1087 results about "Susceptor" patented technology

The present invention provides a vapor deposition device, comprising: a reaction chamber; a gas injection mechanism, located at the top of the reaction chamber; a susceptor, disposed the reaction chamber, a reaction zone being formed above the susceptor; a rotating shaft, connected to the susceptor; a shielding member, positioned in the reaction chamber and surrounding an inner wall of the reaction chamber, the shielding member comprising an isolation wall near the reaction zone, the isolation wall and the gas injection mechanism forming an enclosed spatial region that covers the reaction zone, a radial dimension of the spatial region gradually increasing from top to bottom, and an outer diameter of the lowest end of the shielding member matching an inner diameter of the reaction chamber; purge channels, distributed on the isolation wall, passing through the isolation wall and in communication with the spatial region, so as to allow a purge gas to be introduced into the spatial region. The vapor deposition device provided by the present invention can improve the production efficiency and quality of materials grown by the device, and extend the maintenance cycle of the reaction chamber.

The present disclosure generally relates to an epitaxial chamber for processing of semiconductor substrates. In one example, the epitaxial chamber has a chamber body assembly. The chamber body assembly includes a lower window and an upper window, wherein chamber body assembly, the lower window and the upper window enclose an internal volume. A susceptor assembly is disposed in the internal volume. The epitaxial chamber also has a plurality of temperature control elements. The plurality of temperature control elements include one or more of an upper lamp module, a lower lamp module, an upper heater, a lower heater, or a heated gas passage.

The present application provides a susceptor for inductively heating an aerosol generating substrate, a preparation method of the susceptor, and an aerosol generating article comprising the susceptor; the susceptor comprises a single alloy prepared by smelting iron, nickel and zircon as main element raw materials, has a Curie temperature of 300-600 DEG C, and the initial magnetic permeability of the alloy presents a peak characteristic with the increase of temperature. The single layer structure susceptor of the single alloy material of the present application realizes the functions of heating and temperature control at the same time, and overcomes the defects of the prior art, such as complex process, high preparation cost, and limited compatibility of electromagnetic induction heating appliances. Meanwhile, the susceptor has a relatively wide magnetic performance variation window and an aerosol generating system performance variation window, and can be flexibly adapted to more aerosol generating substrates.

A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.

Described herein are susceptors, processing chambers having the susceptors, and methods of processing substrates using the susceptors. In one example, a susceptor for supporting a substrate during processing is provided. The base has a disc-shaped body that includes a side surrounding an interior region. The interior region is recessed to form a recessed pocket configured to receive a substrate. A plurality of bumps extends radially into the interior region, the bumps configured to contact an outer edge of the substrate when the substrate is disposed in the recessed pocket. A vent region is defined within the interior region. The vent region is defined by a plurality of vent holes formed through the body. The vent region terminates at a radius from a centerline of the body that is at least 4.0 mm less than a radius of an inner wall defining the edge.

Provided is a lifting device mounted to a substrate deposition equipment, the lifting device including a gantry-type base including a top plate and a pair of side plates and having a space formed inside; a guide track formed on each of the pair of side plates that faces each other; a guide unit configured to move upward or downward along the guide track; a linker formed in an internal space of the base and configured to connect to the guide unit; a level regulator attached to the linker; a top cooling plate attached to the top of the level regulator; a ceramic shaft configured to guide the rise and fall of a ceramic plate at the center of the top cooling plate; and a lifting shaft configured to insert into the inside of the ceramic shaft and to connect to a susceptor.

The invention discloses a silicon nitride thin film deposition method and vertical LPCVD equipment. The method comprises the steps that S1, the standby temperature of a process cavity is set; s2, the wafer boat rises to a process position at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe; s3, closing the nitrogen, and vacuumizing the cavity; s4, introducing nitrogen into the cavity, and keeping the pressure in the cavity at P3; s5, evacuating the nitrogen in the cavity, and introducing ammonia gas; s6, under the condition that only ammonia gas flows, the pressure in the cavity is kept at P4; s7, introducing dichlorosilane into the cavity, and carrying out silicon nitride film deposition; s8, closing the dichlorosilane, keeping the ammonia gas flow unchanged, and consuming residual dichlorosilane; s9, removing ammonia gas; and S10, the process cavity recovers to normal pressure, the wafer boat descends at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe. The method has the characteristics of simple principle, high film forming stability, low pollution degree and the like, and overcomes the defect that the surface of the existing silicon nitride film is easily polluted by particles.

The present disclosure provides a susceptor. The susceptor includes: a base member including a first cooling gas flow path configured to introduce a cooling gas; a thermal insulation member having a thermal conductivity of 20 W / mK or less, the thermal insulation member including a second cooling gas flow path in communication with the first cooling gas flow path and being stacked on the base member; and an insulating plate stacked on the thermal insulation member, the insulating plate including a plurality of gas holes in communication with the second cooling gas flow path and configured to discharge the cooling gas to cool a substrate.

A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledge portion. The circular pocket portion is arranged along a rotation axis and has a perforated surface. The annular ledge portion extends circumferentially about pocket portion and has ledge surface that slopes axially upward from the perforated surface. The rim portion extends circumferentially about the ledge portion and is connected to the pocket portion by the ledge portion of the susceptor. The susceptor has one or more of a tuned pocket, a contact break, a precursor vent, and a purge channel located radially outward of the perforated surface to control deposition of a film onto a substrate supported by the susceptor. Semiconductor processing systems, film deposition methods, and methods of making susceptors are also described.

A method of processing waste consumable aerosol-generating articles by pyrolysis, the method comprising the steps of: feeding waste consumable aerosol-generating articles into a pyrolysis reactor, the aerosol-generating articles comprising at least some aerosol-generating articles comprising an aerosol-generating substrate with a metallic susceptor; heating the aerosol-generating articles in the pyrolysis reactor to a temperature sufficient to cause pyrolysis of non-metallic components of the aerosol-generating articles into gaseous products and char, wherein the temperature is less than a melting temperature of the metallic susceptors; extracting the gaseous products from the pyrolysis reactor and feeding the gaseous products to a condensing separator; and feeding the char from the pyrolysis reactor to a magnetic separator and separating the metallic susceptors from the char by applying a magnetic field; wherein at least some of the heat in the pyrolysis reactor is generated by applying an alternating electromagnetic field to the aerosol-generating articles so as to induce eddy currents in the metallic susceptors.

The invention provides an aerosol generating device and a control method thereof. The aerosol generating device comprises a power supply circuit; the DC / AC inverter comprises an E-type power amplifier, and the E-type power amplifier comprises a transistor switch and an LC load network formed by a capacitor and an inductor; an inductor inductively coupled to the susceptor, thereby heating the aerosol-forming substrate to generate an aerosol; a controller configured to, in operation, determine an apparent ohmic resistance based on the DC supply voltage and a DC current output to the DC / AC inverter by the power supply circuit; the controller is further configured to monitor a change in the apparent ohmic resistance and adjust a frequency and a duty cycle of a switching signal supplied to the transistor switch when the apparent ohmic resistance changes. According to the aerosol generating device and the control method thereof, the frequency and the duty ratio of the switching signal supplied to the transistor switch are adjusted by monitoring the change of the apparent ohmic resistance and when the apparent ohmic resistance changes; therefore, the E-type power amplifier always works in the optimal state.

Disclosed is a susceptor including a purge gas channel for supplying purge gas. The present disclosure provides a susceptor including: a plate having a heating element layer embedded therein; and a hollow shaft joined to a bottom of the plate, wherein the plate includes a purge gas channel layer disposed on a plane different from that of the heating element layer, and the purge gas channel layer includes an internal channel and multiple radial branch channels extending outward from the internal channel.

The reaction chamber (100) is designed for a reactor (100) for deposition of layers of semiconductor material on substrates; it comprises a tube (110) and an injector (20) and a holder (30); the tube (110) is made of quartz and has a cylindrical or prismatic shape and surrounds a reaction and deposition zone; the injector (20) is arranged to inject precursor gases into the reaction and deposition zone; the holder (30) is arranged to support a substrate in the reaction and deposition zone during deposition processes; graphite susceptor elements (10, 40, 50) are located inside the tube (110) for heating the reaction and deposition zone and components inside the reaction and deposition zone; an inductor system (60, 70) is located outside the tube (110) for providing energy to the susceptor elements (10, 40, 50) by electromagnetic induction; a rotating element (80) in the form of a cylindrical or prismatic tube is located inside the reaction and deposition zone and surrounds the injector (20).

The invention provides an induction heating device, an aerosol generation system and a control method, and the device is used for heating an aerosol generation product comprising a magnetic metal receptor, and comprises an AC power supply module, an excitation winding, a detection winding and a voltage measurement module. After the aerosol generating product is loaded to the induction heating device, the magnetic metal receptor contained in the aerosol generating product is located in the space of the excitation winding; the length direction of the magnetic metal receptor is parallel to the axes of the excitation winding and the detection winding; the Curie temperature of the magnetic metal is higher than 200 DEG C; the temperature measurement precision is high, the influence of parasitic parameters of components on the measurement precision is eliminated, the influence of position change of the magnetic metal receptor on measurement is reduced, and the defects of airflow obstruction, heating interference and energy consumption increase in temperature measurement of an existing active sensor are overcome.

An apparatus and method of application are described, which include a first switching arrangement configured to generate an alternating current from a power source. The alternating current flows through an inductive element of a resonant circuit for inductively heating a susceptor arrangement and heats an aerosol generating material of an aerosol generating device to generate an aerosol in a heating mode of operation. A driver circuit generates a control signal for controlling the first switching arrangement and a power mode switching arrangement is configured to disconnect at least a part of the driver circuit from the power source in a power saving mode of operation.

Provided in the present application is an aerosol generating apparatus, comprising: a heating tube, wherein an insertion port is provided at an upper end of the heating tube, an aerosol generating substrate of an aerosol generating article can be inserted into the heating tube by means of the insertion port, and the heating tube comprises a heat generating layer and a tube body, the heat generating layer covering at least part of a heating area of the tube body, so that the heating tube can heat the aerosol generating substrate; and an induction coil, which surrounds the periphery of the heating tube and is used for generating a changing magnetic field. A susceptor capable of generating heat in the changing magnetic field is further arranged in the aerosol generating apparatus or the aerosol generating article, and is used for heating the aerosol generating substrate from the inside. The aerosol generating apparatus is configured such that the induction coil and the heating tube output energy independently of each other.

The invention provides semiconductor process equipment and a semiconductor cavity thereof. The semiconductor chamber comprises a chamber body which comprises a reaction space and an air exhaust space; the air inlet assembly is arranged at the top of the chamber body and is provided with an air outlet communicated with the interior of the chamber body; a reaction space is defined by the base, the shielding piece and the air inlet assembly, and the shielding piece is provided with a plurality of air exhaust holes communicating the reaction space with the air exhaust space of the cavity body; the shielding piece comprises an inner peripheral side wall and an outer peripheral side wall which are coaxially arranged, and the diameter of the inner peripheral side wall is smaller than that of the outer peripheral side wall; and at least one air exhaust hole is distributed in the inner peripheral side wall.

An aerosol-generating device is provided, including: a housing defining a chamber configured to receive at least one susceptor and at least one aerosol-forming substrate, the chamber having a length along a longitudinal axis thereof extending from a first end of the chamber to a second end of the chamber; and an inductor coil provided within the housing, disposed around the chamber, and extending along at least a portion of the length of the chamber, the inductor coil including a first portion disposed closest to the first end of the chamber, a second portion disposed closest to the second end of the chamber, and a third portion disposed between the first and the second portions, and a number of turns per unit length in the third portion is less than a number of turns per unit length in one or both of the first and the second portions.

A vapor generation device and a susceptor thereof are disclosed. The susceptor is in a blade shape extending in an axial direction of a cavity, and includes: a first part having a first size in a thickness direction, and a second part having a second size in the thickness direction, the second size being greater than the first size. An accommodation cavity extending in the axial direction is further arranged in the second part, and the accommodation cavity is configured to accommodate or encapsulate a temperature sensor that senses a temperature of the susceptor. The vapor generation device and the susceptor of this application encapsulates or accommodates the temperature sensor in the susceptor. Hence, a sensing part may be basically insulated from the impact of the magnetic field, and the susceptor and the temperature sensor may be integrated to increase stability of mounting and accuracy of temperature detecting.

The present disclosure relates to a ceramic susceptor including a ceramic plate having an electrode disposed thereon, wherein the ceramic plate may include an electrode pad connected to the electrode and an electrode rod having one end connected to the electrode pad to supply power to the electrode, and the electrode rod may include an extension part connected to the electrode pad and a power connection part provided at an end of a tapered portion of the extension part.

Various embodiments of the present technology may provide an apparatus having a susceptor with a plurality of gas channels therethrough and a plurality of pressure sensors coupled to the gas channels. The apparatus may further include a controller in communication with the plurality of sensors and configured to detect a change in pressure or flow rate within the plurality of channels, determine a failure of at least one of the plurality of lift pins based on the detected change in pressure or flow rate, and generate an error signal based on the determined failure.

Methods, systems, and assemblies suitable for gas-phase processes are disclosed. An exemplary assembly includes a susceptor ring and at least one injector tube. The injector tube can be disposed within the susceptor ring to provide a gas to a peripheral region of a substrate. Methods, systems, and assemblies can be used to obtain desired (e.g. composition and / or thickness) profiles of material on a substrate surface.

The invention relates to a deposition method and application of a high-compactness SiO2 film, and belongs to the technical field of composite substrate processing. Providing a substrate to be deposited; the substrate is placed on a base in a chemical vapor deposition chamber, the temperature is kept at 350 + / -50 DEG C, SiH4, Ar and N2O are introduced, the flow is 500 + / -50 sccm, 1000 + / -200 sccm and 100 + / -20 sccm respectively, the radio frequency power is 100 + / -20 W, and a SiO2 film is deposited for 60 + / -20 s; the SiH4, the Ar and the N2O continue to be introduced, the SiO2 thin film is deposited repeatedly for 2-4 times, the flow of the SiH4 deposited in each time is increased by 50 + / -10 sccm compared with the flow of the SiH4 deposited in the last time, and the radio frequency power is increased by 30 + / -6 W; and stopping supplying the SiH4 and the N2O, turning off the radio frequency power, placing the SiO2 thin film in a cavity, heating the cavity to 600 + / -50 DEG C, and annealing for 120 + / -20 minutes to finish deposition.

A method is provided for recycling an aerosol generating article comprising a non-liquid aerosol generating material and an inductively heatable susceptor. The method comprises a first step of shredding the aerosol generating article to break up the non-liquid aerosol material and the inductively heatable susceptor. The method comprises a second step of separating the inductively heatable susceptor and the non-liquid aerosol generating material.

The present application relates to an aerosol-generating product and an aerosol-generating system comprising the same, the aerosol-generating product comprising: a support assembly configured as a tubular structure, the support assembly comprising a susceptor or a heat conductor; the aerosol generating substrate layer is arranged in a continuous ring shape or a discrete ring shape in the circumferential direction of the supporting assembly, and the aerosol generating substrate layer is arranged on the surface of the susceptor or the heat conductor.

There is provided a method of controlling an aerosol-generating system including an aerosol-generating device including a cavity to receive an aerosol-forming substrate, an inductive heating arrangement including an inductive heating element including a susceptor heatable by penetration with a varying magnetic field to heat the substrate, first and second inductor coils, and a power supply; the method including initiating heating of the substrate in the cavity by a first varying current in the first coil to generate a first varying magnetic field that heats a first portion of the element, and controlling the first current to increase a temperature of the first portion with a first profile; and subsequently driving a second varying current in the second coil to generate a second varying magnetic field that heats a second portion of the element, and controlling the second current to increase a temperature of the second portion with a second profile.

The convertible container, carton, or tray and method of use for microwave ovens including a cooking portion and a base portion. The cooking portion defines a quadrilateral panel which may include a susceptor material, the cooking portion including at least one diagonal fold line defining at least one corner tab. The base portion is configured to support the cooking portion in an elevated position. The base portion includes at least one invertible corner configured to transition from a first configuration defining a near-orthogonal external angle, to a second configuration defining a near-orthogonal internal angle to reduce a diagonal dimension of the convertible container to enable rotation within the confines of a microwave.

A method for forming a film, including: atomizing a raw material solution into a mist to form raw material mist; mixing raw material mist and a carrier gas to form gas mixture; placing a substrate on a placement section of susceptor; supplying gas mixture from an atomizer to the substrate to perform film formation by thermal reaction on substrate; and discharging gas mixture after the film formation through an exhaust unit, wherein in the step of supplying the gas mixture from atomizer to substrate to perform film formation by thermal reaction on the substrate, at least a part of gas mixture is supplied from a smooth section adjacent to placement section to a surface of substrate, the smooth section having a surface roughness of 200 μm or less. A method for forming a film capable of uniformly and stably producing a high-quality film on a surface of a large-diameter substrate.

Disclosed herewith are a lift pin assembly, a substrate support assembly having the lift pin assembly, and a method of handling a substrate. The lift pin assembly includes a pin head detachably coupled with a pin body. The elongated pin body includes a first material, and the pin head includes a second material different from the first material. The second material is softer than the first material and may have a thermal conductivity about four (4) to eight (8) times of the first material. The second material has a melting point or a sublimation point of at least 600° C.

An apparatus for a (non-combustible) aerosol generating device is described including: a resonant circuit including one or more inductive elements for inductively heating a susceptor arrangement to heat an aerosol generating material to thereby generate an aerosol, wherein the inductive elements are mounted on a first external surface of a substrate; a switching arrangement for enabling an alternating current to be generated from a voltage supply and flow through one or more of said inductive elements to cause inductive heating of the susceptor arrangement, wherein the switching arrangement includes a plurality of transistors mounted to a second external surface of the substrate; and a heat sink, wherein the inductive elements of the resonant circuit and the transistors of the switching arrangement are thermally connected to the heat sink.