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22723results about "Non-rotating vibration suppression" patented technology

Fluid damper having continuously variable damping response

An improved damping apparatus that utilizes a fluid having a viscosity that may be varied by the application of an electromagnetic field, such as a magnetorheological fluid or an electrorheological fluid, to provide the damping response. The damping apparatus includes a linear to rotary conversion mechanism which comprises a translatable member that is adapted for linear translation in a forward and a reverse direction and a rotatable member comprising a rotatable shaft that is rotatably coupled to the translatable member; wherein translation of the translatable member in one of the forward or the reverse directions produces a forward or a reverse rotation of the rotatable member and shaft, respectively. The damping apparatus also includes a damping mechanism which comprises a hub that is fixed to the shaft, a means for generating a variable electromagnetic field in response to an applied electrical signal that may be continuously varied in response to an input signal that is representative of a desired damping force and a fluid having a viscosity that may be continuously varied by application of the electromagnetic field that is in touching contact with the hub. Application of the variable electromagnetic field to the fluid produces changes in the viscosity of the fluid that in turn provides variable resistance to rotation of the hub and resistance to translation of the translatable member, thereby providing a damping apparatus with a continuously variable damping response.
Owner:GM GLOBAL TECH OPERATIONS LLC

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.
Owner:ASML NETHERLANDS BV

Guideless stage with isolated reaction stage

A guideless stage for aligning a wafer in a microlithography system is disclosed, and a reaction frame is disclosed which isolates both external vibrations as well as vibrations caused by reaction forces from an object stage. In the guideless stage an object stage is disclosed for movement in at least two directions and two separate and independently movable followers move and follow the object stage and cooperating linear force actuators are mounted on the object stage and the followers for positioning the object stage in the first and second directions. The reaction frame is mounted on a base structure independent of the base for the object stage so that the object stage is supported in space independent of the reaction frame. At least one follower is disclosed having a pair of arms which are respectively movable in a pair of parallel planes with the center of gravity of the object stage therebetween. The linear positioning forces of the actuator drive means are mounted and controlled so that the vector sum of the moments of force at the center of gravity of the object stage due to the positioning forces of the drive means is substantially equal to zero. The actuator mounting means can include at least two thin flexible members mounted in series with the primary direction of flex of the members being orthogonal to one another.
Owner:NIKON CORP

Hybrid vehicle drive for a motor vehicle

A hybrid vehicle drive for a motor vehicle includes an internal combustion engine and an electric machine which is selectively coupled with the internal combustion engine. The electric machine can be operated as a generator and as a motor. Regulation device which responds to a reference signal predetermined by a reference signal preset device are provided for the active damping of vibrations, especially torsional vibrations in the torque transmission path between the internal combustion engine and wheels of the motor vehicle driven by the latter. The regulation device also respond to sensing device which deliver an actual-value vibration signal containing vibration information about a rotating structural component of the motor vehicle and control the load torque exerted on the internal combustion engine by the electric machine for reducing or eliminating the vibrations of the structural component. An analysis device for determining a frequency spectrum of the actual-value vibration signal is associated with the regulation device. The reference signal preset device establishes a reference signal with predetermined frequency spectrum. The regulation device control the frequency spectrum of the load torque exerted on the internal combustion engine by the electric machine such that excessive spectral vibrations of the actual-value vibration signal are reduced or eliminated.
Owner:ZF FRIEDRICHSHAFEN AG
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