2252 results about "Vacuum chamber" patented technology

The invention relates to a system and method for rapidly establishing steady state vacuum chamber pressure. According to the system, the set value of the vacuum valve is fixed, and the driving current of the MFC electromagnetic valve is used for adjusting the pressure of the cavity, so that the pressure is stabilized more quickly. The system can operate in a training mode and an inference mode. In the training mode, a PID controller is used for determining set values of an MFC and a vacuum valve; in an inference mode during substrate processing, these settings are quickly invoked and executed, thereby achieving efficient and stable pressure control.

The invention discloses a strength simulation and checking method for a vacuum chamber Sector lifting appliance of a nuclear fusion device, which comprises the following steps of: S1, acquiring structural data of the vacuum chamber Sector lifting appliance, establishing a corresponding geometric data model, and establishing a finite element model to simulate the geometric data model, wherein the geometric data model is set as a lifting appliance three-dimensional model containing all key force bearing components; s2, defining a specified load working condition set, and performing stress analysis and buckling instability analysis operation on the specified component model under the specified load working condition; s3, the safety margin of the specified component model is calculated and evaluated so as to check and judge whether the specified structure meets the specified strength requirement or not, and the safety margin of the specified component model has the following double-threshold combined criterion. According to the invention, systematic mechanical evaluation of key structures such as a lifting lug, a pull rod and a bridge can be realized, so that the structural safety and reliability in a lifting process are guaranteed.

The utility model relates to the technical field of vacuum feed-through, and discloses a vacuum hollow magnetic coupling feed-through device used for a magnetron sputtering coating machine, which comprises an isolation cover, a magnetic coupling feed-through device and a magnetic coupling feed-through device, the first end of the hollow main shaft extends into the isolation hood; the outer magnetic rotor surrounds the outer side of the isolation cover; the inner magnetic rotor is connected to the outer side of the first end of the hollow main shaft; the input wheel is connected with the outer magnetic rotor and is used for being connected with external driving equipment; according to the utility model, the hollow main shaft is adopted, while magnetic coupling torque transmission is realized, the hollow main shaft rotates in the vacuum chamber, and devices which do not need to be rotated, such as wiring and installation of manipulators, can be accommodated in the hollow main shaft, so that the feed-through structure is endowed with more functional richness, flexibility and various possibilities; flanges at two ends of the isolation cover facilitate connection of an external device outside the vacuum chamber.

The invention provides an energy gradient utilization steam Rankine cycle power generation system and method for nuclear fusion, and belongs to the field of nuclear fusion energy conversion and utilization. Different temperature heat of a cladding, a divertor and a vacuum chamber is guided into a high-temperature independent heat storage loop, a medium-temperature independent heat storage loop and a low-temperature independent heat storage loop respectively, an operation section stores heat, and a pause section releases heat; feed water is heated step by step through a multi-stage preheater, an evaporator and a superheater according to the sequence of low temperature, medium temperature and high temperature, and superheated steam of 550 DEG C is formed to continuously drive a turbine to generate power. Decoupling of intermittent output of the fusion reactor and continuous operation of the power generation system is achieved, steam extraction of a steam turbine is omitted, the structure is simplified, and the energy utilization rate and the circulation efficiency are improved.

The invention provides a method and system for diagnosing high-frequency magnetic disturbance in a quasi-ring symmetrical star simulator, and relates to the technical field of star simulators, and the method comprises the steps: designing the three-dimensional size of a magnetic probe body in combination with a physical research target and a vacuum chamber space limiting condition, and preparing a magnetic probe entity adaptive to an experimental environment; designing a magnetic probe array space layout according to the triangular magnetic configuration characteristics of the CFQS star simulator to obtain a positioned magnetic probe array; a positioned magnetic probe array is utilized to construct a signal transmission link, and a calibration qualification system is formed; generating a multi-channel time domain voltage signal set according to a calibration qualified system; and performing frequency response correction on the multi-channel time domain voltage signal set in combination with a transfer function database, analyzing a disturbance mode structure and a propagation direction through time-frequency spectrum analysis and array phase difference, and finally outputting three-dimensional magnetic disturbance evolution characteristics. The three-dimensional high-frequency magnetic disturbance measuring device has the beneficial effects that the three-dimensional high-frequency magnetic disturbance measuring capability is realized, multi-channel high-fidelity signal acquisition can be realized, and the experimental data quality and the physical analysis capability are improved.

The invention relates to the technical field of nuclear fusion, and discloses a flexible supporting device for a proliferation cladding in a nuclear fusion device. The nuclear fusion device comprises a proliferation cladding and a vacuum chamber. The flexible supporting device comprises a lower bottom plate, an adjusting plate and an upper cover plate. The elastic structure is assembled between the adjusting plate and the lower bottom plate and makes contact with the adjusting plate and the lower bottom plate. The guide rod is fixed to the lower bottom plate and penetrates through the adjusting plate and the upper cover plate, and the adjusting plate and the upper cover plate can move relative to the guide rod in the vertical direction; the driving structure is arranged between the adjusting plate and the upper cover plate and used for driving the upper cover plate to move in the vertical direction. By arranging the flexible supporting device, positioning, mounting and dismounting of the value-added cladding are facilitated, the value-added cladding can have certain flexibility, large thermal deformation generated by thermal expansion of the value-added cladding can be buffered, the risk that the value-added cladding and related parts (such as a vacuum chamber) are damaged can be reduced, and the service life of the value-added cladding can be prolonged. And the overall structure reliability of the nuclear fusion device can be improved.

Systems and methods described herein provide for charge state control of multiply-charged anions in a front end, high pressure ion guide. In some example aspects, a mass spectrometer system is provided comprising a first vacuum chamber (121) maintained at a pressure above about 500 mTorr. At least one ion guide (106) is disposed within the first vacuum chamber, the at least one ion guide comprising a plurality of rods extending along a central longitudinal axis. A controller (193) is configured to adjust an amplitude of an RF voltage signal provided to the plurality of rods so as to alternatively operate the ion guide in a first mode of operation with a lower amplitude of the RF voltage signal so as to reduce the likelihood of charge reduction by electron detachment so as to substantially maintain the isotopic distribution of the ions during transmission of ions through the ion guide, and a second mode of operation with a higher amplitude of the RF voltage signal so as to increase the likelihood of electron detachment from ions being transmitted therethrough.

The invention discloses a compact accelerator extremely-high vacuum system and an implementation method thereof. The compact accelerator extremely-high vacuum system comprises a dipole iron vacuum chamber, a BUMP iron vacuum chamber, a BPM cavity, a vacuum pump chamber and a quadrupole iron vacuum chamber which are sequentially connected to form a beam main line. A plurality of non-evaporable getter sheets are arranged in the dipole iron vacuum chamber and the quadrupole iron vacuum chamber in an array manner and are used for extracting active gas in a beam main line to obtain extremely high vacuum; a vacuum measuring gauge tube, a sputtering ion pump, a molecular pump and a gate valve are installed on the vacuum pump chamber, the vacuum measuring gauge tube is used for measuring the vacuum degree in the beam main line, the sputtering ion pump is used for extracting argon and methane in the beam main line and conducting baking, and the molecular pump is used for rough extraction of the beam main line and exhaust in the baking process; the gate valve is used for separating the molecular pump from the beam main line. According to the invention, hydrogen, carbon monoxide and other active gases in the system can be extracted under the condition that a titanium sublimation pump cannot be installed due to insufficient space, so that extremely high vacuum can be obtained.

The invention belongs to the technical field of bonding, and discloses a semiconductor material bonding device, an alignment method and a calibration method. The semiconductor material bonding device comprises a vacuum chamber, a pressure bearing unit, a pressure applying unit and a position detecting unit, wherein the vacuum chamber is provided with a first cavity and a second cavity; a base of the pressure bearing unit is arranged in the first cavity, and a motion platform is arranged on the base; a pressure head of the pressure applying unit is arranged in the second cavity and is positioned right above the base; the pressure head is used for driving the second semiconductor material to be pressed towards the first semiconductor material along the first direction; the position detection unit is located outside the vacuum chamber, the first downward detection camera and the second downward detection camera detect the marking position of the first semiconductor material through the first cavity, and the first upward detection camera and the second upward detection camera detect the marking position of the second semiconductor material through the first cavity. According to the invention, the vacuum degree of the vacuum chamber is not damaged, the volume of the vacuum chamber is reduced, and the vacuumizing time is shortened.

The invention provides a multi-heat-source combined energy storage and auxiliary heating system and method for a nuclear fusion device, and belongs to the field of energy conversion and utilization of the nuclear fusion device, and the system comprises a high-temperature heat source storage and supply system which is used for receiving and storing heat of a cladding and a multiplication region coolant, and continuously outputting a high-temperature heat source during the operation and pause of a fusion reactor; the medium-temperature heat source and auxiliary supply system is used for receiving the heat of the divertor coolant and supplementing and outputting the medium-temperature heat source through a medium-temperature auxiliary heater during the suspension period of the fusion reactor; the low-temperature heat source and auxiliary supply system is used for receiving heat of the vacuum chamber coolant and supplementing and outputting a low-temperature heat source through a low-temperature auxiliary heater during the suspension period of the fusion reactor; the high-temperature heat source storage and supply system, the medium-temperature heat source and auxiliary supply system and the low-temperature heat source and auxiliary supply system operate independently. According to the invention, high-temperature heat, medium-temperature heat and low-temperature heat are simultaneously, continuously and stably supplied to the outside during operation and pause of the fusion reactor.

The invention relates to a film system structure for partitioned film coating. The film system structure comprises a glass substrate, a first film stack and a second film stack, the first film stack is formed by alternately depositing a medium-refractive-index material and a low-refractive-index material in a vacuum chamber, the film system design structure of the first film stack is SUBM + L +... + M + LAir, SUB represents a substrate, M represents a medium-refractive-index material film layer, L represents a low-refractive-index material film layer, and Air represents air; the second film stack is a film stack formed by alternately depositing a high-refractive-index material and a low-refractive-index material in the vacuum chamber, the film system design structure of the second film stack is SUB first film stack + H + L... + H + LAir, SUB represents a substrate, H represents a high-refractive-index material film layer, L represents a low-refractive-index material film layer, and Air represents air. Compared with the prior art, the method has the advantages of reducing the manufacturing cost, improving the boundary definition and the like.

The invention relates to a manufacturing method of a duplex stainless steel and carbon steel asymmetrically rolled composite plate. Stainless steel is any one of duplex stainless steel. The medium carbon steel is any one of plain carbon steel, low-carbon steel and alloy steel. The manufacturing method of the asymmetric composite blank of the duplex stainless steel and the carbon steel comprises the following steps: 1, preparing raw materials for assembling the blank; 2, pretreating the stainless steel middle plate; and 3, surface treatment of the assembly raw material. And 4, cleaning. And 5, assembling. And 6, vacuum chamber electron beam seal welding. And 7, composite blank welding seam detection. And 8, heating the composite blank. And 9, rolling the composite plate. And 10, laminar cooling. And 11, the composite blank has no cracking phenomenon in the heating and rolling processes, the interface shear strength tau after hot rolling is larger than or equal to 280 MPa, the interface bonding rate is 100%, the bonding performance is good, and the proportion of dual-phase steel ferrite is 40-60%.

The present application belongs to the technical field of semiconductor device manufacturing, and provides a method for forming quartz glass products, and a forming device for quartz glass products. The method comprises: placing a quartz glass plate on a quartz glass product forming mold, and heating the quartz glass plate to a pre-processing temperature; performing heat soaking processing on the quartz glass plate during a preset heat soaking duration; continuing to heat the quartz glass plate to a softening temperature; when the actual deformation L0 of the quartz glass plate reaches a first preset deformation value, evacuating a vacuum chamber of the quartz glass product forming mold; when the actual deformation L0 of the quartz glass plate reaches a second preset deformation value, forming the quartz glass plate into a quartz glass product, and stopping the vacuum operation of the vacuum chamber. The quartz glass product forming method provided by the present application can reduce the processing difficulty of quartz glass products, decrease material consumption, and improve the processing accuracy and product yield of quartz glass products.

The invention relates to a diamond-like carbon coating and a preparation method thereof, and belongs to the technical field of coatings. The preparation is carried out in a closed field unbalanced magnetron sputtering system, and the system is at least provided with a titanium target, a graphite target and a linear ion source; the preparation method comprises the following steps: pretreating a base material, removing surface moisture, transferring the base material into a vacuum chamber, and carrying out ion cleaning and activation; adjusting bias voltage, then turning on a titanium target power supply, cleaning a target surface, depositing a gradient layer, turning off the titanium target power supply, turning on a graphite target power supply to carry out hydrogen-free deposition, and after deposition is finished, carrying out furnace cooling in a vacuum environment. According to the diamond-like carbon coating provided by the invention, the graphite target material is adopted, under the condition that hydrogen-containing gas and a metal transition layer are not introduced, a closed field unbalanced magnetron sputtering technology is combined with linear ion source auxiliary deposition, the DLC coating with excellent biocompatibility is prepared, and the problem of biotoxicity caused by element dissolution is greatly reduced.

The invention discloses a multi-stage isolation high vacuum obtaining system of a neutral beam injection device and a control method, and relates to the field of nuclear fusion Tokamak vacuum pumping design. The low-temperature pump unit comprises a plug-in low-temperature pump in a neutral beam vacuum chamber, and the plug-in low-temperature pump is used for refrigerating and cooling liquid nitrogen and liquid helium to adsorb gas to realize vacuum pumping; the low-temperature pump preceding-stage air extractor unit comprises a molecular pump unit, a roots pump unit and a mechanical pump unit; an inlet of the molecular pump set is connected with the neutral beam vacuum chamber through a gate valve, and an outlet of the molecular pump set is connected with an inlet of the roots pump set through a forestage valve. An inlet of the roots pump set is connected with the neutral beam vacuum chamber through a preceding stage valve and a pre-pumping valve, and an outlet of the roots pump set is connected with the mechanical pump set through the preceding stage valve. By adopting a multi-stage vacuum shielding technology and a step-by-step start-stop strategy, step-by-step transition from low vacuum to high vacuum and from high vacuum to low vacuum can be efficiently, stably and reliably realized, and an air extractor unit and a vacuum environment are protected from being polluted.

The utility model discloses a film coating device for the inner wall of a long and thin tube with a medium-small caliber and a deep inner hole, and belongs to the technical field of film coating. The coating equipment consists of a control unit and a coating unit. The control unit comprises a vacuum chamber and a gas inlet system, the vacuum chamber is used for installing and placing the pipe and providing a vacuum environment, and the gas inlet system is used for injecting working gas into the vacuum chamber. The coating unit is composed of a target material, a magnetic coil and a driving mechanism, and the target material is installed on the central axis in the pipe. The magnetic coil provides a uniform magnetic field environment for the coating device, the output end of the driving mechanism is mechanically connected with the target material and the magnetic coil, and synchronous transmission control between the target material and the magnetic coil is ensured. The device is particularly suitable for quickly and efficiently coating the inner wall of a long and thin pipe with a deep inner hole and the caliber of 40mm or below, and the quality of a film layer is excellent. The magnetic core in the target material is externally arranged, so that the diameter of the target material is reduced, disassembly and assembly are simplified, the manufacturing difficulty and cost are reduced, and the economic benefit is improved.

The invention discloses a preparation device of a titanium hydrogen storage alloy for solid hydrogen storage, which comprises a vacuum induction melting system and an ultrasonic generation system, the vacuum induction melting system comprises a vacuum chamber, a melting mechanism and a heatable mold which are arranged in the vacuum chamber, and a vacuum pump communicated with the vacuum chamber; the ultrasonic generation system comprises an ultrasonic generator, an amplitude-change pole and an ultrasonic probe which are connected in sequence, one end of the ultrasonic probe extends into the vacuum chamber, and a mobile positioning system for controlling the position of the ultrasonic probe is arranged on the vacuum induction melting system; the invention further discloses a preparation method of the titanium hydrogen storage alloy for solid hydrogen storage. According to the device, the ultrasonic generation system is arranged, ultrasonic waves are applied in the raw material smelting process, segregation of the Ti element is effectively restrained, meanwhile, dendritic crystal arms are broken in the alloy solidification process, more nucleation sites are formed to refine grains, and the device is suitable for preparing the titanium hydrogen storage alloy for solid hydrogen storage.

The invention discloses a vacuum electron beam welding method for a titanium alloy structural part, and belongs to the technical field of aero-engine manufacturing. The method comprises the following steps: cleaning stains on the surface of a to-be-welded structural member; an oxidation film on the surface of the to-be-welded structural part is cleaned, and a by-product layer formed when the oxidation film is cleaned is removed in a mechanical mode; residual pollutants generated when the surface of the to-be-welded structural part is cleaned in a mechanical mode are removed, and pre-welding cleaning is completed; when the cleaned structural part to be welded is placed in a vacuum chamber of a vacuum electron beam welding machine to be welded, small-beam preheating is conducted firstly; formal welding is carried out according to pre-optimized welding parameters, and electron beam dynamic deflection is increased in the welding process. The method can reduce air hole defects in welding seams, improve the comprehensive mechanical performance of welding joints, and meet the design requirements of aeroengine component welding joints.

The invention belongs to the technical field of tritium removal pump sets, and discloses a molecular pump set for evacuating a hydrogen isotope-containing super-large cavity, which comprises a stainless steel closed cavity and a super-large vacuum cavity, and is characterized in that a first tritium removal pump set and a second tritium removal pump set are respectively arranged in the stainless steel closed cavity through a fixing frame; the first tritium removal pump set and the second tritium removal pump set each comprise four tritium removal pumps, and the first tritium removal pump set and the second tritium removal pump set are integrally arranged in parallel and both communicate with the ultra-large vacuum cavity. According to the invention, the eight tritium removal pumps are mounted in the stainless steel chamber, and a connection mode of'parallel connection + series connection 'is creatively adopted, so that the requirement of continuous evacuation of the large chamber is met. In the initial stage, the eight tritium removal pumps operate in parallel so as to improve the overall pumping speed, the latter four tritium removal pumps serve as backing pumps, and the other four tritium removal pumps serve as main pumping pumps so as to improve the compression ratio of pumped tritium, increase the pressure of an exhaust port and improve the pumping efficiency of tritium.

A mass or mobility spectrometer comprising: a first vacuum chamber; and a collision cell arranged in the first vacuum chamber, wherein the collision cell comprises: an ion entrance at an upstream end thereof; an ion exit at a downstream end thereof; a main body portion between the ion entrance and ion exit; and an elongated tube between the main body portion and the ion exit. The collision cell comprises one or more ion guide extending through the main body portion, and / or through the elongated tube, for radially confining ions within the one or more ion guide. The spectrometer is configured to maintain the main body portion of the collision cell at a higher pressure than the first vacuum chamber; and the elongated tube is configured to limit the gas conductance out of the downstream end of the collision cell.

The invention discloses an energy-saving type vacuum cabinet and a using method thereof, and relates to the technical field of vacuum, the energy-saving type vacuum cabinet comprises a mounting cabinet body, a first partition plate is fixedly mounted in the mounting cabinet body, a second partition plate is fixedly connected in the mounting cabinet body, a sealing plate is mounted on the front surface of the mounting cabinet body, and the sealing plate is used for sealing a vacuum chamber a and a vacuum chamber b respectively; the vacuum pump set is installed at the bottom of an inner cavity of the installation cabinet body, the communicating pipe set is arranged among the vacuum pump set, the vacuum cavity a and the vacuum cavity b, and the vacuum cavity a and the vacuum cavity b form a negative pressure auxiliary source through the communicating pipe set. According to the invention, by utilizing the cooperative use mode of the mounting cabinet body, the vacuum pump set and the connecting pipe set, when the vacuum pump set performs vacuum negative pressure operation on the vacuum chamber a or the vacuum chamber b, the vacuum chamber a and the vacuum chamber b can be a negative pressure auxiliary source under the action of the connecting pipe set, so that the energy consumption during the operation of the vacuum pump set is reduced, and the energy consumption is further reduced.

The invention relates to the technical field of nuclear fusion, and provides a supporting structure and a nuclear fusion device. The supporting structure comprises a first connecting assembly, a second connecting assembly, a first supporting assembly and a second supporting assembly. The first connecting assembly is connected with a lower window of the vacuum chamber; the second connecting assembly is connected with the fixed foundation; the first supporting assembly is supported between the first connecting assembly and the second connecting assembly, the first supporting assembly comprises two sets of hinge structures, and the two sets of hinge structures are arranged side by side in the radial direction of the vacuum chamber and are configured into different specifications; the second supporting assembly is supported between the first connecting assembly and the second connecting assembly and comprises two sets of elastic plate arrays, and the two sets of elastic plate arrays are arranged on the two sides of the first supporting assembly in the radial direction of the vacuum chamber. The supporting structure disclosed by the invention not only can stably bear the load of the vacuum chamber in the vertical direction, but also allows the vacuum chamber to generate smaller radial displacement due to baking, and can play a role in stably supporting the vacuum chamber.

The invention discloses a frequency agility relativistic magnetron based on a dynamic seal axial tuning assembly, and belongs to the technical field of high-power microwave sources. Comprising an anode cylinder, N anode blades, a vacuum chamber shell, a magnetofluid sealing assembly, N / 2 fan-shaped insertion pieces and a tuning assembly, the vacuum chamber shell is coaxially arranged outside the anode cylinder, and an annular vacuum chamber is formed between the vacuum chamber shell and the anode cylinder; an inner sleeve of the magnetofluid sealing assembly is connected with the anode cylinder, and an outer sleeve is connected with the vacuum chamber shell; the tuning assembly is arranged in the vacuum chamber. According to the invention, the axial movement of the tuning assembly is realized through the matching relation of the anode cylinder, the tuning assembly and the vacuum chamber shell, so that the sizes of the coupling slot and the fan-shaped waveguide cavity are changed, and the resonant frequency of the resonant cavity formed by the fan-shaped resonant cavity, the coupling slot and the fan-shaped waveguide cavity is changed; and finally, real-time frequency agility of the device in a high-vacuum state is realized.

The invention discloses a power battery pole coiled material composite coating system and method based on plasma activation, and relates to the technical field of power battery pole material manufacturing. The unwinding device consists of an unwinding roller, a tension sensor and a speed regulator, and conveys the pole coiled material at constant tension and speed; the cavity is a sealed vacuum cavity, is provided with an electrode plate, a gas ingress pipe and a vacuum extraction opening, and is internally provided with a detector for monitoring a plasma state; the coating chamber comprises a first coating chamber, a second coating chamber and a transition vacuum cavity; a thickness gauge, a spectrograph and the like are used for monitoring film layer parameters; graded cooling is adopted, and the gas humidity is controlled; the coiled material winding module is used for maintaining tension stability and correcting deviation; and communicating with each module, adjusting parameters and generating a log. According to the invention, the activation consistency of the pole coiled material and the adhesion force of the film layer are improved, the thickness uniformity and density of the coating film are optimized, multi-parameter monitoring is perfected to find defects in time, the stress of the film layer is reduced by graded cooling, the performance and production efficiency of the pole material are guaranteed, and the manufacturing requirements of power batteries are met.

The invention relates to the technical field of magnetron sputtering equipment maintenance, in particular to an air pipe dedusting and cleaning device in a magnetron sputtering vacuum coating chamber, which is used for dedusting and cleaning a vacuum chamber and comprises an industrial dust collector, a cleaning air pipe is slidably arranged at the bottom of the interior of the vacuum chamber, and a plurality of air suction holes are formed in the cleaning air pipe. The driving mechanism is arranged in the vacuum chamber, and the cleaning air pipe is driven by the driving mechanism to reciprocate on the bottom of the vacuum chamber, so that the air suction holes in the cleaning air pipe can cover the whole or main area of the bottom of the vacuum chamber, and online dust removal of deposited particulate matter is achieved. On the premise that the coating process is not interrupted, online, automatic and intelligent directional cleaning is carried out on the vacuum chamber, the film quality problem caused by particulate matter floating is fundamentally solved, and meanwhile the production efficiency and the process stability are remarkably improved.

The invention relates to the field of particle accelerators, in particular to an ultrahigh and extremely high vacuum acquisition system and method. The vacuum obtaining system comprises a vacuum obtaining device and a vacuum temperature control device, the vacuum obtaining device comprises a ceramic vacuum chamber, an interlayer vacuum chamber, a main pump chamber, a first vacuum pumping assembly and a second vacuum pumping assembly, the main vacuum chamber is formed in the ceramic vacuum chamber, and the ceramic vacuum chamber is arranged in the interlayer vacuum chamber; and an interlayer space is formed between the ceramic vacuum chamber and the interlayer vacuum chamber. The ceramic vacuum chamber is arranged in the interlayer vacuum chamber, the interlayer space is formed between the ceramic vacuum chamber and the interlayer vacuum chamber, and the interlayer vacuum chamber is heated through the heating element, so that the ceramic vacuum chamber is uniformly heated in a non-contact heat radiation uniform heating mode; the problem of thermal stress concentration caused by direct conduction heating of the ceramic vacuum chamber is thoroughly eliminated, leakage or fracture of the ceramic-metal joint caused by thermal stress is avoided, and the structural integrity of a heterogeneous material connecting area is ensured.

Systems / techniques are provided for facilitating vacuum simulation for charged-particle microscopy grid receptacles. In various embodiments, an apparatus can comprise a positioning mechanism configured to be coupled to a vacuum chamber of a charged-particle microscope. In various aspects, the apparatus can comprise an adjustable force applicator coupled to the positioning mechanism and configured to simulate a vacuum for a microscopy grid receptacle located on an inner surface of a load-lock door of the vacuum chamber by mechanically pressing against an outer surface of the load-lock door.

The invention discloses an electron beam additive manufacturing method for an integrated copper-chromium contact-conducting rod assembly, and belongs to the technical field of copper-chromium contact manufacturing. The electron beam additive manufacturing method comprises the steps that S1, a special powder system is designed and prepared, specifically, contact area powder and conducting rod area powder are prepared and subjected to drying treatment; s2, digital modeling and support design: establishing an integrated copper-chromium contact-conducting rod assembly model by using three-dimensional software and slicing; S3, fusing and integrally forming by using an electron beam powder bed: printing an integrated copper-chromium contact-conducting rod assembly in a vacuum chamber of the electron beam powder bed, and S4, a printing post-treatment process is carried out, specifically, returning treatment, hot isostatic pressing treatment and machining treatment are carried out on the integrated copper-chromium contact-conducting rod assembly printed piece. According to the printing post-treatment process, the residual stress of the integrated copper-chromium contact-conducting rod assembly can be effectively eliminated through the printing post-treatment process; and the problems of macroscopic cracks and part warping caused by high residual thermal stress can be effectively avoided.

The invention provides a layout design method for high-precision magnetron sputtering deposition equipment. The method comprises the following steps: firstly, determining sputtering deposition subsystem layout parameters such as revolution radius, target-base distance, target length and the like according to an optimized target difference value of a to-be-plated element parameter, a target preliminary sputtering yield parameter and a film thickness; then, whether the film thickness distribution under the layout parameters meets an optimization target difference value or not is evaluated; and finally, vacuum chamber subsystem layout parameters such as the diameter and the height of the vacuum chamber are calculated. According to the method, a quantitative design mode is adopted, the problems that existing magnetron sputtering deposition equipment layout design depends on experience, and whether the magnetron sputtering deposition equipment meets design index requirements or not is difficult to evaluate are effectively solved, and the scientificity and rationality of equipment layout are improved.

The invention relates to the technical field of nuclear fusion vacuum, and particularly discloses a leak detection tool suitable for a pipeline welding seam in a vacuum chamber of a fusion device, which comprises a pair of oppositely arranged sealing seats, cavities are formed in the sealing seats, grooves matched with a pipeline are formed in the two ends of each sealing seat, when the two sealing seats are combined, the two cavities jointly form a detection cavity, and the two corresponding grooves jointly form a limiting groove used for restraining the position of the pipeline; wherein the detection cavity is of a sealed structure, and the sealing seat is provided with an air exhaust interface used for being connected with external vacuum equipment so as to be used for vacuumizing the outside of the weld joint of the pipeline to be detected, which is sealed and restrained. Therefore, under the condition of high reduction degree, the detection steps and the detection time efficiency are optimized, and the accuracy and the reliability of the detection result are ensured.