Growth structure (1) for a
radiation-emitting
semiconductor component (10) comprising - a
semiconductor substrate (2) which - contains a material based on
arsenide compound semiconductors, - a buffer structure (3) which - is arranged on the
semiconductor substrate (2), - contains a material based on
arsenide compound semiconductors and - a buffer layer (4) with at least one n-doped layer (5), wherein - the n-doped layer (5) contains a material based on
arsenide compound semiconductors and
oxygen and a
molar fraction of
oxygen in the n-doped layer (5) is between 10 15 cm -3 and 10 19 cm -3 amounts, - the buffer structure (3) has at least one further buffer layer (8, 9) which contains a material based on arsenide compound semiconductors, is n-doped and contains
oxygen, - the further buffer layer (8, 9) serves as an
etching stop layer when the semiconductor substrate (2) or the growth structure (1) is detached from a
luminescence diode structure (11), and - one of the at least two buffer
layers (4, 8, 9) is a bulk layer and the other of the at least two buffer
layers (4, 8, 9) consists of a
superlattice having a plurality of n-doped, oxygen-free
layers (6) and a plurality of n-doped, oxygen-containing layers (5) arranged alternately.