MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof

A technology of microwave power and cantilever beam type, which is applied in the direction of electric power measurement by thermal method, microstructure technology, microstructure device, etc., can solve the problem of consuming input signal power and achieve the effect of low loss and high sensitivity

Inactive Publication Date: 2010-12-15
SOUTHEAST UNIV
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Problems solved by technology

Existing microwave power sensors are terminal power sensors based on diodes, thermistors, and thermopiles, which have the advantages of low l

Method used

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  • MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof
  • MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof
  • MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof

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Embodiment Construction

[0048] The present invention will be further described below in conjunction with the accompanying drawings.

[0049] Such as figure 1 , 2 , 3 and 4 show a MEMS cantilever beam type online microwave power sensor, which is provided with a CPW, three MEMS cantilever beam structures and a terminal microwave power sensor composed of a terminal resistor 13 and a thermopile on a gallium arsenide substrate 1. Monitoring system6.

[0050] The CPW includes a main line CPW signal line 7, a secondary line CPW signal line 8 and a CPW ground line 9, the main line CPW signal line 7 and CPW ground line 9 constitute the main line CPW, and the secondary line CPW signal line 8 and CPW ground line 9 constitute The auxiliary line CPW is connected with the ground line 9 which is cut off through the air bridge 17 .

[0051]The MEMS cantilever beam structure includes a cantilever beam 3 and an anchor area 12, the cantilever beam 3 spans above the main line CPW signal line 7, the fixed end of the c...

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Abstract

The invention discloses an MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and a production method thereof. The microwave power sensor comprises a gallium arsenide substrate, a mainline CPW (Co-Planer Waveguide), a subline CPW, an MEMS cantilever beam type structure and a terminal microwave power monitoring system, wherein the MEMS cantilever beam type structure comprises a cantilever beam and an anchor area; the cantilever beam stretches across the mainline CPW signal line, and the fixed end of the cantilever beam is fixed on the anchor area; the anchor area is connected with the terminal microwave power monitoring system through the subline CPW signal line; and a drive electrode is arranged below the cantilever beam type structure. The MEMS cantilever beam type online microwave power sensor not only has the advantages of the terminal type microwave power sensor, such as low loss and high sensitivity, but also has the advantages of online microwave power measurement, realization of monitoring and not monitoring, integration of the online microwave power sensors with various kinds of coupling factors, and compatibility with the gallium arsenide monolithic microwave integrated circuit.

Description

technical field [0001] The invention relates to microelectronic machinery (hereinafter referred to as MEMS), in particular to a MEMS cantilever beam type online microwave power sensor and a preparation method thereof. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics, and the measurement of microwave power plays an important role in wireless technology applications. Existing microwave power sensors are terminal power sensors based on diodes, thermistors, and thermopiles, which have the advantages of low loss and high sensitivity, but their biggest disadvantage is that the input signal power is completely consumed when measuring microwave power. With the development of microelectronics technology, modern personal communication systems and radar systems not only require that the microwave signal of the microwave power sensor is still available during the power measurement p...

Claims

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Application Information

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IPC IPC(8): G01R21/02B81B3/00B81C1/00
Inventor 廖小平张志强
Owner SOUTHEAST UNIV
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