Bridge type nano grating tunable vertical cavity surface emitting laser and preparation method thereof

Abstract

The invention relates to a surface nano grating-based wavelength tunable vertical cavity surface emitting laser and a preparation method, which belong to the field of semiconductor photoelectronic devices. The laser has an inner cavity contact laminated structure; a positive electrode layer (1) is arranged on a P-type ohmic contact layer (5); an air-gap layer (12), a gallium arsenide layer (2a), and a gallium aluminum arsenide layer (2b) are arranged above the ohmic contact layer (5) in turn; a gallium aluminum arsenide oxidation current limitation layer (6), an active region (7), an n-type gallium aluminum arsenide layer (8a), an n-type gallium arsenide (8b), an n-type gallium arsenide substrate (10), and a substrate electrode layer (11) are formed below the ohmic contact layer (5) in turn; and a nano grating (15) is positioned on the surface of the gallium arsenide layer (2a). The thickness of the air-gas layer can be subjected to mechanical adjustment of an electrostatic force and the like, so that photon phase change can be transmitted in the resonant cavity of a laser and an outputted light beam passes through the nano grating (15) immediately; therefore, a wavelength and polarization can be simultaneously controlled.

Description

technical field [0001] The bridge-nano grating wavelength-tunable vertical cavity surface-emitting laser structure and device belong to the field of semiconductor optoelectronic devices, and relate to a preparation structure and technology of a wavelength-tunable and polarization-controllable surface-emitting laser. Background technique [0002] Vertical cavity surface emitting laser (VCSEL) has become an important light source in the field of short-distance optical communication due to the advantages of low threshold current, single longitudinal mode lasing, easy coupling with optical fiber, and easy integration. But due to its symmetric structure of the cavity and the weak anisotropy of the active region, the output light does not have a stable polarization state. For a standard device fabricated along the [100] direction of a GaAs substrate, there are two mutually perpendicular and orthogonal polarization ground states, and the electric vector directions are along the [11...

AI Technical Summary

Problems solved by technology

Polarization instability will have adverse effects on some polarization-sensitive applications, such as increasing the bit error rate of optical transmission

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