The application discloses a kind of based on
light field diffraction iteration's spherical element
surface shape reconstruction
system and method, it is related to the detection of spherical element
surface shape in optical detection technical field, its purpose is to solve the technical problem of high
measurement cost, low measurement efficiency caused by the
surface shape measurement method needing
reference plane in prior art when spherical element surface
shape reconstruction.Light is divided into two ways after spectroscope, one way of transmission light is absorbed by light trap to avoid forming
stray light, another way of reflection light is finally recorded
diffraction spot map by
CCD camera after the spherical mirror to be measured,
phase reconstruction algorithm based on
light field diffraction iteration is used to realize spherical element surface
shape reconstruction, obtain the surface shape
distortion containing the error of spherical mirror to be measured, the surface shape
distortion not containing the error of spherical mirror to be measured, finally obtain the surface shape error of spherical mirror to be measured, the whole process does not need the surface shape measurement method of
reference plane,
measurement cost is lower, measurement efficiency is higher, has great application prospect.