34229 results about "Grating" patented technology

The present invention is directed toward a fiber optic position and shape sensing device and the method of use. The device comprises an optical fiber means. The optical fiber means comprises either at least two single core optical fibers or a multicore optical fiber having at least two fiber cores. In either case, the fiber cores are spaced apart such that mode coupling between the fiber cores is minimized. An array of fiber Bragg gratings are disposed within each fiber core. A broadband reference reflector is positioned in an operable relationship to each fiber Bragg grating wherein an optical path length is established for each reflector/grating relationship. A frequency domain reflectometer is positioned in an operable relationship to the optical fiber means. In use, the device is affixed to an object. Strain on the optical fiber is measured and the strain measurements correlated to local bend measurements. Local bend measurements are integrated to determine position or shape of the object.

Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.

A device for emitting radiation at a predetermined wavelength is presented. This device has a cavity with an active layer in which said radiation is generated by charge carrier recombination. The edges of the device define the region or space for radiation and/or charge carrier confinement. At least one of the edges of this cavity has a substantially random grating structure. The edge of the device has substantially random grating structure and can extend as at least one edge of a waveguide forming part of this radiation emitting device. The radiation emitting device of the present invention can have a cavity comprising a radiation confinement space that includes confinement features for the charge carriers confining the charge carriers to a subspace being smaller than the radiation confinement space within the cavity. The emitting device can comprise at least two edges forming, in cross-section, a substantially triangular shape. The angle between these two edges is smaller than 45°. At least one of the two edges has a transparent portion. the devices according to the present invention can be arranged in arrays.

Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating or other structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The position of an image of the component structure varies between measurements, and a first type of correction is applied to reduce the influence on the measured intensities, caused by differences in the optical path to and from different positions. A plurality of structures may be imaged simultaneously within the field of view of the optical system, and each corrected for its respective position. The measurements may comprise first and second images of the same target under different modes of illumination and/or imaging, for example in a dark field metrology application. A second type of correction may be applied to reduce the influence of asymmetry between the first and second modes of illumination or imaging, for example to permit a more accurate overly measurement in a semiconductor device manufacturing process.

Polarization mode dispersion in an optical signal transmitted through a waveguide of a communications system is compensated by separating the dispersed signal into components corresponding to principal polarization states. The components are delayed by respective delays differing by a delay increment which is controlled to correspond to the dispersion delay and the delayed components are recombined to provide a dispersion compensated optical output signal. Each of the delays is provided by an chirped Bragg reflector forming part of a delay line, the Bragg reflectors comprising optical fibres with chirped intracore index gratings. Transducers or temperature controllers acting on one of the fibres allows dimensional control of the grating periodicity such that the position of Bragg reflection is variable. Wavelength division multiplexed optical signals are compensated using sampled gratings which allow a common Bragg reflection position for each wavelength.

An improved method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like, both fixed and oscillating or scanning, over an atomic and other undulating surface such as gratings or the like, relatively moving with respect to the probing beams; and providing, where desired, increased detection speeds, improved positioning sensing response, freedom from or relaxed requirements of strict control on probing oscillation amplitude, and multi-dimensional position measurement with focused beam probes and the like.

A projection display system. The projection system includes a light source, illumination optics that are capable of splitting the light from the source into individual color bands, and folding mirrors. The folding mirrors operate to direct the color bands to a reflective element that has a contoured surface. The contoured surface of the reflective element causes the light to form into scanning rasters that are recombined and sent to a spatial light modulator. The spatial light modulator is typically made up of a panel of individually addressable elements. If the spatial light modulator requires polarized light, a polarizing beam splitter and quarter-wave plate are included as part of the illumination optics.

An apparatus and methods for fiber optic confocal imaging systems. A plurality of fibers are in communication with a scan system that controllably deflects incident radiation into the fibers in a raster pattern. An index matching agent reduces specular reflections from the fibers.

The present invention is directed toward a fiber optic position and shape sensing device and the method of use. The device comprises an optical fiber means. The optical fiber means comprises either at least two single core optical fibers or a multicore optical fiber having at least two fiber cores. In either case, the fiber cores are spaced apart such that mode coupling between the fiber cores is minimized. An array of fiber Bragg gratings are disposed within each fiber core and a frequency domain reflectometer is positioned in an operable relationship to the optical fiber means. In use, the device is affixed to an object. Strain on the optical fiber is measured and the strain measurements correlated to local bend measurements. Local bend measurements are integrated to determine position and/or shape of the object.

The invention concerns an illumination system for wavelengths <=193 nm, particularly for EUV lithography, with at least one light source, which has an illumination A in a predetermined surface; at least one device for producing secondary light sources; at least one mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements; one or more optical elements, which are arranged between the mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements and the reticle plane, whereby the optical elements image the secondary light sources in the exit pupil of the illumination system.The illumination system is characterized by the fact that the raster elements of the one or more mirror or lenses are shaped and arranged in such a way that the images of the raster elements cover by means of the optical elements the major portion of the reticle plane and that the exit pupil defined by aperture and filling degree is illuminated.

The invention concerns an illumination system, particularly for microlithography with wavelengths <=193 nm, comprising a light source, a first optical component, a second optical component, an image plane and an exit pupil. The first optical component transforms the light source into a plurality of secondary light sources being imaged by the second optical component in said exit pupil. The first optical component comprises a first optical element having a plurality of first raster elements, which are imaged into said image plane producing a plurality of images being superimposed at least partially on a field in said image plane. The first raster elements deflect incoming ray bundles with first deflection angles, wherein at least two of the first deflection angles are different. The first raster elements are preferably rectangular, wherein the field is a segment of an annulus. To transform the rectangular images of the first raster elements into the segment of the annulus, the second optical component comprises a first field mirror for shaping the field to the segment of the annulus.

A beam steering apparatus includes a first beam steering stage and at least a second beam steering stage arranged in-line with the first beam steering stage. The first beam steering stage includes a first polarization grating comprising a uniaxial birefringent material having a first periodic director pattern, and the second beam steering stage includes a second polarization grating comprising a uniaxial birefringent material having a second periodic director pattern. In nonmechanical embodiments, a polarization selector may be arranged to provide a circularly polarized input beam incident on the first polarization grating. In mechanical embodiments, at least one of the first polarization grating and the second polarization grating may be operable to be independently rotated about an azimuth thereof. Related methods of operation are also discussed.

An eye tracker having a waveguide for propagating illumination light towards an eye and propagating image light reflected from at least one surface of an eye, a light source optically coupled to the waveguide, and a detector optically coupled to the waveguide. Disposed in the waveguide is at least one grating lamina for deflecting the illumination light towards the eye along a first waveguide path and deflecting the image light towards the detector along a second waveguide path.

In the systems and methods of the present invention a multifocal multiphoton imaging system has a signal to noise ratio (SNR) that is reduced by over an order of magnitude at imaging depth equal to twice the mean free path scattering length of the specimen. An MMM system based on an area detector such as a multianode photomultiplier tube (MAPMT) that is optimized for high-speed tissue imaging. The specimen is raster-scanned with an array of excitation light beams. The emission photons from the array of excitation foci are collected simultaneously by a MAPMT and the signals from each anode are detected using high sensitivity, low noise single photon counting circuits. An image is formed by the temporal encoding of the integrated signal with a raster scanning pattern. A deconvolution procedure taking account of the spatial distribution and the raster temporal encoding of collected photons can be used to improve decay coefficient. We demonstrate MAPMT-based MMM can provide significantly better contrast than CCD-based existing systems.

A semiconductor device includes a plurality of repeatable circuit cells connectable to one or more conductors providing at least electrical connection to the circuit cells and/or electrical connection between one or more circuit elements in the cells. Each of the circuit cells are configured having gates and active regions forming a grating, wherein, for a given active layer in the device, a width of each active region is substantially the same relative to one another, a spacing between any two adjacent active regions is substantially the same, a width of each gate is substantially the same relative to one another, and a spacing between any two adjacent gates is substantially the same.

An optical coherence tomography (OCT) system including an interferometer provides illuminating light along a first optical path to a sample and an optical delay line and collects light from the sample along a second optical path remitted at several scattering angles to a detector. In one embodiment, illuminating light is directed along a number of incident light paths through a focusing lens to a sample. The light paths and focusing lens are related to the sample and to both the incident light source and the detector. In another embodiment, a focusing system directs light to a location in the sample. A transmission grating or acousto-optic modulator directs light from the sample at an angle representative of the wavelength of the incident light on the transmission grating or acousto-optic modulator.