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327results about "Power measurement by thermal methods" patented technology

Microwave power sensor with multi-cantilever structure

The invention discloses a microwave power sensor with a multi-cantilever structure. The microwave power sensor comprises a substrate, and a micro-strip line, a cantilever anchoring region and a plurality of pressure welding blocks, which are arranged on the substrate, wherein the cantilever anchoring region and the pressure welding blocks are arranged on the two sides of the micro-strip line respectively; a plurality of cantilevers which are parallel to one another and hung in the air are arranged above the micro-strip line; the cantilevers and the micro-strip line are vertical and have different lengths; and one end of each cantilever is arranged on the cantilever anchoring region, and the other end of each cantilever are correspondingly hung above one pressure welding block. According to the microwave power sensor, the displacements of the cantilevers are caused by the attraction of the microwave power transmitted on the micro-strip line to the cantilevers of different lengths, and the measurement of the microwave power transmitted on the micro-strip line is realized by detecting the number of the cantilevers of different lengths, which are placed in parallel and contacted with the pressure welding blocks, so that the sensitivity of the power sensor can be improved, the structure can be simplified, digital output is realized, and the error range is controlled.
Owner:SOUTHEAST UNIV

Microelectronic mechanical dual channel microwave power detection system and preparation method thereof

The invention discloses a dual channel microwave power detection system based on a microelectronic mechanical microwave power sensor and a preparation method thereof. The system has the advantages of simple structure, large measurement range and no direct current power consumption. The system is based on a gallium arsenide substrate. A coplanar waveguide transmission line (A), a thermoelectric MEMS microwave power sensor (B) and an MEMS clamped beam capacitor type microwave power sensor (C) are designed on the substrate. When the power of a microwave signal is small, the thermoelectric MEMS microwave power sensor carries out detection according to the one-to-one corresponding relationship between the thermopile output voltage and the microwave power. When the power of the microwave signal is large, the MEMS clamped beam capacitor type microwave power sensor carries out detection. A square mass block is designed on an MEMS clamped beam above the coplanar waveguide transmission line. The area with the coplanar waveguide transmission line is increased, and at the same time the weight of the center position of the MEMS clamped beam is increased. Static power is more likely to cause large deformation of the MEMS clamped beam, and the system sensitivity is improved.
Owner:NANJING UNIV OF POSTS & TELECOMM

MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof

The invention discloses an MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and a production method thereof. The microwave power sensor comprises a gallium arsenide substrate, a mainline CPW (Co-Planer Waveguide), a subline CPW, an MEMS cantilever beam type structure and a terminal microwave power monitoring system, wherein the MEMS cantilever beam type structure comprises a cantilever beam and an anchor area; the cantilever beam stretches across the mainline CPW signal line, and the fixed end of the cantilever beam is fixed on the anchor area; the anchor area is connected with the terminal microwave power monitoring system through the subline CPW signal line; and a drive electrode is arranged below the cantilever beam type structure. The MEMS cantilever beam type online microwave power sensor not only has the advantages of the terminal type microwave power sensor, such as low loss and high sensitivity, but also has the advantages of online microwave power measurement, realization of monitoring and not monitoring, integration of the online microwave power sensors with various kinds of coupling factors, and compatibility with the gallium arsenide monolithic microwave integrated circuit.
Owner:SOUTHEAST UNIV

MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof

The invention discloses an MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and a production method thereof. The microwave power sensor comprises a gallium arsenide substrate, a mainline CPW (Co-Planer Waveguide), a subline CPW, an MEMS clamped beam type structure and a terminal microwave power monitoring system, wherein the MEMS clamped beam type structure comprises a clamped beam and an anchor area; the clamped beam stretches across the mainline CPW signal line, and both ends of the clamped beam are fixed on the anchor area; the anchor are is connected with the terminal microwave power monitoring system through the subline CPW signal line rather than the CPW ground line; and a drive electrode is arranged below the clamped beam type structure. The MEMS clamped beam type online microwave power sensor not only has the advantages of a terminal type microwave power sensor, such as low loss and high sensitivity, but also has the advantages of online microwave power measurement, realization of monitoring and not monitoring, integration of the online microwave power sensors with various kinds of coupling factors, and compatibility with the gallium arsenide monolithic microwave integrated circuit.
Owner:SOUTHEAST UNIV

System and method for synchronously testing nanofluid heat transfer coefficient and influence rule thereof on power generation efficiency of thermoelectric generation system

The invention relates to a system and a method for synchronously testing nanofluid heat transfer coefficient and influence rule thereof on the power generation efficiency influence rule of a thermoelectric generation system. The system mainly comprises a liquid storage tank, a peristaltic pump, a cold water bath, a copper pipe, a heat sink, a thermoelectric device, a heat source, a plurality of groups of thermocouples, a data acquirer, a computer control terminal and the like. The method comprises the following steps: measuring the temperature T1, T2 and T3 of nanofluid entering the inlet end of the cold water bath, at the distance away from the inlet end by 20-30cm and in the cold water bath, calculating the intensified convection heat transfer performance of the nanofluid according to constant-temperature boundary conditions. Heat carried by the nanofluid is estimated by distributing the thermocouples on the heat sink from top to bottom, and the thermoelectric conversation efficiency under differnet nanofluid working conditions can be obtained by combining the conversation power of the thermoelectric devices. The synchronous testing on the intensified heat transfer coefficient of nanofluid under different working conditions, and the influence of the intensified heat transfer coefficient of nanofluid under different working conditions on the cooling effect of the cold end of the thermoelectric devices as well as the influence on the conversation efficiency can be realized, the measurement errors can be decreased, and the testing accuracy can be improved.
Owner:江苏南通创源材料科技有限公司

Hot-wire anemometer calibration apparatus and method in acoustic field

The present invention discloses a hot-wire anemometer calibrating device in a sound filed and a calibrating method. The device comprises the following components: a closed container; a driving mechanism which is fixed and installed in the closed container; a probe which is connected with the driving mechanism and moves under the driving of the driving mechanism; a displacement transducer which is provided on the driving mechanism; a pressure sensor and a temperature sensor which are installed at the inner part of the container; and a conducting wire. The method comprises the following procedures: when the closed container is executed with vacuum pumping, filling a working medium to be tested; setting a first group of working condition point; setting a second group of working condition point; respectively collecting a hot-wire electric signal corresponding with the working condition point to the first group of working condition point and the second working condition point; respectively executing data fitting to the first group of working condition point, the second group of working condition point and the corresponding hot-wire electric signals; and fitting the two obtained data and then executing combination fitting. The calibrating to the hot-wire anemometer is more accurate and a larger speed range can be calibrated.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof

The invention discloses a five-port micromachine cantilever-based capacitance type microwave power sensor. The input ends of five coplanar waveguides (CPWs) for transmitting microwave signals are arranged on a gallium arsenide substrate, the CPWs are symmetrically arranged, and a 72-degree angle is formed between every two CPWs; the output end of each CPW is connected with two terminal matched resistors; each terminal resistor is provided with a thermocouple nearby; the five thermocouples are arranged at the inclined angle of 72 degrees and are connected in series with one another to form a thermopile; simultaneously, each CPW is bridged with a micro-electromechanical system (MEMS) cantilever; one end of each cantilever is positioned in a free state, and the other end of the cantilever isfixed in an anchor area; the anchor area is positioned on the outer side of a CPW ground wire; and a sensing electrode is arranged between a CPW signal wire and the ground wire. The sensor has low loss, high sensitivity and high linearity; the microwave power of five ports can be measured; simultaneously, ports into which the microwave power is input and the magnitude proportion of the power can be detected; and the sensor has the advantages of high integration level and compatibility with a gallium arsenide monolithic microwave integrated circuit.
Owner:SOUTHEAST UNIV
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