The invention relates to a growth method of
gallium arsenide monocrystal or
germanium arsenide monocrystal, which belongs to the field of
crystal growth. Firstly, PBN is flattened with
sand paper No. 1200 till PBN has no obvious steps, then PBN is put in mixed washing liquid of de-ionized water,
ammonia and oxyful in the volume ratio of 2:1:1 to be immersed for 30 minutes, and then PBN is cleaned with de-ionized water; PBN is baked for about 30 minutes in a baking furnace at 180 to 220 DEG C in
vacuum state, and then is baked for more than 30 minutes in the baking furnace at 900 to 1050 DEG C in
vacuum state; 1atm high purity
oxygen is filled into PBN, to ensure that PBN is baked for more than 30 minutes in the baking furnace at 900 to 1050 DEG C; after PBN is cooled down to 50 DEG C, clear
polycrystalline material is directly loaded, the loading is accomplished within 2 minutes, the loading environment temperature is controlled to be between 20 to 25 DEG C, and the
humidity is controlled to be below 40 percent; and after the loading, the
crystal growth is accomplished according to traditional VGF process. The growth method of
gallium arsenide monocrystal or
germanium arsenide monocrystal not only ensures that the content of
impurity B in the grown monocrystal is reduced, but also ensures that the quality of a substrate is not affected.