The application discloses a LiNbO3-based periodic curved three-
busbar structure
acoustic wave resonator and a preparation method thereof, which comprises a substrate, a piezoelectric film layer arranged on the substrate, an interdigital
electrode layer arranged on the piezoelectric film layer, a release hole arranged on the piezoelectric film layer, and a cavity arranged in the substrate, wherein the interdigital
electrode layer is provided with symmetrically arranged interdigital electrodes, and two interdigital electrodes on the same side are connected by three parallel periodic curved busbars. The transverse excitation bulk acoustic
resonator (XBAR) based on the curved three-
busbar structure can effectively suppress the transverse high-order stray mode, significantly weaken the
ripple in the
passband, suppress the additional
acoustic energy loss caused by the
parasitic mode, improve the flatness and stability of the
frequency response, and improve the
signal transmission performance of the device. Compared with the traditional XBAR with the parallel
busbar structure, the structure can effectively avoid the excitation of other non-target acoustic
modes during the
resonance process, thereby improving the
spectral purity of the device and increasing the Q value by about 4 times compared with the traditional XBAR.