3726 results about "Vacuum chamber" patented technology

The invention relates to the technical field of nuclear fusion devices, and discloses a nuclear fusion device and a monitoring system and an installation method thereof, the monitoring system comprises a cold shield main body, the cold shield main body is of an annular rotation structure, and the cold shield main body is arranged in a cavity and wraps the circumferential outer side of a vacuum chamber; the cold shield main body comprises a plurality of groups of fan-shaped cold shield sections which are sequentially arranged in the circumferential direction, and the plurality of groups of fan-shaped cold shield sections are encircled to form the cold shield main body; the distance measuring assembly is arranged on the cold shield main body, the distance measuring assembly comprises a plurality of groups of distance measuring sensors which are arranged in the circumferential direction of the cold shield main body at intervals, and each group of distance measuring sensors comprises a plurality of distance measuring sensors; the distance measuring sensor is used for detecting the size of a gap between the cold shield body and the longitudinal field coil and the size of a gap between the cold shield body and the vacuum chamber. Therefore, the cold shield main body can be assisted to be assembled at a position in the nuclear fusion device, and the matching position of the cold shield main body, the vacuum chamber and the longitudinal field coil can be monitored in real time.

According to the auxiliary supporting mechanism for assembling the internal parts of the Tokamak and the assembling method, all auxiliary stand columns and a center stand column are installed at the same center distance, and the center stand column is provided with an upper-layer disc-type turn buckle supporting mechanism and a lower-layer disc-type turn buckle supporting mechanism so as to be connected with the outer surface of a vertical section of a vacuum chamber ring petal; the outer side supporting mechanism is connected around the outer surface of the vacuum chamber ring valve set, the double-column type bottom supporting table is located below the vacuum chamber ring valve set, and the vacuum chamber ring valve set is supported from the outer side and the lower portion of the vacuum chamber ring valve set; a stand column connecting rod is connected between every two adjacent auxiliary stand columns, and a limiting mechanism capable of extending into a window in a vacuum chamber ring petal is installed on each stand column connecting rod. The U-shaped operation platform penetrates through the vacuum chamber ring petal set, and a plurality of small internal part assembling auxiliary tools are movably installed on the surface of the U-shaped operation platform. The method is wide in application range, can effectively solve the problems that transportation channels of internal parts are few and the assembly construction space is limited, and reduces the construction difficulty and the construction cost.

The invention relates to the technical field of nuclear fusion, and discloses a supporting device and a method for assembling a vacuum chamber and a cold shield of a nuclear fusion device.The supporting device comprises a first supporting assembly and a second supporting assembly, the first supporting assembly comprises a first clamping piece, a first supporting piece and a first adjusting piece, and the first clamping piece and the first supporting piece are spaced in the first direction and connected through the first adjusting piece; the first adjusting piece can adjust the distance between the first clamping piece and the first supporting piece in the first direction. The second supporting assembly comprises a second clamping piece, a second supporting piece and a second adjusting piece, the second clamping piece and the second supporting piece are spaced in the first direction and connected through the second adjusting piece, and the second adjusting piece can adjust the distance between the second clamping piece and the second supporting piece in the first direction; the third adjusting piece is connected with the first supporting piece and the second clamping piece and can adjust the distance between the first supporting piece and the second clamping piece in the first direction. The cold shield and the vacuum chamber can be clamped, and the gap between the cold shield and the vacuum chamber can be adjusted.

The invention relates to the field of nuclear fusion, and discloses a fixing device for a nuclear fusion preassembled assembly, and the fixing device comprises a magnet connecting assembly which comprises a first beam body and a magnet connecting part, the first beam body extends in a first direction, and the magnet connecting part is arranged on the first beam body; the vacuum chamber connecting assembly and the magnet connecting assembly are spaced in the second direction, the vacuum chamber connecting assembly comprises a second beam body and a vacuum chamber connecting part, the second beam body extends in the first direction, and the vacuum chamber connecting part is arranged on the second beam body; the beam body connecting assembly is arranged at the two ends of the second beam body in the first direction, is connected with the first beam body and comprises a first connecting piece, a second connecting piece and an elastic energy storage piece, the first connecting piece is movably connected with the second connecting piece and is detachably connected with the first beam body, and the second connecting piece is detachably connected with the second beam body; one end of the elastic energy storage piece is movably connected with the first connecting piece, and the other end is movably connected with the second connecting piece. The gap between the magnet and the vacuum chamber can be restrained, and the position precision between the magnet and the vacuum chamber is guaranteed.

The invention relates to a system and method for rapidly establishing steady state vacuum chamber pressure. According to the system, the set value of the vacuum valve is fixed, and the driving current of the MFC electromagnetic valve is used for adjusting the pressure of the cavity, so that the pressure is stabilized more quickly. The system can operate in a training mode and an inference mode. In the training mode, a PID controller is used for determining set values of an MFC and a vacuum valve; in an inference mode during substrate processing, these settings are quickly invoked and executed, thereby achieving efficient and stable pressure control.

The invention discloses a standard volume-based mass spectrum signal calibration system and method, and belongs to the field of measurement, the standard volume-based mass spectrum signal calibration system comprises a standard flow generation system and a mass spectrum detection system.The standard flow generation system comprises a standard tank, a first valve, a fifth valve and a micro-leakage valve which are sequentially connected through a gas pipeline; a gas inlet pipeline, a film gauge and a first molecular pump set are connected to a gas pipeline connecting the first valve and the fifth valve in parallel, a second valve is installed on the gas inlet pipeline, and a fourth valve is installed at an inlet of the first molecular pump set. The mass spectrometry detection system comprises a vacuum chamber communicated with the micro-leakage valve through a gas pipeline, a mass spectrometer, a second molecular pump set and a full-scale gauge are connected to the vacuum chamber, and a gate valve is installed at an inlet of the second molecular pump set. The gas release rate can be calculated and continuously adjusted on the premise that a leak hole is not needed, and the problems that in the prior art, a standard leak hole is limited in application range, low-flux measurement is inaccurate, the nominal leak rate is prone to drifting, and cost is high are solved.

The invention relates to the technical field of capacitors, and discloses a fine-tuning vacuum capacitor. The fine tuning vacuum capacitor comprises a vacuum chamber, an electrode assembly and an adjusting assembly, and a vacuum cavity is arranged in the vacuum chamber; the electrode assembly is arranged in the vacuum cavity and comprises a first electrode ring group and a second electrode ring group which are in coupled connection; the adjusting assembly comprises an adjusting rod and an adjusting nut, the adjusting rod comprises a connecting section, a penetrating section and an adjusting section which are sequentially arranged, the connecting section is connected with the first electrode ring set or the second electrode ring set, the penetrating section penetrates through the vacuum cavity, the adjusting section extends out of the vacuum cavity and is in threaded connection with the adjusting nut, and the adjusting nut is rotationally arranged on the outer wall of the vacuum cavity. And the coupling length of the first electrode ring group and the second electrode ring group can be changed by screwing the adjusting nut. According to the fine-tuning vacuum capacitor, the capacitance value adjusting operation is simple and efficient, and the capacitance value adjusting process is more stable.

The invention relates to the technical field of Tokamak nuclear fusion, and discloses an assembling method of a pre-assembled assembly of a nuclear fusion device and an installing method of the nuclear fusion device. The pre-assembled assembly comprises a vacuum chamber, a window neck tube in the vacuum chamber, a vacuum chamber cold shield and a TF magnet; the assembling method of the nuclear fusion device preassembled assembly comprises the following steps: supporting between a cold shield inner sector and a vacuum chamber through a first tool; a first tool is supported between the cold shield outer sector and the vacuum chamber; the TF magnet is connected with the middle window position of the vacuum chamber through a second tool, the upper arc-shaped section of the outer fan section of the cold shield is connected with the hoisting tool of the TF magnet through a third tool, and the lower window section of the outer fan section of the cold shield is connected with the second tool; and the middle window section and the annular field magnet supporting seat are connected through a fourth tool. According to the assembling method of the nuclear fusion device pre-assembled assembly, interference among installation of the vacuum chamber, the window neck tube in the vacuum chamber, the vacuum chamber cold shield and the TF magnet can be avoided, and the stability and functionality of the pre-assembled assembly structure are guaranteed.

The invention discloses a strength simulation and checking method for a vacuum chamber Sector lifting appliance of a nuclear fusion device, which comprises the following steps of: S1, acquiring structural data of the vacuum chamber Sector lifting appliance, establishing a corresponding geometric data model, and establishing a finite element model to simulate the geometric data model, wherein the geometric data model is set as a lifting appliance three-dimensional model containing all key force bearing components; s2, defining a specified load working condition set, and performing stress analysis and buckling instability analysis operation on the specified component model under the specified load working condition; s3, the safety margin of the specified component model is calculated and evaluated so as to check and judge whether the specified structure meets the specified strength requirement or not, and the safety margin of the specified component model has the following double-threshold combined criterion. According to the invention, systematic mechanical evaluation of key structures such as a lifting lug, a pull rod and a bridge can be realized, so that the structural safety and reliability in a lifting process are guaranteed.

The invention discloses a self-constrained transverse extension ion optical lens device, and belongs to the technical field of cluster ion lens devices. The invention discloses a self-constrained transverse extension ion optical lens device which comprises a cuboid vacuum cavity and an ion lens device. The ion lens device comprises an entrance slit of an ion optical lens, an exit slit of the ion optical lens and an electrode group; the electrode group comprises a conical plate electrode group and a parallel plate electrode group; a crack at the head end of the conical plate electrode group forms an inlet slit of the ion optical lens, the tail end of the conical plate electrode group is connected with the head end of the parallel plate electrode group, and a crack at the tail end of the parallel plate electrode group forms an outlet slit of the ion optical lens; one side of the cuboid vacuum cavity is provided with a cluster beam generation device outlet, and the ion lens device is arranged in the cuboid vacuum cavity. Under the condition that the beam density in the prior art is kept unchanged, the cluster beam intensity entering and leaving the ion optical part is increased, and the cluster yield is improved.

The invention discloses a metal crack repairing method and device based on an ultrasonic technology. The method comprises the steps that metal powder is selected as brazing filler metal and pretreated; cleaning cracks in the metal base material and spraying a boron nitride coating; mixing an ethanol solution with brazing filler metal powder according to a preset proportion, stirring to form a uniform suspension, injecting the suspension into the crack filling area through a needle tube in a vacuum negative pressure environment, preheating to accelerate solvent volatilization, and only leaving and compacting the brazing filler metal powder; clamping and fixing the base material and putting the base material into a vacuum chamber; electron beam melting is started, snakelike scanning is conducted in the length direction of the crack, and meanwhile ultrasonic vibration is conducted on the crack; and after fusion is completed, ultrasonic vibration is continuously carried out to restrain grain coarsening. Aiming at crack repair of a high-temperature metal part, through the coupling effect of electron beam melting and ultrasonic vibration, the limitation of a single technology is broken through, and a complete and synergistic repair system is formed.

Embodiments of the present invention relate to a technology for easily adjusting a level of static electricity required for a substrate according to a semiconductor process by injecting static electricity into the substrate or removing static electricity already formed on the substrate. A static electricity control device for injecting static electricity into a substrate disposed in a vacuum chamber or removing static electricity formed on the substrate in a semiconductor processing system, according to an embodiment, comprises: a charged particle generation unit, disposed on an upper side inside the vacuum chamber, that generates charged particles including positive ions and electrons by generating a vacuum ultraviolet ray (VUV) and reacting the VUV with a process gas inside the vacuum chamber; a grid provided with a plurality of holes, disposed on a lower side of the charged particle generation unit, that selectively pass the type of charged particles downward according to an input voltage; a substrate support, disposed below the grid and having the substrate positioned thereon, that is made of a conductive material and guides the charged particles passing through the grid toward the substrate at a predetermined density according to an input bias voltage; and a static electricity control unit that controls the static electricity of the substrate by supplying a pulsed voltage to at least one of the grid and the substrate support, wherein the grid and the substrate support are arranged so as to have a separation distance that is within four times the mean free path of the process gas according to environmental conditions of the vacuum chamber.

The invention provides a pole piece conveying belt and a pole piece transfer device.The pole piece conveying belt comprises a supporting plate, a belt and a driving part, the supporting plate comprises negative pressure adsorption areas and vacuum breaking areas which are alternately arranged in the first direction, and the negative pressure adsorption areas and the vacuum breaking areas are arranged in a separated mode; the negative pressure adsorption area comprises a plurality of first vacuum chambers which are arranged at intervals in the second direction and communicate with one another, the vacuum breaking area comprises second vacuum chambers and positive pressure chambers which are alternately arranged in the second direction, the multiple positive pressure chambers communicate with one another, and the multiple second vacuum chambers communicate with one another; the belt comprises a plurality of groups of adsorption holes and separation holes which are alternately formed in the second direction, each group of adsorption holes are communicated with the first vacuum chamber and the second vacuum chamber respectively, and each group of separation holes are communicated with the positive pressure chamber; the driving part is used for driving the belt to move along the first direction relative to the supporting plate, so that the pole piece adsorbed on the belt passes through the negative pressure adsorption area and the vacuum breaking area. The problem that the pole pieces are prone to skew or shift during transportation is solved.

An assembly for a pneumatic elevator is provided. The assembly includes a top cylinder housed at a top surface of a vertically stacked elevator cylinder; a control panel box is mounted to a chamber unit, wherein the chamber unit is inbuilt with a split top plate assembly, wherein the chamber unit is operatively coupled to an outer surface of the top cylinder toward a supporting wall. The split top plate assembly includes a split top plate coupled to a top portion of the elevator cylinder. The split top plate assembly also includes a plurality of support tube operatively coupled to an upper surface of the split top plate. The split top plate assembly also includes an air chamber is operatively coupled to a vacuum chamber, wherein the air chamber is configured for air flow between the vacuum chamber and the air chamber.

The invention relates to the technical field of thermophysical property measurement, in particular to a high-precision material in-plane thermal conductivity measuring device and method.A low-temperature refrigeration module generates a working medium with a set temperature in a vacuum heat insulation module, and the working medium is transferred to a space where a sample is located and the cold end of a heat flow meter in a heat conduction mode; the vacuum heat insulation module comprises at least one stage of anti-radiation screen and a vacuum cavity which are arranged in the outer side space of the sample and the heat flow meter; the heat-flow meter comprises a hot-end heat-flow meter and a cold-end heat-flow meter which are arranged in parallel; the cold-end heat-flow meter and the hot-end heat-flow meter are respectively clamped at two ends of the sample; the pressure-bearing sample table module bears and fixes a heat flow meter and a sample, and the sample is a film material; the distance measurement and control module controls and measures the distance between the cold end heat flow meter and the hot end heat flow meter; the temperature measurement and control module obtains the temperature of the heat flow meter and comprises a temperature measurement probe inserted into the heat flow meter, and the temperature measurement probe is connected with a temperature sensor. Through a specific heat flow meter structure, measurement of in-plane heat conductivity is realized.

The invention relates to the technical field of industrial process control, and discloses a vacuum induction heating process closed-loop control system applying an industrial mechanism model, which comprises the following steps: acquiring the input active power of an induction coil through a power monitoring unit, and measuring the total external radiation heat flux of the outer wall of a vacuum chamber by a heat flow sensing unit; the embedded decision-making module calculates the thermal-electric response ratio and the time derivative thereof in real time, judges the phase change critical state of the material based on the derivative change and generates a regulation and control instruction, through dynamic capture of the thermal-electric energy balance relation, recognition of the phase change critical point of the material is achieved, and by combining working condition pre-judgment of the vibration spectrum entropy and current ripple characteristic arbitration, the phase change critical state of the material is judged. An anti-interference multi-verification mechanism is constructed, and the robustness of the control system under the preset working condition is improved.

The invention relates to an online three-dimensional adjusting device and method for a dipolar magnet vacuum chamber of a rotating rack, and the device comprises a pipeline clamping mechanism which is used for clamping the vacuum chamber; the driving and adjusting assembly comprises an X-axis transverse adjusting unit, a Y-axis longitudinal adjusting unit and a Z-axis vertical adjusting unit, the X-axis transverse adjusting unit is vertically arranged on a moving part of the Y-axis longitudinal adjusting unit, and the Z-axis vertical adjusting unit is connected with the moving part of the X-axis transverse adjusting unit; the pipeline clamping mechanism is connected with the Z-axis vertical adjusting unit; and the controller is in communication connection with the driving and adjusting assembly and is used for acquiring position information of the vacuum chamber and analyzing position errors so as to control the driving and adjusting assembly, so that the three-dimensional space position of the vacuum chamber is adjusted. The device solves the problem that the interior of a vacuum chamber cannot be adjusted when a dipolar magnet is installed in an abnormal posture at present.

The invention discloses a welding method for a fusion reactor, and relates to the technical field of fusion reactor manufacturing, the fusion reactor comprises a vacuum chamber shell and a cladding support, and a mounting hole is formed in the vacuum chamber shell; the welding method comprises the steps that a first welding groove and a second welding groove which are formed in the thickness direction of the vacuum chamber shell in a spaced mode are machined in the inner wall of the mounting hole, and the first welding groove and the second welding groove are symmetrically formed along the center line of the vacuum chamber shell in the thickness direction; the cladding support and the vacuum chamber shell are preliminarily limited, and the part of the cladding support is located in the mounting hole; and alternately welding the first welding groove and the cladding support as well as the second welding groove and the cladding support. According to the welding method provided by the embodiment of the invention, the welding heat input is reduced by reducing the cladding metal filling amount, so that the deformation of the profile tolerance of the vacuum chamber shell and the cladding supporting angle is effectively avoided.

A mass damper is connected to a vacuum pump to reduce vibrations during operation. The mass damper includes a conic portion defined by a converging end and a diverging end and a damping mass connected to the converging end of the conic portion. The vacuum pump has a pump body, a vacuum inlet in fluid communication with an internal volume of a vacuum chamber, a vacuum outlet, and a rotor assembly disposed within the pump body. The rotor assembly is configured to rotate about a rotary axis to pump gas from the internal volume of the vacuum chamber out of the vacuum outlet. The conic portion may have a cone axis that is coaxial with the rotary axis of the vacuum pump.

The invention relates to the technical field of nuclear fusion, and discloses a vacuum chamber cold shield module and a vacuum chamber cold shield for a nuclear fusion device.The vacuum chamber cold shield module comprises two panel assemblies and a cooling assembly, the two panel assemblies are arranged in the polar direction, and each panel assembly comprises an inner side panel assembly and an outer side panel assembly; the inner side panel and the outer side panel assembly surround a circle in the annular direction, the outer side panel assembly comprises a first outer side panel and a second outer side panel which are arranged in the polar direction, each panel assembly is correspondingly provided with two cooling assemblies, one cooling assembly surrounds the periphery of the first outer side panel and the periphery of the inner side panel in the annular direction, and the other cooling assembly surrounds the periphery of the second outer side panel in the polar direction. The other cooling assembly surrounds the periphery of the second outer side panel and the periphery of the inner side panel in the annular direction, each cooling assembly comprises a plurality of cooling pipelines, the cooling pipelines are arranged at intervals in the polar direction, and the cooling pipelines are filled with cooling media. The vacuum chamber cold shield module for the nuclear fusion device is convenient to mount, high in heat shielding efficiency and uniform in heat transfer performance.

The utility model relates to the technical field of vacuum feed-through, and discloses a vacuum hollow magnetic coupling feed-through device used for a magnetron sputtering coating machine, which comprises an isolation cover, a magnetic coupling feed-through device and a magnetic coupling feed-through device, the first end of the hollow main shaft extends into the isolation hood; the outer magnetic rotor surrounds the outer side of the isolation cover; the inner magnetic rotor is connected to the outer side of the first end of the hollow main shaft; the input wheel is connected with the outer magnetic rotor and is used for being connected with external driving equipment; according to the utility model, the hollow main shaft is adopted, while magnetic coupling torque transmission is realized, the hollow main shaft rotates in the vacuum chamber, and devices which do not need to be rotated, such as wiring and installation of manipulators, can be accommodated in the hollow main shaft, so that the feed-through structure is endowed with more functional richness, flexibility and various possibilities; flanges at two ends of the isolation cover facilitate connection of an external device outside the vacuum chamber.

According to the invention, the bonding strength between wafers in the semiconductor manufacturing process is improved through a simple structure. Provided is a vacuum chamber (14) for bonding semiconductor wafers (W1, W2) to each other, one using a silicon electrode (G1) and the other using a semiconductor wafer (W2) before bonding crystalline silicon circles (W1, W2) facing each other; after the silicon electrode G1 and the semiconductor wafer W2 are processed for the first time, the silicon electrode G1 is replaced by the bonding wafer G2, and then the bonding wafer G2 and the semiconductor wafer W2 are processed for the second time. Then, the pair of wafers W1 and W2, which are opposite to each other, are bonded together by electrostatic force in a vacuum environment.

The invention provides an energy gradient utilization steam Rankine cycle power generation system and method for nuclear fusion, and belongs to the field of nuclear fusion energy conversion and utilization. Different temperature heat of a cladding, a divertor and a vacuum chamber is guided into a high-temperature independent heat storage loop, a medium-temperature independent heat storage loop and a low-temperature independent heat storage loop respectively, an operation section stores heat, and a pause section releases heat; feed water is heated step by step through a multi-stage preheater, an evaporator and a superheater according to the sequence of low temperature, medium temperature and high temperature, and superheated steam of 550 DEG C is formed to continuously drive a turbine to generate power. Decoupling of intermittent output of the fusion reactor and continuous operation of the power generation system is achieved, steam extraction of a steam turbine is omitted, the structure is simplified, and the energy utilization rate and the circulation efficiency are improved.

The invention relates to the technical field of rocket engine simulation tests, in particular to a vertical high-altitude simulation test bed compatible with a ground test and a test method. Comprising a vacuum chamber which is provided with a ventilation assembly capable of being opened and closed; and the diffuser is communicated with the vacuum cabin and is vertically arranged at the tail end of the engine, and engine gas enters the diffuser. When a high-altitude simulation test is carried out, the long-nozzle engine is arranged in the vacuum cabin, and the openable and closable ventilation assembly is closed, so that the inner side of the vacuum cabin is isolated from the outside. Engine fuel gas enters the diffuser and is expanded in the diffuser to form supersonic airflow to suck the vacuum chamber, the fuel gas is injected to the injection expansion section under injection of the injection working medium, the fuel gas is mixed with the injection working medium airflow to continue to be pressurized in the supersonic speed state, and finally the fuel gas is exhausted from the injection expansion section when the pressure is higher than the atmospheric pressure. The air pressure in the vacuum chamber is lower than the atmospheric pressure, and high-altitude simulation test conditions are met.

The invention relates to the technical field of data processing, in particular to a vacuum box helium leak detection equipment data processing method. The method comprises the following steps: acquiring a helium concentration signal, filtering the helium concentration signal to obtain a preprocessed concentration signal, setting a reference point of each data point, constructing a reference point set of each data point, and calculating the credibility of the reference points in the reference point set; determining the confidence weight of each reference point based on the credibility of the reference points; and taking the product of each confidence weight and the preprocessed concentration data of the corresponding reference point as a local contribution value, and taking the sum of a plurality of local contribution values as a final filtering result. The helium concentration data processing method and device have the effect of improving the helium concentration data processing accuracy.

The invention discloses a mass center regulation and control device and method suitable for micro-thrust calibration torsional pendulum, the mass center precise regulation and control device comprises a double-bottom-plate torsional pendulum base arranged in a vacuum tank, the base is provided with a supporting frame, a pivot and a torsional pendulum, and the supporting frame supports the torsional pendulum through the pivot; the torsional pendulum inclination angle control mechanism is arranged on the driving side of the double-bottom-plate torsional pendulum base, and the mass center position adjusting mechanism is arranged on the double-bottom-plate torsional pendulum base and connected with one end of the torsional pendulum. The controller is arranged outside the vacuum tank; the method comprises the following steps: judging whether the offset s of the current centroid position is less than 10 microns or not, if so, finishing fine adjustment, and if not, continuing to control a torsional pendulum inclination angle # imgabs0 #, and then calculating the offset of the centroid position until the offset s is less than 10 microns; according to the invention, the torsional pendulum inclination angle control resolution of 5 [mu] rad level can be realized, and the centroid positioning precision of 1 [mu] m level can be synchronously reached; 1 [mu] m-level mass center position adjusting resolution can be achieved, and it is ensured that the deflection distance of the torsional pendulum mass center from a rotating shaft is not larger than 10 [mu] m.

The utility model relates to a vacuum cavity with a turnover mechanism, which mainly comprises a vacuum cavity and a turnover mechanism, and the turnover mechanism is connected with the vacuum cavity and positioned in an accommodating space of the vacuum cavity. The turnover mechanism mainly comprises a clamping unit and a turnover unit, and the clamping unit is located in the containing space of the vacuum cavity and used for clamping at least one substrate in the containing space. The overturning unit is located in the containing space of the vacuum cavity and connected with the clamping unit, and the overturning unit is used for driving the clamping unit to overturn the substrate clamped by the clamping unit. According to the structure of the utility model, the substrate in the vacuum cavity can be overturned in a deposition or etching step without taking the substrate out of the vacuum cavity, so that the manufacturing efficiency and quality can be improved.

The invention discloses a fusion reactor vacuum chamber processing method, and belongs to the technical field of fusion reactor engineering. The fusion reactor vacuum chamber processing method comprises the following steps: forming a reference mark based on the positions of a plurality of mounting holes in a to-be-processed shell; fixing the positioning bracket at a target position based on the reference mark; under the condition that the shell is positioned on the positioning bracket, the positioned cladding supporting pieces are welded at the mounting holes; the cladding supporting piece is positioned in the following mode that the auxiliary tool is installed on the cladding supporting piece, and a reference mark is obtained; the cladding supporting piece provided with the auxiliary tool is installed at the installation hole; and adjusting the auxiliary tool based on the alignment degree of the reference mark and the datum mark until the alignment degree meets a first preset target. Through multiple times of positioning, the influence of factors such as the long size of the shell, the large plate thickness, the high weight and forming errors on the assembly precision of the cladding supporting piece and the shell is effectively reduced, and the machining precision and the assembly quality of the whole fusion reactor vacuum chamber are improved.

The invention provides a method and system for diagnosing high-frequency magnetic disturbance in a quasi-ring symmetrical star simulator, and relates to the technical field of star simulators, and the method comprises the steps: designing the three-dimensional size of a magnetic probe body in combination with a physical research target and a vacuum chamber space limiting condition, and preparing a magnetic probe entity adaptive to an experimental environment; designing a magnetic probe array space layout according to the triangular magnetic configuration characteristics of the CFQS star simulator to obtain a positioned magnetic probe array; a positioned magnetic probe array is utilized to construct a signal transmission link, and a calibration qualification system is formed; generating a multi-channel time domain voltage signal set according to a calibration qualified system; and performing frequency response correction on the multi-channel time domain voltage signal set in combination with a transfer function database, analyzing a disturbance mode structure and a propagation direction through time-frequency spectrum analysis and array phase difference, and finally outputting three-dimensional magnetic disturbance evolution characteristics. The three-dimensional high-frequency magnetic disturbance measuring device has the beneficial effects that the three-dimensional high-frequency magnetic disturbance measuring capability is realized, multi-channel high-fidelity signal acquisition can be realized, and the experimental data quality and the physical analysis capability are improved.

The invention relates to the technical field of nuclear fusion, and discloses a flexible supporting device for a proliferation cladding in a nuclear fusion device. The nuclear fusion device comprises a proliferation cladding and a vacuum chamber. The flexible supporting device comprises a lower bottom plate, an adjusting plate and an upper cover plate. The elastic structure is assembled between the adjusting plate and the lower bottom plate and makes contact with the adjusting plate and the lower bottom plate. The guide rod is fixed to the lower bottom plate and penetrates through the adjusting plate and the upper cover plate, and the adjusting plate and the upper cover plate can move relative to the guide rod in the vertical direction; the driving structure is arranged between the adjusting plate and the upper cover plate and used for driving the upper cover plate to move in the vertical direction. By arranging the flexible supporting device, positioning, mounting and dismounting of the value-added cladding are facilitated, the value-added cladding can have certain flexibility, large thermal deformation generated by thermal expansion of the value-added cladding can be buffered, the risk that the value-added cladding and related parts (such as a vacuum chamber) are damaged can be reduced, and the service life of the value-added cladding can be prolonged. And the overall structure reliability of the nuclear fusion device can be improved.