86results about How to "Accurate compensation" patented technology

The invention discloses a multi-dimensional cutting precision control system applied to a laser pipe cutting machine, and relates to the technical field of laser cutting control, and the multi-dimensional cutting precision control system comprises a data acquisition module, a prediction module, an actual verification module, a judgment module and a response module; the data acquisition module is used for acquiring cutting track data of the initial laser pipe cutting machine, including but not limited to cutting speed, cutting depth, cutting angle and cutting path; a sensor is installed at the corresponding position of the laser pipe cutting machine; according to the laser pipe cutting machine, through the integrated data acquisition module, key parameters such as the cutting speed, depth, angle and path of the laser pipe cutting machine in the cutting process can be monitored in real time, the control precision of the cutting process is remarkably improved, and therefore the consistency and reliability of the cutting quality are ensured; the system can more accurately predict and compensate deviation possibly occurring in the cutting process, and the rejection rate caused by parameter fluctuation is reduced.

The invention discloses a single-end open type high-performance magnetic shielding system and a design method thereof. The system is formed by combining a passive magnetic shielding subsystem and an active magnetic compensation subsystem. The passive magnetic shielding subsystem is formed by alternately nesting single-end open type high-permeability and high-conductivity metal barrels, and the structure is beneficial to synchronously improving the shielding capability for full-band magnetic interference; the active magnetic compensation subsystem is composed of a group of axial nonlinear gradient coils, two groups of radial nonlinear gradient coils with orthogonal magnetic fields and a magnetic compensation control circuit, and three groups of magnetic compensation coil windings are obtained based on specific nonlinear distributed magnetic interference reverse design in a single-end open type magnetic shielding barrel; different from conventional shimming and linear gradient coils, accurate compensation of magnetic interference in a working area in the barrel can be realized. According to the invention, the shielding capability of the single-end open type magnetic shielding system is improved, and a required near-zero magnetic environment is provided for extremely weak magnetic measurement.

The invention relates to the technical field of color correction, and discloses a publication printing color correction method and system based on deep learning, and the method achieves the precise correction and compensation of the color of a publication printed matter through a series of steps of cosine distance calculation, color-environment matching model, color deviation calculation, operation parameter adjustment and the like. The core of the method lies in that the accuracy of the printing color is effectively improved and the color quality of the printed matter is ensured to meet the expected standard through careful analysis and processing of the printing color by using the deep learning technology. The correction method provided by the invention has obvious advantages, not only can realize automatic color correction, reduce human intervention and improve the stability and consistency of correction, but also can optimize the operation parameters of the printing equipment, so that the printing equipment can keep a good working state in different printing environments, and the adaptability of the printing process is enhanced.

The invention provides a full-temperature automatic calibration and compensation method for an electric energy meter, which belongs to the technical field of electric energy meter embedding, and is characterized in that a multi-segment and non-uniform temperature segment point method is adopted, an instruction is sent to the electric energy meter through an upper computer, and the electric energy meter can be automatically calibrated and compensated. And then the target temperature of the high-low temperature box is set, and full-temperature calibration is carried out. By adopting the design of multi-section and non-uniform temperature segmentation points, the method can adapt to various temperature-error curves. The method is simple to operate, only an instruction needs to be sent to the electric energy meter through the upper computer, then the target temperature of the high-temperature and low-temperature box is set, full-temperature calibration can be automatically completed, and frequent command interaction with the electric energy meter or frequent manual adjustment of the temperature of the high-temperature and low-temperature box is not needed.

The invention relates to a pixel driving method, system and device. The method comprises the following steps: firstly, acquiring a normal pixel point in a first preset range where an abnormal pixel point is located based on a position coordinate of the abnormal pixel point, and acquiring a target brightness value of a preset sub-pixel of the abnormal pixel point based on an actual brightness value of the preset sub-pixel of the normal pixel point; and then based on the first brightness difference value between the preset brightness value and the target brightness value, the compensation gray scale of the preset sub-pixel of the abnormal pixel point is obtained, so that the abnormal pixel point is not compensated directly based on the actual brightness value of the abnormal pixel point. The target brightness value of the abnormal pixel point is determined on the basis of the actual brightness value of the normal pixel point around the abnormal pixel point, and the abnormal pixel point is compensated on the basis of the target brightness value, so that the brightness of the abnormal pixel point can be compensated, and the problem of over-compensation is avoided.

The invention relates to the technical field of wireless communication, in particular to a low-orbit satellite broadband Doppler simulation and compensation method based on an OFDM (Orthogonal Frequency Division Multiplexing) system, which comprises a simulation process and a compensation process, and the compensation comprises time domain compensation and frequency domain compensation. According to the broadband Doppler simulation method provided by the invention, the wireless signal more conforming to a real satellite-ground communication scene can be generated, and a ground terminal receiver which performs simulation design based on the analog signal can obtain better performance. The broadband Doppler time domain compensation method provided by the invention is suitable for high-throughput, large-bandwidth and high-order modulation scenes, and can accurately compensate the interference of Doppler frequency shift and improve the demodulation performance. The broadband Doppler frequency domain compensation method provided by the invention is suitable for low-delay, small-bandwidth and low-order modulation scenes, an original ground cellular network terminal receiving scheme does not need to be modified basically, and better demodulation performance can be obtained under the condition of low development cost.

The invention relates to the technical field of data processing, and provides an error compensation method, device and equipment for shaft part machining and a storage medium, and the method comprises the steps: obtaining the measurement data of the actual size of a shaft part, calculating the deviation data, inputting the measurement data and the deviation data into a preset neural network compensation model, compensation parameters and machining stability parameters are obtained, the path of a machining tool is adjusted based on the compensation parameters, a target path machining instruction is obtained and subjected to spectral analysis, a corrected instruction is obtained and checked through the machining stability parameters, and the shaft part is machined after the target machining instruction is obtained. The actual size of the shaft part is measured, deviation is calculated, a machining path is adjusted in combination with a neural network compensation model, a machining instruction is optimized through a spectral analysis technology, and the problems that errors of dynamic changes in the machining process cannot be coped with, tremor is likely to occur in the machining process, and the part compensation difficulty is aggravated are solved. And the problem of insufficient real-time error correction exists.

The invention provides a ship propulsion motor sensorless control algorithm based on harmonic suppression, and the algorithm comprises the steps: introducing a compensation coefficient through the analysis of fifth and seventh harmonics, constructing a novel PIR controller, and suppressing the formulated frequency harmonics; the external disturbance of the system is regarded as a system expansion state, a novel observer is constructed by combining cascade ESO and PLL to estimate the position of a motor rotor, it is guaranteed that the system accurately compensates for the deviation angle in a dynamic state and a static state, and the performance of the position-sensorless driving system is improved. According to the invention, a compensation coefficient is introduced, a novel PIR controller is constructed, and control links for five-frequency multiplication and seven-frequency multiplication are added, so that the effects of suppressing PMSM phase current harmonics and reducing the total harmonic content of phase current are achieved. And then external disturbance of the system is regarded as a system expansion state, and the rotor angle of the motor is estimated by combining cascade ESO and PLL. Therefore, the system can accurately compensate the deviation angle in a steady state and a dynamic state, and the performance of the position-sensorless driving system is improved.

The invention relates to a time-resolved spectral measurement method, device and equipment based on a multi-event time-to-digital converter, and a medium, and the method comprises the steps: carrying out the histogram statistics of photon signals of different time responses in each column of single-photon avalanche diodes in different laser pulse periods through the multi-event time-to-digital converter, the photon signal distribution of the photon signal of the specific wavelength corresponding to each column of single-photon avalanche diodes in different laser pulse periods is determined; the multi-event time-to-digital converter carries out delay combination on photon signal distribution in different laser pulse periods so as to determine a photon lifetime curve corresponding to the photon signal of the specific wavelength of each column of single-photon avalanche diodes. And integrating the photon lifetime curves corresponding to the photon signals of the specific wavelength of each column of single-photon avalanche diodes so as to construct the time-resolved spectrum of the sample to be detected. According to the invention, counting loss or time error caused by dead time can be reduced.

The invention discloses a floating type draught fan power control method and device based on wave interval estimation and a medium, and relates to the technical field of draught fan control. The method comprises the steps that an observed value of a state variable at the current moment and a predicted value of a control input quantity at the previous moment are obtained; determining an estimated value of wave interference at the current moment; determining a predicted value of the wave interference at the next moment based on the estimated values of the wave interference at the current moment and the previous moment by using a wave interference predictor; using a state predictor to determine a predicted value of a state variable at the next moment based on the observed value of the state variable at the current moment and a predicted value of wave interference at the next moment, and using a time delay controller to determine a predicted value of a control input quantity at the current moment; and controlling the floating fan at the current moment by using the predicted value of the control input quantity at the current moment. According to the invention, accurate compensation and control of wave interference are realized.

The invention relates to a quadrant point compensation method based on a bus servo control system, which comprises the following steps of: when a numerical control system or a controller supporting a bus judges reverse direction through a tool path, issuing a first section of torque feed-forward compensation value and a reverse clearance compensation value at a numerical control system part; the driver executes the received first-section torque feed-forward instruction and the received reverse gap instruction immediately; after the numerical control reverse gap is sent, a second-section torque feed-forward instruction continues to be sent, and the driver is notified to cache the second-section torque feed-forward instruction; after the driver executes the reverse gap instruction, starting to execute a second-section torque feed-forward instruction; according to the system, a first-section torque feed-forward instruction, a reverse gap instruction and a second-section torque feed-forward instruction are fed back to a motor at a servo control part, and then are fed back to a workbench by the motor through a coupler. According to the method, the motion model of the actual machine tool in the reverse direction can be accurately compensated, the reverse motion process is smoother in the actual machining process, and the machining effect is better.

The invention discloses a low-voltage ride-through control method considering voltage measurement delay estimation, and the method comprises the steps: carrying out the modeling of a typical vector control system of a doubly-fed wind power system, obtaining a reactive power output limiting condition, and carrying out the building of a voltage measurement equipment output model, on this basis, a cosine interpolation fitting method is adopted to accurately estimate the time delay of a voltage measurement device for the grid-connected point voltage of the doubly-fed fan, and after accurate time delay estimation is determined, the time delay is substituted into a low-order time delay compensation control link, so that the power instruction of the doubly-fed fan is compensated. According to the method, the actual voltage delay of the grid-connected point is accurately estimated, and a voltage measurement delay compensation method is adopted to optimize a voltage control strategy of the doubly-fed fan, so that the problem of overvoltage of the grid-connected point caused by delay of a voltage measurement link is reduced.

The invention provides a flight attitude stability control method for an unmanned aerial vehicle with arms, and the method comprises the steps: S1, building an attitude kinematic model of the unmanned aerial vehicle according to an unmanned aerial vehicle model; s2, according to the attitude kinematics model of the unmanned aerial vehicle, establishing an attitude kinematics model of the unmanned aerial vehicle with the arm; and S3, establishing an adaptive control model, adjusting parameters of the attitude kinematics model of the unmanned aerial vehicle with the arm in real time, and performing attitude control on the unmanned aerial vehicle with the arm. Mechanical arm interference is introduced into the unmanned aerial vehicle attitude control system, the environment interaction capability of the unmanned aerial vehicle with the arm is greatly improved, and the real-time performance and stability of the system are enhanced.

The present invention provides a voice compensation method for a Bluetooth headset, which is used for compensating uplink voice in at least one predetermined noise environment, comprising: pre-storing at least one voice compensation spectrum, each voice compensation spectrum corresponding to a predetermined noise environment, each voice compensation spectrum including voice amplitude compensation values ​​at a plurality of preset frequency points in the corresponding predetermined noise environment; receiving current environmental noise, judging whether the current noise environment belongs to one of the predetermined noise environments, and if so, selecting the voice compensation spectrum in the predetermined noise environment corresponding to the current noise environment as the current voice compensation spectrum; receiving a current uplink audio signal, performing noise reduction processing on the current uplink audio signal, and obtaining a current noise reduction voice signal; and superimposing the voice amplitude compensation value corresponding to each target frequency point in the current voice compensation spectrum on the basis of the current noise reduction voice signal, wherein the target frequency point is a frequency point included in a frequency band of the current noise reduction voice signal.

The invention discloses a household appliance, which comprises a shell, a motor and a controller, and is characterized in that the motor is arranged in the shell and is used for operating according to alternating current input voltage; the controller is configured to detect motor parameters of the motor in real time when the motor operates; determining a q-axis voltage compensation value of the motor based on the motor parameters of the motor; adjusting the q-axis voltage value of the motor according to the q-axis voltage compensation value to adjust the voltage value of the motor to the target voltage value, thereby reducing the low-frequency pulsation of the motor, achieving the precise regulation and control of the motor, facilitating the improvement of the stability of the motor, prolonging the service life of the motor, and improving the overall performance of the electric equipment and the user experience.

The embodiment of the invention provides a phase noise representation obtaining method, electronic equipment and a storage medium, and the method comprises the steps: comparing the tail part of an OFDM symbol with the cyclic prefix of the OFDM symbol, and obtaining a total phase offset; interpolation is carried out on the total phase offset, and the phase offset of each sampling point in the OFDM symbol is determined; and performing short-time Fourier transform on the phase offset of each sampling point to obtain two-dimensional time-frequency representation of the phase noise corresponding to each sampling point. By adopting the technical scheme provided by the embodiment of the invention, the phase noise can be accurately estimated and compensated.

The method comprises the following steps: extracting frequency information of power grid voltage based on a characteristic harmonic compensation method of an improved STATCOM to obtain a reference phase and frequency of h-order harmonic; the load current is converted into a d-q coordinate system through a Cabc-dqh change matrix module and decomposed into a load active current component and a load reactive current component, and then a reference current instruction value is obtained through low-pass filtering; performing low-pass filtering on the active current component and the reactive current component to obtain a system side current component as a reference value; comparing each separated harmonic current component with a reference value, and inputting the current components to a fuzzy PI controller to obtain voltage compensation instructions of the characteristic harmonic waves under a d axis and a q axis respectively; and superposing each compensation instruction and the original reactive compensation and direct-current voltage control instruction of the STATCOM, and then inputting PWM (Pulse Width Modulation) to enable the STATCOM to output current containing a characteristic harmonic compensation component. According to the method, multi-synchronous rotating coordinate system detection and fuzzy PI adaptive control are introduced, and dynamic and accurate compensation of multiple characteristic harmonics is realized on the premise of not changing the main circuit topology of the STATCOM.

The invention discloses a robot joint with multi-pole-pair asymmetric magnetic braiding, a joint module and a motor driver, the joint module is provided with a rotating shaft, and the rotating shaft is provided with a permanent magnet which rotates coaxially and is excited radially; a magnetic encoder chip is arranged on the motor driver and is used for sensing the pointing angle of the permanent magnet; the motor driver is electrically connected with a three-phase port of a motor in the joint module; the excitation of the permanent magnet is multi-pole-pair and asymmetric, the number P of pole pairs is larger than 1, a symmetric excitation reference line is obtained by equally dividing the permanent magnet into P parts along a mechanical rotation angle, the actual excitation of the permanent magnet and the symmetric excitation reference line do not coincide and are staggered by a certain angle, and the staggered angle continuously changes along with the mechanical rotation angle. According to the robot joint with the multi-pole-pair asymmetric magnetic braiding, the limitation of conventional multi-pole-pair magnetic braiding on mechanical angle compensation can be overcome, and the angle sensing and control precision of a robot joint module is improved.

The embodiments of the present application provide an error calibration device, method, equipment and storage medium, which relate to the field of semiconductor technology, and solve the technical problem that the comprehensive error formed by the overlap of the coaxial error and the lifting offset error is difficult to detect and difficult to compensate for. The error calibration device of this scheme can be applied to test equipment that needs to use a coaxial camera. The test equipment can use an auxiliary camera and a coaxial camera to observe and identify the marking points on the two calibration plates, and use the auxiliary camera and the fixed marking points of the second calibration plate as a reference to observe the position coordinates of the calibration marking points of the coaxial camera and the first calibration plate before and after lifting, so as to compare the coordinates obtained before and after lifting to determine the comprehensive error in the target direction, which helps to reduce the cumulative impact of error variables, thereby quickly and effectively realizing the calibration of errors, so that the compensation of accuracy can be more accurate and simpler.

The present invention discloses a method for improving the consistency of the optical axis of a high zoom ratio continuous zoom camera, which belongs to the technical field of optoelectronic equipment. It uses a light source, a cross target, a collimator, and a four-dimensional adjustment bracket to form an optical platform system, and sets the product to be tested on the four-dimensional adjustment bracket accordingly. Then, through the generation of a virtual electric cross, the alignment of the electric cross and the cross target, the measurement of the deviation between the electric cross and the cross target during the zoom process of the tested product, the determination and calibration of the consistency of the optical axis, the determination and calibration of the consistency of the optical axis of the tested product can be realized, and the image shift compensation output when the optical axis is inconsistent can be realized. The method in the present invention is simple to operate, has a small human factor, can improve the accuracy and reliability of the use of a high zoom ratio continuous zoom camera, is suitable for the mass production process of the product, reduces the production and application costs of the high zoom ratio continuous zoom camera, and has good practical value and application prospects.

The present invention discloses an online monitoring platform and an adaptive manufacturing method for underwater additive manufacturing, wherein the monitoring platform comprises an underwater sealing cover installed on a substrate for sealing a laser head, wherein an inner hollow shaft motor and an outer hollow shaft motor are installed inside the underwater sealing cover, wherein the inner hollow shaft motor is installed above the laser head, and its inner ring is fixedly connected to the laser head, and a laser beam splitter is installed on the outer ring; the outer ring of the outer hollow shaft motor forms an axial concentric fit with the outer wall of the small hole at the lower end of the inner ring of the underwater sealing cover, and a side monitoring CCD, a line laser generator, a line laser monitoring CCD, a temperature sensor, a high-precision spectrometer, and a line laser generator are installed on the inner ring of the outer hollow shaft motor; and an ultrasonic detector is installed on the back of the substrate. The present invention takes into account the relevant issues of underwater additive manufacturing, and has the characteristics of stable monitoring structure, flexible monitoring process, fast calculation speed, and real-time and accurate results, thereby realizing online monitoring of underwater additive processes.

The embodiment of the invention provides a power grid harmonic reactive compensation method and system based on a synchronous boosting transformer, and relates to the technical field of power grid harmonic reactive compensation, and the method comprises the steps: collecting the instantaneous voltage information and instantaneous current information of a power grid, and the voltage information and current information of a winding of the synchronous boosting transformer; analyzing an instantaneous harmonic demand and an instantaneous reactive demand of the power grid according to the instantaneous voltage information and the instantaneous current information of the power grid; analyzing a magnetic state and a saturation risk of the synchronous boosting transformer according to the voltage information and the current information of the winding of the synchronous boosting transformer; generating a compensation current instruction according to the instantaneous harmonic demand, the instantaneous reactive demand, and the magnetic state and saturation risk of the synchronous boosting transformer; and generating a compensation current according to the compensation current instruction and injecting the compensation current into a power grid. The power quality and the operation stability of the power grid can be improved.

The application discloses a kind of based on computer simulation building carbon emission prediction method and system, it is related to building energy saving and carbon emission monitoring technical field.The method is represented by equivalent heat network with the heat conduction process of envelope structure, and heat resistance and heat capacity parameters are set as learnable parameters, and are encoded into differentiable calculation layer by automatic differentiation framework;Obtain time-varying marginal carbon emission factor sequence, and multiply energy consumption simulation value and corresponding marginal carbon emission factor element by element by time step by time step by carbon emission factor coupling layer to generate carbon emission simulation sequence;Residual correction network is based on simulation intermediate state quantity and carbon emission simulation sequence to output residual correction value, and the carbon emission simulation sequence is added to obtain carbon emission prediction value;With prediction error as loss function, physical parameters and network parameters are updated simultaneously by back propagation, to realize physical parameter adaptive adjustment.System includes differentiable thermodynamic simulation module, carbon emission factor coupling module, residual correction module, end-to-end training module and prediction execution module.

The application discloses a kind of positioning of long-distance magnetic target and its design method, belong to the target positioning technical field based on magnetic field.It includes: S100, the position coordinates and magnetic moment of magnetic interference source are inverted using short baseline magnetic detection system, then real-time stripping interference magnetic field generated by magnetic interference source at long baseline magnetic detection system using inversion result, finally realize long-distance magnetic target positioning using long baseline magnetic detection system, obtain the magnetic moment vector m2 of magnetic target;S200, according to actual working condition and detection demand, the design method of each parameter of magnetic detection system is proposed in combination with the magnetic moment vector m2.The application uses short baseline magnetic detection system to real-time strip platform magnetic interference, and realizes long-distance magnetic target positioning using long baseline magnetic detection system.

The present invention relates to a dead zone compensation method for a three-level DC-AC converter considering an output filter, and its technical characteristics are: an IGCT three-level power device is considered together with a dv / dt filter connected to its AC side, so as to achieve more accurate compensation of the dead zone time. The specific method is to analyze a certain phase of the IGCT three-level converter, establish a frequency domain transfer function model and obtain a corresponding current time domain function according to the influence of the LCR filter circuit on the output phase voltage; calculate the maximum change value of the current; collect the load current in the equivalent topology, judge the relationship between the load current and the maximum change value of the current, calculate the dead zone equivalent area and obtain the dead zone compensation time, and introduce it into the output voltage to achieve compensation. The present invention is reasonably designed, takes into account the influence of the LCR filter circuit on the nonlinear dead zone effect, solves the problem that the conventional dead zone compensation method is poorly compensated at the current zero crossing, improves the accuracy of the dead zone compensation, and greatly improves the current harmonics on the AC side.

The invention discloses a three-axis stabilized platform servo loop gain change value calibration and compensation method. Firstly, a table body shaft, an inner frame shaft and an outer frame shaft are arranged at 0-degree, 0-degree and 0-degree positions, a servo loop is closed, an external test device inputs sine waves, an output signal of the three-axis stabilized platform is collected, amplitudes of the input signal and the output signal at different frequencies are calculated, and an open-loop amplitude-frequency characteristic curve of the current position of the three-axis stabilized platform is obtained. Secondly, rotating the inner frame shaft by 10 degrees every time, and calculating gain change values of the servo loop of the inner frame shaft at different angles; and finally, fitting a function between the angle of the inner frame shaft and a gain change value through the calibration data, and compensating the function into the servo loop gain of the outer frame shaft. The method for calibrating and compensating the gain change value of the servo loop of the three-axis stabilized platform under the condition that the rotational inertia is uncertain is given for the first time, and the stability of the servo loop when a platform frame system is located at any position of an inner frame is guaranteed.

The embodiment of the invention provides a display panel and a display device. The display panel comprises a pixel circuit, and the pixel circuit comprises a driving transistor, a first light-emitting control module and a second light-emitting control module. The first output end of the first shift register circuit is electrically connected with the first signal line. The second output end of the second shift register circuit is electrically connected with the second signal line. The first light-emitting control module and the second light-emitting control module are both electrically connected with the driving transistor and control the driving transistor to output light-emitting driving current when both are turned on. According to the invention, the first light-emitting control module and the second light-emitting control module have a time-sharing starting condition, so that the starting time and the ending time of transmitting the light-emitting driving current generated by the pixel circuit to the light-emitting device are adjusted through the on-off cooperation of the first light-emitting control module and the second light-emitting control module; and the light-emitting duration can be adjusted to be a non-integral multiple or integral multiple clock period.

The application provides a precision attenuation compensation method and system based on a high-precision flattening machine. The method comprises: obtaining precision attenuation evaluation multi-source sensing data by evaluating precision attenuation risk levels, obtaining precision attenuation evaluation influence data by local inversion, obtaining roll system state evolution prediction data by five-field coupling digital twin model analysis, performing multi-objective optimization analysis and processing to obtain feedforward compensation sequence parameters, obtaining flattening machine state evaluation data after compensation execution and stiffness reconstruction processing, obtaining multi-device collaborative compensation values by line multi-device collaborative compensation module analysis, and obtaining flattening measured roll gap analysis precision attenuation compensation evaluation state; the application realizes accurate precision attenuation compensation through adaptive modular sensing, multi-field coupling processing, device and process linkage intelligent decision and self-healing execution, completes data inversion, multi-field coupling prediction, multi-objective optimization feedforward compensation, and macro, micron and thermal deformation multi-scale self-healing execution.

The application discloses a clock synchronization circuit and a clock synchronization method, and relates to the technical field of communication. The clock synchronization circuit of the application comprises a clock synchronization circuit of a receiving circuit and a clock synchronization circuit of a sending circuit. A main receiver and a backup receiver are arranged in the receiving circuit. The delay parameter of the main receiver is obtained by detecting the delay of the backup receiver, so that the clock synchronization of the signal process is realized. Meanwhile, a main sender and a backup sender are arranged in the sending circuit. The delay parameter of the main sender is obtained by measuring the delay of the backup sender, so that the delay of the main sender is compensated, and the clock synchronization during signal sending is realized. The application can compensate the delay generated by each chip in real time, so that the precision of clock synchronization is improved.

An optical device deformation compensation method and system, and a photolithography machine, wherein the optical device is used to transfer a pattern on a mask to a wafer, the optical device deformation compensation method comprises: determining a region with aberration in an actually formed pattern on the wafer according to a difference between the actually formed pattern and a preset pattern; obtaining a deformation compensation amount of a corresponding region of the optical device according to an actual aberration in the region with aberration; and generating a corresponding compensation control signal according to the deformation compensation amount of the corresponding region of the optical device, and controlling a corresponding compensation device to compensate the corresponding region of the optical device. By using the above scheme, the local deformation of the optical device can be accurately compensated, thereby improving the imaging quality of the optical device.