5889 results about "Image plane" patented technology

In a method for manufacturing semiconductor devices and other finely structured parts, a projection objective (5) is used in order to project the image of a pattern arranged in the object plane of the projection objective onto a photosensitive substrate which is arranged in the region of the image plane (12) of the projection objective. In this case, there is set between an exit surface (15), assigned to the projection objective, for exposing light and an incoupling surface (11), assigned to the substrate, for exposing light a small finite working distance (16) which is at least temporarily smaller in size and exposure time interval than a maximum extent of an optical near field of the light emerging from the exit surface. As a result, projection objectives with very high numerical apertures in the region of NA>0.8 or more can be rendered useful for contactless projection lithography.

A catadioptric projection objective is used to project a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the formation of at least one real intermediate image and has an image-side numerical aperture NA>0.7. The projection objective comprises an optical axis and at least one catadioptric objective part that comprises a concave mirror and a first folding mirror. There are a first beam section running from the object plane to the concave mirror and a second beam section running from the concave mirror to the image plane. The first folding mirror is arranged with reference to the concave mirror in such a way that one of the beam sections is folded at the first folding mirror and the other beam section passes the first folding mirror without vignetting, the first beam section and the second beam section crossing one another in a cross-over region.

The present invention relates to an immersion lithographic system for patterning a work piece arranged at an image plane and covered at least partly with a layer sensitive to electromagnetic radiation. Said system comprising a source emitting electromagnetic radiation onto an object plane, a mask, adapted to receive and modulate said electromagnetic radiation at said object plane and to relay said electromagnetic radiation toward said work piece, and an immersion medium contacting at least a portion of a final lens of said lithographic system and a portion of said work piece, wherein an area of said contacting is restricted by capillary forces. The invention further relates to a method for patterning a workpiece.

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

A catadioptric projection objective for imaging a pattern arranged on the object plane of the projection objective, on the image plane of the projection objective, comprising: a first objective part for imaging an object field in a first real intermediate image; a second objective part for producing a second real intermediate image with the radiation coming from the first objective part; and a third objective part for imaging the second real intermediate image on the image plane; wherein at least one of the objective parts is a catadioptric objective part with a concave mirror, and at least one of the objective parts is a refractive objective part and a folding mirror is arranged within this refractive objective part in such a way that a field lens is arranged between the folding mirror and an intermediate image which is closest to the folding mirror.

A moving image brightness variation compensation method for encoding digital moving images for transmission and storage, and for image processing when editing moving images, the moving image brightness variation compensation method comprising a step of compensating for overall brightness variations by correcting a luminance value x of each pixel according to the formula DC.x+DB, wherein DB is a parameter indicating a gain change and DC is a parameter indicating a contrast change, the parameters representing overall luminance changes between a reference image plane and an image plane being processed.

Apparatus and methods are disclosed for use within an image-guided surgical navigation system for the storage and measurement of trajectories for surgical instruments. An icon representing the real-time trajectory of a tracked instrument is overlaid on one or more pre-acquired images of the patient. At the surgeon's command, the navigation system can store multiple trajectories of the instrument and create a static icon representing each saved trajectory for display. The surgeon may also measure a planar angle between any two trajectories. The angle is computed in the plane of the image, and therefore will be computed separately for each image displayed. Furthermore, the surgeon has the option of computing and displaying the three-dimensional distance between two points defined by any two trajectories.

Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection system and method include a final lens which decreases the marginal ray angle of the optical path before light passes into the immersion liquid to impinge on the image plane.

An exposure apparatus performs exposure for a substrate by filling a space between a projection optical system and the substrate with a liquid and projecting an image of a pattern onto the substrate through the liquid by using the projection optical system. The exposure apparatus includes a substrate stage for holding the substrate, a liquid supply unit for supplying the liquid to a side of an image plane of the projection optical system, and a focus/leveling-detecting system for detecting surface information about a surface of the substrate not through the liquid. The exposure apparatus performs liquid immersion exposure for the substrate while adjusting a positional relationship between the surface of the substrate and the image plane formed through the projection optical system and the liquid, on the basis of the surface information detected by the focus/leveling-detecting system. The liquid immersion exposure can be performed at a satisfactory pattern transfer accuracy.

A penetrating endoscope provides visualization of organ or tissue structures or foreign objects in a body. The penetrating endoscope includes an elongate penetrating member, a complementary metal dioxide semiconductor (CMOS) image sensor and an objective lens. The CMOS image sensor is substantially planar and includes a plurality of pixels with a pixel signal processing circuit for generating a color image ready signal. The CMOS image sensor converts image light energy into electrical color image ready signal energy for transmission out of the body. The color image ready signal is viewed on a color image display. The CMOS image sensor is carried on the elongate penetrating member adjacent a distal end of the elongate penetrating member. The objective lens is also carried on the distal end of the elongate penetrating member on an optical axis and focuses an image corresponding to an endoscope field of view at an image plane intersecting the optical axis. The CMOS image sensor is mounted with the CMOS image sensor pixels disposed substantially in the image plane and on the optical axis. The penetrating endoscope may include end effectors such as cutters and forceps.

When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.

There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate P via the projection optical system and the liquid so as to expose the substrate P. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system.

The invention concerns an illumination system, particularly for microlithography with wavelengths <=193 nm, comprising a light source, a first optical component, a second optical component, an image plane and an exit pupil. The first optical component transforms the light source into a plurality of secondary light sources being imaged by the second optical component in said exit pupil. The first optical component comprises a first optical element having a plurality of first raster elements, which are imaged into said image plane producing a plurality of images being superimposed at least partially on a field in said image plane. The first raster elements deflect incoming ray bundles with first deflection angles, wherein at least two of the first deflection angles are different. The first raster elements are preferably rectangular, wherein the field is a segment of an annulus. To transform the rectangular images of the first raster elements into the segment of the annulus, the second optical component comprises a first field mirror for shaping the field to the segment of the annulus.

A folded lens system may include multiple lenses with refractive power and a light path folding element. Light entering the camera through lens(es) on a first optical path or axis is refracted to the folding element, which changes direction of the light onto a second optical path or axis with lens(es) that refract the light to form an image plane at a photosensor. At least one of the object side and image side surfaces of at least one of the lens elements may be aspheric. Total track length (TTL) of the lens system may be 16.0 mm or less. The lens system may be configured so that the telephoto ration |TTL/f| is greater than 1.0. Materials, radii of curvature, shapes, sizes, spacing, and aspheric coefficients of the optical elements may be selected to achieve quality optical performance and high image resolution in a small form factor camera.

The present invention teaches a method of constructing head-mounted virtual display apparatuses for mobile activities based on a non-cross-cavity optical configuration, which simultaneously provides the user with "look toward" access to an inset virtual image and an unobstructed forward field of view of at least 35 degrees. In one embodiment, a pair of light deflecting elements and associated adjustment means project a light path from the normal peripheral field of view towards the eye without geometric distortion of the virtual image associated image plane tilt.

Methods, storage mediums, and systems for image data processing are provided. Embodiments for the methods, storage mediums, and systems include configurations to perform one or more of the following steps: background signal measurement, particle identification using classification dye emission and cluster rejection, inter-image alignment, inter-image particle correlation, fluorescence integration of reporter emission, and image plane normalization.

The invention relates to holographic head-up displays, to holographic optical sights, and also to 3D holographic image displays. We describe a holographic head-up display and a holographic optical sight, for displaying, in an eye box of the display/sight, a virtual image comprising one or more substantially two-dimensional images, the head-up display comprising: a laser light source; a spatial light modulator (SLM) to display a hologram of the two-dimensional images; illumination optics in an optical path between said laser light source and said SLM to illuminate said SLM; and imaging optics to image a plane of said SLM comprising said hologram into an SLM image plane in said eye box such that the lens of the eye of an observer of said head-up display performs a space-frequency transform of said hologram on said SLM to generate an image within said observer's eye corresponding to the two-dimensional images.

The present invention provides an imaging optical lens assembly including, in order from the object side to the image side: a first lens group comprising a first lens element with positive refractive power, no lens element with refractive power being disposed between the first lens element and an imaged object, the first lens element being the only lens element with refractive power in the first lens group; and a second lens group comprising, in order from the object side to the image side: a second lens element with negative refractive power; a third lens element; and a fourth lens element; wherein focusing adjustment is performed by moving the first lens element along an optical axis, such that as a distance between the imaged object and the imaging optical lens assembly changes from far to near, a distance between the first lens element and an image plane changes from near to far; and wherein the number of the lens elements with refractive power in the imaging optical lens assembly is N, and it satisfies the relation: 4≦N≦5. The abovementioned arrangement of optical elements and focusing adjustment method enable the imaging optical lens assembly to obtain good image quality and consume less power.

An information input/output device having an intuitive operating feeling and improved information viewing and discriminating properties. The device comprises an superposing image extraction unit 101 extracting a portion for superpositional display from an image to output the extracted image portion as an superposing image, a mask pattern generating unit 102 generating a mask pattern, effectors 113, 114 processing the superposing image, and the mask pattern based on the effect designation information, and a base image generating unit 115 synthesizing the mask pattern image and the original image to generate a base image. The device also comprises a switcher 116, brightness/contrast controllers 117, 118 adjusting the brightness or contrast of the display image switching means 112, a control unit 111, superpositional image display unit 124 for superposed demonstration of display image planes of the displays 122, 123 and a display position adjustment mechanism 121. The display information of the image for display in superposition is demonstrated at a position which appears to be floated or recessed from the basic display plane.

Methods and apparatuses for providing simultaneous viewing of an instrument in two ultrasound imaging planes. An ultrasound imaging probe is provided which can generate at least two ultrasound imaging planes. In one embodiment, the two imaging planes are not parallel (i.e., the planes intersect). An instrument path is positioned with respect to the planes such that an instrument may be simultaneously viewed in both imaging planes. In one embodiment, the instrument path is provided at an intersection that, at least partially, defines the intersection of the two imaging planes.

An exposure apparatus exposes a substrate P by locally filling a side of an image plane of a projection optical system PL with a liquid 50 and projecting an image of a pattern onto the substrate P through the liquid 50 and the projection optical system PL. The exposure apparatus includes a recovery unit 20 which recovers the liquid 50 outflowed to the outside of the substrate P. When the exposure process is performed in accordance with the liquid immersion method, the pattern can be transferred accurately while suppressing any environmental change even when the liquid outflows to the outside of the substrate.

Method and apparatus for full-resolution light-field capture and rendering. A radiance camera is described in which the microlenses in a microlens array are focused on the image plane of the main lens instead of on the main lens, as in conventional plenoptic cameras. The microlens array may be located at distances greater than f from the photosensor, where f is the focal length of the microlenses. Radiance cameras in which the distance of the microlens array from the photosensor is adjustable, and in which other characteristics of the camera are adjustable, are described. Digital and film embodiments of the radiance camera are described. A full-resolution light-field rendering method may be applied to light-fields captured by a radiance camera to render higher-resolution output images than are possible with conventional plenoptic cameras and rendering methods.

An image-guided radiosurgery method and system are presented that use 2D/3D image registration to keep the radiosurgical beams properly focused onto a treatment target. A pre-treatment 3D scan of the target is generated at or near treatment planning time. A set of 2D DRRs are generated, based on the pre-treatment 3D scan. At least one 2D x-ray image of the target is generated in near real time during treatment. The DRRs are registered with the x-ray images, by computing a set of 3D transformation parameters that represent the change in target position between the 3D scan and the x-ray images. The relative position of the radiosurgical beams and the target is continuously adjusted in near real time in accordance with the 3D transformation parameters. A hierarchical and iterative 2D/3D registration algorithm is used, in which the transformation parameters that are in-plane with respect to the image plane of the x-ray images are computed separately from the out-of-plane transformation parameters.