1319 results about "Susceptor" patented technology

An inductively heatable aerosol-generating article for an inductively heating aerosol-generating device is provided, including at least one aerosol-forming substrate and at least one susceptor in thermal proximity to the aerosol-forming substrate or thermal contact with the aerosol-forming substrate, the susceptor including an expanded metal sheet including a plurality of openings through the sheet. A method for manufacturing an inductively heatable aerosol-generating article is also provided. An apparatus for manufacturing a susceptor of an inductively heatable aerosol-generating article is also provided.

The present invention provides a vapor deposition device, comprising: a reaction chamber; a gas injection mechanism, located at the top of the reaction chamber; a susceptor, disposed the reaction chamber, a reaction zone being formed above the susceptor; a rotating shaft, connected to the susceptor; a shielding member, positioned in the reaction chamber and surrounding an inner wall of the reaction chamber, the shielding member comprising an isolation wall near the reaction zone, the isolation wall and the gas injection mechanism forming an enclosed spatial region that covers the reaction zone, a radial dimension of the spatial region gradually increasing from top to bottom, and an outer diameter of the lowest end of the shielding member matching an inner diameter of the reaction chamber; purge channels, distributed on the isolation wall, passing through the isolation wall and in communication with the spatial region, so as to allow a purge gas to be introduced into the spatial region. The vapor deposition device provided by the present invention can improve the production efficiency and quality of materials grown by the device, and extend the maintenance cycle of the reaction chamber.

The present disclosure relates to a susceptor, and a susceptor of the present disclosure may improve temperature uniformity over the entire area of the upper surface of the susceptor by arranging a heater pattern of a multilayer structure so that arcs thereof do not overlap or so that the straight sections of the heater are arranged at different angles with respect to the center in different layers, or by arranging the straight sections of the heater at different angles with respect to the center even in a heater pattern of a single-layer structure.

The present disclosure generally relates to an epitaxial chamber for processing of semiconductor substrates. In one example, the epitaxial chamber has a chamber body assembly. The chamber body assembly includes a lower window and an upper window, wherein chamber body assembly, the lower window and the upper window enclose an internal volume. A susceptor assembly is disposed in the internal volume. The epitaxial chamber also has a plurality of temperature control elements. The plurality of temperature control elements include one or more of an upper lamp module, a lower lamp module, an upper heater, a lower heater, or a heated gas passage.

Disclosed herein is a processing chamber for a low temperature epitaxy deposition and components of the same. The processing chamber includes a dome lid coupled with a lid liner via a lid liner separator; a remote plasma source disposed outside the dome lid and operable to energize a process gas; a gas ring disposed under the dome lid and coupled with a gas ring liner via a gas ring liner separator; a showerhead disposed under the gas ring; a susceptor disposed below the showerhead and operable to heat a substrate by conduction; and a side wall disposed under the gas ring and coupled with a wall liner via a wall liner separator. The cleaning method of the processing chamber is also disclosed.

To provide a method for manufacturing a ceramic susceptor, capable of improving bonding force between the upper and lower plates of a MMC (a Metal Matric Composite) metal ceramic composite base body, and the ceramic susceptor.SOLUTION: A ceramic susceptor base body includes a body obtained by bonding lower and upper plates 210 and 220 consisting of a metal ceramic composite, respectively. A method for manufacturing the aceramic susceptor base body comprises steps of: successively laminating a first active metal layer 321, a first aluminum layer 322 and a blazing filler layer 323 on the bonded surface of the upper plate; successively laminating a second active metal layer 311 and a second aluminum layer 312 on the bonded surface of the lower plate; and brazing and bonding the lower and upper plates by the brazing filler layer.SELECTED DRAWING: Figure 2C

There is disclosed a method of processing rod-shaped consumable aerosol-generating articles each comprising an aerosol-generating substrate portion including a metallic susceptor, the aerosol-generating generating substrate being longitudinally disposed between first end and second end plug portions, the aerosol-generating substrate and the first and second end plug portions being wrapped in at least one circumferential wrapper, the method comprising the steps of: i) feeding the aerosol-generating articles onto a vibrating sieve and causing the aerosol-generating articles to pass across a surface of the vibrating sieve; ii) arranging the aerosol-generating articles, after passage across the surface of the vibrating sieve, on an alignment belt comprising a plurality of transverse grooves configured to receive the aerosol-generating articles aligned substantially parallel to each other, the alignment belt having first and second opposed side edges; iii) positioning the aerosol-generating articles within the transverse grooves such that the first end plug portions abut at least one of the first and second opposed side edges of the alignment belt; iv) cutting the aerosol-generating articles at at least two points along a length of the aerosol-generating articles so as to separate the first end and second end plug portions from the aerosol-generating substrate portion; v) separating the aerosol-generating substrate portions from the first end plug portions and the second end plug portions; vi) separating the aerosol-generating substrate portions, including the metallic susceptors, from their circumferential wrappers; vii) cutting the aerosol-generating substrate portions so as to expose the metallic susceptors; viii) applying a magnetic field so as to separate the metallic susceptors from the aerosol-generating substrate portions; and ix) separately collecting the aerosol-generating substrate portions and the metallic susceptors.

A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).

The present application provides a susceptor for inductively heating an aerosol generating substrate, a preparation method of the susceptor, and an aerosol generating article comprising the susceptor; the susceptor comprises a single alloy prepared by smelting iron, nickel and zircon as main element raw materials, has a Curie temperature of 300-600 DEG C, and the initial magnetic permeability of the alloy presents a peak characteristic with the increase of temperature. The single layer structure susceptor of the single alloy material of the present application realizes the functions of heating and temperature control at the same time, and overcomes the defects of the prior art, such as complex process, high preparation cost, and limited compatibility of electromagnetic induction heating appliances. Meanwhile, the susceptor has a relatively wide magnetic performance variation window and an aerosol generating system performance variation window, and can be flexibly adapted to more aerosol generating substrates.

A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.

Described herein are susceptors, processing chambers having the susceptors, and methods of processing substrates using the susceptors. In one example, a susceptor for supporting a substrate during processing is provided. The base has a disc-shaped body that includes a side surrounding an interior region. The interior region is recessed to form a recessed pocket configured to receive a substrate. A plurality of bumps extends radially into the interior region, the bumps configured to contact an outer edge of the substrate when the substrate is disposed in the recessed pocket. A vent region is defined within the interior region. The vent region is defined by a plurality of vent holes formed through the body. The vent region terminates at a radius from a centerline of the body that is at least 4.0 mm less than a radius of an inner wall defining the edge.

Provided is a lifting device mounted to a substrate deposition equipment, the lifting device including a gantry-type base including a top plate and a pair of side plates and having a space formed inside; a guide track formed on each of the pair of side plates that faces each other; a guide unit configured to move upward or downward along the guide track; a linker formed in an internal space of the base and configured to connect to the guide unit; a level regulator attached to the linker; a top cooling plate attached to the top of the level regulator; a ceramic shaft configured to guide the rise and fall of a ceramic plate at the center of the top cooling plate; and a lifting shaft configured to insert into the inside of the ceramic shaft and to connect to a susceptor.

The embodiment of the invention relates to the technical field of electronic atomization, and discloses a temperature control method and an aerosol generation device.According to the temperature control method, the corresponding coil voltage is determined from the Curie temperature of a receptor material according to the Curie temperature of the receptor material, and therefore the mapping relation between the temperature of the receptor and the coil voltage is determined. Finally, when the aerosol generating device is used for baking the aerosol forming product, the coil voltage of the induction coil is controlled by controlling the time when the power supply provides energy for the induction heater assembly, so that the temperature of the induction heater assembly is controlled to be the optimal temperature; the aerosol generated after baking can rapidly reach a smokable state and maintain the smokable state. Besides, by determining the mapping relation between the temperature of the susceptor and the voltage of the coil, dependence on a chip is eliminated, the problem that heat absorption of the aerosol forming matrix is insufficient or excessive due to the fault problem of the chip is avoided, and the hardware cost can be effectively reduced.

The invention discloses a silicon nitride thin film deposition method and vertical LPCVD equipment. The method comprises the steps that S1, the standby temperature of a process cavity is set; s2, the wafer boat rises to a process position at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe; s3, closing the nitrogen, and vacuumizing the cavity; s4, introducing nitrogen into the cavity, and keeping the pressure in the cavity at P3; s5, evacuating the nitrogen in the cavity, and introducing ammonia gas; s6, under the condition that only ammonia gas flows, the pressure in the cavity is kept at P4; s7, introducing dichlorosilane into the cavity, and carrying out silicon nitride film deposition; s8, closing the dichlorosilane, keeping the ammonia gas flow unchanged, and consuming residual dichlorosilane; s9, removing ammonia gas; and S10, the process cavity recovers to normal pressure, the wafer boat descends at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe. The method has the characteristics of simple principle, high film forming stability, low pollution degree and the like, and overcomes the defect that the surface of the existing silicon nitride film is easily polluted by particles.

The present disclosure provides a susceptor. The susceptor includes: a base member including a first cooling gas flow path configured to introduce a cooling gas; a thermal insulation member having a thermal conductivity of 20 W / mK or less, the thermal insulation member including a second cooling gas flow path in communication with the first cooling gas flow path and being stacked on the base member; and an insulating plate stacked on the thermal insulation member, the insulating plate including a plurality of gas holes in communication with the second cooling gas flow path and configured to discharge the cooling gas to cool a substrate.

A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledge portion. The circular pocket portion is arranged along a rotation axis and has a perforated surface. The annular ledge portion extends circumferentially about pocket portion and has ledge surface that slopes axially upward from the perforated surface. The rim portion extends circumferentially about the ledge portion and is connected to the pocket portion by the ledge portion of the susceptor. The susceptor has one or more of a tuned pocket, a contact break, a precursor vent, and a purge channel located radially outward of the perforated surface to control deposition of a film onto a substrate supported by the susceptor. Semiconductor processing systems, film deposition methods, and methods of making susceptors are also described.

A method of processing waste consumable aerosol-generating articles by pyrolysis, the method comprising the steps of: feeding waste consumable aerosol-generating articles into a pyrolysis reactor, the aerosol-generating articles comprising at least some aerosol-generating articles comprising an aerosol-generating substrate with a metallic susceptor; heating the aerosol-generating articles in the pyrolysis reactor to a temperature sufficient to cause pyrolysis of non-metallic components of the aerosol-generating articles into gaseous products and char, wherein the temperature is less than a melting temperature of the metallic susceptors; extracting the gaseous products from the pyrolysis reactor and feeding the gaseous products to a condensing separator; and feeding the char from the pyrolysis reactor to a magnetic separator and separating the metallic susceptors from the char by applying a magnetic field; wherein at least some of the heat in the pyrolysis reactor is generated by applying an alternating electromagnetic field to the aerosol-generating articles so as to induce eddy currents in the metallic susceptors.

The invention provides an aerosol generating device and a control method thereof. The aerosol generating device comprises a power supply circuit; the DC / AC inverter comprises an E-type power amplifier, and the E-type power amplifier comprises a transistor switch and an LC load network formed by a capacitor and an inductor; an inductor inductively coupled to the susceptor, thereby heating the aerosol-forming substrate to generate an aerosol; a controller configured to, in operation, determine an apparent ohmic resistance based on the DC supply voltage and a DC current output to the DC / AC inverter by the power supply circuit; the controller is further configured to monitor a change in the apparent ohmic resistance and adjust a frequency and a duty cycle of a switching signal supplied to the transistor switch when the apparent ohmic resistance changes. According to the aerosol generating device and the control method thereof, the frequency and the duty ratio of the switching signal supplied to the transistor switch are adjusted by monitoring the change of the apparent ohmic resistance and when the apparent ohmic resistance changes; therefore, the E-type power amplifier always works in the optimal state.

Disclosed is a susceptor including a purge gas channel for supplying purge gas. The present disclosure provides a susceptor including: a plate having a heating element layer embedded therein; and a hollow shaft joined to a bottom of the plate, wherein the plate includes a purge gas channel layer disposed on a plane different from that of the heating element layer, and the purge gas channel layer includes an internal channel and multiple radial branch channels extending outward from the internal channel.

The reaction chamber (100) is designed for a reactor (100) for deposition of layers of semiconductor material on substrates; it comprises a tube (110) and an injector (20) and a holder (30); the tube (110) is made of quartz and has a cylindrical or prismatic shape and surrounds a reaction and deposition zone; the injector (20) is arranged to inject precursor gases into the reaction and deposition zone; the holder (30) is arranged to support a substrate in the reaction and deposition zone during deposition processes; graphite susceptor elements (10, 40, 50) are located inside the tube (110) for heating the reaction and deposition zone and components inside the reaction and deposition zone; an inductor system (60, 70) is located outside the tube (110) for providing energy to the susceptor elements (10, 40, 50) by electromagnetic induction; a rotating element (80) in the form of a cylindrical or prismatic tube is located inside the reaction and deposition zone and surrounds the injector (20).

The invention provides an induction heating device, an aerosol generation system and a control method, and the device is used for heating an aerosol generation product comprising a magnetic metal receptor, and comprises an AC power supply module, an excitation winding, a detection winding and a voltage measurement module. After the aerosol generating product is loaded to the induction heating device, the magnetic metal receptor contained in the aerosol generating product is located in the space of the excitation winding; the length direction of the magnetic metal receptor is parallel to the axes of the excitation winding and the detection winding; the Curie temperature of the magnetic metal is higher than 200 DEG C; the temperature measurement precision is high, the influence of parasitic parameters of components on the measurement precision is eliminated, the influence of position change of the magnetic metal receptor on measurement is reduced, and the defects of airflow obstruction, heating interference and energy consumption increase in temperature measurement of an existing active sensor are overcome.

An apparatus and method of application are described, which include a first switching arrangement configured to generate an alternating current from a power source. The alternating current flows through an inductive element of a resonant circuit for inductively heating a susceptor arrangement and heats an aerosol generating material of an aerosol generating device to generate an aerosol in a heating mode of operation. A driver circuit generates a control signal for controlling the first switching arrangement and a power mode switching arrangement is configured to disconnect at least a part of the driver circuit from the power source in a power saving mode of operation.

Provided in the present application is an aerosol generating apparatus, comprising: a heating tube, wherein an insertion port is provided at an upper end of the heating tube, an aerosol generating substrate of an aerosol generating article can be inserted into the heating tube by means of the insertion port, and the heating tube comprises a heat generating layer and a tube body, the heat generating layer covering at least part of a heating area of the tube body, so that the heating tube can heat the aerosol generating substrate; and an induction coil, which surrounds the periphery of the heating tube and is used for generating a changing magnetic field. A susceptor capable of generating heat in the changing magnetic field is further arranged in the aerosol generating apparatus or the aerosol generating article, and is used for heating the aerosol generating substrate from the inside. The aerosol generating apparatus is configured such that the induction coil and the heating tube output energy independently of each other.

The invention provides semiconductor process equipment and a semiconductor cavity thereof. The semiconductor chamber comprises a chamber body which comprises a reaction space and an air exhaust space; the air inlet assembly is arranged at the top of the chamber body and is provided with an air outlet communicated with the interior of the chamber body; a reaction space is defined by the base, the shielding piece and the air inlet assembly, and the shielding piece is provided with a plurality of air exhaust holes communicating the reaction space with the air exhaust space of the cavity body; the shielding piece comprises an inner peripheral side wall and an outer peripheral side wall which are coaxially arranged, and the diameter of the inner peripheral side wall is smaller than that of the outer peripheral side wall; and at least one air exhaust hole is distributed in the inner peripheral side wall.

The invention discloses a heating cigarette for an electromagnetic induction heating appliance, the heating cigarette comprises an aerosol generating matrix section and a filtering section, the aerosol generating matrix section comprises an electromagnetic induction surrounding matrix layer and an electromagnetic induction strong hair area, and the electromagnetic induction surrounding matrix layer wraps the electromagnetic induction strong hair area; the electromagnetic induction intense emission area comprises a receptor and an electromagnetic induction intense emission substrate layer, and the receptor is used for inductively heating the electromagnetic induction intense emission substrate layer and the electromagnetic induction surrounding substrate layer under the influence of an alternating electromagnetic field generated by an induction source. By setting the positions of the electromagnetic induction surrounding substrate layer and the electromagnetic induction intense emission area, the amount of smoke generated by the electromagnetic induction intense emission area is greater than the amount of smoke generated by the electromagnetic induction surrounding substrate layer during heating, so that a higher smoke release amount is achieved when the heating temperature is lower; therefore, the problem of insufficient release of the first smoke amount of the existing heating cigarette is solved.

An aerosol-generating device is provided, including: a housing defining a chamber configured to receive at least one susceptor and at least one aerosol-forming substrate, the chamber having a length along a longitudinal axis thereof extending from a first end of the chamber to a second end of the chamber; and an inductor coil provided within the housing, disposed around the chamber, and extending along at least a portion of the length of the chamber, the inductor coil including a first portion disposed closest to the first end of the chamber, a second portion disposed closest to the second end of the chamber, and a third portion disposed between the first and the second portions, and a number of turns per unit length in the third portion is less than a number of turns per unit length in one or both of the first and the second portions.

A susceptor heating element is provided for an aerosol-generating device, the susceptor heating element being configured to heat an aerosol-forming substrate when received in the aerosol-generating device, and the aerosol-forming device including an induction coil configured to generate an alternating magnetic field when an alternating current is provided to the induction coil, the susceptor heating element being formed from a shape-memory material. An aerosol-generating article is also provided.

A vapor generation device and a susceptor thereof are disclosed. The susceptor is in a blade shape extending in an axial direction of a cavity, and includes: a first part having a first size in a thickness direction, and a second part having a second size in the thickness direction, the second size being greater than the first size. An accommodation cavity extending in the axial direction is further arranged in the second part, and the accommodation cavity is configured to accommodate or encapsulate a temperature sensor that senses a temperature of the susceptor. The vapor generation device and the susceptor of this application encapsulates or accommodates the temperature sensor in the susceptor. Hence, a sensing part may be basically insulated from the impact of the magnetic field, and the susceptor and the temperature sensor may be integrated to increase stability of mounting and accuracy of temperature detecting.

The present disclosure relates to a ceramic susceptor including a ceramic plate having an electrode disposed thereon, wherein the ceramic plate may include an electrode pad connected to the electrode and an electrode rod having one end connected to the electrode pad to supply power to the electrode, and the electrode rod may include an extension part connected to the electrode pad and a power connection part provided at an end of a tapered portion of the extension part.