This application discloses a focusing
system,
semiconductor device, and focusing control method, relating to the field of
semiconductor detection technology. The
magnification of the first imaging module is less than that of the second imaging module, and the first defocus amount of the object under test determined based on the first optical
signal from the first detection module is greater than the second defocus amount of the object under test determined based on the second optical
signal from the second detection module. Therefore, wide-range coarse focusing is achieved based on the first
branch, and high-precision fine focusing is achieved based on the second
branch, satisfying various focusing accuracy requirements. That is, different focusing accuracy
modes share some optical elements, simplifying the
system structure; moreover, based on the first optical
signal received by the first detection module, the
reflectivity of the object under test at a first position is determined, and the
gain of the second detection module and / or the output power of the illumination module are adjusted in real time according to the
reflectivity, ensuring that the
photodetector in the second imaging module always operates in a high signal-to-
noise ratio state, improving focusing accuracy.