1097results about "Instrumental components" patented technology

An improved method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like, both fixed and oscillating or scanning, over an atomic and other undulating surface such as gratings or the like, relatively moving with respect to the probing beams; and providing, where desired, increased detection speeds, improved positioning sensing response, freedom from or relaxed requirements of strict control on probing oscillation amplitude, and multi-dimensional position measurement with focused beam probes and the like.

The invention provides a macro-micro driven bidimensional integrated micro positioning platform, which is characterized by including a base, a flexible platform body, two voice coil motors, four piezoelectric ceramic actuators, two displacement sensors and a controller, wherein the flexible platform body is fixed on the base; the two voice coil motors are connected with the flexible platform body; and the controller is in signal connection with the two voice coil motors, the four piezoelectric ceramic actuators and the two displacement sensors. The macro-micro driven bidimensional integrated micro positioning platform adopts a parallel decoupling totally flexible mechanism, and has the advantages of a parallel mechanism, a flexible mechanism and a decoupling mechanism; a macro-motion platform and a micro-motion platform are integrally designed; the same piece of material can be adopted to manufacture the macro-micro driven bidimensional integrated micro positioning platform integrally, and the manufacture is simple and convenient; and the motion decoupling design is applied to the macro-motion platform and the micro-motion platform, so that the motion control is facilitated and the positioning accuracy is improved.

A guideless stage for aligning a wafer in a microlithography system is disclosed, and a reaction frame is disclosed which isolates both external vibrations as well as vibrations caused by reaction forces from an object stage. In the guideless stage an object stage is disclosed for movement in at least two directions and two separate and independently movable followers move and follow the object stage and cooperating linear force actuators are mounted on the object stage and the followers for positioning the object stage in the first and second directions. The reaction frame is mounted on a base structure independent of the base for the object stage so that the object stage is supported in space independent of the reaction frame. At least one follower is disclosed having a pair of arms which are respectively movable in a pair of parallel planes with the center of gravity of the object stage therebetween. The linear positioning forces of the actuator drive means are mounted and controlled so that the vector sum of the moments of force at the center of gravity of the object stage due to the positioning forces of the drive means is substantially equal to zero. The actuator mounting means can include at least two thin flexible members mounted in series with the primary direction of flex of the members being orthogonal to one another.

A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

A positioning device has first and second object holders that are guided over a guiding surface extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the guiding surface from a first position into a second position by means of a displacement system. The displacement system includes a first displacement unit and a second displacement unit to which the object holders can be alternately coupled. The first displacement unit is suitable for carrying out a first series of positioning steps of the first object holder in the first position and for displacing the first object holder from the first position into an intermediate position between the first and second positions. The second displacement unit is suitable for carrying out a second series of positioning steps of the second object holder in the second position, simultaneously with and independently of the first displacement unit, and for displacing the second object holder from the second position into the intermediate position. In the intermediate position, the object holders are exchanged, after which the first series of positioning steps can be carried out by the first displacement unit with the second object holder in the first position and the second series of positioning steps can be carried out by the second displacement unit with the first object holder in the second position. The positioning device is suitable for use in a lithographic device to carry out an exposure process with a first semiconductor substrate in an exposure position and, simultaneously therewith and independently thereof, a characterization process with a second semiconductor substrate in a characterization position.

The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.

A scanning probe microscope probe is disclosed. The scanning probe microscope probe includes a handle and a cantilever shank connected with the handle. The cantilever shank has at one end a base connected with the handle and at an opposing end a tip. The cantilever shank forms a capillary channel between the base to the tip of the cantilever shank.

A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light reflected from the object surface, the scanning probe comprising (a) stripe generating means (14) for generating and emitting a light stripe (55); (b) a camera (16) comprising an imaging sensor having an array of pixels to detect the light stripe reflected from the object surface: (c) means for adjusting the intensity of the light stripe (55) during acquisition of the frame, in dependence upon the intensities detected by the camera (16). It also relates to a means to modify the stripe length, a scanner with separate compartment for the processing means, and an attachable dust cover for a scanner.

Optical apparatuses are provided that use near-field light, where high spatial resolution and high sensitivity are made compatible. Highly intense near-field light is generated in a narrow area using localized plasmons that are produced in a metal pattern 106 in a shape that bears anisotropy and is made to irradiate a measured subject. The direction of polarization 104 of incident light 103 is modulated and signal light is subjected to synchronous detection, so that background light is removed and high sensitivity is achieved.

A multiple source array for illuminating an object including: a reflective mask having an array of spatially separated apertures; at least one optic positioned relative to the mask to form an optical cavity with the mask; and a source providing electromagnetic radiation to the optical cavity to resonantly excite a mode supported by the optical cavity, wherein during operation a portion of the electromagnetic radiation built-up in the cavity leaks through the mask apertures towards the object.

A balanced positioning apparatus comprises a balance mass which is supported so as to be moveable in the three degrees of freedom, such as X and Y translations and rotation about the Z-axis. Drive forces in these degrees of freedom act directly between the positioning body and the balance mass. Reaction forces arising from positioning movements result in corresponding movement of the balance mass and all reaction forces are kept within the balanced positioning system. The balance mass may be a rectangular balance frame having the stators of two linear motors forming the uprights of an H-drive mounted on opposite sides. The cross-piece of the H-drive spans the frame and the positioned object is positioned within the central opening of the frame.

A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow appearing immediately before the probe contacts the sample, or based on a change in relative positions of a probe image and a sample image that are formed as an ion beam is irradiated diagonally.

A Circuit for reducing the number of serial ATA external PHY signals includes: a serializer/deserializer, connected to a storage medium controller through a set of parallel signal transmitting lines and a set of parallel signal receiving lines, so as to convert signals between parallel and serial specifications; a phase locked loop, connected to the serializer/deserializer so as to generate a clock signal required for data signal transmission; at least one pair of transmitter and receiver, each connected to the serializer/deserializer, each transmitter able to transmit the serial data signal from the serializer through a set of serial signal transmitting lines to a serial ATA device, and each receiver able to receive the serial data from the serial ATA device through a set of serial signal receiving lines to the deserializer; and at least one OOB signal detector, each connected to the corresponding receiving lines, so as to detect the out of band signals from the serial ATA device. The Circuit also employs in certain applications a signal encoding approach for reducing the number of serial ATA external PHY signals, wherein an encoder and a decoder are employed to encode control signals and status signals into special data codes transmitted between a serial ATA external PHY and a storage medium controller, so as to minimize the number of interface signals.

Methods are disclosed that provide for structures and techniques for the fabrication of ordered arrangements of crystallographically determined nanometer scale steps on single crystal substrates, particularly SiC. The ordered nanometer scale step structures are produced on the top surfaces of mesas by a combination of growth and etching processes. These structures, sometimes referred to herein as artifacts, are to enable step-height calibration, particularly suitable for scanning probe microscopes and profilometers, from less than one nanometer (nm) to greater than 10 nm, with substantially no atomic scale roughness of the plateaus on either side of each step.

A method for controlling a force acting on a scanning probe of a cantilever by setting bandwidth of a feedback loop constituted by detecting minute displacement of the cantilever and controlling a force of the scanning probe to be greater than a primary resonant frequency of the cantilever.

A support apparatus, a stage apparatus, an exposure apparatus, etc. are proposed that can increase response of a relative movement between a piston and a cylinder, etc. are proposed. There is provided a support apparatus including: a cylinder portion; a piston portion that is provided inside the cylinder portion and is movable in a Z direction; a fluid bearing formed in at least a portion between an inner wall of the cylinder portion and an outer wall of the piston portion, the support apparatus supporting a supported member in the Z direction with respect to a support member by means of a biasing force generated by the cylinder portion and the piston portion, in which fluids are supplied independently inside the fluid bearing and the cylinder.