1891 results about "Vacuum pumping" patented technology

The invention discloses a wafer vapor deposition device and a use method, and the wafer vapor deposition device comprises a wafer box lifting device which is used for lifting a wafer box; the load locking chamber is arranged between the reaction chamber and the wafer box lifting device, and a wafer cache structure is arranged in the load locking chamber; the wafer cache structure is used for storing wafers which are not subjected to film deposition and transferred from the wafer box to the reaction chamber or storing wafers which are subjected to film deposition and transferred from the reaction chamber to the wafer box; the reaction chambers are used for performing thin film deposition on the wafer; and the wafer transfer device is used for transferring wafers among the wafer box, the wafer cache structure and the reaction chamber. The opening and closing frequency of the load locking cavity is obviously reduced, frequent conversion between atmospheric pressure and vacuum pressure is avoided, the production efficiency is improved, and the operation pressure of a vacuum pumping system is effectively relieved.

The invention provides a system and a method for off-line measurement of a cesium evaporation rate in a fusion device. The system comprises a vacuum chamber, a cesium crucible assembly, a heating assembly, a film thickness meter, a laser absorption spectrum system and a vacuum pumping unit. According to the invention, an ultrahigh vacuum environment is provided for the whole device including the vacuum chamber by using the vacuum pumping unit; then the cesium crucible and the conveying pipeline are heated through a heating assembly, so that effective evaporation of cesium is guaranteed, and deposition of cesium on the wall face of the pipeline is reduced; measuring the deposition thickness of cesium and the concentration of cesium atoms by using a film thickness meter and a laser absorption spectrum system, and checking the measurement results of the two diagnosis methods mutually; the cesium evaporation rate is measured, and the quantitative relation between the cesium evaporation rate and the heating temperature is obtained; and finally, a measurement system is transplanted into a negative ion source, and the cesium injection amount in the vacuum stage is monitored in real time. Effective data and technical support are provided for cesium flow control in the magnetic confinement nuclear fusion negative neutral beam injection system.

The present invention relates to a food packaging device, and particularly to a rotary vacuum pumping device for a food packaging device. The present invention provides the following technical solutions: A rotary vacuum pumping device for a food packaging device includes a turntable and a vacuum pumping assembly. The vacuum pumping assembly includes a base and a cover body. An opening and closing cover driving mechanism is provided between the turntable and the vacuum pumping assembly. A support frame is provided on the turntable. The cover body is connected to the support frame through a support arm. A closing position tension adjusting member is provided between the support frame and the cover body; the base is hingedly connected to the turntable through a hinge block. The base has a linkage station. The support arm and the linkage station of the base are linked through a connecting rod. One end of the connecting rod extends between the two hinge points of the support arm and is hingedly connected to the support arm, and the other end is at the linkage station and is hingedly connected to the linkage station. By adopting the above technical solutions, a rotary vacuum pumping device for a food packaging device with energy saving, shortened vacuum pumping time, and simple structure is provided.

The invention provides an underground coal mine air and water pumping switching electro-hydraulic control system and method, the electro-hydraulic control system comprises an air supply control module, a water supply control module, a negative pressure control module and an oil supply module, and the method adopts a remote control system to control the underground coal mine air and water pumping switching electro-hydraulic control system. According to the underground coal mine air and water pumping switching electro-hydraulic control system, air and water pumping electric control rapid opening and closing and rapid switching of different functions are achieved, the automation degree of air and water pumping switching is improved, and the air and water pumping switching time is shortened; and meanwhile, when dangerous working conditions that gas accumulation exceeds the limit due to hole blocking behind the drill hole or carbon monoxide gas appears in the drill hole and the like, rapid and automatic response processing can be achieved. The air and water pumping conversion efficiency is improved, the labor intensity of workers is relieved, and key technical support is provided for coal mine underground automatic drilling whole-process operation.

The invention relates to a test device and method for simulating migration and transformation of nitrogen in underground water of a river bank subsurface zone, and the device comprises a detachable organic glass tank, the internal space of which is divided into a left-end water tank, a middle sand tank and a right-end water tank from left to right in sequence, and the left-end water tank, the middle sand tank and the right-end water tank are respectively used for simulating a river channel, a river bank and a far-bank aquifer; the water level control assembly comprises two constant water head control modules and platform lifting modules corresponding to the two constant water head control modules; the pore water level monitoring assembly comprises a plurality of piezometric tubes, a plurality of transparent graduated scales and a photographing module; the water quality sampling assembly comprises a pore water filtering module embedded in the middle sand tank in an array manner, a vacuum pumping module and a water sample collecting module connected with the pore water filtering module and the vacuum pumping module. Compared with the prior art, the sampling time of the pore water of the fine-particle soil is greatly shortened, and the accuracy of a test result is ensured; automatic control, whole-process monitoring and rapid and automatic sampling of water level fluctuation in the water tank are realized.

The invention discloses a vacuum-assisted pultrusion preforming device for a composite material. The vacuum-assisted pultrusion preforming device comprises a yarn threading plate, a gum dipping tank, a gum extruding roller and a vacuum-assisted preforming mold which are sequentially arranged in the pultrusion direction, wherein fiber bundles penetrate through the yarn threading plate in a layered mode, the gum dipping tank is used for containing resin, and the gum extruding roller is used for extruding redundant resin. The vacuum auxiliary preforming mold is provided with a preforming mold cavity, a vacuum cavity is formed in one section of the preforming mold cavity of the vacuum auxiliary preforming mold, an air exhaust hole is formed in the upper portion of the vacuum cavity, and a semi-permeable membrane allowing gas to pass through but blocking resin to pass through is arranged at the air exhaust hole. And the air exhaust hole is externally connected with a vacuumizing device. The vacuum-assisted pultrusion preforming device can effectively discharge microbubbles in resin and fiber bundles, effectively control uniform distribution of the content of the resin and remarkably promote full infiltration of high-viscosity resin to fibers.

The present invention provides a vacuum air extraction device with high practicality and reliability. The vacuum air extraction device with high practicality and reliability includes an air extraction host machine and a vacuum sucker in matching connection to a lower part of the air extraction host machine, where a control circuit board, a vacuum air pump and a decompression valve are arranged in the air extraction host machine; an annular groove body is formed in one end connected to the air extraction host machine, of the vacuum sucker; a spongy body for filtering air is arranged in the annular groove body; air extracted through the air extraction host machine passes through the air circulation channel to enter the annular groove body, is filtered at the spongy body, and then flows into the vacuum air pump.

A vacuum pumping system includes a vacuum pump and a motor for driving the vacuum pump. A motor stator and a motor rotor are received in a pumping chamber of the vacuum pump. Thanks to such arrangement, the vacuum pumping can be made as a single, sealed unit and the need for dynamic seals can be avoided. Moreover, the vacuum pumping system can be more compact and lighter than prior vacuum pumping systems. A pump rotor of the vacuum pump may be at least partially made as a hollow body, and the motor may be received inside the pump rotor.

The invention relates to a preparation method of a high-response miniature supercapacitor based on high-conductivity graphene, and the method comprises the steps: providing a substrate, and carrying out the surface modification of the substrate; preparing a cyanate ester film on the substrate; irradiating the cyanate ester film through a large-size light spot laser beam, and inducing the cyanate ester film to form a high-conductivity graphene film; engraving the high-conductivity graphene film through a small-size light spot laser beam to obtain a high-resolution interdigital electrode; the pins of the high-resolution interdigital electrodes are led out through conductive silver paste and copper foil, and the high-resolution interdigital electrodes with the pins led out are cleaned and dried; uniformly coating the dried high-resolution interdigital electrode with a gel electrolyte, and carrying out vacuum pumping treatment on the high-resolution interdigital electrode; and packaging the vacuumized high-resolution interdigital electrode by using a packaging film to obtain the high-response micro supercapacitor. According to the invention, the graphene film with high conductivity is prepared, so that the high-response micro supercapacitor is manufactured, and the manufacturing cost is low.

The invention discloses a vacuum pumping system and method. The vacuum pumping system comprises a cavity, at least one low-vacuum pumping pump set, at least one high-vacuum pumping pump set, a first pipeline and a second pipeline, and the low-vacuum pumping pump set communicates with the cavity through the first pipeline and the second pipeline; the low-vacuum air extracting pump set is communicated with the cavity through a first pipeline, the high-vacuum air extracting pump set is communicated with the cavity through a second pipeline, the controller is electrically connected to the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, the controller sequentially controls on-off of the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, and the low-vacuum air extracting pump set can extract pressure in the cavity to be lower than 0.1 Torr; the system comprises a low-vacuum air extracting pump set and a high-vacuum air extracting pump set, and the low-vacuum air extracting pump set and the high-vacuum air extracting pump set can be used for extracting the pressure in the cavity to be lower than 0.1 Torr and the pressure in the cavity to be in an ultrahigh vacuum state respectively. The grading air exhaust mode can more effectively improve the air exhaust efficiency and reduce the air exhaust time; and the equipment can be prevented from being in a high-load state for a long time, so that the service life of the equipment is prolonged.

The invention relates to the technical field of stator assembly glue pouring, in particular to a motor stator assembly glue pouring device and a glue pouring process, the motor stator assembly glue pouring device comprises a glue pouring mold, a positioning shaft and a glue pouring ring, the glue pouring mold comprises a lower mold base, an upper mold base and a plurality of connecting pieces; an annular cavity is defined by the outer peripheral surface of the positioning shaft and the inner walls of the lower die holder and the upper die holder, and the annular cavity is communicated with an axial groove of the stator assembly to jointly form a closed glue pouring cavity; the vacuumizing assembly is used for vacuumizing the glue filling cavity; the section of the glue pouring ring is of a W-shaped structure, the highest point in the middle of the glue pouring ring is located over the winding, and the two lowest points correspond to the inner side and the outer side of the winding respectively; a plurality of liquid injection holes are formed in the corners of the two lowest points at intervals in the circumferential direction. Through the W-shaped structure of the glue filling ring, the glue liquid is synchronously filled from the inner side and the outer side of the winding and is matched with immersion type rising, the problems of bubbles and air holes in traditional glue filling are solved, the insulation and heat dissipation performance is guaranteed, and the operation reliability of the motor is improved.

The invention discloses a local area inert gas protection auxiliary vacuum environment laser welding device and method, belongs to the technical field of laser welding, and aims to solve the problem that the laser welding quality of an existing easily-oxidized material is insufficient. A local area inert gas protection auxiliary vacuum environment laser welding device comprises a monitoring and feedback control system, a gas precise control system and a vacuum cavity, a gas nozzle, a workbench and a laser welding head are all arranged in the vacuum cavity, the laser welding head is located above the workbench, the gas nozzle is arranged on one side of the laser welding head, and the gas nozzle is arranged on the other side of the laser welding head. The vacuum pumping system is connected with the vacuum cavity, the laser welding head is connected with the laser welding machine, the gas precise control system controls the flow and the mixing proportion of inert gas jetted by the gas nozzle, and the monitoring and feedback control system monitors the temperature, the vacuum degree, the oxygen content and the plasma state of a welding area. And data are fed back to carry out closed-loop regulation control on various welding parameters. And the welding quality is greatly improved.

The invention provides a cooking device which comprises a box body forming a shell outside the cooking device, an inner container arranged in the box body, a frying barrel arranged in the box body and located on one side of the inner container, a vacuum pumping module used for pumping air and an oil box arranged at the bottom of the frying barrel, and the frying barrel comprises a barrel body and a first oil outlet formed in the bottom of the barrel body; the first oil outlet is communicated with the oil box, and is provided with an oil control switch for controlling the communication of the frying cavity and the oil box, a pressure relief channel for communicating the frying cavity and air, and a pressure relief switch arranged in the pressure relief channel. In the cooking process, the vacuumizing module is controlled to exhaust air in the frying cavity; after cooking is finished, firstly, an oil control switch is controlled to be turned on, so that oil in the frying cavity flows into an oil box through a first oil outlet; and then the pressure relief switch is controlled to be turned on to relieve the pressure of the frying cavity, so that the influence on the taste of the food materials due to re-oil absorption of the food materials after pressure relief is avoided.

The invention discloses an integrated valve type vacuum pump, a breast pump main machine and a breast pump, and relates to the technical field of vacuumizing devices.The integrated valve type vacuum pump comprises an air exhaust assembly, a driving motor, a shell and a rotating shaft, an air cavity is formed in the shell, and the shell is provided with an air leakage channel and a connecting channel communicated with the breast pump; the integrated valve type vacuum pump further comprises a linkage arm, a linkage piece and a sealing piece. The linkage arm is rotationally connected with the rotating shaft, and the linkage arm is coupled with the linkage piece; and when the driving motor works, the rotating shaft is driven to rotate to drive at least one part of the linkage arm to move away from the rotating shaft or have the trend of moving away from the rotating shaft, so that the linkage piece is driven to move in the axial direction of the rotating shaft, and the sealing piece is driven to seal the air leakage channel. According to the technical scheme provided by the invention, the problem that the volume size of the breast pump is limited by the vacuum air exhaust assembly and the air release valve can be solved.

The invention relates to the field of laser detection, in particular to a sample mechanism for marine corrosion primary process detection, which comprises a sample box, a sample loading device for placing a sample plate is arranged in the sample box, and one side of the sample box is provided with an excitation interface and a detection interface. The upper portion of the communication port is connected with a three-way connector, the other two connectors of the three-way connector are used for air exhaust and water dripping respectively, the connector for air exhaust is connected with a vacuumizing pump, and the connector for water dripping is matched with a plugging cover. And the water dripping joint is connected with a water dripping pipe matched with a sample plate on the sample loading device. The communicating port is matched with the three-way joint, so that the vacuumizing operation can be completed through the communicating port, and meanwhile, the dripping operation can also be completed, so that the sample plate simulates a sample environment in which seawater is immersed, and a more accurate detection effect can be obtained.

The invention discloses a helium detection device and method for the airtightness of a bonding interface and a bonding microcavity, and belongs to the field of the airtightness of MEMS devices. The device comprises a sample holder, a mass spectrometer, a molecular pump, a mechanical pump and other components, helium is used as detection gas, and the helium is leaked only through a bonding interface through a customized and processed test sample and sample holder structure, so that the interference of other leaks in a non-bonding area on a test result is avoided. The testing method comprises the steps of sample introduction, vacuum pumping, helium filling, signal detection, dynamic and steady state testing and the like, the helium leak rate is monitored in real time by combining with a helium mass spectrometer, and the minimum leak detection rate is that high-sensitivity air tightness detection is ensured. According to the method, the airtightness of the bonding interface can be independently evaluated, and a reliable basis is provided for development of a novel bonding process. The method is suitable for air tightness detection and evaluation of the bonding process in MEMS device processing and manufacturing.

A continuous and fully-automatic energy-saving production line and method for vacuum glass are provided. The production line includes conveying roller tables that run through the entire production line, and includes a feeding platform, a low-vacuum pumping chamber, a high-vacuum pumping chamber, a main processing chamber, a high-vacuum automatic cooling chamber, a first-stage boosting and automatic cooling chamber, and a second-stage boosting and automatic cooling chamber in sequence. The main processing chamber is integrally welded, and cylindrical in shape, with two sides respectively provided with inspection holes; the low-vacuum pumping chamber and the high-vacuum pumping chamber are connected to form a degassing section; the high-vacuum automatic cooling chamber, the first-stage boosting and automatic cooling chamber, and the second-stage boosting and automatic cooling chamber form a cooling section; and the degassing section and the cooling section are respectively connected to two ends of the main processing chamber through sealing doors.

The invention discloses a full-automatic packaging assembly line for semiconductor material trays, which comprises a material taking and feeding mechanism, a material tray label tearing and pasting mechanism, a moisture-proof monitoring mechanism, a bagging and packaging helium detection mechanism and a boxing and packaging redetection mechanism which are arranged in sequence, and the assembly line realizes material tray grabbing, visual detection and overturning, old label tearing and new label pasting; the full-process automatic operation comprises the following steps of: automatically placing a humidity card and a drying agent, bagging an aluminum foil bag, vacuumizing, filling helium, carrying out heat sealing, carrying out helium detection, and finally automatically boxing, sealing, rechecking, labeling and stacking. By integrating multi-stage visual positioning and detection, double-path parallel heat sealing and closed-loop quality control, the packaging efficiency and precision are remarkably improved, the sealing performance, moisture resistance and traceability of product packaging are ensured, and the automatic packaging machine is particularly suitable for automatic packaging of precise electronic components such as semiconductors.

The invention provides a metal continuous casting device, and relates to the field of metal casting. The metal continuous casting device comprises a hot melting unit, a feeding unit is arranged above the hot melting unit, a heat preservation unit is arranged below the hot melting unit, a vibration crystallizer is arranged below the heat preservation unit, and a dummy ingot sealing unit is arranged at the outlet end of the vibration crystallizer. The vacuum pumping unit is communicated with the hot melting unit, the feeding unit and the heat preservation unit, the hot melting unit comprises a smelting cavity and a smelting crucible fixedly installed in the smelting cavity, the center of the bottom end of the smelting crucible is open and communicated with the heat preservation unit through a long nozzle, and a first stopper mechanism is fixedly installed above the smelting cavity. According to the metal continuous casting device, the smelting crucible is arranged in the smelting cavity, and the flowing of molten copper is controlled through the first stopper rod mechanism, so that a structure for driving the smelting crucible to feed can be reduced, feeding can be controlled more conveniently, and meanwhile, the device can be kept in a vacuum state conveniently.

The utility model belongs to the field of coating, and particularly relates to a magnetron sputtering coating production line. Comprising a coating cabin, a feeding cabin and a discharging cabin, the feeding cabin and the discharging cabin are arranged at an inlet and an outlet of the coating cabin respectively, and the feeding cabin and the discharging cabin are both communicated with the coating cabin; the coating cabin, the feeding cabin and the discharging cabin are all provided with vacuumizing assemblies, and sealing mechanisms are arranged at the communicating positions of the feeding cabin and the coating cabin as well as the communicating positions of the discharging cabin and the coating cabin. The utility model provides a magnetron sputtering coating production line and aims to solve the problem of low efficiency during continuous magnetron sputtering coating.

The invention discloses a flexible gripper device, and relates to the technical field of mechanical automatic gripping, the flexible gripper device comprises a gripper mounted on a mechanical arm, the gripper further comprises a vacuum valve terminal, a plurality of vacuum gas guide holes used for being connected with a vacuum pumping pipeline are formed in one side of the vacuum valve terminal, and a plurality of adsorption holes are further formed in the bottom of the vacuum valve terminal; the vacuum air guide hole and the adsorption hole are communicated with the interior of the vacuum valve terminal to form an airflow path of a vacuum system; the buffer part covers the bottom area of the vacuum valve terminal and is connected with the bottom of the vacuum valve terminal; after starting, the mechanical arm drives the gripper to get close to an object, an elastic breathable material of the buffer part abuts against and extrudes the object during air exhaust, then the buffer part shrinks and deforms to fill a pit, after the object is adsorbed to be stable, the mechanical arm is lifted, the valve terminal keeps air exhaust, and the buffer part and the elastic counter-recoil mechanism buffer impact force brought by the object together. And the elastic counter-recoil mechanism deforms and rebounds to further buffer the impact force.

The present invention belongs to the technical field of the preparation of titanium-based dental implants, and provides a preparation method and a product of a titanium-based dental implant with a surface gradient tantalum, which specifically includes the following steps: S1, loading the titanium-based dental implant into the working chamber, and placing a tantalum target in the working chamber; S2, performing a vacuum pumping operation on the working chamber, and then turning on the heater to heat the temperature to a preset temperature value; S3, introducing argon into the working chamber to reach a preset pressure value, and then starting magnetron sputtering coating; S4, cooling to room temperature, and taking out the formed tantalum-coated dental implant; S5, then using an eddy current induction heating device to perform induction heating on the tantalum-coated dental implant; S6, cooling to room temperature to obtain a titanium-based dental implant with a surface gradient tantalum. Through the synergistic effect of magnetron sputtering and eddy current induction heating, the present invention can quickly obtain a titanium-based dental implant with a surface gradient tantalum, with a dense and uniform coating, extremely high efficiency, capable of rapid and large-scale industrial production, and having good application prospects.

The utility model relates to the field of shoe mold design, and provides a shoe sole mold with a negative pressure maintaining function, the shoe sole mold comprises a lower mold and a heat insulation mold, the lower mold is provided with a mold cavity for forming a shoe sole, and the inner wall of the mold cavity is provided with a plurality of first negative pressure holes penetrating through the outer side face of the lower mold; the heat insulation die comprises a vacuum bottom die for fixing the lower die and heat insulation layers arranged on the inner walls of the vacuum bottom die, and when the lower die is fixed to the vacuum bottom die, a vacuum gap for heat preservation and heat insulation is formed between the lower die and the vacuum bottom die; a vacuum opening communicated with the vacuum gap is formed in the outer wall of the vacuum bottom die, and the vacuum opening is used for being matched with a first vacuumizing device of the machine table base to form negative pressure; the vacuum bottom die is provided with a one-way mechanism used for limiting gas from flowing back to the vacuum gap, and an unlocking mechanism is arranged between the vacuum bottom die and the lower die and used for eliminating negative pressure in the first negative pressure hole after the shoe sole is formed. On the basis, electric energy loss in the shoe sole forming process can be reduced, and the effects of saving energy and reducing consumption are achieved.

The utility model discloses a high-vacuum-degree micro-pressure-difference control device for desulfurization slurry grading flash evaporation heat recovery, and belongs to the technical field of coal-fired boiler waste heat heat supply. The system aims at solving the problems that when desulfurization slurry flash evaporation is adopted for boiler flue gas waste heat recovery, much non-condensable gas such as SO2 can escape due to heat release and condensation, the volume of a vacuum system is relatively large, and consequently the high vacuum degree is difficult to maintain by adopting a conventional vacuumizing device, a special micro-differential pressure vacuum pump is added, and the vacuum degree is reduced; extracting non-condensable gas on the liquid level of the condensed water of the last-stage heater, and sending the non-condensable gas to a front-mounted heater matched with the last-stage flash tank; when necessary, alkaline water can be sprayed to the space, where non-condensable gas is enriched, of the final-stage heater so as to comprehensively absorb SO2 and other components to reduce the partial pressure, so that the micro-differential pressure vacuum pump can stably maintain the high-vacuum state of the final-stage heater, the temperature of a concentrated slurry outlet of the final-stage flash tank is greatly reduced, and the concentration rate of the final-stage flash tank is increased. And optimal operation conditions are created for greatly reducing the exhaust gas temperature and greatly improving the waste heat recovery amount.

The application discloses a testing device and testing method for hydrogen isotope permeation parameters of fusion reactor application materials, relates to material testing technology in the hydrogen field, and belongs to the field of material testing technology in the hydrogen field. The testing device for hydrogen isotope permeation parameters of fusion reactor application materials comprises the following: a membrane sample is installed in a membrane testing cavity to divide the membrane testing cavity into a gas inlet sub-cavity and a permeation sub-cavity; a gas inlet tank is selectively communicated with the gas inlet sub-cavity to supply testing gas; a collecting tank is selectively communicated with the permeation sub-cavity to collect outflowing gas; a vacuum pumping structure is used for pumping the gas inlet sub-cavity and the permeation sub-cavity; a heating structure is used for heating the gas inlet sub-cavity and the permeation sub-cavity; a high-resolution mass spectrometer is selectively communicated with the permeation sub-cavity, and gas selectively flows into the high-resolution mass spectrometer. The testing device for hydrogen isotope permeation parameters of fusion reactor application materials can control the gas pressure and temperature in the two sub-cavities respectively, thereby accurately determining the hydrogen isotope permeation parameters of the materials, and the precision is high, and the data resolution is excellent.

The invention relates to the technical field of scanning electron microscopes, in particular to a scanning electron microscope which comprises a mounting frame, an electron microscope body, a vacuumizing mechanism, an adapter, a damping mechanism and a vacuum tube structure, the electron microscope body comprises a lens cone and a sample bin, and the vacuumizing mechanism is used for synchronously vacuumizing the lens cone and the sample bin; the damping mechanism is arranged between the mounting rack and the electron microscope main body; the adapter comprises an adapter tube, a first joint and a second joint, and the first joint and the second joint are arranged on the two sides of the adapter tube; the vacuum tube structure comprises a first flexible tube, a first rigid tube, a second flexible tube and a second rigid tube, and the first flexible tube and the second flexible tube are symmetrically arranged. Due to the fact that the flexible pipes are connected with the vacuumizing mechanism and the rigid pipe is connected with the electron microscope body, the symmetrical flexible pipes can balance pulling force in the vacuumizing process, the influence of the pulling force on the electron microscope body is reduced, the influence on the image quality is reduced, and the detection accuracy of the scanning electron microscope and the definition of images are effectively guaranteed.

A vacuuming system includes: multiple first vacuum pumping components and a second vacuum pumping component. The multiple first vacuum pumping components are connected to the multiple process chamber groups in a one-to-one correspondence. Each first vacuum pumping component includes a first vacuum pump and multiple first vacuum pumping pipelines. Outlet ends of the multiple first vacuum pumping pipelines in each first vacuum pumping component are connected to the first vacuum pump. Inlet ends of the multiple first vacuum pumping pipelines in each first vacuum pumping component are respectively connected one-to-one with the multiple process chambers in each process chamber group. The second vacuum pumping component includes a second vacuum pump and a second vacuum pumping pipeline. An outlet end of the second vacuum pumping pipeline is connected to the second vacuum pump. An inlet end of the second vacuum pumping pipeline is connected to all the process chambers respectively.

The invention provides a novel vacuum evaporator which comprises a vacuumizing system, a carrier rotating system, a light-operated integrated system, a crystal oscillation system, a heating system, a water cooling system and an evaporation system, and the light-operated integrated system and the crystal oscillation system are arranged in a hollow cavity of a first rotating mechanism, so that cooperative work of rotary coating and real-time detection is realized; a detection light path is shortened, and the signal-to-noise ratio is improved; rotation axis detection ensures data representativeness; the top radiation heating and the side wall conduction heating have a synergistic effect, so that the surface temperature difference of the substrate is smaller than + / -1.5 DEG C, the cooling efficiency of the evaporation system is improved by 40% through the water cooling system, the equipment is highly integrated through the modular architecture design, and the space is saved by 30% through the coaxial design of the carrier rotating system and the detection system; a rotating system, a heating system and a detecting system are cooperatively controlled, a dynamic compensation algorithm automatically adjusts the evaporation rate and the carrier rotating speed by comparing light control data with crystal oscillator data in real time, the film thickness control precision is + / -2 nm, and the refractive index deviation is smaller than 0.5%.

The invention provides a machining method for improving the yield of a 2K negative pressure aluminum plate-fin heat exchanger. The machining method comprises the steps that a core body is manufactured; manufacturing an end socket; the core body is connected with the end socket to manufacture the heat exchanger; normal-temperature detection is conducted on the heat exchanger; performing low-temperature detection on the heat exchanger; the heat exchanger is subjected to cold shock treatment, and the background leakage rate and the vacuum degree of each heat exchange channel in the heat exchanger and the background leakage rate and the vacuum degree of the sealing device in the cooling process are obtained; and under the condition that the temperature is reduced to the preset temperature threshold value, low-temperature helium mass spectrum leakage detection is conducted on the heat exchanger, after low-temperature helium mass spectrum leakage detection is conducted, secondary vacuumizing is conducted, then third-time vacuumizing is conducted, the circulation is conducted till ith vacuumizing is conducted, and the total leakage rate is calculated, and i is an integer larger than 3. The heat exchanger with the micro leakage rate, high mechanical strength, compact size and high cleanliness can be obtained, and the machining efficiency and the yield are improved.

The utility model discloses an air tightness detection device for a new energy automobile battery. The air tightness detection device comprises a detection table, a lifting assembly, a sealing cover, a pushing and supporting assembly, a vacuum air exhaust assembly and a detection assembly, the lifting assembly is arranged at the top of the detection table, is connected with the sealing cover and is used for driving the sealing cover to move in the vertical direction; the pushing and supporting assembly is located in the sealing cover and comprises a pushing piece, a sliding piece and a supporting piece. The output end of the pushing piece is connected with the sliding piece, the bottom of the sliding piece is slidably connected with the top of the detection table, and the pushing piece is used for pushing the sliding piece to move in the horizontal direction; the top of the sliding piece is connected with the supporting piece, and the supporting piece is used for supporting the battery pack; the vacuum pumping assembly is communicated with the internal space of the sealing cover and is used for pumping gas in the sealing cover; the detection assembly is used for being connected with a detection port of the battery pack and is used for introducing gas into the battery pack.