The invention relates to a special baking oven and a special material rack thereof for silicon material. The baking oven comprises a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor, a temperature sensor, a frame body, idler wheels and a silicon material box, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the baking oven, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, and the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven. The movable baking shelf thereof can facilitate loading/unloading and in/out of silicon material, save baking preparation time, and has the advantages of high baking efficiency and low energy consumption. The whole silicon material box can be directly moved in the baking oven for baking, thereby greatly shortening technology preparation time and reducing labor strength of operators.