1869 results about "Susceptor" patented technology

A reel includes a core having a first end region, a first flange, a first hub member, and a first bonded joint connecting the first hub member to the first end region of the core. The first bonded joint includes a first susceptor material arranged between the first hub member and the first end region of the core. The first hub member and the first end region of the core are bonded together around the first susceptor material in such a way that the first flange is interposed between the first hub member and the first end region of the core.

An inductively heatable aerosol-generating article for an inductively heating aerosol-generating device is provided, including at least one aerosol-forming substrate and at least one susceptor in thermal proximity to the aerosol-forming substrate or thermal contact with the aerosol-forming substrate, the susceptor including an expanded metal sheet including a plurality of openings through the sheet. A method for manufacturing an inductively heatable aerosol-generating article is also provided. An apparatus for manufacturing a susceptor of an inductively heatable aerosol-generating article is also provided.

The present invention provides a vapor deposition device, comprising: a reaction chamber; a gas injection mechanism, located at the top of the reaction chamber; a susceptor, disposed the reaction chamber, a reaction zone being formed above the susceptor; a rotating shaft, connected to the susceptor; a shielding member, positioned in the reaction chamber and surrounding an inner wall of the reaction chamber, the shielding member comprising an isolation wall near the reaction zone, the isolation wall and the gas injection mechanism forming an enclosed spatial region that covers the reaction zone, a radial dimension of the spatial region gradually increasing from top to bottom, and an outer diameter of the lowest end of the shielding member matching an inner diameter of the reaction chamber; purge channels, distributed on the isolation wall, passing through the isolation wall and in communication with the spatial region, so as to allow a purge gas to be introduced into the spatial region. The vapor deposition device provided by the present invention can improve the production efficiency and quality of materials grown by the device, and extend the maintenance cycle of the reaction chamber.

The present disclosure relates to a susceptor, and a susceptor of the present disclosure may improve temperature uniformity over the entire area of the upper surface of the susceptor by arranging a heater pattern of a multilayer structure so that arcs thereof do not overlap or so that the straight sections of the heater are arranged at different angles with respect to the center in different layers, or by arranging the straight sections of the heater at different angles with respect to the center even in a heater pattern of a single-layer structure.

Various embodiments of the present technology may provide in-situ metrology. A system may include a first sensor embedded within a susceptor and flush with a top surface of the susceptor. The system may also include lift pin pads having a second sensor arranged to contact a lift pin. The system may also include a third sensor arranged outside of a reaction chamber and adjacent to a view port. The system may also include a processor to receive output signals from one or more of the sensors and use the output signals to determine a film thickness on a wafer.

The present disclosure generally relates to an epitaxial chamber for processing of semiconductor substrates. In one example, the epitaxial chamber has a chamber body assembly. The chamber body assembly includes a lower window and an upper window, wherein chamber body assembly, the lower window and the upper window enclose an internal volume. A susceptor assembly is disposed in the internal volume. The epitaxial chamber also has a plurality of temperature control elements. The plurality of temperature control elements include one or more of an upper lamp module, a lower lamp module, an upper heater, a lower heater, or a heated gas passage.

Disclosed herein is a processing chamber for a low temperature epitaxy deposition and components of the same. The processing chamber includes a dome lid coupled with a lid liner via a lid liner separator; a remote plasma source disposed outside the dome lid and operable to energize a process gas; a gas ring disposed under the dome lid and coupled with a gas ring liner via a gas ring liner separator; a showerhead disposed under the gas ring; a susceptor disposed below the showerhead and operable to heat a substrate by conduction; and a side wall disposed under the gas ring and coupled with a wall liner via a wall liner separator. The cleaning method of the processing chamber is also disclosed.

To provide a method for manufacturing a ceramic susceptor, capable of improving bonding force between the upper and lower plates of a MMC (a Metal Matric Composite) metal ceramic composite base body, and the ceramic susceptor.SOLUTION: A ceramic susceptor base body includes a body obtained by bonding lower and upper plates 210 and 220 consisting of a metal ceramic composite, respectively. A method for manufacturing the aceramic susceptor base body comprises steps of: successively laminating a first active metal layer 321, a first aluminum layer 322 and a blazing filler layer 323 on the bonded surface of the upper plate; successively laminating a second active metal layer 311 and a second aluminum layer 312 on the bonded surface of the lower plate; and brazing and bonding the lower and upper plates by the brazing filler layer.SELECTED DRAWING: Figure 2C

There is disclosed a method of processing rod-shaped consumable aerosol-generating articles each comprising an aerosol-generating substrate portion including a metallic susceptor, the aerosol-generating generating substrate being longitudinally disposed between first end and second end plug portions, the aerosol-generating substrate and the first and second end plug portions being wrapped in at least one circumferential wrapper, the method comprising the steps of: i) feeding the aerosol-generating articles onto a vibrating sieve and causing the aerosol-generating articles to pass across a surface of the vibrating sieve; ii) arranging the aerosol-generating articles, after passage across the surface of the vibrating sieve, on an alignment belt comprising a plurality of transverse grooves configured to receive the aerosol-generating articles aligned substantially parallel to each other, the alignment belt having first and second opposed side edges; iii) positioning the aerosol-generating articles within the transverse grooves such that the first end plug portions abut at least one of the first and second opposed side edges of the alignment belt; iv) cutting the aerosol-generating articles at at least two points along a length of the aerosol-generating articles so as to separate the first end and second end plug portions from the aerosol-generating substrate portion; v) separating the aerosol-generating substrate portions from the first end plug portions and the second end plug portions; vi) separating the aerosol-generating substrate portions, including the metallic susceptors, from their circumferential wrappers; vii) cutting the aerosol-generating substrate portions so as to expose the metallic susceptors; viii) applying a magnetic field so as to separate the metallic susceptors from the aerosol-generating substrate portions; and ix) separately collecting the aerosol-generating substrate portions and the metallic susceptors.

A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).

The present application provides a susceptor for inductively heating an aerosol generating substrate, a preparation method of the susceptor, and an aerosol generating article comprising the susceptor; the susceptor comprises a single alloy prepared by smelting iron, nickel and zircon as main element raw materials, has a Curie temperature of 300-600 DEG C, and the initial magnetic permeability of the alloy presents a peak characteristic with the increase of temperature. The single layer structure susceptor of the single alloy material of the present application realizes the functions of heating and temperature control at the same time, and overcomes the defects of the prior art, such as complex process, high preparation cost, and limited compatibility of electromagnetic induction heating appliances. Meanwhile, the susceptor has a relatively wide magnetic performance variation window and an aerosol generating system performance variation window, and can be flexibly adapted to more aerosol generating substrates.

A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.

Described herein are susceptors, processing chambers having the susceptors, and methods of processing substrates using the susceptors. In one example, a susceptor for supporting a substrate during processing is provided. The base has a disc-shaped body that includes a side surrounding an interior region. The interior region is recessed to form a recessed pocket configured to receive a substrate. A plurality of bumps extends radially into the interior region, the bumps configured to contact an outer edge of the substrate when the substrate is disposed in the recessed pocket. A vent region is defined within the interior region. The vent region is defined by a plurality of vent holes formed through the body. The vent region terminates at a radius from a centerline of the body that is at least 4.0 mm less than a radius of an inner wall defining the edge.

There is provided an aerosol-generating article (10) for generating an inhalable aerosol upon heating, the aerosol-generating article comprising a susceptor assembly (100). The susceptor assembly comprises at least one strand (102) of susceptor material, the at least one strand (102) of susceptor material being twisted so as to be laid helically about a longitudinal axis of the susceptor assembly (100). Further, the susceptor assembly (100) comprises an aerosol-generating element comprising at least one strand (104) of porous non-tobacco material carrying an aerosol-forming composition, the aerosol-forming composition comprising at least 35% by weight of an aerosol former. At least one strand of the aerosol-generating element is twisted with at least one strand of susceptor material (102).

Provided is a lifting device mounted to a substrate deposition equipment, the lifting device including a gantry-type base including a top plate and a pair of side plates and having a space formed inside; a guide track formed on each of the pair of side plates that faces each other; a guide unit configured to move upward or downward along the guide track; a linker formed in an internal space of the base and configured to connect to the guide unit; a level regulator attached to the linker; a top cooling plate attached to the top of the level regulator; a ceramic shaft configured to guide the rise and fall of a ceramic plate at the center of the top cooling plate; and a lifting shaft configured to insert into the inside of the ceramic shaft and to connect to a susceptor.

The embodiment of the invention relates to the technical field of electronic atomization, and discloses a temperature control method and an aerosol generation device.According to the temperature control method, the corresponding coil voltage is determined from the Curie temperature of a receptor material according to the Curie temperature of the receptor material, and therefore the mapping relation between the temperature of the receptor and the coil voltage is determined. Finally, when the aerosol generating device is used for baking the aerosol forming product, the coil voltage of the induction coil is controlled by controlling the time when the power supply provides energy for the induction heater assembly, so that the temperature of the induction heater assembly is controlled to be the optimal temperature; the aerosol generated after baking can rapidly reach a smokable state and maintain the smokable state. Besides, by determining the mapping relation between the temperature of the susceptor and the voltage of the coil, dependence on a chip is eliminated, the problem that heat absorption of the aerosol forming matrix is insufficient or excessive due to the fault problem of the chip is avoided, and the hardware cost can be effectively reduced.

The invention discloses a silicon nitride thin film deposition method and vertical LPCVD equipment. The method comprises the steps that S1, the standby temperature of a process cavity is set; s2, the wafer boat rises to a process position at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe; s3, closing the nitrogen, and vacuumizing the cavity; s4, introducing nitrogen into the cavity, and keeping the pressure in the cavity at P3; s5, evacuating the nitrogen in the cavity, and introducing ammonia gas; s6, under the condition that only ammonia gas flows, the pressure in the cavity is kept at P4; s7, introducing dichlorosilane into the cavity, and carrying out silicon nitride film deposition; s8, closing the dichlorosilane, keeping the ammonia gas flow unchanged, and consuming residual dichlorosilane; s9, removing ammonia gas; and S10, the process cavity recovers to normal pressure, the wafer boat descends at a constant speed, and nitrogen is introduced between the inner pipe and the outer pipe. The method has the characteristics of simple principle, high film forming stability, low pollution degree and the like, and overcomes the defect that the surface of the existing silicon nitride film is easily polluted by particles.

There is provided a cartridge for an aerosol-generating system, the cartridge comprising a container comprising an outer surface and an inner surface, wherein the container outer surface at least partially defines an outer surface of the cartridge. The cartridge also includes a susceptor material comprising a susceptor material inner surface at least partially defining a cartridge cavity, the susceptor material inner surface defining a plurality of interstices. The cartridge also includes an aerosol-forming substrate in the form of a gel at room temperature, plurality of interstices are configured to hold the gel.

The invention discloses an electromagnetic circumferential heating type smoking set, which belongs to the technical field of heating cigarettes and comprises a power supply, a control circuit and an electromagnetic heating component, the electromagnetic heating assembly comprises a receptor and an induction coil, the receptor is of a cylindrical structure with at least one open end, and the receptor generates heat energy in an alternating magnetic field generated by the induction coil and is used for heating a cigarette arranged in the receptor. And the receptor at least surrounds a part of the cigarette along the axial length. According to the invention, the numerical range of the wall thickness sigma of the receptor, the frequency f of the alternating magnetic field and the penetration depth delta of the alternating magnetic field on the receptor is reasonably set, the influence of the penetration depth on the electromagnetic circumferential heating efficiency can be balanced, the fuming effect is excellent, and the energy efficiency is higher.

The present disclosure provides a susceptor. The susceptor includes: a base member including a first cooling gas flow path configured to introduce a cooling gas; a thermal insulation member having a thermal conductivity of 20 W / mK or less, the thermal insulation member including a second cooling gas flow path in communication with the first cooling gas flow path and being stacked on the base member; and an insulating plate stacked on the thermal insulation member, the insulating plate including a plurality of gas holes in communication with the second cooling gas flow path and configured to discharge the cooling gas to cool a substrate.

A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledge portion. The circular pocket portion is arranged along a rotation axis and has a perforated surface. The annular ledge portion extends circumferentially about pocket portion and has ledge surface that slopes axially upward from the perforated surface. The rim portion extends circumferentially about the ledge portion and is connected to the pocket portion by the ledge portion of the susceptor. The susceptor has one or more of a tuned pocket, a contact break, a precursor vent, and a purge channel located radially outward of the perforated surface to control deposition of a film onto a substrate supported by the susceptor. Semiconductor processing systems, film deposition methods, and methods of making susceptors are also described.

A method of processing waste consumable aerosol-generating articles by pyrolysis, the method comprising the steps of: feeding waste consumable aerosol-generating articles into a pyrolysis reactor, the aerosol-generating articles comprising at least some aerosol-generating articles comprising an aerosol-generating substrate with a metallic susceptor; heating the aerosol-generating articles in the pyrolysis reactor to a temperature sufficient to cause pyrolysis of non-metallic components of the aerosol-generating articles into gaseous products and char, wherein the temperature is less than a melting temperature of the metallic susceptors; extracting the gaseous products from the pyrolysis reactor and feeding the gaseous products to a condensing separator; and feeding the char from the pyrolysis reactor to a magnetic separator and separating the metallic susceptors from the char by applying a magnetic field; wherein at least some of the heat in the pyrolysis reactor is generated by applying an alternating electromagnetic field to the aerosol-generating articles so as to induce eddy currents in the metallic susceptors.

The invention provides an aerosol generating device and a control method thereof. The aerosol generating device comprises a power supply circuit; the DC / AC inverter comprises an E-type power amplifier, and the E-type power amplifier comprises a transistor switch and an LC load network formed by a capacitor and an inductor; an inductor inductively coupled to the susceptor, thereby heating the aerosol-forming substrate to generate an aerosol; a controller configured to, in operation, determine an apparent ohmic resistance based on the DC supply voltage and a DC current output to the DC / AC inverter by the power supply circuit; the controller is further configured to monitor a change in the apparent ohmic resistance and adjust a frequency and a duty cycle of a switching signal supplied to the transistor switch when the apparent ohmic resistance changes. According to the aerosol generating device and the control method thereof, the frequency and the duty ratio of the switching signal supplied to the transistor switch are adjusted by monitoring the change of the apparent ohmic resistance and when the apparent ohmic resistance changes; therefore, the E-type power amplifier always works in the optimal state.

The present invention provides an aerosol generating component, an aerosol generating device, a system and a control method, wherein the aerosol generating component comprises: an aerosol matrix part; a susceptor, which is arranged in the aerosol matrix part, and the susceptor has a Curie temperature, and the Curie temperature is less than 400 degrees Celsius. By changing the voltage standing wave ratio of the microwave component through the phase change of the susceptor, non-contact temperature control of the aerosol matrix part can be achieved, and there is no need to set a circuit detection component that is attached to the aerosol matrix part, so as to avoid dirt on the circuit detection component and reduce the cleaning workload of the user on the aerosol generating device.

There is provided an inductively heating aerosol-generating device configured to generate an aerosol by heating an aerosol-forming substrate, the device including a receiving cavity configured to receive the aerosol-forming substrate; an induction source configured to generate an alternating electromagnetic field; and a susceptor assembly configured and arranged to inductively heat the aerosol-forming substrate within the receiving cavity under influence of the alternating magnetic field generated by the induction source, the susceptor assembly including a first susceptor and a second susceptor, the first susceptor including a first susceptor material having a positive temperature coefficient of resistance, and the second susceptor including a second ferromagnetic or ferrimagnetic susceptor material having a negative temperature coefficient of resistance. There is also provided an aerosol-generating system including the aerosol-generating device and an aerosol-generating article for the aerosol-generating device, the article including an aerosol-forming substrate.

Disclosed is a susceptor including a purge gas channel for supplying purge gas. The present disclosure provides a susceptor including: a plate having a heating element layer embedded therein; and a hollow shaft joined to a bottom of the plate, wherein the plate includes a purge gas channel layer disposed on a plane different from that of the heating element layer, and the purge gas channel layer includes an internal channel and multiple radial branch channels extending outward from the internal channel.

The reaction chamber (100) is designed for a reactor (100) for deposition of layers of semiconductor material on substrates; it comprises a tube (110) and an injector (20) and a holder (30); the tube (110) is made of quartz and has a cylindrical or prismatic shape and surrounds a reaction and deposition zone; the injector (20) is arranged to inject precursor gases into the reaction and deposition zone; the holder (30) is arranged to support a substrate in the reaction and deposition zone during deposition processes; graphite susceptor elements (10, 40, 50) are located inside the tube (110) for heating the reaction and deposition zone and components inside the reaction and deposition zone; an inductor system (60, 70) is located outside the tube (110) for providing energy to the susceptor elements (10, 40, 50) by electromagnetic induction; a rotating element (80) in the form of a cylindrical or prismatic tube is located inside the reaction and deposition zone and surrounds the injector (20).

The invention discloses a method and a device for measuring ETC (electronic toll collection) door frame illumination glare, and belongs to the field of expressway environment illumination detection. The device comprises a positioner, a reflected signal demodulator, a reflected signal receptor, a transmitted signal modulator, a signal transmitter, a transmitted signal demodulator, a transmitted signal receptor, a transparent and reflective mirror group, a detector, an upper vertical plane illumination detector, a camera and a switcher. The calculation formula of the ground brightness is obtained by measuring the reflectivity of the ground below the ETC door frame and measuring the ground brightness, the ground brightness is obtained at a short distance, and the problems that the interference of external stray light is much and the measurement accuracy of a brightness meter is reduced when the distance is long due to the fact that the brightness meter and the like are used for measuring the brightness at a long distance are solved; the brightness of the light supplement lamp under different orders of magnitude is obtained through the switcher blades with different light transmittances, the sensitivity advantages of the left camera and the right camera in a high-brightness area and a low-brightness area are integrated, the system error is reduced, and an accurate comprehensive illumination value is obtained.

The invention provides an induction heating device, an aerosol generation system and a control method, and the device is used for heating an aerosol generation product comprising a magnetic metal receptor, and comprises an AC power supply module, an excitation winding, a detection winding and a voltage measurement module. After the aerosol generating product is loaded to the induction heating device, the magnetic metal receptor contained in the aerosol generating product is located in the space of the excitation winding; the length direction of the magnetic metal receptor is parallel to the axes of the excitation winding and the detection winding; the Curie temperature of the magnetic metal is higher than 200 DEG C; the temperature measurement precision is high, the influence of parasitic parameters of components on the measurement precision is eliminated, the influence of position change of the magnetic metal receptor on measurement is reduced, and the defects of airflow obstruction, heating interference and energy consumption increase in temperature measurement of an existing active sensor are overcome.