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4745 results about "Vacuum chamber" patented technology

A vacuum chamber is a rigid enclosure from which air and other gases are removed by a vacuum pump. This results in a low-pressure environment within the chamber, commonly referred to as a vacuum. A vacuum environment allows researchers to conduct physical experiments or to test mechanical devices which must operate in outer space (for example) or for processes such as vacuum drying or vacuum coating. Chambers are typically made of metals which may or may not shield applied external magnetic fields depending on wall thickness, frequency, resistivity, and permeability of the material used. Only some materials are suitable for vacuum use.

Nuclear fusion reaction device, system and method

A nuclear fusion reaction device, system and method. The outer wall of a vacuum chamber (301) in the nuclear fusion reaction device (30) comprises an inner ring surface (M1) and an outer ring surface (M2) which are connected to each other; the outer ring surface (M2) surrounds the inner ring surface (M1); the inner ring surface (M1) protrudes toward the central axis of the vacuum chamber (301); the vacuum chamber (301) surrounds a plurality of first coils (302); at least some of the plurality of first coils (302) extend in the circumferential direction of the inner ring surface (M1) and are sequentially arranged in the axial direction of the vacuum chamber (301); a plurality of second coils (303) surround the vacuum chamber (301), extend in the circumferential direction of the outer ring surface (M2), and are sequentially arranged in the axial direction of the vacuum chamber (301); a plurality of third coils (304) all surround the vacuum chamber (301) and are sequentially arranged in the circumferential direction of the vacuum chamber (301); and the plurality of first coils (302), the plurality of second coils (303), and the plurality of third coils (304) are used for generating a magnetic field, such that plasma rings with negative triangular deformation are generated in the vacuum chamber (301), and a fusion reaction occurs.
Owner:SHAANXI STARTORUS FUSION TECHNOLOGY COMPANY LIMITED

Nuclear fusion device and monitoring system and installation method thereof

The invention relates to the technical field of nuclear fusion devices, and discloses a nuclear fusion device and a monitoring system and an installation method thereof, the monitoring system comprises a cold shield main body, the cold shield main body is of an annular rotation structure, and the cold shield main body is arranged in a cavity and wraps the circumferential outer side of a vacuum chamber; the cold shield main body comprises a plurality of groups of fan-shaped cold shield sections which are sequentially arranged in the circumferential direction, and the plurality of groups of fan-shaped cold shield sections are encircled to form the cold shield main body; the distance measuring assembly is arranged on the cold shield main body, the distance measuring assembly comprises a plurality of groups of distance measuring sensors which are arranged in the circumferential direction of the cold shield main body at intervals, and each group of distance measuring sensors comprises a plurality of distance measuring sensors; the distance measuring sensor is used for detecting the size of a gap between the cold shield body and the longitudinal field coil and the size of a gap between the cold shield body and the vacuum chamber. Therefore, the cold shield main body can be assisted to be assembled at a position in the nuclear fusion device, and the matching position of the cold shield main body, the vacuum chamber and the longitudinal field coil can be monitored in real time.
Owner:聚变新能(安徽)有限公司 +1

Auxiliary supporting mechanism for assembling internal parts of Tokamak and assembling method

According to the auxiliary supporting mechanism for assembling the internal parts of the Tokamak and the assembling method, all auxiliary stand columns and a center stand column are installed at the same center distance, and the center stand column is provided with an upper-layer disc-type turn buckle supporting mechanism and a lower-layer disc-type turn buckle supporting mechanism so as to be connected with the outer surface of a vertical section of a vacuum chamber ring petal; the outer side supporting mechanism is connected around the outer surface of the vacuum chamber ring valve set, the double-column type bottom supporting table is located below the vacuum chamber ring valve set, and the vacuum chamber ring valve set is supported from the outer side and the lower portion of the vacuum chamber ring valve set; a stand column connecting rod is connected between every two adjacent auxiliary stand columns, and a limiting mechanism capable of extending into a window in a vacuum chamber ring petal is installed on each stand column connecting rod. The U-shaped operation platform penetrates through the vacuum chamber ring petal set, and a plurality of small internal part assembling auxiliary tools are movably installed on the surface of the U-shaped operation platform. The method is wide in application range, can effectively solve the problems that transportation channels of internal parts are few and the assembly construction space is limited, and reduces the construction difficulty and the construction cost.
Owner:FUSION ENERGY (HEFEI) ENGINEERING DESIGN INSTITUTE CO LTD

Active injection verification system and verification method for high-altitude simulation test bench

The invention relates to an attitude and orbit control engine high-altitude environment simulation ignition test system and a verification method, in particular to a high-altitude simulation test bed active injection verification system and a verification method, and solves the technical problems of high cost, high risk and low verification data validity during verification of a high-altitude simulation test bed in the prior art. The active injection verification system for the high-altitude simulation test bench comprises a vacuum chamber, a diffuser, a water spray cooler, a first corrugated pipe, a first gas collection chamber, a second corrugated pipe, n groups of coolers, a third corrugated pipe, a second gas collection chamber, a steam-jet pump, a pipeline and a data acquisition module, according to the verification method of the active ejection verification system of the high-altitude simulation test stand, ejection capacity verification is carried out in two stages, and the verification effectiveness is greatly improved on the premise that the verification cost is greatly reduced.
Owner:XIAN AEROSPACE PROPULSION TESTING TECHN INST

Supporting device, vacuum chamber of nuclear fusion device and assembling method of cold shield

The invention relates to the technical field of nuclear fusion, and discloses a supporting device and a method for assembling a vacuum chamber and a cold shield of a nuclear fusion device.The supporting device comprises a first supporting assembly and a second supporting assembly, the first supporting assembly comprises a first clamping piece, a first supporting piece and a first adjusting piece, and the first clamping piece and the first supporting piece are spaced in the first direction and connected through the first adjusting piece; the first adjusting piece can adjust the distance between the first clamping piece and the first supporting piece in the first direction. The second supporting assembly comprises a second clamping piece, a second supporting piece and a second adjusting piece, the second clamping piece and the second supporting piece are spaced in the first direction and connected through the second adjusting piece, and the second adjusting piece can adjust the distance between the second clamping piece and the second supporting piece in the first direction; the third adjusting piece is connected with the first supporting piece and the second clamping piece and can adjust the distance between the first supporting piece and the second clamping piece in the first direction. The cold shield and the vacuum chamber can be clamped, and the gap between the cold shield and the vacuum chamber can be adjusted.
Owner:聚变新能(安徽)有限公司

Fixing device of nuclear fusion preassembled assembly

The invention relates to the field of nuclear fusion, and discloses a fixing device for a nuclear fusion preassembled assembly, and the fixing device comprises a magnet connecting assembly which comprises a first beam body and a magnet connecting part, the first beam body extends in a first direction, and the magnet connecting part is arranged on the first beam body; the vacuum chamber connecting assembly and the magnet connecting assembly are spaced in the second direction, the vacuum chamber connecting assembly comprises a second beam body and a vacuum chamber connecting part, the second beam body extends in the first direction, and the vacuum chamber connecting part is arranged on the second beam body; the beam body connecting assembly is arranged at the two ends of the second beam body in the first direction, is connected with the first beam body and comprises a first connecting piece, a second connecting piece and an elastic energy storage piece, the first connecting piece is movably connected with the second connecting piece and is detachably connected with the first beam body, and the second connecting piece is detachably connected with the second beam body; one end of the elastic energy storage piece is movably connected with the first connecting piece, and the other end is movably connected with the second connecting piece. The gap between the magnet and the vacuum chamber can be restrained, and the position precision between the magnet and the vacuum chamber is guaranteed.
Owner:聚变新能(安徽)有限公司

System and method for rapid establishment of steady state vacuum chamber pressure

The invention relates to a system and method for rapidly establishing steady state vacuum chamber pressure. According to the system, the set value of the vacuum valve is fixed, and the driving current of the MFC electromagnetic valve is used for adjusting the pressure of the cavity, so that the pressure is stabilized more quickly. The system can operate in a training mode and an inference mode. In the training mode, a PID controller is used for determining set values of an MFC and a vacuum valve; in an inference mode during substrate processing, these settings are quickly invoked and executed, thereby achieving efficient and stable pressure control.
Owner:SHANGHAI ATOMIC QIZHI SEMICONDUCTOR EQUIPMENT CO LTD

Cavity leakage monitoring method of medical cyclotron vacuum chamber

The invention relates to the technical field of data cleaning, in particular to a medical cyclotron vacuum chamber leakage monitoring method, which comprises the following steps: acquiring the vacuum degree at each moment in a vacuum chamber, the operating power of a vacuum pump at each moment and the magnetic field intensity at each moment in real time when a medical cyclotron operates; dividing all moments into a plurality of monitoring time periods; determining the monitoring sensitivity of each monitoring time period; determining a power influence index at any moment; determining a relative amplitude difference of each monitoring time period; determining a magnetic field influence index at any moment; determining a measurement distance between any moment and other moments; and performing data cleaning on the vacuum degrees at all moments by adopting an anomaly detection algorithm, and monitoring chamber leakage of the vacuum chamber in combination with a deep learning model. According to the invention, the interference of redundant information in the data is reduced, and the accuracy of chamber leakage monitoring of the vacuum chamber is improved.
Owner:SHAANXI ZHENGZE BIOTECHNOLOGY CO LTD

Mass spectrum signal calibration system and calibration method based on standard volume

The invention discloses a standard volume-based mass spectrum signal calibration system and method, and belongs to the field of measurement, the standard volume-based mass spectrum signal calibration system comprises a standard flow generation system and a mass spectrum detection system.The standard flow generation system comprises a standard tank, a first valve, a fifth valve and a micro-leakage valve which are sequentially connected through a gas pipeline; a gas inlet pipeline, a film gauge and a first molecular pump set are connected to a gas pipeline connecting the first valve and the fifth valve in parallel, a second valve is installed on the gas inlet pipeline, and a fourth valve is installed at an inlet of the first molecular pump set. The mass spectrometry detection system comprises a vacuum chamber communicated with the micro-leakage valve through a gas pipeline, a mass spectrometer, a second molecular pump set and a full-scale gauge are connected to the vacuum chamber, and a gate valve is installed at an inlet of the second molecular pump set. The gas release rate can be calculated and continuously adjusted on the premise that a leak hole is not needed, and the problems that in the prior art, a standard leak hole is limited in application range, low-flux measurement is inaccurate, the nominal leak rate is prone to drifting, and cost is high are solved.
Owner:MATERIAL INST OF CHINA ACADEMY OF ENG PHYSICS

Conveying platform for internal parts of compact fusion reactor and use method of conveying platform

The invention provides a conveying platform for internal parts of a compact fusion reactor and a using method of the conveying platform, and belongs to the field of transportation of the internal parts of the fusion reactor. Vacuum outdoor transportation parts of the conveying platform comprise a supporting steel frame assembly, a transportation track assembly, a transportation trolley assembly and a mobile crane assembly, and the supporting steel frame assembly comprises a cage-shaped steel frame; one section of the transportation track assembly is straightly installed in the building channel, the other sections of the transportation track assembly are straightly located in the cage-shaped steel frame and extend to a window in the vacuum chamber, and the movable crane assembly and the transportation trolley are sequentially located on the transportation track assembly. The cable-stayed hanger rail component comprises cable-stayed rods, a bearing steel beam and an annular hanger rail, the cable-stayed rods are installed at the upper end of the regular polygon-shaped frame in an annular array mode, one end of each cable-stayed rod is connected with the upper window collar of the vacuum chamber, and the other end of each cable-stayed rod is connected with the bearing steel beam of the frame. According to the invention, after internal parts on the equatorial plane of the vacuum chamber are quickly conveyed, the internal parts can be conveyed through simple adjustment.
Owner:FUSION ENERGY (HEFEI) ENGINEERING DESIGN INSTITUTE CO LTD

System and method for off-line measurement of cesium evaporation rate in fusion device

The invention provides a system and a method for off-line measurement of a cesium evaporation rate in a fusion device. The system comprises a vacuum chamber, a cesium crucible assembly, a heating assembly, a film thickness meter, a laser absorption spectrum system and a vacuum pumping unit. According to the invention, an ultrahigh vacuum environment is provided for the whole device including the vacuum chamber by using the vacuum pumping unit; then the cesium crucible and the conveying pipeline are heated through a heating assembly, so that effective evaporation of cesium is guaranteed, and deposition of cesium on the wall face of the pipeline is reduced; measuring the deposition thickness of cesium and the concentration of cesium atoms by using a film thickness meter and a laser absorption spectrum system, and checking the measurement results of the two diagnosis methods mutually; the cesium evaporation rate is measured, and the quantitative relation between the cesium evaporation rate and the heating temperature is obtained; and finally, a measurement system is transplanted into a negative ion source, and the cesium injection amount in the vacuum stage is monitored in real time. Effective data and technical support are provided for cesium flow control in the magnetic confinement nuclear fusion negative neutral beam injection system.
Owner:INST OF ENERGY HEFEI COMPREHENSIVE NAT SCI CENT (ANHUI ENERGY LAB)

Method for coating fluorescent powder with aluminum oxide through plasma-assisted atomic layer deposition

The invention discloses a method for coating fluorescent powder with aluminum oxide through plasma-assisted atomic layer deposition, which comprises the following steps of: building an atomic layer deposition system, and placing a base station in a vacuum chamber of the atomic layer deposition system; fluorescent powder is placed on a base station, a vibration motor is turned on, and then the fluorescent powder is pretreated, including degassing treatment and oxygen plasma pretreatment; sequentially and alternately introducing two precursors into a vacuum chamber of the atomic layer deposition system, so that the two precursors are chemically adsorbed on the surface of the fluorescent powder and react to generate an aluminum oxide film; and after each precursor is introduced and reacts, the vacuum chamber needs to be cleaned by inert gas. According to the method, high-precision monoatomic-layer-level film control is achieved through the plasma-assisted atomic layer deposition technology, the defect that powder is prone to agglomeration in deposition is overcome through the vibration type fluidized bed technology, and therefore a high-quality aluminum oxide protection layer can be formed on the surface of the fluorescent powder; the water resistance and the luminescence property of the fluorescent powder are obviously improved.
Owner:BEIJING INSTITUTE OF GRAPHIC COMMUNICATION

Fine tuning vacuum capacitor

The invention relates to the technical field of capacitors, and discloses a fine-tuning vacuum capacitor. The fine tuning vacuum capacitor comprises a vacuum chamber, an electrode assembly and an adjusting assembly, and a vacuum cavity is arranged in the vacuum chamber; the electrode assembly is arranged in the vacuum cavity and comprises a first electrode ring group and a second electrode ring group which are in coupled connection; the adjusting assembly comprises an adjusting rod and an adjusting nut, the adjusting rod comprises a connecting section, a penetrating section and an adjusting section which are sequentially arranged, the connecting section is connected with the first electrode ring set or the second electrode ring set, the penetrating section penetrates through the vacuum cavity, the adjusting section extends out of the vacuum cavity and is in threaded connection with the adjusting nut, and the adjusting nut is rotationally arranged on the outer wall of the vacuum cavity. And the coupling length of the first electrode ring group and the second electrode ring group can be changed by screwing the adjusting nut. According to the fine-tuning vacuum capacitor, the capacitance value adjusting operation is simple and efficient, and the capacitance value adjusting process is more stable.
Owner:KUNSHAN GUOLI VACUUM ELECTRIC

Assembly method of nuclear fusion device preassembled assembly and installation method of nuclear fusion device

The invention relates to the technical field of Tokamak nuclear fusion, and discloses an assembling method of a pre-assembled assembly of a nuclear fusion device and an installing method of the nuclear fusion device. The pre-assembled assembly comprises a vacuum chamber, a window neck tube in the vacuum chamber, a vacuum chamber cold shield and a TF magnet; the assembling method of the nuclear fusion device preassembled assembly comprises the following steps: supporting between a cold shield inner sector and a vacuum chamber through a first tool; a first tool is supported between the cold shield outer sector and the vacuum chamber; the TF magnet is connected with the middle window position of the vacuum chamber through a second tool, the upper arc-shaped section of the outer fan section of the cold shield is connected with the hoisting tool of the TF magnet through a third tool, and the lower window section of the outer fan section of the cold shield is connected with the second tool; and the middle window section and the annular field magnet supporting seat are connected through a fourth tool. According to the assembling method of the nuclear fusion device pre-assembled assembly, interference among installation of the vacuum chamber, the window neck tube in the vacuum chamber, the vacuum chamber cold shield and the TF magnet can be avoided, and the stability and functionality of the pre-assembled assembly structure are guaranteed.
Owner:聚变新能(安徽)有限公司

Nickel-based alloy composite board and preparation method thereof

The invention relates to a nickel-based alloy composite plate and a preparation method thereof, and belongs to the technical field of alloy preparation. The alloy reinforcing agent is prepared under the sintering condition of high-temperature reducing gas protection by mixing the lanthanum element and the nanometer aluminum oxide, the granularity can be refined in the smelting process by adding the alloy reinforcing agent, and the wear resistance, hardness, strength and oxidation resistance of the alloy are effectively improved. Nickel is used as a matrix, an alloy reinforcing agent and elements such as molybdenum, copper, boron and hafnium are added, meanwhile, a mixture of potassium chloride and magnesium fluoride is used as a fluxing agent, uniform mixing and reaction of alloy components are promoted, and the nickel-based alloy smelted through step-by-step heating in vacuum has high hardness and strength and good abrasion resistance, corrosion resistance and high temperature resistance; and the stainless steel substrate and the nickel-based alloy plate are tightly combined through welding treatment, and the nickel-based alloy composite plate is suitable for manufacturing a vacuum chamber.
Owner:SHANGHAI SHUNFENG MACHINERY MFG

Raman nondestructive testing system for cultural heritage based on cooling device

The invention relates to a Raman nondestructive testing system for cultural heritage based on a cooling device. Comprising a vacuum chamber, and the vacuum chamber is used for placing a sample and receiving Raman scattering signals generated by the light inlet module penetrating through the vacuum chamber, irradiating the surface of the cultural relic sample and exciting the sample; the cooling device module is connected with the vacuum chamber and is used for efficiently cooling the vacuum chamber and preventing the cultural relic sample from being damaged by a laser heat effect; the control and data processing module is used for monitoring and adjusting the laser power, the chamber pressure and the temperature of the sample table in real time, analyzing the collected Raman spectrum data and outputting a detection result; the laser energy density at the sample can be effectively reduced, and the cultural relic sample is prevented from being damaged due to strong light focusing irradiation; meanwhile, efficient collection of Raman signals in a large light spot range is achieved through the beam expander and the signal collection module, and the problem that the signal strength is weakened is solved.
Owner:XIHUA UNIV

Balancing machine special for turbine rotor and balance debugging method

The invention relates to the technical field of turbine rotor balance debugging, in particular to a balancing machine special for a turbine rotor and a balance debugging method. Comprising a vacuum chamber, the vacuum chamber and the platform form a sealed space, a vacuum adjusting device connected with a processing and control unit is installed in the vacuum chamber, and a motor, a drilling weight removing device, a vibration detecting device and a clamp are all arranged in the vacuum chamber; the vacuum adjusting device comprises a sensor and a vacuum pump, and the vacuum pump is communicated with the vacuum chamber through a pipeline; and the sensor and the vacuum pump are respectively connected with the processing and control unit. The vacuum degree in the vacuum chamber can be adjusted by arranging the vacuum pump and the sensor, balance debugging can be carried out under high rotating speed and high vacuum and low rotating speed and low vacuum, and the balance debugging is not influenced by airflow when the balance debugging is carried out under the high rotating speed.
Owner:KYKY TECH

PVD (Physical Vapor Deposition) coating vacuum system

The utility model relates to the technical field of PVD (Physical Vapor Deposition) coating, in particular to a PVD coating vacuum system, which comprises a feeding table, a sheet inlet / outlet chamber, a first buffer chamber, a process chamber, a second buffer chamber and an isolating valve, and the sheet inlet / outlet chamber, the first buffer chamber, the process chamber and the second buffer chamber are sequentially arranged behind the feeding table. Isolation valves are arranged between the feeding table and the sheet inlet and outlet chamber, between the sheet inlet and outlet chamber and the first buffer chamber, between the first buffer chamber and the process chamber, and between the process chamber and the second buffer chamber; and when the isolation valves are closed, all the chambers form closed chambers. According to the PVD coating vacuum system disclosed by the utility model, the isolating valves are arranged among the vacuum chambers, so that the vacuum degree of each vacuum chamber can be well controlled; the vacuum coating system is simple in structure, high in reliability, low in cost and capable of being used for research and development of PVD coating products, continuous production can be achieved, cost is saved to a great extent, and working efficiency is improved.
Owner:ANHUI HUAYUAN EQUIP TECH CO LTD +1

A tool for a toroidal field magnet set for a nuclear fusion device

The invention discloses a tool for a toroidal field magnet set for a nuclear fusion device, belonging to a toroidal field magnet set tool, wherein the fixed tool comprises an annular guide rail coaxially mounted on the inner wall of a host hall, the annular guide rail is coaxially arranged with a central column erected in the host hall, a plurality of vacuum chamber hangers with one end mounted on the inner wall of the host hall are arranged in an inner annular array of the annular guide rail, the bottom end of the vacuum chamber hanger is used to hang the vacuum chamber sector to the corresponding welding assembly position; a radial beam arranged radially along the annular guide rail is also provided above the vacuum chamber hanger, one end of the radial beam is rotatably mounted in the top bearing of the central column, and the other end is mounted on the annular guide rail through a tail drive system, and can move in a circle along the top surface of the annular guide rail with the center of the central column, so that the toroidal field magnet hoisted below the radial beam is sleeved on the outside of the corresponding vacuum chamber sector. The invention can greatly improve the assembly efficiency and positioning accuracy of the toroidal field magnet of the nuclear fusion device.
Owner:FUSION ENERGY (HEFEI) ENGINEERING DESIGN INSTITUTE CO LTD

Strength simulation and checking method of vacuum chamber Sector lifting appliance of nuclear fusion device

ActiveCN120974857AGeometric CADDesign optimisation/simulationElement modelBuckling instability
The invention discloses a strength simulation and checking method for a vacuum chamber Sector lifting appliance of a nuclear fusion device, which comprises the following steps of: S1, acquiring structural data of the vacuum chamber Sector lifting appliance, establishing a corresponding geometric data model, and establishing a finite element model to simulate the geometric data model, wherein the geometric data model is set as a lifting appliance three-dimensional model containing all key force bearing components; s2, defining a specified load working condition set, and performing stress analysis and buckling instability analysis operation on the specified component model under the specified load working condition; s3, the safety margin of the specified component model is calculated and evaluated so as to check and judge whether the specified structure meets the specified strength requirement or not, and the safety margin of the specified component model has the following double-threshold combined criterion. According to the invention, systematic mechanical evaluation of key structures such as a lifting lug, a pull rod and a bridge can be realized, so that the structural safety and reliability in a lifting process are guaranteed.
Owner:聚变新能(安徽)有限公司

Self-constrained transverse extension ion optical lens device

The invention discloses a self-constrained transverse extension ion optical lens device, and belongs to the technical field of cluster ion lens devices. The invention discloses a self-constrained transverse extension ion optical lens device which comprises a cuboid vacuum cavity and an ion lens device. The ion lens device comprises an entrance slit of an ion optical lens, an exit slit of the ion optical lens and an electrode group; the electrode group comprises a conical plate electrode group and a parallel plate electrode group; a crack at the head end of the conical plate electrode group forms an inlet slit of the ion optical lens, the tail end of the conical plate electrode group is connected with the head end of the parallel plate electrode group, and a crack at the tail end of the parallel plate electrode group forms an outlet slit of the ion optical lens; one side of the cuboid vacuum cavity is provided with a cluster beam generation device outlet, and the ion lens device is arranged in the cuboid vacuum cavity. Under the condition that the beam density in the prior art is kept unchanged, the cluster beam intensity entering and leaving the ion optical part is increased, and the cluster yield is improved.
Owner:SHENZHEN KUOWEI ATOMIC TECH CO LTD

Metal crack repairing method and device based on ultrasonic technology

The invention discloses a metal crack repairing method and device based on an ultrasonic technology. The method comprises the steps that metal powder is selected as brazing filler metal and pretreated; cleaning cracks in the metal base material and spraying a boron nitride coating; mixing an ethanol solution with brazing filler metal powder according to a preset proportion, stirring to form a uniform suspension, injecting the suspension into the crack filling area through a needle tube in a vacuum negative pressure environment, preheating to accelerate solvent volatilization, and only leaving and compacting the brazing filler metal powder; clamping and fixing the base material and putting the base material into a vacuum chamber; electron beam melting is started, snakelike scanning is conducted in the length direction of the crack, and meanwhile ultrasonic vibration is conducted on the crack; and after fusion is completed, ultrasonic vibration is continuously carried out to restrain grain coarsening. Aiming at crack repair of a high-temperature metal part, through the coupling effect of electron beam melting and ultrasonic vibration, the limitation of a single technology is broken through, and a complete and synergistic repair system is formed.
Owner:NANTONG UNIV

Static electrcity control device for semiconductor processing system

Embodiments of the present invention relate to a technology for easily adjusting a level of static electricity required for a substrate according to a semiconductor process by injecting static electricity into the substrate or removing static electricity already formed on the substrate. A static electricity control device for injecting static electricity into a substrate disposed in a vacuum chamber or removing static electricity formed on the substrate in a semiconductor processing system, according to an embodiment, comprises: a charged particle generation unit, disposed on an upper side inside the vacuum chamber, that generates charged particles including positive ions and electrons by generating a vacuum ultraviolet ray (VUV) and reacting the VUV with a process gas inside the vacuum chamber; a grid provided with a plurality of holes, disposed on a lower side of the charged particle generation unit, that selectively pass the type of charged particles downward according to an input voltage; a substrate support, disposed below the grid and having the substrate positioned thereon, that is made of a conductive material and guides the charged particles passing through the grid toward the substrate at a predetermined density according to an input bias voltage; and a static electricity control unit that controls the static electricity of the substrate by supplying a pulsed voltage to at least one of the grid and the substrate support, wherein the grid and the substrate support are arranged so as to have a separation distance that is within four times the mean free path of the process gas according to environmental conditions of the vacuum chamber.
Owner:NEXTIN INC

System and method for multiplexed optical addressing of atomic memories

A system for optically modulating a plurality of optical channels includes a power delivery module adapted to convert a coherent light beam into a plurality of optical channels, at least one optical modulator, optically coupled to the power delivery module, the at least one optical modulator adapted to optically modulate each of the plurality of the optical channels, and a vacuum chamber having a trapping plane therein, the vacuum chamber adapted to generate an addressable array of trapped particles at the trapping plane, wherein each of the plurality of optical channels is optically coupled to at least one of the trapped particles of the addressable array.
Owner:MASSACHUSETTS INST OF TECH +1

Paddle configuration for a particle coating reactor

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.
Owner:APPLIED MATERIALS INC

Large range heated electrostatic chuck

A clamping system has a workpiece clamp having a platen to support a workpiece and heating elements for heating the platen to a platen temperature. A cooling plate has cooling features to cool to the cooling plate. A vacuum chamber defines a chamber volume between the platen and the cooling plate. One or more radiation shields within the chamber volume can limit a radiative heat transfer between the platen and the cooling plate. A vacuum source and a gas source are selectively fluidly coupled to the chamber volume. A controller controls the platen temperature in both a high and a low temperature regime by controlling a pressure within the vacuum chamber through the vacuum source and gas source to control a heat transfer between the platen and the cooling plate.
Owner:AXCELIS TECHNOLOGIES INC

Pole piece conveying belt and pole piece transfer device

The invention provides a pole piece conveying belt and a pole piece transfer device.The pole piece conveying belt comprises a supporting plate, a belt and a driving part, the supporting plate comprises negative pressure adsorption areas and vacuum breaking areas which are alternately arranged in the first direction, and the negative pressure adsorption areas and the vacuum breaking areas are arranged in a separated mode; the negative pressure adsorption area comprises a plurality of first vacuum chambers which are arranged at intervals in the second direction and communicate with one another, the vacuum breaking area comprises second vacuum chambers and positive pressure chambers which are alternately arranged in the second direction, the multiple positive pressure chambers communicate with one another, and the multiple second vacuum chambers communicate with one another; the belt comprises a plurality of groups of adsorption holes and separation holes which are alternately formed in the second direction, each group of adsorption holes are communicated with the first vacuum chamber and the second vacuum chamber respectively, and each group of separation holes are communicated with the positive pressure chamber; the driving part is used for driving the belt to move along the first direction relative to the supporting plate, so that the pole piece adsorbed on the belt passes through the negative pressure adsorption area and the vacuum breaking area. The problem that the pole pieces are prone to skew or shift during transportation is solved.
Owner:ZHUHAI HIGRAND ELECTRONICS TECH

Split unit with reduced headroom assembly for a pneumatic vacuum elevator

An assembly for a pneumatic elevator is provided. The assembly includes a top cylinder housed at a top surface of a vertically stacked elevator cylinder; a control panel box is mounted to a chamber unit, wherein the chamber unit is inbuilt with a split top plate assembly, wherein the chamber unit is operatively coupled to an outer surface of the top cylinder toward a supporting wall. The split top plate assembly includes a split top plate coupled to a top portion of the elevator cylinder. The split top plate assembly also includes a plurality of support tube operatively coupled to an upper surface of the split top plate. The split top plate assembly also includes an air chamber is operatively coupled to a vacuum chamber, wherein the air chamber is configured for air flow between the vacuum chamber and the air chamber.
Owner:BABU KILLAKATHU RAMANATHAN

High-precision material in-plane thermal conductivity measuring device and method

The invention relates to the technical field of thermophysical property measurement, in particular to a high-precision material in-plane thermal conductivity measuring device and method.A low-temperature refrigeration module generates a working medium with a set temperature in a vacuum heat insulation module, and the working medium is transferred to a space where a sample is located and the cold end of a heat flow meter in a heat conduction mode; the vacuum heat insulation module comprises at least one stage of anti-radiation screen and a vacuum cavity which are arranged in the outer side space of the sample and the heat flow meter; the heat-flow meter comprises a hot-end heat-flow meter and a cold-end heat-flow meter which are arranged in parallel; the cold-end heat-flow meter and the hot-end heat-flow meter are respectively clamped at two ends of the sample; the pressure-bearing sample table module bears and fixes a heat flow meter and a sample, and the sample is a film material; the distance measurement and control module controls and measures the distance between the cold end heat flow meter and the hot end heat flow meter; the temperature measurement and control module obtains the temperature of the heat flow meter and comprises a temperature measurement probe inserted into the heat flow meter, and the temperature measurement probe is connected with a temperature sensor. Through a specific heat flow meter structure, measurement of in-plane heat conductivity is realized.
Owner:SHANDONG INST OF ADVANCED TECH

Vacuum induction heating process closed-loop control system applying industrial mechanism model

The invention relates to the technical field of industrial process control, and discloses a vacuum induction heating process closed-loop control system applying an industrial mechanism model, which comprises the following steps: acquiring the input active power of an induction coil through a power monitoring unit, and measuring the total external radiation heat flux of the outer wall of a vacuum chamber by a heat flow sensing unit; the embedded decision-making module calculates the thermal-electric response ratio and the time derivative thereof in real time, judges the phase change critical state of the material based on the derivative change and generates a regulation and control instruction, through dynamic capture of the thermal-electric energy balance relation, recognition of the phase change critical point of the material is achieved, and by combining working condition pre-judgment of the vibration spectrum entropy and current ripple characteristic arbitration, the phase change critical state of the material is judged. An anti-interference multi-verification mechanism is constructed, and the robustness of the control system under the preset working condition is improved.
Owner:BOHAI UNIV