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34472 results about "Grating" patented technology

A grating is any regularly spaced collection of essentially identical, parallel, elongated elements. Gratings usually consist of a single set of elongated elements, but can consist of two sets, in which case the second set is usually perpendicular to the first (as illustrated). When the two sets are perpendicular, this is also known as a grid (as in grid paper) or a mesh.

Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method

Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.
Owner:ASML NETHERLANDS BV

Method of manufacturing surface textured high-efficiency radiating devices and devices obtained therefrom

A device for emitting radiation at a predetermined wavelength is presented. This device has a cavity with an active layer in which said radiation is generated by charge carrier recombination. The edges of the device define the region or space for radiation and / or charge carrier confinement. At least one of the edges of this cavity has a substantially random grating structure. The edge of the device has substantially random grating structure and can extend as at least one edge of a waveguide forming part of this radiation emitting device. The radiation emitting device of the present invention can have a cavity comprising a radiation confinement space that includes confinement features for the charge carriers confining the charge carriers to a subspace being smaller than the radiation confinement space within the cavity. The emitting device can comprise at least two edges forming, in cross-section, a substantially triangular shape. The angle between these two edges is smaller than 45°. At least one of the two edges has a transparent portion. the devices according to the present invention can be arranged in arrays.
Owner:SIGNIFY HLDG BV

Metrology Method and Apparatus, and Device Manufacturing Method

Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating or other structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The position of an image of the component structure varies between measurements, and a first type of correction is applied to reduce the influence on the measured intensities, caused by differences in the optical path to and from different positions. A plurality of structures may be imaged simultaneously within the field of view of the optical system, and each corrected for its respective position. The measurements may comprise first and second images of the same target under different modes of illumination and / or imaging, for example in a dark field metrology application. A second type of correction may be applied to reduce the influence of asymmetry between the first and second modes of illumination or imaging, for example to permit a more accurate overly measurement in a semiconductor device manufacturing process.
Owner:ASML NETHERLANDS BV

Fiber-optic confocal imaging apparatus and methods of use

An apparatus and methods for fiber optic confocal imaging systems. A plurality of fibers are in communication with a scan system that controllably deflects incident radiation into the fibers in a raster pattern. An index matching agent reduces specular reflections from the fibers.
Owner:BOARD OF RGT THE UNIV OF TEXAS SYST +1

Fiber Optic Position and Shape Sensing Device and Method Relating Thereto

The present invention is directed toward a fiber optic position and shape sensing device and the method of use. The device comprises an optical fiber means. The optical fiber means comprises either at least two single core optical fibers or a multicore optical fiber having at least two fiber cores. In either case, the fiber cores are spaced apart such that mode coupling between the fiber cores is minimized. An array of fiber Bragg gratings are disposed within each fiber core and a frequency domain reflectometer is positioned in an operable relationship to the optical fiber means. In use, the device is affixed to an object. Strain on the optical fiber is measured and the strain measurements correlated to local bend measurements. Local bend measurements are integrated to determine position and / or shape of the object.
Owner:INTUITIVE SURGICAL OPERATIONS INC

Illumination system particularly for microlithography

The invention concerns an illumination system, particularly for microlithography with wavelengths <=193 nm, comprising a light source, a first optical component, a second optical component, an image plane and an exit pupil. The first optical component transforms the light source into a plurality of secondary light sources being imaged by the second optical component in said exit pupil. The first optical component comprises a first optical element having a plurality of first raster elements, which are imaged into said image plane producing a plurality of images being superimposed at least partially on a field in said image plane. The first raster elements deflect incoming ray bundles with first deflection angles, wherein at least two of the first deflection angles are different. The first raster elements are preferably rectangular, wherein the field is a segment of an annulus. To transform the rectangular images of the first raster elements into the segment of the annulus, the second optical component comprises a first field mirror for shaping the field to the segment of the annulus.
Owner:CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS

Device for expanding an exit pupil in two dimensions

A diffractive beam expander (50) comprises an input grating (10), a crossed grating (20), and an output grating (30) implemented on a planar transparent substrate (7). The crossed grating (20) comprises a plurality of diffractive features (23) arranged along the lines of a first set of parallel lines (25) and along the lines of a second set of parallel lines (26) such that the lines (25) of the first set are parallel to the lines (26) of the second set. The lines of the first set have a first grating period and the lines of the second set have a second grating period. A light beam (B1) coupled into the substrate (7) by the input grating (10) impinges on the crossed grating (20) at a first location (EC1) and further locations (EC2). Interaction at the first location (EC1) provides several sub-beams (S00, S01, S10) which propagate in different directions. Further interactions at second locations (EC2) provide further sub-beams (V01, U10) which propagate in the same direction as the original in-coupled light (B1). Light is subsequently coupled out of the substrate (7) by the output grating (30) to provide a light beam (B2) which is expanded in two directions (SX, SZ) with respect to the beam (B0) impinging on the input grating. A virtual display device (200) may comprise said diffractive beam expander (50).
Owner:MAGIC LEAP INC
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