The invention discloses a
microwave power detection
system based on parallel-connected MEMS (micro-electromechanical
system)
cantilever beams and a preparation method of the
microwave power detection
system. The method is used for on-line measurement, electrostatic force can be generated between each MEMS
cantilever beam and a
transmission line in a center
signal line transmission process, the
cantilever beams are pulled downwards, and an interval between each cantilever beam and a corresponding test
electrode becomes smaller, so that
capacitance values are changed and
microwave power in one-to-one correspondence with the
capacitance values is obtained by measuring the changed
capacitance values. The
microwave power detection system based on the parallel-connected MEMS cantilever beams comprises a
gallium arsenide substrate, wherein a plane-
waveguide center
signal line (A), a parallel-connected MEMS cantilever beam structure (B) and a capacitance type
microwave power sensor (C) are arranged on the substrate. When a microwave
signal is transmitted on the plane-
waveguide center signal line, the two parallel-connected MEMS cantilever beams generate displacement under the action of the electrostatic force, and the to-be-measured power is detected by the capacitance type
microwave power sensor.