deforming an optically effective surface of the optical element is arranged on a back side of the optical element. The actuator is configured to exert compressive or tensile forces on the optical element perpendicular to the optically effective surface. The at least one actuator is in a cutout in a main body of the optical element. A method for fixing an actuator in a cutout in a main body of an optical element, which method comprises: providing the actuator and at least one radial clamping element; inserting the actuator and the radial clamping element into the cutout, wherein the radial clamping element is arranged between the actuator and an inner surface of the cutout; and bracing the clamping element for the purpose of fixing the actuator.

An optical assembly includes a housing, and an optical filter and an optical compensator disposed within the housing. The optical filter is oriented at a first non-zero angle in a first tilt direction with respect to an optical axis of the optical assembly. The optical compensator is oriented at a second non-zero angle in a second tilt direction with respect to the normal of the optical axis of the optical assembly. The optical filter is configured to pass, to the optical compensator, a portion of an optical beam that impinges on the optical filter along an optical axis of the optical assembly, such that the portion of the optical beam is offset from the optical axis. The optical compensator is configured to cause the portion of the optical beam to propagate out of the optical assembly along the optical axis of the optical assembly (or with a minimized offset).

This invention relates to a high-precision aspherical optical element alignment and bonding device, belonging to the technical field of optical element processing equipment. It includes a device support, a hollow rotating platform with an auxiliary adjustment mechanism for fixing and rotating the lens, a detection and curing mechanism on one side of the auxiliary adjustment mechanism for real-time monitoring of the lens position and assisting in lens fixing, and a lens adjustment mechanism on the opposite side of the detection and curing mechanism for real-time fine adjustment of the lens position under the detection and curing mechanism's monitoring. A closed-loop control system is formed by using a laser rangefinder in conjunction with the lens adjustment mechanism, enabling real-time acquisition and automatic correction of lens position deviations, effectively replacing traditional manual adjustment methods, significantly improving the coaxiality accuracy of the lens and fixture, and solving the problem of low accuracy in manual positioning. The multi-mechanism coordinated adjustment improves adjustment efficiency and stability.

The invention discloses an optical imaging lens. The optical imaging lens comprises a lens barrel, a six-piece lens group and a spacer group, wherein the six-piece lens group and the spacer group are arranged in the lens barrel; the six-piece type lens group comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged from the object side to the image side along the optical axis; the object side surface of the fifth lens is a convex surface; the sixth lens has negative focal power; the spacer group includes a fifth spacer disposed on an image-side surface of the fifth lens and in contact with the image-side surface of the fifth lens. The air interval T56 between the fifth lens and the sixth lens on the optical axis and the maximum thickness CP5 of the fifth spacer in the direction of the optical axis meet the following conditions: 0 lt; cP5 / T56lt; 0.9, 0.9; the inner diameter d5m of the image side surface of the fifth spacer and the outer diameter D5m of the image side surface of the fifth spacer satisfy 1.2 lt; d < 5m > / d < 5mlt >; 2.0.

The application discloses an imaging lens, which is composed of five lenses, at least one interval element is arranged between the first lens and the second lens and between the second lens and the third lens, the effective focal length f1 of the first lens, the effective focal length f2 of the second lens and the effective focal length f of the imaging lens satisfy 0.85<(f1+f2) / f<1.85, the sum of the maximum thicknesses of all interval elements between the first lens and the second lens along the optical axis direction is ∑CP1, the sum of the maximum thicknesses of all interval elements between the second lens and the third lens along the optical axis direction is ∑CP2, and the interval distance EP12 of the first interval element and the second interval element along the optical axis direction satisfies 0.90<(∑CP1+∑CP2) / EP12<1.95. The imaging lens can effectively inhibit stray light and improve imaging quality.

The application relates to the technical field of laser ranging, in particular to an aberration-optimized optical compensation laser range finder. A laser receiving module comprises a receiving lens group, a filter and a photoelectric sensor; the receiving lens group, the filter and the photoelectric sensor are arranged in sequence along the transmission direction of a laser reflection signal, and the optical axes are kept collinear. The receiving lens group is composed of a front converging lens, a middle correction lens and a rear focusing lens arranged in sequence along the transmission direction of the laser reflection signal, and the refractive indexes and the Abbe constant of the three are set to a unified numerical range; the axial spacing between the front converging lens and the middle correction lens and the axial spacing between the middle correction lens and the rear focusing lens are reasonably limited, and the comprehensive focal length of the receiving lens group calculated by an optical lens combination formula is matched, so that the light condensing function of the front converging lens, the aberration correction function of the middle correction lens and the signal focusing function of the rear focusing lens are complementary and linked, thereby effectively inhibiting the spherical aberration and chromatic aberration in the optical system.

The present invention provides a technology whereby relative positioning in the horizontal direction between a specimen observation area in a specimen container and an imaging field of view can be reliably performed, even prior to adjusting the focal position in the vertical direction using an auto-focus system. This specimen observation apparatus: obtains a luminance value for an image at a plurality of locations in the specimen container, prior to performing auto-focus; and uses the number of high-luminance regions and the width of those regions and identifies a central position, in the horizontal direction, in the specimen container or uses the number of low-luminance regions and the width of those regions and identifies the central position, in the horizontal direction, in the specimen container.

A head-up display includes: an image generator that emits display light that forms a display image; a second reflective mirror that forms a virtual image on a side opposite to an observer relative to the windshield; and a housing that houses the image generator and the second reflective mirror. The second reflective mirror includes: a base that is elongated and includes a first surface and a second surface, the first surface including a reflective surface that guides the display light to the windshield, the second surface being a rear surface of the first surface; and a raised wall that extends upward from a terminal edge of the second surface and extends in a longitudinal direction of the base. The center portion of the raised wall in the longitudinal direction is lower than each of both end portions of the raised wall in the longitudinal direction.

Conventional adjustment devices required the combination of multiple devices to achieve six degrees of freedom of adjustment. [Solution] The adjustment device includes a base 1, a Z-axis adjustment unit 2, an X-axis adjustment unit 3, a Y-axis adjustment unit 4, and a multi-dimensional adjustment unit 5 stacked from bottom to top, the incident end of the lens barrel assembly being rotatably connected to the multi-dimensional adjustment unit, the X-axis adjustment unit being movably connected to the Z-axis adjustment unit, the X-axis adjustment unit being configured to adjust the position of the lens barrel assembly in the X-axis direction, the Y-axis adjustment unit being configured to adjust the position in the Y-axis direction, the Z-axis adjustment unit being movably connected to the base, the Z-axis adjustment unit being configured to adjust the position of the lens barrel assembly in the Z-axis direction, and the multi-dimensional adjustment unit being configured to rotate the lens barrel assembly around the X-axis and / or the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction.

The present invention relates to an optical assembly (30) having an optical element (Mx, 117), the optical element (Mx, 117) including a body (31), at least one actuator (35) for deforming the body (31) being disposed on the back side of the body (31), the at least one actuator (35) being connected to the back side (33) of the body at a first connection surface and to a back plate (36) at a second connection surface, the back plate (36) being attached only via the actuator (35).

The application discloses a large-aperture SWIR vehicle-mounted lens, which is applied to a near-infrared wave band and comprises, in sequence from an object plane to an image plane, a positive-power first lens, a positive-power second lens, a stop, a positive-power third lens, a negative-power fourth lens, a negative-power fifth lens, a positive-power sixth lens and a positive-power seventh lens; the vehicle-mounted lens adopts an optical passive compensation technology, and the power of each lens is distributed, so that the vehicle-mounted lens realizes athermal high-definition imaging in a temperature range of-40 DEG C to 105 DEG C. The application provides a long-focal-length, large-aperture and athermal vehicle-mounted lens, which can be adapted to a megapixel sensor, and the vehicle-mounted lens can image in the near-infrared wave band, can effectively reduce the interference of low visibility under weather such as rain, snow and haze, and adopts the optical passive compensation, so that the vehicle-mounted lens realizes high-low temperature defocus compensation in a temperature range of-40 DEG C to 105 DEG C, thereby having good optical performance.

The application discloses a method and system for selectively eliminating internal residual stress of an optical element. The method comprises the following steps: firstly, scanning the optical element to be processed by using a three-dimensional stress measuring device to obtain the real three-dimensional residual stress distribution data inside the optical element; then, identifying a target point based on the obtained three-dimensional residual stress distribution data and calculating the corresponding three-dimensional coordinates; finally, controlling a laser beam and focusing the laser beam on the three-dimensional coordinates of the target point inside the optical element to be processed by using a high numerical aperture objective lens to irradiate, and realizing stress relaxation by using local thermal effect. The system integrates the three-dimensional stress measuring device and the focused laser irradiation device, and ensures the uniformity of the coordinates by setting a shared optical path. The application realizes the precise minimally invasive processing of "what you see is what you treat", can selectively eliminate the residual stress points at any depth inside the optical element, and has the advantages of real processing basis, direct and in-depth action, high spatial precision and closed-loop feedback.

The utility model discloses a kind of special-shaped light spot effect systems based on optical fiber and custom lens, belong to the field of semiconductor laser application technology, the utility model includes cabinet upper plate, cabinet lower plate, side arm, crane arm bottom plate, installation bottom plate, custom lens, front panel, rear panel;The cabinet upper plate is installed on the cabinet lower plate, the front panel and rear panel are fixed by screw and are installed in the front and rear two sides of cabinet lower plate respectively, the side arm is installed in the left and right sides of the cabinet lower plate;The side arm is fixedly connected with crane arm bottom plate by screw, the crane arm bottom plate is fixed on installation bottom plate by screw again;The front panel is provided with threaded hole, the custom lens is installed in the threaded hole, and the final emission light spot homogenization degree is high through special-shaped light spot effect system, luminance is high, emission special-shaped light spot effect pattern, pattern size and shape can be customized, different custom lens can be customized according to customer demand.

A light detection and ranging (LIDAR) system includes a laser source and a polygon scanner. The laser source is configured to generate a first beam. The polygon scanner includes a frame and a plurality of mirrors coupled to the frame, each mirror comprising a glass material.

A fixed-focal-length optical system consists of, in order from an object side to an image side, a front group, a stop, and a rear group. In a case where a refractive index and an Abbe number of a lens included in the fixed-focal-length optical system are denoted by Nd and νd, respectively, the fixed-focal-length optical system includes at least one specific lens that is a lens satisfying 2.435<Nd+0.01425×νd<2.75 and 15<νd<39.