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1246 results about "Gallium arsenide" patented technology

Gallium arsenide (GaAs) is a compound of the elements gallium and arsenic. It is a III-V direct band gap semiconductor with a zinc blende crystal structure. Gallium arsenide is used in the manufacture of devices such as microwave frequency integrated circuits, monolithic microwave integrated circuits, infrared light-emitting diodes, laser diodes, solar cells and optical windows.

Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system

The invention discloses a microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and a preparation method of the microwave power detection system. The method is used for on-line measurement, electrostatic force can be generated between each MEMS cantilever beam and a transmission line in a center signal line transmission process, the cantilever beams are pulled downwards, and an interval between each cantilever beam and a corresponding test electrode becomes smaller, so that capacitance values are changed and microwave power in one-to-one correspondence with the capacitance values is obtained by measuring the changed capacitance values. The microwave power detection system based on the parallel-connected MEMS cantilever beams comprises a gallium arsenide substrate, wherein a plane-waveguide center signal line (A), a parallel-connected MEMS cantilever beam structure (B) and a capacitance type microwave power sensor (C) are arranged on the substrate. When a microwave signal is transmitted on the plane-waveguide center signal line, the two parallel-connected MEMS cantilever beams generate displacement under the action of the electrostatic force, and the to-be-measured power is detected by the capacitance type microwave power sensor.
Owner:南京尔芯电子有限公司

Microelectronic mechanical dual channel microwave power detection system and preparation method thereof

The invention discloses a dual channel microwave power detection system based on a microelectronic mechanical microwave power sensor and a preparation method thereof. The system has the advantages of simple structure, large measurement range and no direct current power consumption. The system is based on a gallium arsenide substrate. A coplanar waveguide transmission line (A), a thermoelectric MEMS microwave power sensor (B) and an MEMS clamped beam capacitor type microwave power sensor (C) are designed on the substrate. When the power of a microwave signal is small, the thermoelectric MEMS microwave power sensor carries out detection according to the one-to-one corresponding relationship between the thermopile output voltage and the microwave power. When the power of the microwave signal is large, the MEMS clamped beam capacitor type microwave power sensor carries out detection. A square mass block is designed on an MEMS clamped beam above the coplanar waveguide transmission line. The area with the coplanar waveguide transmission line is increased, and at the same time the weight of the center position of the MEMS clamped beam is increased. Static power is more likely to cause large deformation of the MEMS clamped beam, and the system sensitivity is improved.
Owner:NANJING UNIV OF POSTS & TELECOMM

MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof

The invention discloses an MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and a production method thereof. The microwave power sensor comprises a gallium arsenide substrate, a mainline CPW (Co-Planer Waveguide), a subline CPW, an MEMS cantilever beam type structure and a terminal microwave power monitoring system, wherein the MEMS cantilever beam type structure comprises a cantilever beam and an anchor area; the cantilever beam stretches across the mainline CPW signal line, and the fixed end of the cantilever beam is fixed on the anchor area; the anchor area is connected with the terminal microwave power monitoring system through the subline CPW signal line; and a drive electrode is arranged below the cantilever beam type structure. The MEMS cantilever beam type online microwave power sensor not only has the advantages of the terminal type microwave power sensor, such as low loss and high sensitivity, but also has the advantages of online microwave power measurement, realization of monitoring and not monitoring, integration of the online microwave power sensors with various kinds of coupling factors, and compatibility with the gallium arsenide monolithic microwave integrated circuit.
Owner:SOUTHEAST UNIV
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